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Beckhoffcfg - plctask.xml

Beckhoffcfg - plctask.xml 44 KB
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  1. <?xml version="1.0" encoding="utf-8"?>
    2. 

  2. <BeckhoffCfg>
    3. 

  3. 	<Controller Name="MASTER" IPAddress="10.4.6.75.1.1" PortAddress="851">
    4. 

  4. 

  5. 		<!-- Need to have at least one input and one output before Axis stuff -->
    6. 

  6. 

  7. 		<!-- All inputs first, then all outputs -->
    8. 

  8. 

  9. 		<!--////////////////////////////////////////////////// ALL INPUTS START //////////////////////////////////////////////////-->
    10. 

  10. 		
    11. 

  11. 		<!-- Safety inputs start -->
    12. 

  12. 		<Input Name="r_EtherCat_State" Address="MAIN.EtherCAT_State" Invert="false" Type="Analog" Scaling="0=0,1=1" DataType="uint"/>
    13. 

  13. 		<Input Name="r_Safety_ComErr" Address="MAIN.Safety_ComErr" Invert="false" Type="Digital" DataType="bool"/>
    14. 

  14. 		<Input Name="r_Safety_FbErr" Address="MAIN.Safety_FbErr" Invert="false" Type="Digital" DataType="bool"/>
    15. 

  15. 		<Input Name="r_EtherCat_State_HotConnect_VPW" Address="MAIN.EtherCat_State_HotConnect_VPW" Invert="false" Type="Analog" Scaling="0=0,1=1" DataType="uint"/>
    16. 

  16. 		<Input Name="r_Safety_ComErr_VPW" Address="MAIN.Safety_ComErr_VPW"  Invert="false" Type="Digital" DataType="bool"/>
    17. 

  17. 		<Input Name="r_Safety_FbErr_VPW" Address="MAIN.Safety_FbErr_VPW"  Invert="false" Type="Digital" DataType="bool"/>
    18. 

  18. 		<Input Name="r_EtherCat_State_HotConnect_RES1_2" Address="MAIN.EtherCat_State_HotConnect_RES1_2" Invert="false" Type="Analog" Scaling="0=0,1=1" DataType="uint"/>
    19. 

  19. 		<Input Name="r_Safety_ComErr_RES1_2" Address="MAIN.Safety_ComErr_RES1_2"  Invert="false" Type="Digital" DataType="bool"/>
    20. 

  20. 		<Input Name="r_Safety_FbErr_RES1_2" Address="MAIN.Safety_FbErr_RES1_2"  Invert="false" Type="Digital" DataType="bool"/>
    21. 

  21. 		<Input Name="r_EtherCat_State_HotConnect_RES3_4" Address="MAIN.EtherCat_State_HotConnect_RES3_4" Invert="false" Type="Analog" Scaling="0=0,1=1" DataType="uint"/>
    22. 

  22. 		<Input Name="r_Safety_ComErr_RES3_4" Address="MAIN.Safety_ComErr_RES3_4" Invert="false" Type="Digital" DataType="bool"/>
    23. 

  23. 		<Input Name="r_Safety_FbErr_RES3_4" Address="MAIN.Safety_FbErr_RES3_4" Invert="false" Type="Digital" DataType="bool"/>
    24. 

  24. 		<Input Name="r_EtherCat_State_HotConnect_Facility" Address="MAIN.EtherCat_State_HotConnect_Facility" Invert="false" Type="Analog" Scaling="0=0,1=1" DataType="uint"/>
    25. 

  25. 		<Input Name="r_Safety_ComErr_Facility" Address="MAIN.Safety_ComErr_Facility" Invert="false" Type="Digital" DataType="bool"/>
    26. 

  26. 		<Input Name="r_Safety_FbErr_Facility" Address="MAIN.Safety_FbErr_Facility" Invert="false" Type="Digital" DataType="bool"/>
    27. 

  27. 		<Input Name="r_EtherCat_State_HotConnect_PlatingCell1_2" Address="MAIN.EtherCat_State_HotConnect_PlatingCell1_2" Invert="false" Type="Analog" Scaling="0=0,1=1" DataType="uint"/>
    28. 

  28. 		<Input Name="r_Safety_ComErr_PlatingCell1_2" Address="MAIN.Safety_ComErr_PlatingCell1_2" Invert="false" Type="Digital" DataType="bool"/>
    29. 

  29. 		<Input Name="r_Safety_FbErr_PlatingCell1_2" Address="MAIN.Safety_FbErr_PlatingCell1_2" Invert="false" Type="Digital" DataType="bool"/>
    30. 

  30. 		<Input Name="r_EtherCat_State_HotConnect_PlatingCell3_4" Address="MAIN.EtherCat_State_HotConnect_PlatingCell3_4" Invert="false" Type="Analog" Scaling="0=0,1=1" DataType="uint"/>
    31. 

  31. 		<Input Name="r_Safety_ComErr_PlatingCell3_4" Address="MAIN.Safety_ComErr_PlatingCell3_4" Invert="false" Type="Digital" DataType="bool"/>
    32. 

  32. 		<Input Name="r_Safety_FbErr_PlatingCell3_4" Address="MAIN.Safety_FbErr_PlatingCell3_4" Invert="false" Type="Digital" DataType="bool"/>
    33. 

  33. 		<Input Name="r_EtherCat_State_HotConnect_SRD" Address="MAIN.EtherCat_State_HotConnect_SRD" Invert="false" Type="Analog" Scaling="0=0,1=1" DataType="uint"/>
    34. 

  34. 		<Input Name="r_Safety_ComErr_SRD" Address="MAIN.Safety_ComErr_SRD" Invert="false" Type="Digital" DataType="bool"/>
    35. 

  35. 		<Input Name="r_Safety_FbErr_SRD" Address="MAIN.Safety_FbErr_SRD" Invert="false" Type="Digital" DataType="bool"/>
    36. 

  36. 		
    37. 

  37. 		<Input Name="r_Cell1_2_Doors_Left_Locked" Address="MAIN.Safety_SDI_CHANNEL_EL1904_NS100_1" Invert="false" Type="Digital" DataType="bool"/>
    38. 

  38. 		<Input Name="r_Cell1_2_Doors_Right_Locked" Address="MAIN.Safety_SDI_CHANNEL_EL1904_NS100_2" Invert="false" Type="Digital" DataType="bool"/>
    39. 

  39. 		<Input Name="r_Cell3_4_Doors_Left_Locked" Address="MAIN.Safety_SDI_CHANNEL_EL1904_NS100_3" Invert="false" Type="Digital" DataType="bool"/>
    40. 

  40. 		<Input Name="r_Cell3_4_Doors_Right_Locked" Address="MAIN.Safety_SDI_CHANNEL_EL1904_NS100_4" Invert="false" Type="Digital" DataType="bool"/>
    41. 

  41. 		<Input Name="r_Aligner_Door_Closed" Address="MAIN.Safety_SDI_CHANNEL_EL1904_NS101_1" Invert="false" Type="Digital" DataType="bool"/>
    42. 

  42. 		<Input Name="r_Cassette_Doors_Left_Locked" Address="MAIN.Safety_SDI_CHANNEL_EL1904_NS101_2" Invert="false" Type="Digital" DataType="bool"/>
    43. 

  43. 		<Input Name="r_Cassette_Doors_Right_Locked" Address="MAIN.Safety_SDI_CHANNEL_EL1904_NS101_3" Invert="false" Type="Digital" DataType="bool"/>
    44. 

  44. 		<Input Name="r_RES1_2_Door_Closed" Address="MAIN.Safety_SDI_CHANNEL_EL1904_NS101_4" Invert="false" Type="Digital" DataType="bool"/>
    45. 

  45. 		<Input Name="r_RES3_4_Door_Closed" Address="MAIN.Safety_SDI_CHANNEL_EL1904_NS102_1" Invert="false" Type="Digital" DataType="bool"/>
    46. 

  46. 		<Input Name="r_VPW_Door_Closed" Address="MAIN.Safety_SDI_CHANNEL_EL1904_NS102_2" Invert="false" Type="Digital" DataType="bool"/>
    47. 

  47. 		<Input Name="r_Plumbing_Door_Closed" Address="MAIN.Safety_SDI_CHANNEL_EL1904_NS102_3" Invert="false" Type="Digital" DataType="bool"/>
    48. 

  48. 		<Input Name="r_SRD_Panel_Closed" Address="MAIN.Safety_SDI_CHANNEL_EL1904_NS102_4" Invert="false" Type="Digital" DataType="bool"/>
    49. 

  49. 		<Input Name="r_Halt_Button_Left" Address="MAIN.Safety_SDI_CHANNEL_EL1904_NS103_1" Invert="true" Type="Digital" DataType="bool"/>
    50. 

  50. 		<Input Name="r_Halt_Button_Right" Address="MAIN.Safety_SDI_CHANNEL_EL1904_NS103_2" Invert="true" Type="Digital" DataType="bool"/>
    51. 

  51. 		
    52. 

  52. 		<Input Name="r_VPW_LEAK_DETECT"  Address="MAIN.VPW_DI_16CHANNEL_EL1819_N100_3" Invert="false" Type="Digital" DataType="bool"/>
    53. 

  53. 		<Input Name="r_RES1_2_Pump_EDM" Address="MAIN.RES1_2_SDI_4CHANNEL_EL1904_NS401_1" Invert="false" Type="Digital" DataType="bool"/>
    54. 

  54. 		<Input Name="r_RES3_4_Pump_EDM" Address="MAIN.RES3_4_SDI_4CHANNEL_EL1904_NS431_1" Invert="false" Type="Digital" DataType="bool"/>
    55. 

