PunkHPX8/PunkHPX8_RT/Devices/EFEM/SunWayRobot.cs

using System;
using System.Collections.Generic;
using System.Linq;
using System.Text;
using System.Threading.Tasks;
using System.Collections;
using PunkHPX8_Core;
using PunkHPX8_RT.Modules;
using MECF.Framework.Common.CommonData;
using MECF.Framework.Common.Equipment;
using MECF.Framework.Common.SubstrateTrackings;
using Aitex.Sorter.Common;
using Aitex.Core.Common;
using Aitex.Core.RT.SCCore;
using Aitex.Core.RT.Log;
using Aitex.Core.Util;
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robot;
using PunkHPX8_RT.Devices.YASKAWA;
using System.Collections.Concurrent;
using System.Diagnostics;
using System.Data.SqlTypes;
using System.Windows.Media.Media3D;
using System.ComponentModel;
using MECF.Framework.Common.Beckhoff.Station;
using System.Runtime.Remoting.Contexts;
using System.Windows.Markup;
using PunkHPX8_RT.Modules.LPs;
using MECF.Framework.Common.ToolLayout;

namespace PunkHPX8_RT.Devices.EFEM
{
    public class SunWayRobot : EfemBase
    {
        #region 常量
        private const string NONE = "None";
        #endregion
        private RState _status;
        private bool _IsHomed;
        private bool _bIsUnloadClamp;
        private RobotMoveInfo _robotMoveInfo = new RobotMoveInfo();
        private readonly SignalTower _signalT = new SignalTower();
        private readonly AsyncSocket _socket;
        private EfemMessage _currentMessage;
        private string _error;
        private bool _LiftIsUp = false;
        private bool _LiftIsDown = false;
        private R_TRIG _busyTrig = new R_TRIG();
        private Stopwatch _busyWatch = new Stopwatch();
        private Dictionary<string, int> _moduleStationNumberDictionary = new Dictionary<string, int>();

        private Dictionary<Hand, string> _armString = new Dictionary<Hand, string>
        {
            [Hand.Blade1] = "A",
            [Hand.Blade2] = "B"
        };

        
        public override RState Status
        {
            get
            {
                _busyTrig.CLK = _status == RState.Running;
                if (_busyTrig.Q)
                {
                    _busyWatch.Restart();
                }
                else if (_busyTrig.M)
                {
                    int timeOut = 5000;
                    if (
                        _currentMessage.Operation == EfemOperation.Home ||
                        _currentMessage.Operation == EfemOperation.Map ||
                        _currentMessage.Operation == EfemOperation.Pick || 
                        _currentMessage.Operation == EfemOperation.Place)
                    {
                        timeOut = 30000;
                    }
                    if (_busyWatch.ElapsedMilliseconds > timeOut)
                    {
                        _busyWatch.Stop();
                        _status = RState.Timeout;
                    }
                }

                return _status;
            }
        }
        public override bool IsHomed { get { return _IsHomed; } }
        public override RobotMoveInfo TMRobotMoveInfo { get { return _robotMoveInfo; } }


        public override bool LiftIsUp { get { return _LiftIsUp; } }
        public override bool LiftIsDown { get { return _LiftIsDown; } }

        private BlockingCollection<RobotAnimationData> blockingCollection = new BlockingCollection<RobotAnimationData>();

        private string _address = "";

        public override bool IsResumeRDYReceived { get; set; }
        public override bool IsPauseRDYReceived { get; set; }
        public override bool IsActionRDYReceived { get; set; }

        public SunWayRobot()
        {
            _socket = new AsyncSocket("","",DataType.Ascii,true);
            try
            {
                _address = SC.GetStringValue($"EFEM.IPAddress");
                _socket.Connect(_address);
                _socket.OnConnect += Socket_OnConnect;
                _socket.OnDataChanged += OnReceiveMessage;
                _socket.OnErrorHappened += OnErrorHappen;
            }
            catch(Exception ex)
            {
                LOG.WriteLog(eEvent.ERR_EFEM_COMMON_FAILED, "EFEM", ex.Message);
            }

            _status = RState.Init;
            _IsHomed = false;
            _busyTrig.RST = true;


