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System.sccfg

System.sccfg 39 KB
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  1. <?xml version="1.0" encoding="utf-8"?>
    2. 

  2. <root system="Venus">
    3. 

  3. 	<configs name="System" nameView="System">
    4. 

  4. 		<config default="1" name="AtTemperatureRange" nameView="AtTemperatureRange" description="判断到达设定温度的误差" max="5" min="0.1" paramter="" tag="" unit="" type="Double" visible="true"/>
    5. 

  5. 		<config default="0.11" name="RampStepSize" nameView="RampStepSize" description="内外温度差的误差" max="1" min="0.01" paramter="" tag="" unit="" type="Double" visible="true"/>
    6. 

  6. 		<config default="5" name="TemeratureDelatLimit" nameView="TemeratureDelatLimit" description="TC温度差报警值" max="10" min="1" paramter="" tag="" unit="" type="Double" visible="true"/>
    7. 

  7. 		<config default="10." name="ControlIPFilter" description="Control IP Config" max="0" min="0" paramter="" tag="" unit="" type="String" />
    8. 

  8. 		<config default="Any,SnAg,Cu,Ni,Au" name="ChemistryList" nameView="Chemistry List" description="化学液集合" max="" min="" paramter="" tag="" unit="" type="String" visible="true"/>
    9. 

  9. 		<config default="1,2,3,4" name="LSType" nameView="Lis Seal Type" description="Lip Seal类型" max="" min="" paramter="" tag="" unit="" type="String" visible="true"/>
    10. 

  10. 		<config default="200" name="WaferSize" nameView="Wafer Size" description="Wafer尺寸" max="300" min="0" paramter="" tag="" unit="" type="Integer" visible="true"/>
    11. 

  11. 		<config default="0.1" name="Increment" nameView="Increment" description="步进" max="100" min="0" paramter="" tag="" unit="" type="Double" visible="true"/>
    12. 

  12. 		<config default="true" name="IsSimulatorMode" nameView="Simulator Mode" description="仿真模式" max="" min="" paramter="" tag="" unit="" type="Bool" visible="false"/>
    13. 

  13. 		<config default="true" name="DisplayPopDialogWhenJobComplete" nameView="Pop Dialog When Job Complete" description="是否弹出Job结束对话框" max="" min="" paramter="" tag="" unit="" type="Bool" />
    14. 

  14. 		<config default="True" name="IsIgnoreSaveDB" nameView="IsIgnoreSaveDB" description="IO实时数据是否保存数据库，2023/09/02暂时加参数设计" max="" min="" paramter="" tag="" unit="" type="Bool" visible="false"/>
    15. 

  15. 		<config default="10"  name="CheckResourceInterval" nameView="CheckResourceInterval" description="进程资源监视间隔，单位为分钟，0为不监视" max="60" min="0" paramter="" tag="" unit="min" type="Integer"/>
    16. 

  16. 		<config default="Cyber X8" name="Name" nameView="Name" description="Name" tag="" unit="" type="String" />
    17. 

  17. 		<config default="100" name="CompareInterval" nameView="CompareInterval" description="interval distance of comparing left/right side of target position" tag="" unit="mm" type="Double" />
    18. 

  18. 		<config default="1000"  name="DataCollectionInterval" nameView="DataCollectionInterval" description="插入数据时间间隔" max="2000" min="200" paramter="" tag="" unit="ms" type="Integer"/>
    19. 

  19. 		<configs name="Job" nameView="Job"  >
    20. 

  20. 			<config default="10" name="BuzzerTimeWhenJobDone" nameView="Buzzer Time When Job Done"  description="buzzer time after job done, -1=never stop, 0=silent,xxx=buzzer time" max="300" min="0" paramter="" tag="" unit="s" type="Integer" />
    21. 

  21. 		</configs>
    22. 

  22. 		<config default="EFEM,PUF1,PUF2,Loader1,Transporter2,Transporter1,Prewet" name="InitializeCheckModuleList" nameView="InitializeCheckModuleList" description="Initialize检验模块集合" max="" min="" paramter="" tag="" unit="" type="String"/>
    23. 

  23. 		<config default="SN 03.Cyber101" name="ToolID" nameView="ToolID" description="Tool ID" tag="" unit="" type="String" />
    24. 

  24. 		<config default="0" name="LogsSaveDays" description="max days of log file,zero is not to delete log file" max="365" min="0" paramter="" tag="" unit="" type="Integer" />
    25. 

  25. 		<config default="True" name="IsEnableCompressLogFile" nameView="IsEnableCompressLogFile" description="is enable to compress log files" max="" min="" paramter="" tag="" unit="" type="Bool" visible="false"/>
    26. 

  26. 	</configs>
    27. 

  27. 	<configs name="Twincat" nameView="Twincat">
    28. 

  28. 		<config default="false" name="EnableReadLog" nameView="Enalbe Twincat Variable Read log" description="是否启用Twincat变量读取日志" max="" min="" paramter="" tag="" unit="" type="Bool" />
    29. 

  29. 		<config default="10" name="SlsSpeed" nameView="SLS Axis Speed" description="SLS模式下Axis的速度" max="100" min="1" paramter="" tag="" unit="" type="Integer" />
    30. 

  30. 	</configs>
    31. 

  31. 	<!--FA-->
    32. 

  32. 	<configs name="FA" nameView="FA">
    33. 