  55. 		<Input Name="r_Degas1_Pump_EDM" Address="MAIN.RES1_2_SDI_4CHANNEL_EL1904_NS400_1" Invert="false" Type="Digital" DataType="bool"/>
    56. 

  56. 		<Input Name="r_Degas2_Pump_EDM" Address="MAIN.RES3_4_SDI_4CHANNEL_EL1904_NS430_1" Invert="false" Type="Digital" DataType="bool"/>
    57. 

  57. 		<Input Name="r_Vacuum_Pump_STO_EDM" Address="MAIN.VPW_SDI_4CHANNEL_EL1904_NS300_2" Invert="false" Type="Digital" DataType="bool"/>
    58. 

  58. 		<Input Name="r_Booster_Pump_STO_EDM" Address="MAIN.VPW_SDI_4CHANNEL_EL1904_NS300_2" Invert="false" Type="Digital" DataType="bool"/>
    59. 

  59. 		<Input Name="r_External_Fluid_EDM" Address="MAIN.Facility_SDI_4CHANNEL_EL1904_NS200_1" Invert="false" Type="Digital" DataType="bool"/>
    60. 

  60. 		<Input Name="r_RES1_High_High" Address="MAIN.RES1_2_SDI_4CHANNEL_EL1904_NS400_2" Invert="false" Type="Digital" DataType="bool"/>
    61. 

  61. 		<Input Name="r_RES2_High_High" Address="MAIN.RES1_2_SDI_4CHANNEL_EL1904_NS400_3" Invert="false" Type="Digital" DataType="bool"/>
    62. 

  62. 		<Input Name="r_RES3_High_High" Address="MAIN.RES3_4_SDI_4CHANNEL_EL1904_NS430_2" Invert="false" Type="Digital" DataType="bool"/>
    63. 

  63. 		<Input Name="r_RES4_High_High" Address="MAIN.RES3_4_SDI_4CHANNEL_EL1904_NS430_3" Invert="false" Type="Digital" DataType="bool"/>
    64. 

  64. 		<Input Name="r_VPW1_Rotate_STO_EDM" Address="MAIN.VPW_SDI_4CHANNEL_EL1904_NS300_1" Invert="false" Type="Digital" DataType="bool"/>
    65. 

  65. 		<Input Name="r_VPW2_Rotate_STO_EDM" Address="MAIN.VPW_SDI_4CHANNEL_EL1904_NS300_4" Invert="false" Type="Digital" DataType="bool"/>
    66. 

  66. 		<Input Name="r_SAMPLE_SYS_1_FLUID_PRESENT" Address="MAIN.Facility_DI_16CHANNEL_EL1819_N000_1" Invert="false" Type="Digital" DataType="bool"/>
    67. 

  67. 		<Input Name="r_SAMPLE_SYS_2_FLUID_PRESENT" Address="MAIN.Facility_DI_16CHANNEL_EL1819_N000_2" Invert="false" Type="Digital" DataType="bool"/>
    68. 

  68. 		<Input Name="r_CONTAINMENT_FLUID" Address="MAIN.Facility_DI_16CHANNEL_EL1819_N000_10" Invert="false" Type="Digital" DataType="bool"/>
    69. 

  69. 		<Input Name="r_PlatingCell1_2_Leak_Detected" Address="MAIN.RES1_2_DI_16CHANNEL_4_20MA_EL1819_N200_7" Invert="false" Type="Digital" DataType="bool"/>
    70. 

  70. 		<Input Name="r_PlatingCell3_4_Leak_Detected" Address="MAIN.RES3_4_DI_8CHANNEL_4_20MA_EL1008_N230_7" Invert="false" Type="Digital" DataType="bool"/>
    71. 

  71. 		
    72. 

  72. 		<Input Name="r_PlatingCell1_2_Left_STO_EDM" Address="MAIN.RES1_2_SDI_4CHANNEL_EL1904_NS500_2" Invert="false" Type="Digital" DataType="bool"/>
    73. 

  73. 		<Input Name="r_PlatingCell1_2_Right_STO_EDM" Address="MAIN.RES1_2_SDI_4CHANNEL_EL1904_NS500_3" Invert="false" Type="Digital" DataType="bool"/>
    74. 

  74. 		<Input Name="r_PlatingCell3_4_Left_STO_EDM" Address="MAIN.RES1_2_SDI_4CHANNEL_EL1904_NS531_2" Invert="false" Type="Digital" DataType="bool"/>
    75. 

  75. 		<Input Name="r_PlatingCell3_4_Right_STO_EDM" Address="MAIN.RES3_4_SDI_4CHANNEL_EL1904_NS531_1" Invert="false" Type="Digital" DataType="bool"/>
    76. 

  76. 		<Input Name="r_PlatingCell1_2_Vertical_STO_EDM" Address="MAIN.RES1_2_SDI_4CHANNEL_EL1904_NS500_1" Invert="false" Type="Digital" DataType="bool"/>
    77. 

  77. 		<Input Name="r_PlatingCell3_4_Vertical_STO_EDM" Address="MAIN.RES1_2_SDI_4CHANNEL_EL1904_NS531_1" Invert="false" Type="Digital" DataType="bool"/>
    78. 

  78. 		<Input Name="r_SRD1_ROTATE_STO_EDM" Address="MAIN.SRD1_SDI_4CHANNEL_EL1904_NS300_1" Invert="false" Type="Digital" DataType="bool"/>
    79. 

  79. 		<Input Name="r_SRD2_ROTATE_STO_EDM" Address="MAIN.SRD2_SDI_4CHANNEL_EL1904_NS300_4" Invert="false" Type="Digital" DataType="bool"/>
    80. 

  80. 		
    81. 

  81. 		<!-- Safety inputs end -->
    82. 

  82. 		
    83. 

  83. 		<!-- facility inputs start -->
    84. 

  84. 

  85. 		<Input Name="r_Cassette_A_Present" Address="MAIN.Facility_DI_16CHANNEL_EL1819_N000_11" Invert="false" Type="Digital" DataType="bool"/>
    86. 

  86. 		<Input Name="r_Cassette_A_100MM" Address="MAIN.Facility_DI_16CHANNEL_EL1819_N000_12" Invert="false" Type="Digital" DataType="bool"/>
    87. 

  87. 		<Input Name="r_Cassette_A_200MM" Address="MAIN.Facility_DI_16CHANNEL_EL1819_N000_13" Invert="false" Type="Digital" DataType="bool"/>
    88. 

  88. 		<Input Name="r_Cassette_B_Present" Address="MAIN.Facility_DI_16CHANNEL_EL1819_N000_14" Invert="false" Type="Digital" DataType="bool"/>
    89. 

  89. 		<Input Name="r_Cassette_B_100MM" Address="MAIN.Facility_DI_16CHANNEL_EL1819_N000_15" Invert="false" Type="Digital" DataType="bool"/>
    90. 

  90. 		<Input Name="r_Cassette_B_200MM" Address="MAIN.Facility_DI_16CHANNEL_EL1819_N000_16" Invert="false" Type="Digital" DataType="bool"/>
    91. 

  91. 		<Input Name="r_pH3" Address="MAIN.Facility_AI_8CHANNEL_4_20mA_EL3058_N005_1" Scaling="0=0, 40=32767" Type="Analog" DataType="int"/>
    92. 

  92. 		<Input Name="r_HCW_FLOW" Address="MAIN.Facility_AI_8CHANNEL_4_20mA_EL3058_N005_5" Scaling="0=0, 40=32767" Type="Analog" DataType="int"/>
    93. 

  93. 		<Input Name="r_DIWRETURN_FLOW" Address="MAIN.Facility_AI_8CHANNEL_4_20mA_EL3058_N006_106" Scaling="0=0, 40=32767" Type="Analog" DataType="int"/>
    94. 

  94. 		<Input Name="r_SYSTEM_EXHAUST_1" Address="MAIN.Facility_AI_8CHANNEL_4_20mA_EL3058_N006_1" Scaling="0=0, 2=32767" Type="Analog" DataType="int"/>
    95. 

  95. 		<Input Name="r_SYSTEM_EXHAUST_2" Address="MAIN.Facility_AI_8CHANNEL_4_20mA_EL3058_N006_2" Scaling="0=0, 2=32767" Type="Analog" DataType="int"/>
    96. 

  96. 		<Input Name="r_DI_WATER_PRESSURE" Address="MAIN.Facility_AI_8CHANNEL_4_20mA_EL3058_N006_5" Scaling="0=0, 100=32767" Type="Analog" DataType="int"/>
    97. 

  97. 		<Input Name="r_N2_1B_PRESSURE" Address="MAIN.Facility_AI_8CHANNEL_0_10V_EL3068_N007_1" Scaling="0=3276.7, 145=16383.5" Type="Analog" DataType="int"/>
    98. 

  98. 		<Input Name="r_N2_1A_PRESSURE" Address="MAIN.Facility_AI_8CHANNEL_0_10V_EL3068_N007_2" Scaling="0=3276.7, 145=16383.5" Type="Analog" DataType="int"/>
    99. 

  99. 		<Input Name="r_N2_2B_PRESSURE" Address="MAIN.Facility_AI_8CHANNEL_0_10V_EL3068_N007_3" Scaling="0=3276.7, 145=16383.5" Type="Analog" DataType="int"/>
    100. 

  100. 		<Input Name="r_N2_2A_PRESSURE" Address="MAIN.Facility_AI_8CHANNEL_0_10V_EL3068_N007_4" Scaling="0=3276.7, 145=16383.5" Type="Analog" DataType="int"/>
    101. 

