| 123456789101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960616263646566676869707172737475767778798081828384858687888990919293949596979899100101102103104105106107108109110111112113114115116117118119120121122123124125126127128129130131132133134135136137138139140141142143144145146147148149150151152153154155156157158159160161162163164165166167168169170171172173174175176177178179180181182183184185186187188189190191192193194195196197198199200201202203204205206207208209210211212213214215216217218219220221222223224225226227228229230231232233234235236237238239240241242243244245246247248249250251252253254255256257258259260261262263264265266267268269270271272273274275276277278279280281282283284285286287288289290291292293294295296297298299300301302303304305306307308309310311312313314315316317318319320321322323324325326327328329330331332333334335336337338339340341342343344345346347348349350351352353354355356357358359360361362363364365366367368369370371372373374375376377378379380381382383384385 | using Aitex.Core.RT.Device;using Aitex.Core.RT.Log;using Aitex.Core.RT.Routine;using PunkHPX8_Core;using PunkHPX8_RT.Devices.AXIS;using PunkHPX8_RT.Devices.Facilities;using PunkHPX8_RT.Devices.SRD;using MECF.Framework.Common.Equipment;using MECF.Framework.Common.Routine;using MECF.Framework.Common.SubstrateTrackings;using Aitex.Core.Common;namespace PunkHPX8_RT.Modules.SRD{    public class SRDLoaderRoutine : RoutineBase, IRoutine    {        private enum SRDLoaderStep         {            Load_LiftUpOff,            Load_FlippersIn,            Load_N2On,            Load_Delay,            Load_N2Off,            Load_ChuckVacuumOn,            Load_FlippersOut,            End        }        #region 常量         #endregion        #region 内部变量        /// <summary>        /// Rotation Axis        /// </summary>        private JetAxisBase _rotationAxis;        /// <summary>        /// SRD Common        /// </summary>        private SrdCommonDevice _srdCommon;        /// <summary>        /// Total SRD        /// </summary>        private TotalSRDDevice _totalSRDDevice;        /// <summary>        /// System Facility        /// </summary>        private SystemFacilities _systemFacilities;        /// <summary>        /// 当前WaferSize        /// </summary>        private int _waferSize = 200;        #endregion        #region 属性        #endregion        /// <summary>        /// 构造函数        /// </summary>        /// <param name="module"></param>        public SRDLoaderRoutine(string module) : base(module)        {        }        /// <summary>        /// 中止        /// </summary>        public void Abort()        {            Runner.Stop("SRD Loader Abort");        }        /// <summary>        /// 监控        /// </summary>        /// <returns></returns>        public RState Monitor()        {            Runner.Run(SRDLoaderStep.Load_LiftUpOff, LiftUpOff, CheckLiftUpOffEndStatus, CheckLiftUpOffStopStatus)                .Run(SRDLoaderStep.Load_FlippersIn, FlippersIn, CheckFlippersInEndStatus, CheckFlippersInStopStatus)                .Run(SRDLoaderStep.Load_N2On, N2On, _delay_1ms)                .Delay(SRDLoaderStep.Load_Delay, 500)                .Run(SRDLoaderStep.Load_N2Off, N2Off, _delay_1ms)                .Run(SRDLoaderStep.Load_ChuckVacuumOn, ChuckVacuumOn, CheckChuckVacuumOnEndStatus, CheckChuckVacuumOnStopStatus)                .Run(SRDLoaderStep.Load_FlippersOut, FlippersOut, CheckFlippersOutEndStatus, CheckFlippersOutStopStatus)                .End(SRDLoaderStep.End, NullFun, _delay_1ms);            return Runner.Status;        }        /// <summary>        /// 启动        /// </summary>        /// <param name="objs"></param>        /// <returns></returns>        public RState Start(params object[] objs)        {            _srdCommon = DEVICE.GetDevice<SrdCommonDevice>($"{Module}.Common");            _totalSRDDevice = DEVICE.GetDevice<TotalSRDDevice>("SRD");            _rotationAxis = DEVICE.GetDevice<JetAxisBase>($"{Module}.Rotation");            _systemFacilities = DEVICE.GetDevice<SystemFacilities>("System.Facilities");            if (!GetWaferSize())            {                NotifyError(eEvent.ERR_SRD, "Wafer Size is invalid", 0);                return RState.Failed;            }            if (!CheckPreCondition())            {                return RState.Failed;            }            return Runner.Start(Module, "SRD Loader Start");        }        /// <summary>        /// Check Pre Condition        /// </summary>        /// <returns></returns>        private bool CheckPreCondition()        {            //Check Rotation Home            if (!