  33. 		<config default="Passive" name="ConnectionMode" nameView="Connection Mode" description="Passive  Active" max="0" min="0" paramter="" tag="" unit="" type="String" />
    34. 

  34. 		<config default="127.0.0.1" name="LocalIpAddress" nameView="Local Ip Address" description=" " max="0" min="0" paramter="" tag="" unit="" type="String" />
    35. 

  35. 		<config default="5000" name="LocalPortNumber" nameView="Local Port Number" description="LocalPortNumber" max="99999" min="0" paramter="" tag="" unit="" type="Integer" />
    36. 

  36. 		<config default="127.0.0.1" name="RemoteIpAddress" nameView="Remote Ip Address" description=" " max="0" min="0" paramter="" tag="" unit="" type="String" />
    37. 

  37. 		<config default="5001" name="RemotePortNumber" nameView="Remote Port Number" description=" " max="99999" min="0" paramter="" tag="" unit="" type="Integer" />
    38. 

  38. 		<config default="45" name="T3Timeout" nameView="T3 Timeout" description=" " max="999" min="0" paramter="" tag="" unit="s" type="Integer" />
    39. 

  39. 		<config default="10" name="T5Timeout" nameView="T5 Timeout" description=" " max="999" min="0" paramter="" tag="" unit="s" type="Integer" />
    40. 

  40. 		<config default="5" name="T6Timeout" nameView="T6 Timeout" description=" " max="999" min="0" paramter="" tag="" unit="s" type="Integer" />
    41. 

  41. 		<config default="10" name="T7Timeout" nameView="T7 Timeout" description=" " max="999" min="0" paramter="" tag="" unit="s" type="Integer" />
    42. 

  42. 		<config default="5" name="T8Timeout" nameView="T8 Timeout" description=" " max="999" min="0" paramter="" tag="" unit="s" type="Integer" />
    43. 

  43. 		<config default="false" name="EnableSpooling" nameView="Enable Spooling" description="EnableSpooling" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    44. 

  44. 		<config default="30" name="LinkTestInterval" nameView="Link Test Interval" description="LinkTestInterval" max="999" min="0" paramter="" tag="" unit="s" type="Integer" />
    45. 

  45. 		<config default="0" name="DeviceId" nameView="Device Id" description="DeviceId" max="0" min="0" paramter="" tag="" unit="" type="String" />
    46. 

  46. 		<config default="0" name="SpoolingCapability" description="Spooling Capacity" max="99999" min="0" paramter="" tag="" unit="" type="Integer" />
    47. 

  47. 		<config default="0" name="SpoolingMaxTransmit" description="Spooling Max transmit" max="99999" min="0" paramter="" tag="" unit="" type="Integer" />
    48. 

  48. 		<config default="true" name="SpoolingFullOverWrite" description="Spooling Full OverWrite" max="0" min="0" paramter="" tag="" unit="" type="String" />
    49. 

  49. 		<config default="Enabled" name="DefaultCommunicationState" description="Default Communication State" max="0" min="0" paramter="" tag="" unit="" type="String" />
    50. 

  50. 		<config default="Online" name="DefaultControlState" description="Default Control State" max="0" min="0" paramter="" tag="" unit="" type="String" />
    51. 

  51. 		<config default="Local" name="DefaultControlSubState" description="Default Control SubState" max="0" min="0" paramter="" tag="" unit="" type="String" />
    52. 

  52. 	</configs>
    53. 

  53. 

  54. 	<!--Router-->
    55. 

  55. 	<configs name="Scheduler" nameView="Scheduler" >
    56. 

  56. 		<config default="true" name="GroupWaferBySequence" nameView="Group Wafer By Sequence" description="GroupWaferBySequence" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    57. 

  57. 		<config default="true" name="IsRunInParallelMode" nameView="Is Run In Parallel Mode" description="并行模式1对1，串行模式按顺序" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    58. 

  58. 		<config default="false" name="IsQdrCheckConflict" nameView="IsQdrCheckConflict" description="false-qdr schedule check empty qdr realtime,true-qdr scheduler uses time conflict" max="" min="" paramter="" tag="" unit="" type="Bool"  visible="true"/>
    59. 

  59. 		<config default="false" name="IsIgnoreTransporterConflict" nameView="IsIgnoreTransporterConflict" description="false-check transporter time conflict,true-ignore transporter time conflict" max="0" min="0" paramter="" tag="" unit="" type="Bool"  visible="true"/>
    60. 

  60. 		<config default="false" name="EnableTransporter1Priority" nameView="EnableTransporter1Priority" description="false-no transporter1 priority,true-transporter1 priority" max="0" min="0" paramter="" tag="" unit="" type="Bool"  visible="true"/>
    61. 

  61. 		<config default="false" name="IsShowLog" nameView="IsShowLog" description="false-no log show,true-show sheduler log" max="0" min="0" paramter="" tag="" unit="" type="Bool"  visible="true"/>
    62. 

  62. 	</configs>
    63. 

  63. 

  64. 	<!--EFEM-->
    65. 

  65. 	<configs name="EFEM" nameView="EFEM">
    66. 

  66. 		<config default="30" name="HomeTimeout" nameView="Home Timeout" description="EFEM初始化超时" max="300" min="1" paramter="" tag="" unit="s" type="Integer" />
    67. 

