| 123456789101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960616263646566676869707172737475767778798081828384858687888990919293949596979899100101102103104105106107108109110111112113114115116117118119120121122123124125126127128129130131132133134135136137138139140141142143144145146147148149150151152153154155156157158159160161162163164165166167168169170171172173174175176177178179180181182183184185186187188189190191192193194195196197198199200201202203204205206207208209210211212213214 | 
							- using Aitex.Core.RT.Device;
 
- using Aitex.Core.RT.Log;
 
- using Aitex.Core.RT.Routine;
 
- using Aitex.Core.RT.SCCore;
 
- using Aitex.Core.Util;
 
- using MECF.Framework.Common.Equipment;
 
- using MECF.Framework.Common.RecipeCenter;
 
- using MECF.Framework.Common.Routine;
 
- using MECF.Framework.Common.SubstrateTrackings;
 
- using PunkHPX8_Core;
 
- using PunkHPX8_RT.Devices.AXIS;
 
- using PunkHPX8_RT.Devices.VpwCell;
 
- using PunkHPX8_RT.Devices.VpwMain;
 
- using PunkHPX8_RT.Modules.VpwMain;
 
- using System;
 
- using System.Collections.Generic;
 
- using System.Linq;
 
- using System.Text;
 
- using System.Threading.Tasks;
 
- namespace PunkHPX8_RT.Modules.VpwCell
 
- {
 
-     public class VpwPrepareRoutine : RoutineBase, IRoutine
 
-     {
 
-         private enum PrepareStep
 
-         {
 
-             CheckPreCondition,
 
-             Purge,
 
-             PurgeDelay,
 
-             WaitPurge,
 
-             RotationPositionOffset,
 
-             WaitRotation,
 
-             CloseDrip,
 
-             Delay,
 
-             End
 
-         }
 
-         #region 内部变量
 
-         /// <summary>
 
-         /// recipe
 
-         /// </summary>
 
-         private VpwRecipe _recipe;
 
-         /// <summary>
 
-         /// 设备
 
-         /// </summary>
 
-         private VpwCellDevice _vpwCellDevice;
 
-         /// <summary>
 
-         /// 延迟时间
 
-         /// </summary>
 
-         private int _putDownAfterDripClose = 2000;
 
-         /// <summary>
 
-         /// 等待Wafer放入时间
 
-         /// </summary>
 
-         private int _waitForWaferTime = 300000;
 
-         /// <summary>
 
-         /// Main设备
 
-         /// </summary>
 
-         private VpwMainDevice _mainDevice;
 
-         /// <summary>
 
-         /// VPW Entity
 
-         /// </summary>
 
-         private VpwMainEntity _vpwMainEntity;
 
-         #endregion
 
-         /// <summary>
 
-         /// 构造函数
 
-         /// </summary>
 
-         /// <param name="module"></param>
 
-         public VpwPrepareRoutine(string module) : base(module)
 
-         {
 
-         }
 
-         /// <summary>
 
-         /// 中止
 
-         /// </summary>
 
-         public void Abort()
 
-         {
 
-             Runner.Stop("Manual abort");
 
-         }
 
-         /// <summary>
 
-         /// 监控
 
-         /// </summary>
 
-         /// <returns></returns>
 
-         public RState Monitor()
 
-         {
 
-             Runner.Run(PrepareStep.CheckPreCondition,CheckPreCondition,_delay_1ms)
 
-                 .RunIf(PrepareStep.Purge,_recipe.PurgeEnable,Purge,_delay_1ms)
 
-                 .DelayIf(PrepareStep.PurgeDelay,_recipe.PurgeEnable, 500)
 
-                 .WaitWithStopConditionIf(PrepareStep.WaitPurge,_recipe.PurgeEnable,CheckPurgeStatus,CheckPurgeStopStatus)
 
-                 .Run(PrepareStep.RotationPositionOffset,RotationPositionOffset,_delay_1ms)
 
-                 .WaitWithStopCondition(PrepareStep.WaitRotation,CheckRotationStatus,CheckRotationStopStatus)
 
-                 .Run(PrepareStep.CloseDrip,()=>_vpwCellDevice.FlowDripOff(),_delay_1ms)
 
-                 .Delay(PrepareStep.Delay,_putDownAfterDripClose)
 
-                 .End(PrepareStep.End,NullFun,_delay_1ms);
 
-             return Runner.Status;
 
-         }
 
-         /// <summary>
 
-         /// Purge routine
 
-         /// </summary>
 
-         /// <returns></returns>
 
-         private bool Purge()
 