            InitializeModuleStation(ModuleName.LP1);
            InitializeModuleStation(ModuleName.LP2);
            InitializeModuleStation(ModuleName.LP3);
            InitializeModuleStation(ModuleName.Dummy1);
            InitializeModuleStation(ModuleName.Dummy2);
            InitializeModuleStation(ModuleName.Aligner1);
            InitializeModuleStation(ModuleName.SRD1);
            InitializeModuleStation(ModuleName.SRD2);
            InitializeModuleStation(ModuleName.VPW1);
            InitializeModuleStation(ModuleName.VPW2);
            InitializeModuleStation(ModuleName.PlatingCell1);
            InitializeModuleStation(ModuleName.PlatingCell2);
            InitializeModuleStation(ModuleName.PlatingCell3);
            InitializeModuleStation(ModuleName.PlatingCell4);
 

            CarrierManager.Instance.SubscribeLocation(ModuleName.LP1.ToString(), 1);
            CarrierManager.Instance.SubscribeLocation(ModuleName.LP2.ToString(), 1);
            CarrierManager.Instance.SubscribeLocation(ModuleName.LP3.ToString(), 1);

            WaferManager.Instance.SubscribeLocation(ModuleName.EfemRobot, 2);
            WaferManager.Instance.SubscribeLocation(ModuleName.Aligner1, 1);
            WaferManager.Instance.SubscribeLocation(ModuleName.LP1, SC.GetValue<int>("EFEM.LoadPort.SlotNumber"));
            WaferManager.Instance.SubscribeLocation(ModuleName.LP2, SC.GetValue<int>("EFEM.LoadPort.SlotNumber"));
            WaferManager.Instance.SubscribeLocation(ModuleName.LP3, SC.GetValue<int>("EFEM.LoadPort.SlotNumber"));
            Task.Run(() =>
            {
                foreach (var data in blockingCollection.GetConsumingEnumerable())
                {
                    _robotMoveInfo.Action = data.Action;
                    _robotMoveInfo.ArmTarget = data.Hand == Hand.Blade1 ? RobotArm.ArmA : (data.Hand == Hand.Both ? RobotArm.Both : RobotArm.ArmB);
                    _robotMoveInfo.BladeTarget = $"{_robotMoveInfo.ArmTarget}.{data.Target}";
                    System.Threading.Thread.Sleep(600);
                }
            });
        }
        /// <summary>
        /// 初始化Module Station
        /// </summary>
        /// <param name="module"></param>
        private void InitializeModuleStation(ModuleName module)
        {
            int cassete200Station = SC.GetValue<int>($"EFEM.{module}.Cassete200Station");
            _moduleStationNumberDictionary[$"{module}_200"] = cassete200Station;
            int cassete150Station = SC.GetValue<int>($"EFEM.{module}.Cassete150Station");
            _moduleStationNumberDictionary[$"{module}_150"] = cassete150Station;
            int cassete100Station = SC.GetValue<int>($"EFEM.{module}.Cassete100Station");
            _moduleStationNumberDictionary[$"{module}_100"]=cassete100Station;
        }
        private void Socket_OnConnect()
        {
            Singleton<RouteManager>.Instance.EFEM.PostMsg(EfemEntity.MSG.CommReady);
            LOG.WriteLog(eEvent.EV_EFEM_COMMON_INFO, Module.ToString(), $"connect {_address} success");
        }
        private void OnErrorHappen(ErrorEventArgs args)
        {
            _status = RState.Failed;
            if (_error != args.Reason)
            {
                _error = args.Reason;
                LOG.Write(eEvent.ERR_EFEM_COMMON_FAILED, Module, $"{Module} {_error}");
            }
            Singleton<RouteManager>.Instance.EFEM.PostMsg(EfemEntity.MSG.Error);
        }
        public override void Monitor()
        {
        }
        public override void Terminate()
        {

        }
        public override void Reset()
        {
            _status = RState.End;
            _currentMessage = null;
        }
        public override void SetOnline(bool online)
        {