  67. 		<config default="60" name="MotionTimeout" nameView="Motion Timeout" description="motion time out" max="600" min="1" paramter="" tag="" unit="s" type="Integer" />
    68. 

  68. 		<config default="127.0.0.1:1102" name="IPAddress" nameView="IP Address" description="EFEM IP、端口设置;default 10.0.0.100:1102" max="" min="" paramter="" tag="" unit="" type="String" />
    69. 

  69. 		<config default="true" name="CheckSideDoorOnEAPMap" nameView="CheckSideDoorOnEAPMap" description="在自动跑货的时候检查侧门是否关闭" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
    70. 

  70. 		<config default="true" name="CheckCassetteDoorOnEAPMap" nameView="CheckCassetteDoorOnEAPMap" description="在自动跑货的时候检查EFEM正门是否关闭" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
    71. 

  71. 		
    72. 

  72. 		<config default="15" name="DefaultMoveSpeedInPercent" nameView="DefaultMoveSpeed InPercent" description="机械臂初始速度" max="100" min="1" paramter="" tag="" unit="" type="Integer" />
    73. 

  73. 		<config default="5" name="DefaultHomeSpeedInPercent" nameView="DefaultHomeSpeed InPercent" description="机械臂Home速度" max="100" min="1" paramter="" tag="" unit="" type="Integer" />
    74. 

  74. 

  75. 		<config default="2" name="EfemType" nameView="EFEM Type" description="EFEM类型，1=Future广川 2=SunWay 3=Brooks" max="300" min="1" paramter="" tag="" unit="" type="Integer" />
    76. 

  76. 		<config default="false" name="AutoUnlockAfterUnload" nameView="auto unlock after unload" description="是否自动解锁" max="" min="" paramter="" tag="" unit="" type="Bool" />
    77. 

  77. 	
    78. 

  78. 		<config default="false" name="IsLoadPort1Unable" nameView="Is LoadPort1 Unable" description="LP1是否无法使用" max="" min="" paramter="" tag="" unit="" type="Bool" />
    79. 

  79. 		<config default="false" name="IsLoadPort2Unable" nameView="Is LoadPort2 Unable" description="LP2是否无法使用" max="" min="" paramter="" tag="" unit="" type="Bool" />
    80. 

  80. 		<config default="false" name="IsLoadPort3Unable" nameView="Is LoadPort3 Unable" description="LP3是否无法使用" max="" min="" paramter="" tag="" unit="" type="Bool" />
    81. 

  81. 		<config default="false" name="IsLoadPort3Unable" nameView="Is LoadPort3 Unable" description="LP3是否无法使用" max="" min="" paramter="" tag="" unit="" type="Bool" />
    82. 

  82. 		<config default="-500" name="ChuckVacuumIsValid" nameView="ChuckVacuumIsValid" description="EFEM is invalid when vacuum level is less than this value" max="0" min="-1000" paramter="" tag="" unit="mmHg" type="Double" />
    83. 

  83. 		<config default="0" name="AlignerOffsetAngle" nameView="Aligner Offset Angle" description="Aligner Offset Angle" max="360" min="0" paramter="" tag="" unit="deg" type="Integer" />
    84. 

  84. 		
    85. 

  85. 		<configs name="LoadPort" nameView="LoadPort" >
    86. 

  86. 			<config default="30" name="MotionTimeout" nameView="Motion Timeout"  description="Motion Timeout" max="60" min="1" paramter="" tag="" unit="s" type="Integer" />
    87. 

  87. 			<config default="30" name="HomeTimeout" nameView="Home Timeout"  description="LoadPort初始化超时时间" max="60" min="1" paramter="" tag="" unit="s" type="Integer" />
    88. 

  88. 			<config default="25" name="SlotNumber" nameView="Slot number"  description="槽位个数" max="60" min="1" paramter="" tag="" unit="s" type="Integer" />
    89. 

  89. 			<config default="true" name="SlotFromBottom" nameView="Slot number from bottom" description="编号顺序从下往上，最下面的是1" max="" min="" paramter="" tag="" unit="" type="Bool" />
    90. 

  90. 

  91. 			<config default="false" name="EnableScanner" nameView="Enable Scanner Reader" description="是否打开扫码枪功能" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    92. 

  92. 

  93. 		</configs>
    94. 

  94. 		<configs name="LP1" nameView="LP1" visible="false">
    95. 

  95. 			<config default="50" name="Cassete200Station" nameView="Cassete200Station" description="Wafer 200 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
    96. 

  96. 			<config default="51" name="Cassete150Station" nameView="Cassete150Station" description="Wafer 150 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
    97. 

  97. 			<config default="52" name="Cassete100Station" nameView="Cassete100Station" description="Wafer 100 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
    98. 

  98. 		</configs>
    99. 

  99. 		<configs name="LP2" nameView="LP2" visible="false">
    100. 

  100. 			<config default="53" name="Cassete200Station" nameView="Cassete200Station" description="Wafer 200 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
    101. 

  101. 			<config default="54" name="Cassete150Station" nameView="Cassete150Station" description="Wafer 150 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
    102. 

  102. 			<config default="55" name="Cassete100Station" nameView="Cassete100Station" description="Wafer 100 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
    103. 

  103. 		</configs>
    104. 

  104. 		<configs name="LP3" nameView="LP3" visible="false">
    105. 

