PunkHPX8/PunkHPX8_RT/Config/Layout/ToolLayoutConfiguration.xml

<?xml version="1.0" encoding="utf-8"?>
<ToolLayoutXmlRoot xmlns:i="http://www.w3.org/2001/XMLSchema-instance">
	<Items>
		<!-- PLATING POWER SUPPLIES -->
		<Item i:type="PlatingPowerSupply">
			<Installed>true</Installed>
			<PowerSupplyID>1</PowerSupplyID>
			<Count>1</Count>
			<SubType>Lumina1ChannelCurrent</SubType>
		</Item>
		<Item i:type="PlatingPowerSupply">
			<Installed>true</Installed>
			<PowerSupplyID>2</PowerSupplyID>
			<Count>1</Count>
			<SubType>Lumina1ChannelCurrent</SubType>
		</Item>
		<Item i:type="PlatingPowerSupply">
			<Installed>true</Installed>
			<PowerSupplyID>3</PowerSupplyID>
			<Count>1</Count>
			<SubType>Lumina1ChannelCurrent</SubType>
		</Item>
		<Item i:type="PlatingPowerSupply">
			<Installed>true</Installed>
			<PowerSupplyID>4</PowerSupplyID>
			<Count>1</Count>
			<SubType>Lumina1ChannelCurrent</SubType>
		</Item>
		<Item i:type="PlatingPowerSupply">
			<Installed>true</Installed>
			<PowerSupplyID>5</PowerSupplyID>
			<Count>1</Count>
			<SubType>Lumina1ChannelCurrent</SubType>
		</Item>
		<Item i:type="PlatingPowerSupply">
			<Installed>true</Installed>
			<PowerSupplyID>6</PowerSupplyID>
			<Count>1</Count>
			<SubType>Lumina1ChannelCurrent</SubType>
		</Item>
		<Item i:type="PlatingPowerSupply">
			<Installed>true</Installed>
			<PowerSupplyID>7</PowerSupplyID>
			<Count>1</Count>
			<SubType>Lumina1ChannelCurrent</SubType>
		</Item>
		<Item i:type="PlatingPowerSupply">
			<Installed>true</Installed>
			<PowerSupplyID>8</PowerSupplyID>
			<Count>1</Count>
			<SubType>Lumina1ChannelCurrent</SubType>
		</Item>
		<Item i:type="PlatingPowerSupply">
			<Installed>true</Installed>
			<PowerSupplyID>9</PowerSupplyID>
			<Count>1</Count>
			<SubType>Lumina1ChannelCurrent</SubType>
		</Item>
		<Item i:type="PlatingPowerSupply">
			<Installed>true</Installed>
			<PowerSupplyID>10</PowerSupplyID>
			<Count>1</Count>
			<SubType>Lumina1ChannelCurrent</SubType>
		</Item>
		<Item i:type="PlatingPowerSupply">
			<Installed>true</Installed>
			<PowerSupplyID>11</PowerSupplyID>
			<Count>1</Count>
			<SubType>Lumina1ChannelCurrent</SubType>
		</Item>
		<Item i:type="PlatingPowerSupply">
			<Installed>true</Installed>
			<PowerSupplyID>12</PowerSupplyID>
			<Count>1</Count>
			<SubType>Lumina1ChannelCurrent</SubType>
		</Item>
		<Item i:type="PlatingPowerSupply">
			<Installed>true</Installed>
			<PowerSupplyID>13</PowerSupplyID>
			<Count>1</Count>
			<SubType>Lumina1ChannelCurrent</SubType>
		</Item>
		
		<Item i:type="PlatingPowerSupply">
			<Installed>true</Installed>
			<PowerSupplyID>14</PowerSupplyID>
			<Count>1</Count>
			<SubType>Lumina2ChannelCurrent</SubType>
		</Item>
		

		<!-- CMM POWER SUPPLIES -->

		<Item i:type="CMMPowerSupply">
			<Installed>true</Installed>
			<PowerSupplyID>1</PowerSupplyID>
			<Count>1</Count>
			<SubType>Lumina1ChannelCurrent</SubType>
		</Item>

		<!-- UPS -->

		<Item i:type="UPS">
			<Installed>false</Installed>
			<SubType>Eaton5PX</SubType>
		</Item>
		<!-- HEDs -->

		<Item i:type="TempControl">
			<Installed>true</Installed>
			<Count>4</Count>
			<TCID>1</TCID>
			<SubType>SMC</SubType>
		</Item>

		<!-- RESISTIVITY PROBES -->

		<Item i:type="ResistivityProbe">
			<Installed>true</Installed>
			<Count>4</Count>
			<ResistivityProbeID>1</ResistivityProbeID>
			<SubType>STDThornton</SubType>
		</Item>