  101. 		<Input Name="r_CDA_2_PRESSURE" Address="MAIN.Facility_AI_8CHANNEL_0_10V_EL3068_N007_5" Scaling="0=3276.7, 145=16383.5" Type="Analog" DataType="int"/>
    102. 

  102. 		<Input Name="r_CDA_1_PRESSURE" Address="MAIN.Facility_AI_8CHANNEL_0_10V_EL3068_N007_6" Scaling="0=3276.7, 145=16383.5" Type="Analog" DataType="int"/>
    103. 

  103. 		<Input Name="r_CDA_EXTERNAL_PRESSURE" Address="MAIN.Facility_AI_8CHANNEL_0_10V_EL3068_N007_7" Scaling="0=3276.7, 145=16383.5" Type="Analog" DataType="int"/>
    104. 

  104. 		<Input Name="r_SYSTEM_VACUUM" Address="MAIN.Facility_AI_8CHANNEL_0_10V_EL3068_N007_8" Scaling="-750=3276.7, 750=16383.5" Type="Analog" DataType="int"/>
    105. 

  105. 		<Input Name="r_N2_BLANKET_PRESSURE" Address="MAIN.Facility_AI_8CHANNEL_0_10V_EL3068_N008_1" Scaling="-14.5=3276.7, 14.5=16383.5" Type="Analog" DataType="int"/>
    106. 

  106. 		<Input Name="r_N2_OVERFLOW_PRESSURE" Address="MAIN.Facility_AI_8CHANNEL_0_10V_EL3068_N008_2" Scaling="-14.5=3276.7, 14.5=16383.5" Type="Analog" DataType="int"/>
    107. 

  107. 		<Input Name="r_CLAMSHELL_CYLINDER_PRESSURE" Address="MAIN.PlatingCell1_2_AI_8CHANNEL_0_10V_EL3086_N402_3" Scaling="0=0, 100=32767" Type="Analog" DataType="udint"/>
    108. 

  108. 		<Input Name="r_TILT_CYLINDER_PRESSURE" Address="MAIN.PlatingCell1_2_AI_8CHANNEL_0_10V_EL3086_N402_4" Scaling="0=0, 100=32767" Type="Analog" DataType="udint"/>
    109. 

  109. 

  110. 		<!-- facility inputs end -->
    111. 

  111. 

  112. 		<!--PlatingCell1 inputs Start-->
    113. 

  113. 		<Input Name="r_PlatingCell1_2_HEAD_TILTED"  Address="MAIN.PlatingCell1_2_DI_16CHANNEL_EL1819_N400_4" Invert="false" Type="Digital" DataType="bool"/>
    114. 

  114. 		<Input Name="r_PlatingCell1_2_HEAD_VERTICAL"  Address="MAIN.PlatingCell1_2_DI_16CHANNEL_EL1819_N400_5" Invert="false" Type="Digital" DataType="bool"/>
    115. 

  115. 		<Input Name="r_CELL1_CLAMSHELL_DISTANCE"  Address="MAIN.PlatingCell1_2_AI_8CHANNEL_0_10V_EL3068_N402_1" Scaling="0=0,100=32767" Type="Analog" DataType="int"/>
    116. 

  116. 		<Input Name="r_CLAMSHELL_CYLINDER_PRESSURE"  Address="MAIN.PlatingCell1_2_AI_8CHANNEL_0_10V_EL3068_N402_3" Scaling="0=0,20=32767" Type="Analog" DataType="int"/>
    117. 

  117. 		<Input Name="r_CELL1_OVERFLOW_LEVEL"  Address="MAIN.PlatingCell1_2_AI_8CHANNEL_4_20MA_EL3058_N403_1" Scaling="0=0,20=32767" Type="Analog" DataType="int"/>
    118. 

  118. 		<!--PlatingCell1 inputs End-->
    119. 

  119. 

  120. 

  121. 		<!--Reservoir1 inputs Start-->
    122. 

  122. 		<Input Name="r_RES1_CA_PUMP"  Address="MAIN.RES1_2_DI_8CHANNEL_EL1008_N200_1" Invert="false" Type="Digital" DataType="bool"/>
    123. 

  123. 		<Input Name="r_RES1_AN_TOWER_HIGH"  Address="MAIN.RES1_2_DI_8CHANNEL_EL1008_N200_3" Invert="false" Type="Digital" DataType="bool"/>
    124. 

  124. 		<Input Name="r_RES1_AN_TOWER_LOW"  Address="MAIN.RES1_2_DI_8CHANNEL_EL1008_N200_4" Invert="false" Type="Digital" DataType="bool"/>
    125. 

  125. 		<Input Name="r_CELL1_AN_FLOW"  Address="MAIN.RES1_2_AI_8CHANNEL_4_20MA_EL3058_N202_1" Scaling="0=0,20=32767" Type="Analog" DataType="int"/>
    126. 

  126. 		<Input Name="r_CELL1_CA_FLOW"  Address="MAIN.RES1_2_AI_8CHANNEL_4_20MA_EL3058_N202_3" Scaling="0=0,20=32767" Type="Analog" DataType="int"/>
    127. 

  127. 		<Input Name="r_RES1_CA_LEVEL_RAW"  Address="MAIN.RES1_2_AI_8CHANNEL_4_20MA_EL3058_N202_5" Scaling="0=0,100=32767" Type="Analog" DataType="int"/>
    128. 

  128. 		<!--Reservoir1 inputs End-->
    129. 

  129. 		
    130. 

  130. 		<!--Reservoir2 inputs Start-->
    131. 

  131. 		<Input Name="r_RES2_CA_PUMP"  Address="MAIN.RES1_2_DI_8CHANNEL_EL1008_N200_2" Invert="false" Type="Digital" DataType="bool"/>
    132. 

  132. 		<Input Name="r_RES2_AN_TOWER_HIGH"  Address="MAIN.RES1_2_DI_8CHANNEL_EL1008_N200_5" Invert="false" Type="Digital" DataType="bool"/>
    133. 

  133. 		<Input Name="r_RES2_AN_TOWER_LOW"  Address="MAIN.RES1_2_DI_8CHANNEL_EL1008_N200_6" Invert="false" Type="Digital" DataType="bool"/>
    134. 

  134. 		<Input Name="r_CELL2_AN_FLOW"  Address="MAIN.RES1_2_AI_8CHANNEL_4_20MA_EL3058_N202_2" Scaling="0=0,20=32767" Type="Analog" DataType="int"/>
    135. 

  135. 		<Input Name="r_CELL2_CA_FLOW"  Address="MAIN.RES1_2_AI_8CHANNEL_4_20MA_EL3058_N202_4" Scaling="0=0,20=32767" Type="Analog" DataType="int"/>
    136. 

  136. 		<Input Name="r_RES2_CA_LEVEL_RAW"  Address="MAIN.RES1_2_AI_8CHANNEL_4_20MA_EL3058_N202_6" Scaling="0=0,100=32767" Type="Analog" DataType="int"/>
    137. 

  137. 		<!--Reservoir2 inputs End-->
    138. 

  138. 		
    139. 

  139. 		<!--Reservoir3 inputs Start-->
    140. 

  140. 		<Input Name="r_RES3_CA_PUMP"  Address="MAIN.RES3_4_DI_8CHANNEL_EL1008_N230_1" Invert="false" Type="Digital" DataType="bool"/>
    141. 

  141. 		<Input Name="r_RES3_AN_TOWER_HIGH"  Address="MAIN.RES3_4_DI_8CHANNEL_EL1008_N230_3" Invert="false" Type="Digital" DataType="bool"/>
    142. 

  142. 		<Input Name="r_RES3_AN_TOWER_LOW"  Address="MAIN.RES3_4_DI_8CHANNEL_EL1008_N230_4" Invert="false" Type="Digital" DataType="bool"/>
    143. 

  143. 		<Input Name="r_CELL3_AN_FLOW"  Address="MAIN.RES3_4_AI_8CHANNEL_4_20MA_EL3058_N232_1" Scaling="0=0,20=32767" Type="Analog" DataType="int"/>
    144. 

  144. 		<Input Name="r_CELL3_CA_FLOW"  Address="MAIN.RES3_4_AI_8CHANNEL_4_20MA_EL3058_N232_3" Scaling="0=0,20=32767" Type="Analog" DataType="int"/>
    145. 

  145. 		<Input Name="r_RES3_CA_LEVEL_RAW"  Address="MAIN.RES3_4_AI_8CHANNEL_4_20MA_EL3058_N232_5" Scaling="0=0,100=32767" Type="Analog" DataType="int"/>
    146. 

  146. 		<!--Reservoir3inputs End-->
    147. 

  147. 		
    148. 

  148. 		<!--Reservoir4 inputs Start-->
    149. 

  149. 		<Input Name="r_RES4_CA_PUMP"  Address="MAIN.RES3_4_DI_8CHANNEL_EL1008_N230_2" Invert="false" Type="Digital" DataType="bool"/>
    150. 

  150. 		<Input Name="r_RES4_AN_TOWER_HIGH"  Address="MAIN.RES3_4_DI_8CHANNEL_EL1008_N230_5" Invert="false" Type="Digital" DataType="bool"/>
    151. 

  151. 		<Input Name="r_RES4_AN_TOWER_LOW"  Address="MAIN.RES3_4_DI_8CHANNEL_EL1008_N230_6" Invert="false" Type="Digital" DataType="bool"/>
    152. 

  152. 		<Input Name="r_CELL4_AN_FLOW"  Address="MAIN.RES3_4_AI_8CHANNEL_4_20MA_EL3058_N232_2" Scaling="0=0,20=32767" Type="Analog" DataType="int"/>
    153. 