_rotationAxis.IsHomed)            {                NotifyError(eEvent.ERR_SRD, "Rotation is not homed", 0);                return false;            }            //Check Vacuum off            if (!_srdCommon.CommonData.ChuckVacuum)            {                NotifyError(eEvent.ERR_SRD, "Chuck Vacuum is on", 0);                return false;            }            //Check LiftUp            if (!_srdCommon.CommonData.LiftUp)            {                NotifyError(eEvent.ERR_SRD, "LiftUp is off", 0);                return false;            }            //Check LiftUp Status            if (!_srdCommon.CommonData.LiftUpStatus)            {                NotifyError(eEvent.ERR_SRD, "LiftUp sensor is off", 0);                return false;            }            //Check Wafer Present            if (!_srdCommon.CommonData.WaferPresent)            {                NotifyError(eEvent.ERR_SRD, "WaferPresent sensor is off", 0);                return false;            }            //Check LoaderDI            if (!_systemFacilities.LoaderDiEnable)            {                NotifyError(eEvent.ERR_SRD, "Load DI Is Disable", 0);                return false;            }            //Check Flippers            if (_srdCommon.CommonData.FlippersIn150 || _srdCommon.CommonData.FlippersIn200)            {                NotifyError(eEvent.ERR_SRD, "FlippersIn is on", 0);                return false;            }            if (!_srdCommon.CommonData.Flipper1Out150Status || !_srdCommon.CommonData.Flipper2Out150Status || !_srdCommon.CommonData.Flipper3Out150Status                || !_srdCommon.CommonData.Flipper1Out200Status || !_srdCommon.CommonData.Flipper2Out200Status || !_srdCommon.CommonData.Flipper3Out200Status)            {                NotifyError(eEvent.ERR_SRD, "Flippers are at In position", 0);                return false;            }                       return true;        }        /// <summary>        /// Get current WaferSize        /// </summary>        /// <returns></returns>        private bool GetWaferSize()        {            WaferInfo waferInfo = WaferManager.Instance.GetWafer(ModuleNameString.ToEnum(Module), 0);            if (waferInfo == null)            {                return false;            }            switch (waferInfo.Size)            {                               case WaferSize.WS4:                    _waferSize = 100;                    break;                case WaferSize.WS6:                case WaferSize.WS150:                case WaferSize.WS159:                    _waferSize = 150;                    break;                case WaferSize.WS0:                case WaferSize.WS8:                    _waferSize = 200;                    break;                default:                    return false;            }            return true;        }        /// <summary>        /// LiftUpOff        /// </summary>        /// <param name="param"></param>        /// <returns></returns>        private bool LiftUpOff()        {            bool result = _srdCommon.LiftUpOffAction("", null);            if (!result)            {                NotifyError(eEvent.ERR_SRD, "Lift Up Off Action is failed", 0);                return result;            }                       return true;        }        /// <summary>        /// 检验LiftUpOff结束状态        /// </summary>        /// <param name="param"></param>        /// <returns></returns>        private bool CheckLiftUpOffEndStatus()        {            return _srdCommon.Status == RState.End && !_srdCommon.CommonData.LiftUpStatus;        }        /// <summary>        /// 检验LiftUpOff结束状态        /// </summary>        /// <param name="param"></param>        /// <returns></returns>        private bool CheckLiftUpOffStopStatus()        {            if (_srdCommon.Status == RState.Failed || _srdCommon.Status == RState.Timeout)            {                NotifyError(eEvent.ERR_SRD, "Check LiftUpOff is failed", 0);                return true;            }            return false;        }        /// <summary>        /// Flippers In        /// </summary>        /// <param name="param"></param>        /// <returns></returns>        private bool FlippersIn()        {            bool result = false;            object[] objects = new object[1];            objects[0] = _waferSize;            result = _srdCommon.FlipperInAction("", objects);            if (!result)            {                NotifyError(eEvent.ERR_SRD, $"FlipperIn{_waferSize} Action is failed", 0);                return result;            }                        return true;        }        /// <summary>        /// 检验FlippersIn结束状态        /// </summary>        /// <param name="param"></param>        /// <returns></returns>        private bool CheckFlippersInEndStatus()        {            return _srdCommon.Status == RState.End;        }        /// <summary>        /// 检验FlippersIn结束状态        /// </summary>        /// <param name="param"></param>        /// <returns></returns>        private bool CheckFlippersInStopStatus()        {            if (_srdCommon.Status == RState.Failed || _srdCommon.Status == RState.Timeout)            {                NotifyError(eEvent.ERR_SRD, $"Check FlipperIn{_waferSize} Action is failed", 0);                return true;            }            return false;        }        /// <summary>        /// 打开 Wafer N2        /// </summary>        /// <returns></returns>        private bool N2On()        {            bool result = _srdCommon.N2OnAction("", null);            if (!result)            {                NotifyError(eEvent.ERR_SRD, $"N2 On Action is failed", 0);            }            return result;        }        /// <summary>        /// 关闭 Wafer N2        /// </summary>        /// <returns></returns>        private bool N2Off()        {            bool result = _srdCommon.N2OffAction("", null);            if (!result)            {                NotifyError(eEvent.ERR_SRD, $"N2 Off Action is failed", 0);            }            return result;        }        /// <summary>        /// ChuckVacuumOn        /// </summary>        /// <param name="param"></param>        /// <returns></returns>        private bool ChuckVacuumOn()        {            bool result = _srdCommon.ChuckVacuumOnAction("", null);            if (!result)            {                NotifyError(eEvent.ERR_SRD, "ChuckVacuumOn Action is failed", 0);                return result;            }            return true;        }        /// <summary>        /// 检验ChuckVacuumOn结束状态        /// </summary>        /// <param name="param"></param>        /// <returns></returns>        private bool CheckChuckVacuumOnEndStatus()        {            return _srdCommon.Status == RState.End && !_srdCommon.CommonData.ChuckVacuum;        }        /// <summary>        /// 检验ChuckVacuumOn结束状态        /// </summary>        /// <param name="param"></param>        /// <returns></returns>        private bool CheckChuckVacuumOnStopStatus()        {            if (_srdCommon.Status == RState.Failed || _srdCommon.Status == RState.Timeout)            {                NotifyError(eEvent.ERR_SRD, "Check ChuckVacuumOn is failed", 0);                return true;            }            return false;        }        /// <summary>        /// Flippers Out        /// </summary>        /// <param name="param"></param>        /// <returns></returns>        private bool FlippersOut()        {            bool result = false;            object[] objects = new object[1];            objects[0] = _waferSize;            result = _srdCommon.FlipperOutAction("", objects);            if (!result)            {                NotifyError(eEvent.ERR_SRD, $"FlipperOut{_waferSize} Action is failed", 0);                return result;            }            return true;        }        /// <summary>        /// 检验FlippersOut结束状态        /// </summary>        /// <param name="param"></param>        /// <returns></returns>        private bool CheckFlippersOutEndStatus()        {            return _srdCommon.Status == RState.End;        }        /// <summary>        /// 检验FlippersOut结束状态        /// </summary>        /// <param name="param"></param>        /// <returns></returns>        private bool CheckFlippersOutStopStatus()        {            if (_srdCommon.Status == RState.Failed || _srdCommon.Status == RState.Timeout)            {                NotifyError(eEvent.ERR_SRD, $"Check FlipperOut{_waferSize} Action is failed", 0);                return true;            }            return false;        }    }}
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