  105. 			<config default="56" name="Cassete200Station" nameView="Cassete200Station" description="Wafer 200 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
    106. 

  106. 			<config default="57" name="Cassete150Station" nameView="Cassete150Station" description="Wafer 150 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
    107. 

  107. 			<config default="58" name="Cassete100Station" nameView="Cassete100Station" description="Wafer 100 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
    108. 

  108. 		</configs>
    109. 

  109. 		<configs name="Dummy1" nameView="Dummy1" visible="false">
    110. 

  110. 			<config default="64" name="Cassete200Station" nameView="Cassete200Station" description="Wafer 200 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
    111. 

  111. 			<config default="65" name="Cassete150Station" nameView="Cassete150Station" description="Wafer 150 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
    112. 

  112. 			<config default="66" name="Cassete100Station" nameView="Cassete100Station" description="Wafer 100 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
    113. 

  113. 		</configs>
    114. 

  114. 		<configs name="Dummy2" nameView="Dummy2" visible="false">
    115. 

  115. 			<config default="62" name="Cassete200Station" nameView="Cassete200Station" description="Wafer 200 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
    116. 

  116. 			<config default="63" name="Cassete150Station" nameView="Cassete150Station" description="Wafer 150 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
    117. 

  117. 			<config default="64" name="Cassete100Station" nameView="Cassete100Station" description="Wafer 100 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
    118. 

  118. 		</configs>
    119. 

  119. 		<configs name="SRD1" nameView="SRD1" visible="false">
    120. 

  120. 			<config default="6" name="Cassete200Station" nameView="Cassete200Station" description="Wafer 200 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
    121. 

  121. 			<config default="6" name="Cassete150Station" nameView="Cassete150Station" description="Wafer 150 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
    122. 

  122. 			<config default="6" name="Cassete100Station" nameView="Cassete100Station" description="Wafer 100 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
    123. 

  123. 		</configs>
    124. 

  124. 		<configs name="SRD2" nameView="SRD2" visible="false">
    125. 

  125. 			<config default="7" name="Cassete200Station" nameView="Cassete200Station" description="Wafer 200 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
    126. 

  126. 			<config default="7" name="Cassete150Station" nameView="Cassete150Station" description="Wafer 150 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
    127. 

  127. 			<config default="7" name="Cassete100Station" nameView="Cassete100Station" description="Wafer 100 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
    128. 

  128. 		</configs>
    129. 

  129. 		<configs name="PUF1" nameView="PUF1" visible="false">
    130. 

  130. 			<config default="8" name="Cassete200Station" nameView="Cassete200Station" description="Wafer 200 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
    131. 

  131. 			<config default="8" name="Cassete150Station" nameView="Cassete150Station" description="Wafer 150 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
    132. 

  132. 			<config default="8" name="Cassete100Station" nameView="Cassete100Station" description="Wafer 100 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
    133. 

  133. 		</configs>
    134. 

  134. 		<configs name="Aligner1" nameView="Aligner1">
    135. 

  135. 			<config default="9" name="Cassete200Station" nameView="Cassete200Station" description="Wafer 200 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
    136. 

  136. 			<config default="9" name="Cassete150Station" nameView="Cassete150Station" description="Wafer 150 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
    137. 

  137. 			<config default="9" name="Cassete100Station" nameView="Cassete100Station" description="Wafer 150 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
    138. 

  138. 			<config default="86000" name="Aligner200Distance" nameView="Aligner200Distance" description="Wafer 200 aligner distance" max="9999999" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
    139. 

  139. 			<config default="61000" name="Aligner150Distance" nameView="Aligner150Distance" description="Wafer 150 aligner distance" max="9999999" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
    140. 

  140. 			<config default="31000" name="Aligner100Distance" nameView="Aligner100Distance" description="Wafer 100 aligner distance" max="9999999" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
    141. 

  141. 			<config default="0" name="AlignerPlatType" nameView="AlignerPlatType" description="aligner default plat type" max="10" min="0" paramter="" tag="" unit="" type="Integer" visible="true"/>
    142. 

  142. 		</configs>
    143. 

  143. 	</configs>
    144. 

  144. 	<configs name="Log" nameView="Log">
    145. 

  145. 		<config default="false" name="EnableLinmotLog" nameView="EnableLinmotLog" description="enable linmot log" max="" min="" paramter="" tag="" unit="" type="Bool" />
    146. 

  146. 		<config default="false" name="EnableResistivityLog" nameView="EnableResistivityLog" description="enable Resistivity log" max="" min="" paramter="" tag="" unit="" type="Bool" />
    147. 

  147. 		<config default="false" name="EnableTemperatureLog" nameView="EnableTemperatureLog" description="enable Temperature log" max="" min="" paramter="" tag="" unit="" type="Bool" />
    148. 

  148. 		<config default="false" name="EnablePowerSupplierLog" nameView="EnablePowerSupplierLog" description="enable Temperature log" max="" min="" paramter="" tag="" unit="" type="Bool" />
    149. 

  149. 		<config default="false" name="EnableBarcodeReaderLog" nameView="EnalbeBarcodeReaderlog" description="enable BarcodeReader log" max="" min="" paramter="" tag="" unit="" type="Bool" />
    150. 

  150. 	</configs>
    151. 

  151. 	<configs name="Facilities" nameView="Facilities">
    152. 