        }
        public override void SetOnline(ModuleName mod, bool online)
        {

        }

        public override void SetBusy(ModuleName mod, bool online)
        {
            _status = RState.Running;
        }

        public override bool HomeAll()
        {
            if (_status == RState.Running&&_currentMessage!=null)
            {
                LOG.WriteLog(eEvent.ERR_EFEM_COMMON_FAILED, Module.ToString(), $"Current Msg {_currentMessage.Operation} is Running,cannot home All");
                return false;
            }
            //判断socket是否链接
            if (!_socket.IsConnected) 
            {
                LOG.WriteLog(eEvent.ERROR_EFEM_COMMUNICATION, Module.ToString(), $"Socket is not Conntected");
                return false ;
            }
            _status = RState.Running;
            string data = "HOME ALL\r";
            _currentMessage =new EfemMessage(){
                Operation= EfemOperation.Home,
                Module=ModuleName.EFEM
            };
            //SetRobotMovingInfo(RobotAction.Homing, Hand.Both, ModuleName.EFEM);
            return WriteCommand(data);
        }

        public override bool Home(ModuleName mod)
        {
            if (_status == RState.Running && _currentMessage!= null)
            {
                LOG.WriteLog(eEvent.ERR_EFEM_COMMON_FAILED, Module.ToString(), $"Current Msg {_currentMessage.Operation} is Running,cannot home {mod}");
                return false;
            }
            if (mod != ModuleName.Aligner1&&mod!=ModuleName.EfemRobot)
            {
                LOG.WriteLog(eEvent.ERR_EFEM_COMMON_FAILED, Module.ToString(), $"{mod} can not support home method");
                return false;
            }
            //判断socket是否链接
            if (!_socket.IsConnected)
            {
                LOG.WriteLog(eEvent.ERROR_EFEM_COMMUNICATION, Module.ToString(), $"Socket is not Conntected");
                return false;
            }
            if(mod == ModuleName.EfemRobot) SetRobotMovingInfo(RobotAction.Homing, Hand.Blade1, ModuleName.EfemRobot);
            _status = RState.Running;
            string cmd = "Home ALL\r";
            if (mod == ModuleName.Aligner1)
            {
                cmd = "ALIGNER HOME\r";
            }
            _currentMessage = new EfemMessage()
            {
                Operation = EfemOperation.Home,
                Module = ModuleName.Aligner1
            };
            return WriteCommand(cmd);
        }

        public override bool OriginalSearch(ModuleName mod)
        {
            return true;
        }

        public override bool CheckWaferPresence()
        {
            if (_status == RState.Running && _currentMessage != null)
            {
                LOG.WriteLog(eEvent.ERR_EFEM_COMMON_FAILED, Module.ToString(), $"Current Msg {_currentMessage.Operation} is Running,cannot check wafer");
                return false;
            }

            //判断socket是否链接
            if (!_socket.IsConnected)
            {
                LOG.WriteLog(eEvent.ERROR_EFEM_COMMUNICATION, Module.ToString(), $"Socket is not Conntected");
                return false;
            }
            if (!CheckEfemStatus())
                return false;

            _currentMessage = new EfemMessage()
            {
                Operation = EfemOperation.StateTrack,
                Module = ModuleName.EfemRobot
            };
            _status = RState.Running;
            string cmd = $"RQ LOAD {_armString[Hand.Blade1]}\r";
            return WriteCommand(cmd);
        }

        public override string GetWaferPresence()
        {
            return "";
        }

        public override bool Halt()
        {
            //判断socket是否链接
            if (!_socket.IsConnected)
            {
                LOG.WriteLog(eEvent.ERROR_EFEM_COMMUNICATION, Module.ToString(), $"Socket is not Conntected");
                return false;
            }
            _currentMessage = new EfemMessage()
            {
                Operation = EfemOperation.Abort,
                Module = ModuleName.EfemRobot
            };
            SetRobotMovingInfo(RobotAction.None, Hand.Both, ModuleName.EFEM);
            string cmd = "HALT\r";
            return WriteCommand(cmd);
        }

        public override bool Pause()
        {
            //判断socket是否链接
            if (!_socket.IsConnected)
            {
                LOG.WriteLog(eEvent.ERROR_EFEM_COMMUNICATION, Module.ToString(), $"Socket is not Conntected");
                return false;
            }
            _currentMessage = new EfemMessage()
            {
                Operation = EfemOperation.Pause,
                Module = ModuleName.EfemRobot
            };
            _status = RState.Running;
            string cmd = "PAUSE\r";
            return WriteCommand(cmd);
        }
        public override bool Resume()
        {
            IsActionRDYReceived = false; //把收到resume信号后执行resume动作成功的变量置false 
            //判断socket是否链接
            if (!_socket.IsConnected)
            {
                LOG.WriteLog(eEvent.ERROR_EFEM_COMMUNICATION, Module.ToString(), $"Socket is not Conntected");
                return false;
            }
            _currentMessage = new EfemMessage()
            {
                Operation = EfemOperation.Resume,
                Module = ModuleName.EfemRobot
            };
            _status = RState.Running;
            string cmd = "RESUME\r";
            return WriteCommand(cmd);
        }