  153. 		<Input Name="r_CELL4_CA_FLOW"  Address="MAIN.RES3_4_AI_8CHANNEL_4_20MA_EL3058_N232_4" Scaling="0=0,20=32767" Type="Analog" DataType="int"/>
    154. 

  154. 		<Input Name="r_RES4_CA_LEVEL_RAW"  Address="MAIN.RES3_4_AI_8CHANNEL_4_20MA_EL3058_N232_6" Scaling="0=0,100=32767" Type="Analog" DataType="int"/>
    155. 

  155. 		<!--Reservoir4 inputs End-->
    156. 

  156. 

  157. 

  158. 		
    159. 

  159. 		<!--VPW Main Start-->
    160. 

  160. 		<Input Name="r_VPW_CHAMBER_CLOSED"  Address="MAIN.VPW_DI_16CHANNEL_EL1819_N100_1" Invert="false" Type="Digital" DataType="bool"/>
    161. 

  161. 		<Input Name="r_VPW_CHAMBER_OPENED"  Address="MAIN.VPW_DI_16CHANNEL_EL1819_N100_2" Invert="false" Type="Digital" DataType="bool"/>
    162. 

  162. 		<Input Name="r_VPW_VAC_PUMP_PRESSURE"  Address="MAIN.VPW_AI_8CHANNEL_4_20mA_EL3058_N102_6" Scaling="758=0,0=32767" Type="Analog" DataType="int"/>
    163. 

  163. 		<Input Name="r_VPW_BOOSTER_PUMP_STATUS"  Address="MAIN.VPW_DI_16CHANNEL_EL1819_N100_9" Invert="true" Type="Digital" DataType="bool"/>
    164. 

  164. 		<Input Name="r_VPW_DIW_TOTAL_FLOW"  Address="MAIN.VPW_AI_8CHANNEL_4_20mA_EL3058_N102_1" Scaling="0=0,20=32767" Type="Analog" DataType="int"/>
    165. 

  165. 		<Input Name="r_VPW_DIW_PRESSURE"  Address="MAIN.VPW_AI_8CHANNEL_4_20mA_EL3058_N102_4" Scaling="0=0,100=32767" Type="Analog" DataType="int"/>
    166. 

  166. 		<Input Name="r_VPW_DEGAS_PUMP_PRESSURE"  Address="MAIN.VPW_AI_8CHANNEL_4_20mA_EL3058_N102_5" Scaling="758=0,100=32767" Type="Analog" DataType="int"/>
    167. 

  167. 		<Input Name="r_VPW_BOOSTER_PUMP_CURRENT" Address="MAIN.VPW_AO_8CHANNEL_0_10V_EL4008_N104_5" Scaling="0=0, 10=32767" Type="Analog" DataType="int"/>
    168. 

  168. 		<!--VPW Main End-->
    169. 

  169. 

  170. 		<!--VPW1 Start-->
    171. 

  171. 		<Input Name="r_VPW_DIW_CELL_1_FLOW"  Address="MAIN.VPW_AI_8CHANNEL_4_20mA_EL3058_N102_2" Scaling="0=0,8=32767" Type="Analog" DataType="int"/>
    172. 

  172. 		<Input Name="r_VPW_CELL_1_VAC_PRESSURE"  Address="MAIN.VPW_AI_8CHANNEL_0_10V_EL3068_N105_1" Scaling="0=0,10=32767" Type="Analog" DataType="int"/>
    173. 

  173. 		<!--VPW1 End-->
    174. 

  174. 

  175. 		<!--VPW2 Start-->
    176. 

  176. 		<Input Name="r_VPW_DIW_CELL_2_FLOW"  Address="MAIN.VPW_AI_8CHANNEL_4_20mA_EL3058_N102_3" Scaling="0=0,8=32767" Type="Analog" DataType="int"/>
    177. 

  177. 		<Input Name="r_VPW_CELL_2_VAC_PRESSURE"  Address="MAIN.VPW_AI_8CHANNEL_0_10V_EL3068_N105_2" Scaling="0=0,10=32767" Type="Analog" DataType="int"/>
    178. 

  178. 		<!--VPW2 End-->
    179. 

  179. 

  180. 		<!--EFEM Start-->
    181. 

  181. 		<Input Name="r_EFEM_VACUUM" Address="MAIN.Facility_AI_8CHANNEL_0_10V_EL3068_N007_8" Scaling="-750=3276.7, 750=16383.5" Type="Analog" DataType="int"/>
    182. 

  182. 		<Input Name="r_Cassette_A_Present" Address="MAIN.Facility_DI_16CHANNEL_EL1819_N000_11" Invert="false" Type="Digital" DataType="bool"/>
    183. 

  183. 		<Input Name="r_Cassette_A_100MM" Address="MAIN.Facility_DI_16CHANNEL_EL1819_N000_12" Invert="false" Type="Digital" DataType="bool"/>
    184. 

  184. 		<Input Name="r_Cassette_A_200MM" Address="MAIN.Facility_DI_16CHANNEL_EL1819_N000_13" Invert="false" Type="Digital" DataType="bool"/>
    185. 

  185. 		<Input Name="r_Cassette_B_Present" Address="MAIN.Facility_DI_16CHANNEL_EL1819_N000_14" Invert="false" Type="Digital" DataType="bool"/>
    186. 

  186. 		<Input Name="r_Cassette_B_100MM" Address="MAIN.Facility_DI_16CHANNEL_EL1819_N000_15" Invert="false" Type="Digital" DataType="bool"/>
    187. 

  187. 		<Input Name="r_Cassette_B_200MM" Address="MAIN.Facility_DI_16CHANNEL_EL1819_N000_16" Invert="false" Type="Digital" DataType="bool"/>
    188. 

  188. 		
    189. 

  189. 		<!--EFEM End-->
    190. 

  190. 		<!--////////////////////////////////////////////////// ALL INPUTS END //////////////////////////////////////////////////-->
    191. 

  191. 

  192. 

  193. 		<!--////////////////////////////////////////////////// ALL COUNTERS BEGIN //////////////////////////////////////////////////-->
    194. 

  194. 		<Counter Name="r_DIREPLEN_FLOW" Address="MAIN.Facility_COUNTER_2CHANNEL_EL1512_N009_1_Counter_value" DataType="udint" Mode="2" Period="2000" Scaling="0=0,1=22">
    195. 

  195. 			<Output Address="MAIN.Facility_COUNTER_2CHANNEL_EL1512_N009_1_Set_counter" Type="Start" DataType="bool"/>
    196. 

  196. 			<Output Address="MAIN.Facility_COUNTER_2CHANNEL_EL1512_N009_1_Inhibit_counter" Type="Stop" DataType="bool"/>
    197. 

  197. 			<Output Address="MAIN.Facility_COUNTER_2CHANNEL_EL1512_N009_1_Set_counter_value" Type="Reset" DataType="udint"/>
    198. 

  198. 		</Counter>		
    199. 

  199. 

  200. 		<!--////////////////////////////////////////////////// ALL COUNTERS END //////////////////////////////////////////////////-->
    201. 

  201. 

  202. 

  203. 

  204. 

  205. 

  206. 		<!--////////////////////////////////////////////////// ALL OUTPUTS BEGIN //////////////////////////////////////////////////-->
    207. 

  207. 		
    208. 

  208. 		<!-- Safety outputs start -->
    209. 

  209. 

  210. 		<Output Name="c_Safety_RunStop" Address="MAIN.Safety_RunStop" Type="Digital" DataType="bool"/>
    211. 

  211. 		<Output Name="c_Safety_ErrAck" Address="MAIN.Safety_ErrAck" Type="Digital" DataType="bool"/>
    212. 

  212. 		<Output Name="c_Safety_VPW_STO_EStop_Restart" Address="MAIN.Safety_VPW_STO_EStop_Restart" Type="Digital" DataType="bool"/>
    213. 

  213. 		<Output Name="c_Safety_RES1_2_STO_EStop_Restart" Address="MAIN.Safety_RES1_2_STO_EStop_Restart" Type="Digital" DataType="bool"/>
    214. 

  214. 		<Output Name="c_Safety_RES3_4_STO_EStop_Restart" Address="MAIN.Safety_RES3_4_STO_EStop_Restart" Type="Digital" DataType="bool"/>
    215. 

  215. 		<Output Name="c_Safety_PlatingCell1_2_STO_1_EStop_Restart" Address="MAIN.Safety_PlatingCell1_2_STO_1_EStop_Restart" Type="Digital" DataType="bool"/>
    216. 

  216. 		<Output Name="c_Safety_PlatingCell1_2_STO_2_EStop_Restart" Address="MAIN.Safety_PlatingCell1_2_STO_2_EStop_Restart" Type="Digital" DataType="bool"/>
    217. 

  217. 		<Output Name="c_Safety_PlatingCell3_4_STO_1_EStop_Restart" Address="MAIN.Safety_PlatingCell3_4_STO_1_EStop_Restart" Type="Digital" DataType="bool"/>
    218. 

  218. 		<Output Name="c_Safety_PlatingCell3_4_STO_2_EStop_Restart" Address="MAIN.Safety_PlatingCell3_4_STO_2_EStop_Restart" Type="Digital" DataType="bool"/>
    219. 

  219. 		<Output Name="c_Safety_Facility_STO_EStop_Restart" Address="MAIN.Safety_Facility_STO_EStop_Restart" Type="Digital" DataType="bool"/>
    220. 

  220. 		<Output Name="c_Safety_SRD_STO_EStop_Restart" Address="MAIN.Safety_SRD_STO_EStop_Restart" Type="Digital" DataType="bool"/>
    221. 