  152. 		<config default="300" name="SampleAutoDisableTime" nameView="SampleAutoDisableTime" description="Sample Auto Disable Time" max="600" min="1" paramter="" tag="" unit="s" type="Integer"/>
    153. 

  153. 		<configs name="CDA_1_Pressure" nameView="CDA_1_Pressure">
    154. 

  154. 			<config default="90.0" name="Error_Max" nameView="Error_Max" max="90.0" min="65.0" paramter="" tag="" unit="" type="Double"  description="This value defines the maximum pressure, in psi (pounds per square inch), above which this interlock will transition to an Error state."/>
    155. 

  155. 			<config default="80.0" name="Warning_Max" nameView="Warning_Max" max="90.0" min="65.0" paramter="" tag="" unit="" type="Double"  description="This value defines the maximum pressure, in psi (pounds per square inch), above which this interlock will transition to an Warning state.  Note corresponding Error_Min/Error_Max testing supersedes this test."/>
    156. 

  156. 			<config default="65.0" name="Error_Min" nameView="Error_Min" max="90.0" min="65.0" paramter="" tag="" unit="" type="Double"  description="This value defines the minimum pressure, in psi (pounds per square inch), below which this interlock will transition to an Error state."/>
    157. 

  157. 			<config default="68.0" name="Warning_Min" nameView="Warning_Min" max="90.0" min="65.0" paramter="" tag="" unit="" type="Double"  description="This value defines the minimum pressure, in psi (pounds per square inch), below which this interlock will transition to an Warning state.  Note corresponding Error_Min/Error_Max testing supersedes this test."/>
    158. 

  158. 		</configs>
    159. 

  159. 		<configs name="CDA_2_Pressure" nameView="CDA_2_Pressure">
    160. 

  160. 			<config default="90.0" name="Error_Max" nameView="Error_Max" max="90.0" min="65.0" paramter="" tag="" unit="" type="Double"  description="This value defines the maximum pressure, in psi (pounds per square inch), above which this interlock will transition to an Error state."/>
    161. 

  161. 			<config default="80.0" name="Warning_Max" nameView="Warning_Max" max="90.0" min="65.0" paramter="" tag="" unit="" type="Double"  description="This value defines the maximum pressure, in psi (pounds per square inch), above which this interlock will transition to an Warning state.  Note corresponding Error_Min/Error_Max testing supersedes this test."/>
    162. 

  162. 			<config default="65.0" name="Error_Min" nameView="Error_Min" max="90.0" min="65.0" paramter="" tag="" unit="" type="Double"  description="This value defines the minimum pressure, in psi (pounds per square inch), below which this interlock will transition to an Error state."/>
    163. 

  163. 			<config default="68.0" name="Warning_Min" nameView="Warning_Min" max="90.0" min="65.0" paramter="" tag="" unit="" type="Double"  description="This value defines the minimum pressure, in psi (pounds per square inch), below which this interlock will transition to an Warning state.  Note corresponding Error_Min/Error_Max testing supersedes this test."/>
    164. 

  164. 		</configs>
    165. 

  165. 		<configs name="N2_1A_Pressure" nameView="N2_1A_Pressure">
    166. 

  166. 			<config default="80.0" name="Error_Max" nameView="Error_Max" max="80.0" min="20.0" paramter="" tag="" unit="" type="Double"  description="This value defines the maximum pressure, in psi (pounds per square inch), above which this interlock will transition to an Error state."/>
    167. 

  167. 			<config default="75.0" name="Warning_Max" nameView="Warning_Max" max="80.0" min="20.0" paramter="" tag="" unit="" type="Double"  description="This value defines the maximum pressure, in psi (pounds per square inch), above which this interlock will transition to an Warning state.  Note corresponding Error_Min/Error_Max testing supersedes this test."/>
    168. 

  168. 			<config default="60.0" name="Error_Min" nameView="Error_Min" max="80.0" min="20.0" paramter="" tag="" unit="" type="Double"  description="This value defines the minimum pressure, in psi (pounds per square inch), below which this interlock will transition to an Error state."/>
    169. 

  169. 			<config default="62.0" name="Warning_Min" nameView="Warning_Min" max="80.0" min="20.0" paramter="" tag="" unit="" type="Double"  description="This value defines the minimum pressure, in psi (pounds per square inch), below which this interlock will transition to an Warning state.  Note corresponding Error_Min/Error_Max testing supersedes this test."/>
    170. 

  170. 		</configs>
    171. 

  171. 		<configs name="N2_1B_Pressure" nameView="N2_1B_Pressure">
    172. 

  172. 			<config default="29.0" name="Error_Max" nameView="Error_Max" max="80.0" min="20.0" paramter="" tag="" unit="" type="Double"  description="This value defines the maximum pressure, in psi (pounds per square inch), above which this interlock will transition to an Error state."/>
    173. 

  173. 			<config default="27.0" name="Warning_Max" nameView="Warning_Max" max="80.0" min="20.0" paramter="" tag="" unit="" type="Double"  description="This value defines the maximum pressure, in psi (pounds per square inch), above which this interlock will transition to an Warning state.  Note corresponding Error_Min/Error_Max testing supersedes this test."/>
    174. 

  174. 			<config default="20.0" name="Error_Min" nameView="Error_Min" max="80.0" min="20.0" paramter="" tag="" unit="" type="Double"  description="This value defines the minimum pressure, in psi (pounds per square inch), below which this interlock will transition to an Error state."/>
    175. 