-         {
 
-             if (_vpwMainEntity == null)
 
-             {
 
-                 NotifyError(eEvent.ERR_VPW, "VPW Main not exist", -1);
 
-                 return false;
 
-             }
 
-             if (_vpwMainEntity.IsIdle)
 
-             {
 
-                 return _vpwMainEntity.CheckToPostMessage<VPWMainState, VPWMainMsg>(eEvent.ERR_VPW, Module, (int)VPWMainMsg.Purge);
 
-             }
 
-             else if (_vpwMainEntity.State == VPWMainState.Purgeing)
 
-             {
 
-                 return true;
 
-             }
 
-             else
 
-             {
 
-                 NotifyError(eEvent.ERR_VPW, $"State {_vpwMainEntity.State} cannot purge", -1);
 
-                 return false;
 
-             }
 
-         }
 
-         /// <summary>
 
-         /// 检验Purge执行是否结束
 
-         /// </summary>
 
-         /// <returns></returns>
 
-         private bool CheckPurgeStatus()
 
-         {
 
-             return _vpwMainEntity.IsIdle;
 
-         }
 
-         /// <summary>
 
-         /// 检验Purger执行是否出现异常
 
-         /// </summary>
 
-         /// <returns></returns>
 
-         private bool CheckPurgeStopStatus()
 
-         {
 
-             return _vpwMainEntity.IsError;
 
-         }
 
-         /// <summary>
 
-         /// Position运行至offset
 
-         /// </summary>
 
-         /// <returns></returns>
 
-         private bool RotationPositionOffset()
 
-         {
 
-             bool result = _vpwCellDevice.HomeRotation();
 
-             if (!result)
 
-             {
 
-                 NotifyError(eEvent.ERR_VPW, "rotation start home failed", -1);
 
-             }
 
-             return result;
 
-         }
 
-         /// <summary>
 
-         /// 检验电机是否完成运动
 
-         /// </summary>
 
-         /// <returns></returns>
 
-         private bool CheckRotationStatus()
 
-         {
 
-             return _vpwCellDevice.CheckHomeEndStatus();
 
-         }
 
-         /// <summary>
 
-         /// 检验电机运动是否出现异常
 
-         /// </summary>
 
-         /// <returns></returns>
 
-         private bool CheckRotationStopStatus()
 
-         {
 
-             bool result = _vpwCellDevice.CheckRotationStopStatus();
 
-             if (result)
 
-             {
 
-                 NotifyError(eEvent.ERR_VPW, "rotation home failed", -1);
 
-             }
 
-             return result;
 
-         }
 
-         /// <summary>
 
-         /// 启动
 
-         /// </summary>
 
-         /// <param name="objs"></param>
 
-         /// <returns></returns>
 
-         public RState Start(params object[] objs)
 
-         {
 
-             _recipe=(VpwRecipe)objs[0];
 
-             _vpwCellDevice = DEVICE.GetDevice<VpwCellDevice>(Module);
 
-             _mainDevice = DEVICE.GetDevice<VpwMainDevice>(ModuleName.VPWMain1.ToString());
 
-             _putDownAfterDripClose = SC.GetValue<int>($"{Module}.PutDownAfterDripClose");
 
-             _waitForWaferTime = SC.GetValue<int>($"{Module}.WaitForWaferTime") * 1000;
 
-             _vpwMainEntity = Singleton<RouteManager>.Instance.GetModule<VpwMainEntity>(ModuleName.VPWMain1.ToString());
 
-             return Runner.Start(Module, $"{Module} prepare");
 
-         }
 
-         /// <summary>
 
-         /// 检验前置条件
 
-         /// </summary>
 
-         /// <returns></returns>
 
-         private bool CheckPreCondition()
 
-         {
 
-             if (!_vpwCellDevice.CheckRotationSwitchOn())
 
-             {
 
-                 NotifyError(eEvent.ERR_VPW,"rotaion is not switch on",-1);
 
-                 return false;
 
-             }
 
-             return true;
 
-         }
 
-         /// <summary>
 
-         /// 重试
 
-         /// </summary>
 
-         /// <param name="step"></param>
 
-         public RState Retry(int step)
 
-         {
 
-             if (_recipe == null)
 
-             {
 
-                 NotifyError(eEvent.ERR_VPW, "recipe is null", -1);
 
-                 return RState.Failed;
 
-             }
 
-             List<Enum> preStepIds = new List<Enum>();
 
-             return Runner.Retry(PrepareStep.CheckPreCondition, preStepIds, Module, "Prepare Retry");
 
-         }
 
-     }
 
- }
 
 
  |