  221. 		<Output Name="c_Safety_ReqAlignerDoorsLock" Address="MAIN.Safety_ReqAlignerDoorsLock" Type="Digital" DataType="bool"/>
    222. 

  222. 		<Output Name="c_Safety_ReqCassetteDoorsLock" Address="MAIN.Safety_ReqCassetteDoorsLock" Type="Digital" DataType="bool"/>
    223. 

  223. 		<Output Name="c_Safety_ReqCell1_2DoorsLock" Address="MAIN.Safety_ReqCell1_2DoorsLock" Type="Digital" DataType="bool"/>
    224. 

  224. 		<Output Name="c_Safety_ReqCell3_4DoorsLock" Address="MAIN.Safety_ReqCell3_4DoorsLock" Type="Digital" DataType="bool"/>
    225. 

  225. 

  226. 		<!-- Safety outputs end -->
    227. 

  227. 		
    228. 

  228. 		
    229. 

  229. 		<!-- facility outputs start -->
    230. 

  230. 		<Output Name="c_N2_ENABLE" Address="MAIN.Facility_DO_16CHANNEL_EL2809_N002_1" Type="Digital" DataType="bool"/> 
    231. 

  231. 		<Output Name="c_CDA_ENABLE" Address="MAIN.Facility_DO_16CHANNEL_EL2809_N002_2" Type="Digital" DataType="bool"/>
    232. 

  232. 		<Output Name="c_EXTERNAL_CDA_ENABLE" Address="MAIN.Facility_DO_16CHANNEL_EL2809_N002_3" Type="Digital" DataType="bool"/>
    233. 

  233. 		<Output Name="c_DI_MAIN_ENABLE" Address="MAIN.Facility_DO_16CHANNEL_EL2809_N002_4" Type="Digital" DataType="bool"/>
    234. 

  234. 		<Output Name="c_HCW_ENABLE" Address="MAIN.Facility_DO_16CHANNEL_EL2809_N002_5" Type="Digital" DataType="bool"/>
    235. 

  235. 		<Output Name="c_DI_REPLEN_ENABLE" Address="MAIN.Facility_DO_16CHANNEL_EL2809_N002_6" Type="Digital" DataType="bool"/>
    236. 

  236. 		<Output Name="c_DI_FILL_ENABLE" Address="MAIN.Facility_DO_16CHANNEL_EL2809_N002_7" Type="Digital" DataType="bool"/>
    237. 

  237. 		
    238. 

  238. 		<Output Name="c_SAMPLE_STATION_ENABLE" Address="MAIN.VPW_PNEU_SMC_EX260_BYTE2" Type="Digital" BitOperated="true" Bit="5" DataType="byte"/>
    239. 

  239. 		<Output Name="c_FILTER_PURGE_ENABLE" Address="MAIN.VPW_PNEU_SMC_EX260_BYTE2" Type="Digital" BitOperated="true" Bit="6" DataType="byte"/>
    240. 

  240. 		<Output Name="c_DIW_SRD_ENABLE" Address="MAIN.VPW_PNEU_SMC_EX260_BYTE2" Type="Digital" BitOperated="true" Bit="7" DataType="byte"/>
    241. 

  241. 		
    242. 

  242. 		
    243. 

  243. 		<!-- facility outputs end -->
    244. 

  244. 		
    245. 

  245. 		<!--PlatingCell1 outputs Start-->
    246. 

  246. 		<Output Name="c_CELL1_CLAMSHELL_CLOSE" Address="MAIN.PlatingCell1_2_DO_16CHANNEL_EL2809_N401_9" Type="Digital" Invert="false" DataType="bool"/>
    247. 

  247. 		<Output Name="c_PlatingCell1_2_HEAD_TILT" Address="MAIN.PlatingCell1_2_DO_16CHANNEL_EL2809_N401_13" Type="Digital" Invert="false" DataType="bool"/>
    248. 

  248. 		<!--PlatingCell1 outputs End-->
    249. 

  249. 		
    250. 

  250. 		<!--Reservoir1 outputs Start-->
    251. 

  251. 		<Output Name="c_RES1_AN_PUMP_ENABLE" Address="MAIN.RES1_2_DO_16CHANNEL_EL2809_N201_1" Type="Digital" Invert="false" DataType="bool"/>
    252. 

  252. 		<Output Name="c_RES1_CA_PUMP_ENABLE" Address="MAIN.RES1_2_DO_16CHANNEL_EL2809_N201_3" Type="Digital" Invert="false" DataType="bool"/>
    253. 

  253. 		<Output Name="c_RES1_AN_PUMP_SPEED" Address="MAIN.RES1_2_AO_8CHANNEL_0_10V_EL4008_N204_1" Scaling="0=0,100=32767" Type="Analog" DataType="int"/>
    254. 

  254. 		<Output Name="c_RES1_CA_PUMP_SPEED" Address="MAIN.RES1_2_AO_4CHANNEL_4_20mA_EL4024_N205_1" Scaling="0=0,100=32767" Type="Analog" DataType="int"/>
    255. 

  255. 		<Output Name="c_RES1_RETURN_VALVE_OPENING" Address="MAIN.RES1_2_AO_4CHANNEL_4_20mA_EL4024_N205_3" Scaling="0=0,100=32767" Type="Analog" DataType="int"/>
    256. 

  256. 		<Output Name="c_RES1_CA_DIW_REPLEN" Address="MAIN.RES1_2_PNEU_SMC_EX260_V01_V04" Type="Digital" BitOperated="true" Bit="0" DataType="byte"/>
    257. 

  257. 		<Output Name="c_RES1_SAMPLE_OUT" Address="MAIN.RES1_2_PNEU_SMC_EX260_V01_V04" Type="Digital" BitOperated="true" Bit="1" DataType="byte"/>
    258. 

  258. 		<Output Name="c_RES1_DEGAS_ENABLE" Address="MAIN.RES1_2_PNEU_SMC_EX260_V01_V04" Type="Digital" BitOperated="true" Bit="2" DataType="byte"/>
    259. 

  259. 		<Output Name="c_CELL1_CA_ISOLATION" Address="MAIN.RES1_2_PNEU_SMC_EX260_V01_V04" Type="Digital" BitOperated="true" Bit="3" DataType="byte"/>
    260. 

  260. 		<Output Name="c_RES1_AN_DIW_REPLEN" Address="MAIN.RES1_2_PNEU_SMC_EX260_V01_V04" Type="Digital" BitOperated="true" Bit="4" DataType="byte"/>
    261. 

  261. 		<Output Name="c_CELL1_AN_ISOLATION" Address="MAIN.RES1_2_PNEU_SMC_EX260_V01_V04" Type="Digital" BitOperated="true" Bit="5" DataType="byte"/>
    262. 

  262. 		<!--Reservoir1 outputs End-->
    263. 

  263. 		
    264. 

  264. 		<!--Reservoir2 outputs Start-->
    265. 

  265. 		<Output Name="c_RES2_AN_PUMP_ENABLE" Address="MAIN.RES1_2_DO_16CHANNEL_EL2809_N201_2" Type="Digital" Invert="false" DataType="bool"/>
    266. 

  266. 		<Output Name="c_RES2_CA_PUMP_ENABLE" Address="MAIN.RES1_2_DO_16CHANNEL_EL2809_N201_4" Type="Digital" Invert="false" DataType="bool"/>
    267. 

  267. 		<Output Name="c_RES2_AN_PUMP_SPEED" Address="MAIN.RES1_2_AO_8CHANNEL_0_10V_EL4008_N204_2" Scaling="0=0,100=32767" Type="Analog" DataType="int"/>
    268. 

  268. 		<Output Name="c_RES2_CA_PUMP_SPEED" Address="MAIN.RES1_2_AO_4CHANNEL_4_20mA_EL4024_N205_2" Scaling="0=0,100=32767" Type="Analog" DataType="int"/>
    269. 

  269. 		<Output Name="c_RES2_RETURN_VALVE_OPENING" Address="MAIN.RES1_2_AO_4CHANNEL_4_20mA_EL4024_N205_4" Scaling="0=0,100=32767" Type="Analog" DataType="int"/>
    270. 

  270. 		<Output Name="c_RES2_CA_DIW_REPLEN" Address="MAIN.RES1_2_PNEU_SMC_EX260_V01_V04" Type="Digital" BitOperated="true" Bit="6" DataType="byte"/>
    271. 

  271. 		<Output Name="c_RES2_SAMPLE_OUT" Address="MAIN.RES1_2_PNEU_SMC_EX260_V01_V04" Type="Digital" BitOperated="true" Bit="7" DataType="byte"/>
    272. 

  272. 		<Output Name="c_RES2_DEGAS_ENABLE" Address="MAIN.RES1_2_PNEU_SMC_EX260_V05_V08" Type="Digital" BitOperated="true" Bit="0" DataType="byte"/>
    273. 

  273. 		<Output Name="c_CELL2_CA_ISOLATION" Address="MAIN.RES1_2_PNEU_SMC_EX260_V05_V08" Type="Digital" BitOperated="true" Bit="1" DataType="byte"/>
    274. 

  274. 		<Output Name="c_RES2_AN_DIW_REPLEN" Address="MAIN.RES1_2_PNEU_SMC_EX260_V05_V08" Type="Digital" BitOperated="true" Bit="2" DataType="byte"/>
    275. 

  275. 		<Output Name="c_CELL2_AN_ISOLATION" Address="MAIN.RES1_2_PNEU_SMC_EX260_V05_V08" Type="Digital" BitOperated="true" Bit="3" DataType="byte"/>
    276. 

  276. 		<!--Reservoir2 outputs End-->
    277. 