  175. 			<config default="22.0" name="Warning_Min" nameView="Warning_Min" max="80.0" min="20.0" paramter="" tag="" unit="" type="Double"  description="This value defines the minimum pressure, in psi (pounds per square inch), below which this interlock will transition to an Warning state.  Note corresponding Error_Min/Error_Max testing supersedes this test."/>
    176. 

  176. 		</configs>
    177. 

  177. 		<configs name="N2_2A_Pressure" nameView="N2_1A_Pressure">
    178. 

  178. 			<config default="80.0" name="Error_Max" nameView="Error_Max" max="80.0" min="20.0" paramter="" tag="" unit="" type="Double"  description="This value defines the maximum pressure, in psi (pounds per square inch), above which this interlock will transition to an Error state."/>
    179. 

  179. 			<config default="75.0" name="Warning_Max" nameView="Warning_Max" max="80.0" min="20.0" paramter="" tag="" unit="" type="Double"  description="This value defines the maximum pressure, in psi (pounds per square inch), above which this interlock will transition to an Warning state.  Note corresponding Error_Min/Error_Max testing supersedes this test."/>
    180. 

  180. 			<config default="60.0" name="Error_Min" nameView="Error_Min" max="80.0" min="20.0" paramter="" tag="" unit="" type="Double"  description="This value defines the minimum pressure, in psi (pounds per square inch), below which this interlock will transition to an Error state."/>
    181. 

  181. 			<config default="62.0" name="Warning_Min" nameView="Warning_Min" max="80.0" min="20.0" paramter="" tag="" unit="" type="Double"  description="This value defines the minimum pressure, in psi (pounds per square inch), below which this interlock will transition to an Warning state.  Note corresponding Error_Min/Error_Max testing supersedes this test."/>
    182. 

  182. 		</configs>
    183. 

  183. 		<configs name="N2_2B_Pressure" nameView="N2_1B_Pressure">
    184. 

  184. 			<config default="29.0" name="Error_Max" nameView="Error_Max" max="80.0" min="20.0" paramter="" tag="" unit="" type="Double"  description="This value defines the maximum pressure, in psi (pounds per square inch), above which this interlock will transition to an Error state."/>
    185. 

  185. 			<config default="27.0" name="Warning_Max" nameView="Warning_Max" max="80.0" min="20.0" paramter="" tag="" unit="" type="Double"  description="This value defines the maximum pressure, in psi (pounds per square inch), above which this interlock will transition to an Warning state.  Note corresponding Error_Min/Error_Max testing supersedes this test."/>
    186. 

  186. 			<config default="20.0" name="Error_Min" nameView="Error_Min" max="80.0" min="20.0" paramter="" tag="" unit="" type="Double"  description="This value defines the minimum pressure, in psi (pounds per square inch), below which this interlock will transition to an Error state."/>
    187. 

  187. 			<config default="22.0" name="Warning_Min" nameView="Warning_Min" max="80.0" min="20.0" paramter="" tag="" unit="" type="Double"  description="This value defines the minimum pressure, in psi (pounds per square inch), below which this interlock will transition to an Warning state.  Note corresponding Error_Min/Error_Max testing supersedes this test."/>
    188. 

  188. 		</configs>
    189. 

  189. 		<configs name="DIWater_Pressure" nameView="DIWater_Pressure">
    190. 

  190. 			<config default="48.0" name="Error_Max" nameView="Error_Max" max="60.0" min="10.0" paramter="" tag="" unit="" type="Double"  description="This value defines the maximum pressure, in psi (pounds per square inch), above which this interlock will transition to an Error state."/>
    191. 

  191. 			<config default="45.0" name="Warning_Max" nameView="Warning_Max" max="60.0" min="10.0" paramter="" tag="" unit="" type="Double"  description="This value defines the maximum pressure, in psi (pounds per square inch), above which this interlock will transition to an Warning state.  Note corresponding Error_Min/Error_Max testing supersedes this test."/>
    192. 

  192. 			<config default="25.0" name="Error_Min" nameView="Error_Min" max="60.0" min="10.0" paramter="" tag="" unit="" type="Double"  description="This value defines the minimum pressure, in psi (pounds per square inch), below which this interlock will transition to an Error state."/>
    193. 

  193. 			<config default="30.0" name="Warning_Min" nameView="Warning_Min" max="60.0" min="10.0" paramter="" tag="" unit="" type="Double"  description="This value defines the minimum pressure, in psi (pounds per square inch), below which this interlock will transition to an Warning state.  Note corresponding Error_Min/Error_Max testing supersedes this test."/>
    194. 

  194. 		</configs>
    195. 

  195. 		<configs name="HouseChilledWater_Flow" nameView="HouseChilledWater_Flow">
    196. 

  196. 			<config default="30.0" name="Error_Max" nameView="Error_Max" max="30.0" min="10.0" paramter="" tag="" unit="" type="Double"  description="This value defines the maximum pressure, in psi (pounds per square inch), above which this interlock will transition to an Error state."/>
    197. 

  197. 			<config default="25.0" name="Warning_Max" nameView="Warning_Max" max="30.0" min="10.0" paramter="" tag="" unit="" type="Double"  description="This value defines the maximum pressure, in psi (pounds per square inch), above which this interlock will transition to an Warning state.  Note corresponding Error_Min/Error_Max testing supersedes this test."/>
    198. 