		<Item i:type="ResistivityProbe">
			<Installed>false</Installed>
			<Count>1</Count>
			<ResistivityProbeID>2</ResistivityProbeID>
			<SubType>STDThornton</SubType>
		</Item>
		<!-- FFU -->

		<Item i:type="FFU">
			<Installed>true</Installed>
			<FFUID>1</FFUID>
			<SubType>FFUType2</SubType>
		</Item>

		<!--VPW-->
		<Item i:type="VpwMain">
			<Installed>true</Installed>
			<CellID>20</CellID>
			<NominalGantryPositionInMilliMeters>1135</NominalGantryPositionInMilliMeters>
			<VpwMainID>1</VpwMainID>
			<SubType>Scanning</SubType>
			<Cells>
				<Item i:type="VpwCell">
					<Installed>true</Installed>
					<CellID>14</CellID>
					<NominalGantryPositionInMilliMeters>2219</NominalGantryPositionInMilliMeters>
					<VpwCellID>1</VpwCellID>
					<SubType>Stratus</SubType>
				</Item>
				<Item i:type="VpwCell">
					<Installed>true</Installed>
					<CellID>15</CellID>
					<NominalGantryPositionInMilliMeters>2219</NominalGantryPositionInMilliMeters>
					<VpwCellID>2</VpwCellID>
					<SubType>Stratus</SubType>
				</Item>
			</Cells>
		</Item>
		
		<!-- PREWET -->

		<Item i:type="Prewet">
			<Installed>false</Installed>
			<CellID>20</CellID>
			<NominalGantryPositionInMilliMeters>1135</NominalGantryPositionInMilliMeters>
			<PrewetID>1</PrewetID>
			<SubType>Scanning</SubType>
			<LinmotID>LNM3-1</LinmotID>
		</Item>

		<!-- DRYERs -->

		<Item i:type="Dryer">
			<Installed>false</Installed>
			<CellID>21</CellID>
			<NominalGantryPositionInMilliMeters>957</NominalGantryPositionInMilliMeters>
			<DryerID>1</DryerID>
			<SubType>HVDHSIndependent</SubType>
		</Item>
		<Item i:type="Dryer">
			<Installed>false</Installed>
			<CellID>22</CellID>
			<NominalGantryPositionInMilliMeters>873</NominalGantryPositionInMilliMeters>
			<DryerID>2</DryerID>
			<SubType>HVDHSIndependent</SubType>
		</Item>
		<!-- SRDs -->

		<Item i:type="SRD">
			<Installed>true</Installed>
			<PermittedWaferSizeInMM>300</PermittedWaferSizeInMM>
			<ResourceID>SRD1</ResourceID>
			<Type>SRD</Type>
			<SRDID>1</SRDID>
			<SubType>VacuumChuckWithFan</SubType>
		</Item>
		<Item i:type="SRD">
			<Installed>true</Installed>
			<PermittedWaferSizeInMM>300</PermittedWaferSizeInMM>
			<ResourceID>SRD2</ResourceID>
			<Type>SRD</Type>
			<SRDID>2</SRDID>
			<SubType>VacuumChuckWithFan</SubType>
		</Item>

		<!-- SYSTEM FACILITIES -->

		<Item i:type="SystemFacilities">
			<Installed>true</Installed>
			<Type>SystemFacilities</Type>
			<ExternalPumpBox>false</ExternalPumpBox>	  	 
			<SampleStation1Installed>true</SampleStation1Installed>
			<SampleStation2Installed>false</SampleStation2Installed>
			<SlipstreamInterfaceInstalled>true</SlipstreamInterfaceInstalled>
			<RecirculationFlowPressure>false</RecirculationFlowPressure>
		</Item>

		<!-- SAFETY -->

		<Item i:type="SystemSafety">
			<Installed>true</Installed>
			<Type>SystemSafety</Type>
			<ReservoirOverflowSensor>true</ReservoirOverflowSensor>
		</Item>

		<!-- DUMMYs -->

		<Item i:type="DummyCassette">
			<Installed>true</Installed>
			<PermittedWaferSizeInMM>200</PermittedWaferSizeInMM>
			<ResourceID>Dummy1</ResourceID>
			<Type>Dummy</Type>
			<MaxNumberOfSlots>25</MaxNumberOfSlots>
			<DummyCassetteID>1</DummyCassetteID>
		</Item>
		<Item i:type="DummyCassette">
			<Installed>true</Installed>
			<PermittedWaferSizeInMM>200</PermittedWaferSizeInMM>
			<ResourceID>Dummy1</ResourceID>
			<Type>Dummy</Type>
			<MaxNumberOfSlots>25</MaxNumberOfSlots>
			<DummyCassetteID>2</DummyCassetteID>
		</Item>

	</Items>

</ToolLayoutXmlRoot>