  277. 		
    278. 

  278. 		<!--Reservoir3 outputs Start-->
    279. 

  279. 		<Output Name="c_RES3_AN_PUMP_ENABLE" Address="MAIN.RES3_4_DO_16CHANNEL_EL2809_N231_1" Type="Digital" Invert="false" DataType="bool"/>
    280. 

  280. 		<Output Name="c_RES3_CA_PUMP_ENABLE" Address="MAIN.RES3_4_DO_16CHANNEL_EL2809_N231_3" Type="Digital" Invert="false" DataType="bool"/>
    281. 

  281. 		<Output Name="c_RES3_AN_PUMP_SPEED" Address="MAIN.RES3_4_AO_8CHANNEL_0_10V_EL4008_N234_1" Scaling="0=0,100=32767" Type="Analog" DataType="int"/>
    282. 

  282. 		<Output Name="c_RES3_CA_PUMP_SPEED" Address="MAIN.RES3_4_AO_4CHANNEL_4_20mA_EL4024_N235_1" Scaling="0=0,100=32767" Type="Analog" DataType="int"/>
    283. 

  283. 		<Output Name="c_RES3_RETURN_VALVE_OPENING" Address="MAIN.RES3_4_AO_4CHANNEL_4_20mA_EL4024_N235_3" Scaling="0=0,100=32767" Type="Analog" DataType="int"/>
    284. 

  284. 		<Output Name="c_RES3_CA_DIW_REPLEN" Address="MAIN.RES3_4_PNEU_SMC_EX260_V01_V04" Type="Digital" BitOperated="true" Bit="0" DataType="byte"/>
    285. 

  285. 		<Output Name="c_RES3_SAMPLE_OUT" Address="MAIN.RES3_4_PNEU_SMC_EX260_V01_V04" Type="Digital" BitOperated="true" Bit="1" DataType="byte"/>
    286. 

  286. 		<Output Name="c_RES3_DEGAS_ENABLE" Address="MAIN.RES3_4_PNEU_SMC_EX260_V01_V04" Type="Digital" BitOperated="true" Bit="2" DataType="byte"/>
    287. 

  287. 		<Output Name="c_CELL3_CA_ISOLATION" Address="MAIN.RES3_4_PNEU_SMC_EX260_V01_V04" Type="Digital" BitOperated="true" Bit="3" DataType="byte"/>
    288. 

  288. 		<Output Name="c_RES3_AN_DIW_REPLEN" Address="MAIN.RES3_4_PNEU_SMC_EX260_V01_V04" Type="Digital" BitOperated="true" Bit="4" DataType="byte"/>
    289. 

  289. 		<Output Name="c_CELL3_AN_ISOLATION" Address="MAIN.RES3_4_PNEU_SMC_EX260_V01_V04" Type="Digital" BitOperated="true" Bit="5" DataType="byte"/>
    290. 

  290. 		<!--Reservoir3 outputs End-->
    291. 

  291. 		
    292. 

  292. 		<!--Reservoir4 outputs Start-->
    293. 

  293. 		<Output Name="c_RES4_AN_PUMP_ENABLE" Address="MAIN.RES3_4_DO_16CHANNEL_EL2809_N231_2" Type="Digital" Invert="false" DataType="bool"/>
    294. 

  294. 		<Output Name="c_RES4_CA_PUMP_ENABLE" Address="MAIN.RES3_4_DO_16CHANNEL_EL2809_N231_4" Type="Digital" Invert="false" DataType="bool"/>
    295. 

  295. 		<Output Name="c_RES4_AN_PUMP_SPEED" Address="MAIN.RES3_4_AO_8CHANNEL_0_10V_EL4008_N234_2" Scaling="0=0,100=32767" Type="Analog" DataType="int"/>
    296. 

  296. 		<Output Name="c_RES4_CA_PUMP_SPEED" Address="MAIN.RES3_4_AO_4CHANNEL_4_20mA_EL4024_N235_2" Scaling="0=0,100=32767" Type="Analog" DataType="int"/>
    297. 

  297. 		<Output Name="c_RES4_RETURN_VALVE_OPENING" Address="MAIN.RES3_4_AO_4CHANNEL_4_20mA_EL4024_N235_4" Scaling="0=0,100=32767" Type="Analog" DataType="int"/>
    298. 

  298. 		<Output Name="c_RES4_CA_DIW_REPLEN" Address="MAIN.RES3_4_PNEU_SMC_EX260_V01_V04" Type="Digital" BitOperated="true" Bit="6" DataType="byte"/>
    299. 

  299. 		<Output Name="c_RES4_SAMPLE_OUT" Address="MAIN.RES3_4_PNEU_SMC_EX260_V01_V04" Type="Digital" BitOperated="true" Bit="7" DataType="byte"/>
    300. 

  300. 		<Output Name="c_RES4_DEGAS_ENABLE" Address="MAIN.RES3_4_PNEU_SMC_EX260_V05_V08" Type="Digital" BitOperated="true" Bit="0" DataType="byte"/>
    301. 

  301. 		<Output Name="c_CELL4_CA_ISOLATION" Address="MAIN.RES3_4_PNEU_SMC_EX260_V05_V08" Type="Digital" BitOperated="true" Bit="1" DataType="byte"/>
    302. 

  302. 		<Output Name="c_RES4_AN_DIW_REPLEN" Address="MAIN.RES3_4_PNEU_SMC_EX260_V05_V08" Type="Digital" BitOperated="true" Bit="2" DataType="byte"/>
    303. 

  303. 		<Output Name="c_CELL4_AN_ISOLATION" Address="MAIN.RES3_4_PNEU_SMC_EX260_V05_V08" Type="Digital" BitOperated="true" Bit="3" DataType="byte"/>
    304. 

  304. 		<!--Reservoir4 outputs End-->
    305. 

  305. 		
    306. 

  306. 		<!--VPW Main Start-->
    307. 

  307. 		<Output Name="c_VPW_CHAMBER_CLOSE" Address="MAIN.MOTION_DO_16CHANNEL_EL2809_N401_15" Type="Digital" Invert="true" DataType="bool"/>
    308. 

  308. 		<Output Name="c_VPW_VACUUM_PUMP_POWER" Address="MAIN.VPW_DO_16CHANNEL_EL2809_101_5" Type="Digital" Invert="false" DataType="bool"/>
    309. 

  309. 		<Output Name="c_VPW_DEGAS_PUMP_ENABLE" Address="MAIN.VPW_DO_16CHANNEL_EL2809_101_6" Type="Digital" Invert="false" DataType="bool"/>
    310. 

  310. 		<Output Name="c_VPW_BOOSTER_PUMP_ENABLE" Address="MAIN.VPW_DO_16CHANNEL_EL2809_101_7" Type="Digital" Invert="false" DataType="bool"/>
    311. 

  311. 		<Output Name="c_VPW_VACUUM_PUMP_ENABLE" Address="MAIN.MAIN_IO_RELAY_4CHANNEL_EL2624_N106_1" Type="Digital" Invert="false" DataType="bool"/>
    312. 

  312. 		<Output Name="c_VPW_VACUUM_PUMP_SPEED_ENABLE" Address="MAIN.MAIN_IO_RELAY_4CHANNEL_EL2624_N106_2" Type="Digital" Invert="false" DataType="bool"/>
    313. 

  313. 		<Output Name="c_VPW_VACUUM_PUMP_SPEED" Address="MAIN.VPW_AO_8CHANNEL_0_10V_EL4008_N104_1" Scaling="0=0,20=32767" Type="Analog" DataType="int"/>
    314. 

  314. 		<Output Name="c_VPW_BOOSTER_PUMP_SPPED" Address="MAIN.VPW_AO_8CHANNEL_0_10V_EL4008_N104_5" Scaling="300=0,10000=32767" Type="Analog" DataType="int"/>
    315. 

  315. 		<Output Name="c_VPW_DIW_ENABLE" Address="MAIN.VPW_PNEU_SMC_EX260_BYTE0" Type="Digital" BitOperated="true" Bit="0" DataType="byte"/>
    316. 

  316. 		<Output Name="c_VPW_DIW_PROCESS" Address="MAIN.VPW_PNEU_SMC_EX260_BYTE0" Type="Digital" BitOperated="true" Bit="1" DataType="byte"/>
    317. 

  317. 		<Output Name="c_VPW_DIW_DEGAS" Address="MAIN.VPW_PNEU_SMC_EX260_BYTE1" Type="Digital" BitOperated="true" Bit="0" DataType="byte"/>
    318. 

  318. 		<Output Name="c_VPW_DEGAS_ADJUST" Address="MAIN.VPW_PNEU_SMC_EX260_BYTE1" Type="Digital" BitOperated="true" Bit="1" DataType="byte"/>
    319. 

  319. 		<Output Name="c_VPW_DEGAS_PURGE" Address="MAIN.VPW_PNEU_SMC_EX260_BYTE1" Type="Digital" BitOperated="true" Bit="2" DataType="byte"/>
    320. 

  320. 		<!--VPW Main End-->
    321. 

  321. 

  322. 		<!--VPW1 Start-->
    323. 

  323. 		<Output Name="c_VPW_1_FLOW_DRIP" Address="MAIN.VPW_PNEU_SMC_EX260_BYTE0" Type="Digital" BitOperated="true" Bit="2" DataType="byte"/>
    324. 

  324. 		<Output Name="c_VPW_1_FLOW_SMALL" Address="MAIN.VPW_PNEU_SMC_EX260_BYTE0" Type="Digital" BitOperated="true" Bit="3" DataType="byte"/>
    325. 