  198. 			<config default="10.0" name="Error_Min" nameView="Error_Min" max="30.0" min="5.0" paramter="" tag="" unit="" type="Double"  description="This value defines the minimum pressure, in psi (pounds per square inch), below which this interlock will transition to an Error state."/>
    199. 

  199. 			<config default="15.0" name="Warning_Min" nameView="Warning_Min" max="30.0" min="5.0" paramter="" tag="" unit="" type="Double"  description="This value defines the minimum pressure, in psi (pounds per square inch), below which this interlock will transition to an Warning state.  Note corresponding Error_Min/Error_Max testing supersedes this test."/>
    200. 

  200. 		</configs>
    201. 

  201. 		<configs name="CDA_External_Pressure" nameView="CDA_External_Pressure">
    202. 

  202. 			<config default="85.0" name="Error_Max" nameView="Error_Max" max="85.0" min="65.0" paramter="" tag="" unit="" type="Double"  description="This value defines the maximum pressure, in psi (pounds per square inch), above which this interlock will transition to an Error state."/>
    203. 

  203. 			<config default="80.0" name="Warning_Max" nameView="Warning_Max" max="85.0" min="65.0" paramter="" tag="" unit="" type="Double"  description="This value defines the maximum pressure, in psi (pounds per square inch), above which this interlock will transition to an Warning state.  Note corresponding Error_Min/Error_Max testing supersedes this test."/>
    204. 

  204. 			<config default="65.0" name="Error_Min" nameView="Error_Min" max="85.0" min="65.0" paramter="" tag="" unit="" type="Double"  description="This value defines the minimum pressure, in psi (pounds per square inch), below which this interlock will transition to an Error state."/>
    205. 

  205. 			<config default="70.0" name="Warning_Min" nameView="Error_Max" max="85.0" min="65.0" paramter="" tag="" unit="" type="Double"  description="This value defines the minimum pressure, in psi (pounds per square inch), below which this interlock will transition to an Warning state.  Note corresponding Error_Min/Error_Max testing supersedes this test."/>
    206. 

  206. 		</configs>
    207. 

  207. 		<configs name="Vacuum_Pressure" nameView="Vacuum_Pressure">
    208. 

  208. 			<config default="-600.0" name="Error_Max" nameView="Error_Max" max="-600.0" min="-800.0" paramter="" tag="" unit="" type="Double"  description="This value defines the maximum pressure, in psi (pounds per square inch), above which this interlock will transition to an Error state."/>
    209. 

  209. 			<config default="-625.0" name="Warning_Max" nameView="Warning_Max" max="-600.0" min="-800.0" paramter="" tag="" unit="" type="Double"  description="This value defines the maximum pressure, in psi (pounds per square inch), above which this interlock will transition to an Warning state.  Note corresponding Error_Min/Error_Max testing supersedes this test."/>
    210. 

  210. 			<config default="-800.0" name="Error_Min" nameView="Error_Min" max="-600.0" min="-800.0" paramter="" tag="" unit="" type="Double"  description="This value defines the minimum pressure, in psi (pounds per square inch), below which this interlock will transition to an Error state."/>
    211. 

  211. 			<config default="-760.0" name="Warning_Min" nameView="Warning_Min" max="-600.0" min="-800.0" paramter="" tag="" unit="" type="Double"  description="This value defines the minimum pressure, in psi (pounds per square inch), below which this interlock will transition to an Warning state.  Note corresponding Error_Min/Error_Max testing supersedes this test."/>
    212. 

  212. 		</configs>
    213. 

  213. 		<configs name="Exhaust_Pressure" nameView="Exhaust_Pressure">
    214. 

  214. 			<config default="2.0" name="Error_Max" nameView="Error_Max" max="2.0" min="0.5" paramter="" tag="" unit="" type="Double"  description="This value defines the maximum pressure, in psi (pounds per square inch), above which this interlock will transition to an Error state."/>
    215. 

  215. 			<config default="1.8" name="Warning_Max" nameView="Warning_Max" max="2.0" min="0.5" paramter="" tag="" unit="" type="Double"  description="This value defines the maximum pressure, in psi (pounds per square inch), above which this interlock will transition to an Warning state.  Note corresponding Error_Min/Error_Max testing supersedes this test."/>
    216. 

  216. 			<config default="0.5" name="Error_Min" nameView="Error_Min" max="2.0" min="0" paramter="" tag="" unit="" type="Double"  description="This value defines the minimum pressure, in psi (pounds per square inch), below which this interlock will transition to an Error state."/>
    217. 

  217. 			<config default="0.7" name="Warning_Min" nameView="Warning_Min" max="2.0" min="0" paramter="" tag="" unit="" type="Double"  description="This value defines the minimum pressure, in psi (pounds per square inch), below which this interlock will transition to an Warning state.  Note corresponding Error_Min/Error_Max testing supersedes this test."/>
    218. 

  218. 		</configs>
    219. 

  219. 	</configs>
    220. 

  220. 	<configs name="SRD">
    221. 

  221. 		<config default="-500" name="ChuckVacuumOnLimit" nameView="ChuckVacuumOnLimit" description="Chuck vacuum is ON if vacuum pressure is less than this value." max="0" min="-760" paramter="" tag="" unit="s" type="Integer"/>
    222. 