  325. 		<Output Name="c_VPW_1_FLOW_LARGE" Address="MAIN.VPW_PNEU_SMC_EX260_BYTE0" Type="Digital" BitOperated="true" Bit="4" DataType="byte"/>
    326. 

  326. 		<Output Name="c_VPW_1_VACUUM_VALVE" Address="MAIN.VPW_PNEU_SMC_EX260_BYTE1" Type="Digital" BitOperated="true" Bit="3" DataType="byte"/>
    327. 

  327. 		<Output Name="c_VPW_1_VENT_VALVE" Address="MAIN.VPW_PNEU_SMC_EX260_BYTE1" Type="Digital" BitOperated="true" Bit="5" DataType="byte"/>
    328. 

  328. 		<Output Name="c_VPW_1_DIW_DRAIN" Address="MAIN.VPW_PNEU_SMC_EX260_BYTE2" Type="Digital" BitOperated="true" Bit="0" DataType="byte"/>
    329. 

  329. 		<!--VPW1 End-->
    330. 

  330. 

  331. 		<!--VPW2 Start-->
    332. 

  332. 		<Output Name="c_VPW_2_FLOW_DRIP" Address="MAIN.VPW_PNEU_SMC_EX260_BYTE0" Type="Digital" BitOperated="true" Bit="5" DataType="byte"/>
    333. 

  333. 		<Output Name="c_VPW_2_FLOW_SMALL" Address="MAIN.VPW_PNEU_SMC_EX260_BYTE0" Type="Digital" BitOperated="true" Bit="6" DataType="byte"/>
    334. 

  334. 		<Output Name="c_VPW_2_FLOW_LARGE" Address="MAIN.VPW_PNEU_SMC_EX260_BYTE0" Type="Digital" BitOperated="true" Bit="7" DataType="byte"/>
    335. 

  335. 		<Output Name="c_VPW_2_VACUUM_VALVE" Address="MAIN.VPW_PNEU_SMC_EX260_BYTE1" Type="Digital" BitOperated="true" Bit="4" DataType="byte"/>
    336. 

  336. 		<Output Name="c_VPW_2_VENT_VALVE" Address="MAIN.VPW_PNEU_SMC_EX260_BYTE1" Type="Digital" BitOperated="true" Bit="6" DataType="byte"/>
    337. 

  337. 		<Output Name="c_VPW_2_DIW_DRAIN" Address="MAIN.VPW_PNEU_SMC_EX260_BYTE2" Type="Digital" BitOperated="true" Bit="1" DataType="byte"/>
    338. 

  338. 		<!--VPW2 End-->
    339. 

  339. 

  340. 		<!--EFEM Start-->
    341. 

  341. 		<Output Name="c_System_Alarm" Address="MAIN.Facility_DO_16CHANNEL_EL2809_N003_1" Type="Digital" DataType="bool"/>
    342. 

  342. 		<Output Name="c_Pole_Red" Address="MAIN.Facility_DO_16CHANNEL_EL2809_N003_2" Type="Digital" DataType="bool"/>
    343. 

  343. 		<Output Name="c_Pole_Amber" Address="MAIN.Facility_DO_16CHANNEL_EL2809_N003_3" Type="Digital" DataType="bool"/>
    344. 

  344. 		<Output Name="c_Pole_Green" Address="MAIN.Facility_DO_16CHANNEL_EL2809_N003_4" Type="Digital" DataType="bool"/>
    345. 

  345. 		<Output Name="c_Pole_Blue" Address="MAIN.Facility_DO_16CHANNEL_EL2809_N003_5" Type="Digital" DataType="bool"/>
    346. 

  346. 		<Output Name="c_System_Alarm2" Address="MAIN.Facility_DO_16CHANNEL_EL2809_N003_6" Type="Digital" DataType="bool"/>
    347. 

  347. 		<!--EFEM End-->
    348. 

  348. 		
    349. 

  349. 		<!--////////////////////////////////////////////////// ALL OUTPUTS END //////////////////////////////////////////////////-->
    350. 

  350. 

  351. 

  352. 

  353. 		<!--////////////////////////////////////////////////// ALL AXIS BEGIN //////////////////////////////////////////////////-->
    354. 

  354. 

  355. 		<Axis Name="VPW1.Rotation" MotorType="Yaskawa" COEAddress="192.168.0.14.4.1" COEPort="1016" DebugLogging="false">
    356. 

  356. 			<Input Address="MAIN.VPW1RotationStatusWord" Type="StatusWord" DataType="uint"/>
    357. 

  357. 			<Input Address="MAIN.VPW1RotationDigitalInputs" Type="DigitalInputs" DataType="udint"/>
    358. 

  358. 			<Input Address="MAIN.VPW1RotationMotorPosition" Type="MotorPosition" DataType="dint"/>
    359. 

  359. 			<Input Address="MAIN.VPW1RotationPositionError" Type="PositionError" DataType="dint"/>
    360. 

  360. 			<Input Address="MAIN.VPW1RotationActualVelocity" Type="ActualVelocity" DataType="dint"/>
    361. 

  361. 			<Input Address="MAIN.VPW1RotationActualTorque" Type="ActualTorque" DataType="int"/>
    362. 

  362. 			<!-- Input Address="MAIN.Loader1Rotation_DigitalOutputs" Type="DigitalOutputs" DataType="dint"/ -->
    363. 

  363. 			<Input Address="0x607D:01" Type="SoftwareLimitMinus" DataType="dint"/>
    364. 

  364. 			<Input Address="0x607D:02" Type="SoftwareLimitPlus" DataType="dint"/>
    365. 

  365. 			<Input Address="0x6098:00" Type="HomingMethod" DataType="byte"/>
    366. 

  366. 			<Input Address="0x607C:00" Type="HomeOffset" DataType="dint"/>
    367. 

  367. 			<Input Address="0x6099:01" Type="HomingVelocity" DataType="dint"/>
    368. 

  368. 			<Input Address="0x6099:02" Type="HomingVelocitySlow" DataType="dint"/>
    369. 

  369. 			<Input Address="0x609A:00" Type="HomingAccel" DataType="dint"/>
    370. 

  370. 			<Input Address="0x2403:00" Type="NegativeTorqueLimit" DataType="uint"/>
    371. 

  371. 			<Input Address="0x2402:00" Type="PositiveTorqueLimit" DataType="uint"/>
    372. 

  372. 			<Input Address="0x6085:00" Type="EStopDecel" DataType="udint"/>
    373. 

  373. 			<Input Address="0x2406:00" Type="EStopTorque" DataType="uint"/>
    374. 

  374. 			<Input Address="0x607F:00" Type="VelocityLimit" DataType="udint"/>
    375. 

  375. 			<Input Address="0x2522:00" Type="PositionWindow" DataType="udint"/>
    376. 

  376. 			<Input Address="0x2520:00" Type="FollowingErrorWindow" DataType="udint"/>
    377. 

  377. 			<Input Address="0x603F:00" Type="ErrorCode" DataType="uint"/>
    378. 

  378. 

  379. 			<Output Address="MAIN.VPW1RotationControlWord" Type="ControlWord" DataType="uint"/>
    380. 

  380. 			<Output Address="MAIN.VPW1RotationModeOfOperation" Type="ModeOfOperation" DataType="byte"/>
    381. 

  381. 			<Output Address="MAIN.VPW1RotationTargetPosition" Type="TargetPosition" DataType="dint"/>
    382. 

  382. 			<Output Address="MAIN.VPW1RotationProfileVelocity" Type="ProfileVelocity" DataType="dint"/>
    383. 

  383. 			<Output Address="MAIN.VPW1RotationProfileAccel" Type="ProfileAccel" DataType="dint"/>
    384. 

  384. 			<Output Address="MAIN.VPW1RotationProfileDecel" Type="ProfileDecel" DataType="dint"/>
    385. 

  385. 			<!-- Output Address="MAIN.Loader1Rotation_DigitalOutputs" Type="DigitalOutputs" DataType="dint"/ -->
    386. 

  386. 			<Output Address="0x607D:01" Type="SoftwareLimitMinus" DataType="dint"/>
    387. 

  387. 			<Output Address="0x607D:02" Type="SoftwareLimitPlus" DataType="dint"/>
    388. 

  388. 			<Output Address="0x607C:00" Type="HomeOffset" DataType="dint"/>
    389. 

  389. 			<Output Address="0x6098:00" Type="HomingMethod" DataType="byte"/>
    390. 

  390. 			<Output Address="0x6099:01" Type="HomingVelocity" DataType="dint"/>
    391. 

  391. 			<Output Address="0x6099:02" Type="HomingVelocitySlow" DataType="dint"/>
    392. 

  392. 			<Output Address="0x609A:00" Type="HomingAccel" DataType="dint"/>
    393. 

  393. 			<Output Address="0x2403:00" Type="NegativeTorqueLimit" DataType="uint"/>
    394. 

  394. 			<Output Address="0x2402:00" Type="PositiveTorqueLimit" DataType="uint"/>
    395. 

  395. 

  396. 			<MotorType>Servo</MotorType>
    397. 

  397. 			<MotorDriveDirection>0</MotorDriveDirection>
    398. 

  398. 			<EncoderFeedbackDirectionMValue>0</EncoderFeedbackDirectionMValue>
    399. 

  399. 			<EncoderFeedbackDirectionNValue>0</EncoderFeedbackDirectionNValue>
    400. 

  400. 			<ReverseLimitSwitchPolarity>0</ReverseLimitSwitchPolarity>
    401. 

  401. 			<ForwardLimitSwitchPolarity>0</ForwardLimitSwitchPolarity>
    402. 

  402. 			<HomeSwitchPolarity>0</HomeSwitchPolarity>
    403. 