  222. 		<config default="-100" name="ChuckVacuumOffLimit" nameView="ChuckVacuumOffLimit" description="Chuck vacuum is OFF if vacuum pressure is greater than this value." max="100" min="-760" paramter="" tag="" unit="s" type="Integer"/>
    223. 

  223. 		<config default="20" name="SRDRotationPlusSecond" nameView="SRDRotationPlusSecond" description="SRD Rotation motion surplus second to complete motion" max="100" min="-760" paramter="" tag="" unit="s" type="Integer"/>
    224. 

  224. 		<config default="false" name="N2Enabled" nameView="N2Enabled" description="N2 Enabled" max="" min="" paramter="" tag="" unit="s" type="Bool"/>
    225. 

  225. 		<config default="50" name="WaferPresenceCheckAccelDecelPercentage" nameView="WaferPresenceCheckAccelDecelPercentage" description="Accel/Decel to apply to the wafer presence check rotation move." max="100" min="1" paramter="" tag="" unit="" type="Integer"/>
    226. 

  226. 		<config default="25" name="WaferPresenceCheckSpeedInRPMs" nameView="WaferPresenceCheckSpeedInRPMs" description="Wafer check rotation speed in rpms." max="25" min="1" paramter="" tag="" unit="" type="Integer"/>
    227. 

  227. 		<config default="25" name="WaferPresenceCheckDistanceInDegrees" nameView="WaferPresenceCheckDistanceInDegrees" description="WaferPresenceCheckDistanceInDegrees" max="3600" min="0" paramter="" tag="" unit="deg" type="Integer"/>
    228. 

  228. 		<config default="true" name="SRD1EnablePresenceCheckvalue" nameView="SRD1EnablePresenceCheckvalue" description="SRD1 Enable Presence Test" max="" min="" paramter="" tag="" unit="" type="Bool"/>
    229. 

  229. 		<config default="true" name="SRD2EnablePresenceCheckvalue" nameView="SRD2EnablePresenceCheckvalue" description="SRD2 Enable Presence Test" max="" min="" paramter="" tag="" unit="" type="Bool"/>
    230. 

  230. 	</configs>
    231. 

  231. 	<configs name="VPWMain">
    232. 

  232. 		<config default="5.1" name="PumpKp" nameView="PumpKp" description="PumpKp" max="1000" min="0" paramter="" tag="" unit="s" type="Double"/>
    233. 

  233. 		<config default="0" name="PumpKi" nameView="PumpKi" description="PumpKi" max="1000" min="0" paramter="" tag="" unit="s" type="Double"/>
    234. 

  234. 		<config default="0" name="PumpKd" nameView="PumpKd" description="PumpKd" max="1000" min="0" paramter="" tag="" unit="s" type="Double"/>
    235. 

  235. 		<config default="42" name="PressureTarget" nameView="PressureTarget" description="PressureTarget" max="100" min="0" paramter="" tag="" unit="s" type="Double"/>
    236. 

  236. 		<config default="7300" name="MaxPumpSpeed" nameView="MaxPumpSpeed" description="Max Pump Speed" max="32768" min="0" paramter="" tag="" unit="" type="Integer"/>
    237. 

  237. 		<config default="300" name="MinPumpSpeed" nameView="MinPumpSpeed" description="Min Pump Speed" max="32768" min="0" paramter="" tag="" unit="" type="Integer"/>
    238. 

  238. 		<config default="0.5" name="PrewetTargetLimit" nameView="PrewetTargetLimit" description="Prewet pressure in PrewetTarget Limit,device stop adjust speed" max="60" min="0" paramter="" tag="" unit="" type="Double"/>
    239. 

  239. 		<configs name="PumpPressure" nameView="PumpPressure">
    240. 

  240. 			<config default="50.0" name="Error_Max" nameView="Error_Max" max="100.0" min="0" paramter="" tag="" unit="" type="Double"  description="This value defines the maximum flow, in liters per minute, above which this interlock will transition to an Error state."/>
    241. 

  241. 			<config default="40.0" name="Warning_Max" nameView="Warning_Max" max="100.0" min="0" paramter="" tag="" unit="" type="Double"  description="This value defines the maximum flow, in liters per minute, above which this interlock will transition to an Warning state.  Note corresponding Error_Min/Error_Max testing supersedes this test."/>
    242. 

  242. 			<config default="20.0" name="Error_Min" nameView="Error_Min" max="100.0" min="0" paramter="" tag="" unit="" type="Double"  description="This value defines the minimum flow, in liters per minute, below which this interlock will transition to an Error state."/>
    243. 

  243. 			<config default="30.0" name="Warning_Min" nameView="Warning_Min" max="100.0" min="0" paramter="" tag="" unit="" type="Double"  description="This value defines the minimum flow, in liters per minute, below which this interlock will transition to an Warning state.  Note corresponding Error_Min/Error_Max testing supersedes this test."/>
    244. 

  244. 		</configs>
    245. 

  245. 	</configs>
    246. 

  246. 	<configs name="Linmot" nameView="Linmot">
    247. 

  247. 		<config default="5000" name="LinmotHoldoffMilliseconds" nameView="LinmotHoldoffMilliseconds" description="Linmot Hold off Milliseconds" max="10000" min="1" paramter="" tag="" unit="ms" type="Integer"></config>
    248. 

  248. 	</configs>
    249. 

  249. </root>
    250.