  403. 			<HomingMethod>24</HomingMethod>
    404. 

  404. 			<HomeConfig>0</HomeConfig>
    405. 

  405. 			<HomingOffset>0</HomingOffset>
    406. 

  406. 			<HomingSpeedHomeSwitch>1500000</HomingSpeedHomeSwitch>
    407. 

  407. 			<HomingSpeedEncoderIndex>0</HomingSpeedEncoderIndex>
    408. 

  408. 			<HomingAccelDecel>10000000</HomingAccelDecel>
    409. 

  409. 			<HomingTimeOut>60000</HomingTimeOut>
    410. 

  410. 			<ProportionalGain>0</ProportionalGain>
    411. 

  411. 			<IntegralGain>0</IntegralGain>
    412. 

  412. 			<DerivativeGain>0</DerivativeGain>
    413. 

  413. 			<IntegralLimit>0</IntegralLimit>
    414. 

  414. 			<ErrorLimit>6766</ErrorLimit>
    415. 

  415. 			<VoltageOffset>0</VoltageOffset>
    416. 

  416. 			<!-- -193 degrees * 169161 = -32648073 -->
    417. 

  417. 			<ReverseSoftwareLimit>0</ReverseSoftwareLimit>
    418. 

  418. 			<!-- 13 degrees * 169161 = 2199093 -->
    419. 

  419. 			<ForwardSoftwareLimit>0</ForwardSoftwareLimit>
    420. 

  420. 			<Speed>360</Speed>
    421. 

  421. 			<Acceleration>1000</Acceleration>
    422. 

  422. 			<Deceleration>1000</Deceleration>
    423. 

  423. 			<Jerk>0</Jerk>
    424. 

  424. 			<FeedforwardVelocity>0</FeedforwardVelocity>
    425. 

  425. 			<FeedforwardAcceleration>0</FeedforwardAcceleration>
    426. 

  426. 			<OffOnError>0</OffOnError>
    427. 

  427. 		</Axis>
    428. 

  428. 		<Axis Name="VPW2.Rotation" MotorType="Yaskawa" COEAddress="192.168.0.14.4.1" COEPort="1016" DebugLogging="false">
    429. 

  429. 			<Input Address="MAIN.VPW2RotationStatusWord" Type="StatusWord" DataType="uint"/>
    430. 

  430. 			<Input Address="MAIN.VPW2RotationDigitalInputs" Type="DigitalInputs" DataType="udint"/>
    431. 

  431. 			<Input Address="MAIN.VPW2RotationMotorPosition" Type="MotorPosition" DataType="dint"/>
    432. 

  432. 			<Input Address="MAIN.VPW2RotationPositionError" Type="PositionError" DataType="dint"/>
    433. 

  433. 			<Input Address="MAIN.VPW2RotationActualVelocity" Type="ActualVelocity" DataType="dint"/>
    434. 

  434. 			<Input Address="MAIN.VPW2RotationActualTorque" Type="ActualTorque" DataType="int"/>
    435. 

  435. 			<!-- Input Address="MAIN.Loader1Rotation_DigitalOutputs" Type="DigitalOutputs" DataType="dint"/ -->
    436. 

  436. 			<Input Address="0x607D:01" Type="SoftwareLimitMinus" DataType="dint"/>
    437. 

  437. 			<Input Address="0x607D:02" Type="SoftwareLimitPlus" DataType="dint"/>
    438. 

  438. 			<Input Address="0x6098:00" Type="HomingMethod" DataType="byte"/>
    439. 

  439. 			<Input Address="0x607C:00" Type="HomeOffset" DataType="dint"/>
    440. 

  440. 			<Input Address="0x6099:01" Type="HomingVelocity" DataType="dint"/>
    441. 

  441. 			<Input Address="0x6099:02" Type="HomingVelocitySlow" DataType="dint"/>
    442. 

  442. 			<Input Address="0x609A:00" Type="HomingAccel" DataType="dint"/>
    443. 

  443. 			<Input Address="0x2403:00" Type="NegativeTorqueLimit" DataType="uint"/>
    444. 

  444. 			<Input Address="0x2402:00" Type="PositiveTorqueLimit" DataType="uint"/>
    445. 

  445. 			<Input Address="0x6085:00" Type="EStopDecel" DataType="udint"/>
    446. 

  446. 			<Input Address="0x2406:00" Type="EStopTorque" DataType="uint"/>
    447. 

  447. 			<Input Address="0x607F:00" Type="VelocityLimit" DataType="udint"/>
    448. 

  448. 			<Input Address="0x2522:00" Type="PositionWindow" DataType="udint"/>
    449. 

  449. 			<Input Address="0x2520:00" Type="FollowingErrorWindow" DataType="udint"/>
    450. 

  450. 			<Input Address="0x603F:00" Type="ErrorCode" DataType="uint"/>
    451. 

  451. 

  452. 			<Output Address="MAIN.VPW2RotationControlWord" Type="ControlWord" DataType="uint"/>
    453. 

  453. 			<Output Address="MAIN.VPW2RotationModeOfOperation" Type="ModeOfOperation" DataType="byte"/>
    454. 

  454. 			<Output Address="MAIN.VPW2RotationTargetPosition" Type="TargetPosition" DataType="dint"/>
    455. 

  455. 			<Output Address="MAIN.VPW2RotationProfileVelocity" Type="ProfileVelocity" DataType="dint"/>
    456. 

  456. 			<Output Address="MAIN.VPW2RotationProfileAccel" Type="ProfileAccel" DataType="dint"/>
    457. 

  457. 			<Output Address="MAIN.VPW2RotationProfileDecel" Type="ProfileDecel" DataType="dint"/>
    458. 

  458. 			<!-- Output Address="MAIN.Loader1Rotation_DigitalOutputs" Type="DigitalOutputs" DataType="dint"/ -->
    459. 

  459. 			<Output Address="0x607D:01" Type="SoftwareLimitMinus" DataType="dint"/>
    460. 

  460. 			<Output Address="0x607D:02" Type="SoftwareLimitPlus" DataType="dint"/>
    461. 

  461. 			<Output Address="0x607C:00" Type="HomeOffset" DataType="dint"/>
    462. 

  462. 			<Output Address="0x6098:00" Type="HomingMethod" DataType="byte"/>
    463. 

  463. 			<Output Address="0x6099:01" Type="HomingVelocity" DataType="dint"/>
    464. 

  464. 			<Output Address="0x6099:02" Type="HomingVelocitySlow" DataType="dint"/>
    465. 

  465. 			<Output Address="0x609A:00" Type="HomingAccel" DataType="dint"/>
    466. 

  466. 			<Output Address="0x2403:00" Type="NegativeTorqueLimit" DataType="uint"/>
    467. 

  467. 			<Output Address="0x2402:00" Type="PositiveTorqueLimit" DataType="uint"/>
    468. 

  468. 

  469. 			<MotorType>Servo</MotorType>
    470. 

  470. 			<MotorDriveDirection>0</MotorDriveDirection>
    471. 

  471. 			<EncoderFeedbackDirectionMValue>0</EncoderFeedbackDirectionMValue>
    472. 

  472. 			<EncoderFeedbackDirectionNValue>0</EncoderFeedbackDirectionNValue>
    473. 

  473. 			<ReverseLimitSwitchPolarity>0</ReverseLimitSwitchPolarity>
    474. 

  474. 			<ForwardLimitSwitchPolarity>0</ForwardLimitSwitchPolarity>
    475. 

  475. 			<HomeSwitchPolarity>0</HomeSwitchPolarity>
    476. 

  476. 			<HomingMethod>24</HomingMethod>
    477. 

  477. 			<HomeConfig>0</HomeConfig>
    478. 

  478. 			<HomingOffset>0</HomingOffset>
    479. 

  479. 			<HomingSpeedHomeSwitch>1500000</HomingSpeedHomeSwitch>
    480. 

  480. 			<HomingSpeedEncoderIndex>0</HomingSpeedEncoderIndex>
    481. 

  481. 			<HomingAccelDecel>10000000</HomingAccelDecel>
    482. 

  482. 			<HomingTimeOut>60000</HomingTimeOut>
    483. 

  483. 			<ProportionalGain>0</ProportionalGain>
    484. 

  484. 			<IntegralGain>0</IntegralGain>
    485. 

  485. 			<DerivativeGain>0</DerivativeGain>
    486. 

  486. 			<IntegralLimit>0</IntegralLimit>
    487. 

  487. 			<ErrorLimit>6766</ErrorLimit>
    488. 

  488. 			<VoltageOffset>0</VoltageOffset>
    489. 

  489. 			<!-- -193 degrees * 169161 = -32648073 -->
    490. 

  490. 			<ReverseSoftwareLimit>-46180953</ReverseSoftwareLimit>
    491. 

  491. 			<!-- 13 degrees * 169161 = 2199093 -->
    492. 

  492. 			<ForwardSoftwareLimit>2706576</ForwardSoftwareLimit>
    493. 

  493. 			<Speed>15000000</Speed>
    494. 

  494. 			<Acceleration>10000000</Acceleration>
    495. 

  495. 			<Deceleration>10000000</Deceleration>
    496. 

  496. 			<Jerk>0</Jerk>
    497. 

  497. 			<FeedforwardVelocity>0</FeedforwardVelocity>
    498. 

  498. 			<FeedforwardAcceleration>0</FeedforwardAcceleration>
    499. 

  499. 			<OffOnError>0</OffOnError>
    500. 

  500. 		</Axis>
    501. 

  501. 	</Controller>
    502. 

  502. </BeckhoffCfg>
    503. 

  503.