        public override bool ClearError()
        {
            return true;
        }

        public override bool CloseBuzzer()
        {
            LOG.WriteLog(eEvent.ERR_EFEM_COMMON_FAILED, Module.ToString(), $"System cannot support {EfemConstant.OperationString[EfemOperation.TurnOffBuzzer]}");
            return false;
        }

        public override bool PickExtend(ModuleName chamber, int slot, Hand hand)
        {
            LOG.WriteLog(eEvent.ERR_EFEM_COMMON_FAILED, Module.ToString(), $"System cannot support {EfemConstant.OperationString[EfemOperation.Extend]}");
            return false;
        }
        public override bool PickRetract(ModuleName chamber, int slot, Hand hand)
        {
            LOG.WriteLog(eEvent.ERR_EFEM_COMMON_FAILED, Module.ToString(), $"System cannot support {EfemConstant.OperationString[EfemOperation.Extend]}");
            return false;
        }
        public override bool PlaceExtend(ModuleName chamber, int slot, Hand hand)
        {
            LOG.WriteLog(eEvent.ERR_EFEM_COMMON_FAILED, Module.ToString(), $"System cannot support {EfemConstant.OperationString[EfemOperation.Extend]}");
            return false;
        }

        public override bool PlaceRetract(ModuleName chamber, int slot, Hand hand)
        {
            LOG.WriteLog(eEvent.ERR_EFEM_COMMON_FAILED, Module.ToString(), $"System cannot support {EfemConstant.OperationString[EfemOperation.Extend]}");
            return false;
        }

        public override bool Pick(ModuleName station, int slot, Hand hand, Flip flip)
        {
            if (_status == RState.Running && _currentMessage != null)
            {
                LOG.WriteLog(eEvent.ERR_EFEM_COMMON_FAILED, Module.ToString(), $"Current Msg {_currentMessage.Operation} is Running,cannot pick");
                return false;
            }
            //判断socket是否链接
            if (!_socket.IsConnected)
            {
                LOG.WriteLog(eEvent.ERROR_EFEM_COMMUNICATION, Module.ToString(), $"Socket is not Conntected");
                return false;
            }
            
            //判断Loadport的门是否打开
            //if (ModuleHelper.IsLoadPort(station) && !GetLoadPort(station).IsDoorOpened)
            //{
            //    LOG.WriteLog(eEvent.ERR_EFEM_COMMON_FAILED, Module.ToString(), $"{station}'s Door is Closed, Cannot Execute Pick Action");
            //    return false;
            //}
            if (!CheckEfemStatus())
                return false;
            int waferSize = GetModuleSlotWaferSize(station,slot);
            if (waferSize == 0)
            {
                LOG.WriteLog(eEvent.ERR_EFEM_COMMON_FAILED, Module.ToString(), $"{station} slot {slot} wafer size is 0, Cannot Execute Pick Action");
                return false;
            }
            string strModuleWaferSize = $"{station}_{waferSize}";
            if (!_moduleStationNumberDictionary.ContainsKey(strModuleWaferSize))
            {
                LOG.WriteLog(eEvent.ERR_EFEM_COMMON_FAILED, Module.ToString(), $"{station}'s number is not exist, Cannot Execute Pick Action");
                return false;
            }
            int stationNumber= _moduleStationNumberDictionary[strModuleWaferSize]; 
            string strFlip = flip == Flip.Flip ? " Flip" : "";
            string cmd = $"PICK {stationNumber} SLOT {slot+1} ARM {_armString[hand]}{strFlip}\r";
            if(ModuleHelper.IsAligner(station)||ModuleHelper.IsSRD(station)||ModuleHelper.IsVPWCell(station) || ModuleHelper.IsPlatingCell(station))
            {
                cmd = $"PICK {stationNumber} SLOT 1 ARM {_armString[hand]}\r";
            }
            _currentMessage = new EfemMessage()
            {
                Operation=EfemOperation.Pick
            };
            _status = RState.Running;
            SetRobotMovingInfo(RobotAction.Picking, hand, station);
            return WriteCommand(cmd);
        }

        private Loadport GetLoadPort(ModuleName station)
        {
            LoadPortModule loadPortModule = Singleton<RouteManager>.Instance.EFEM.GetLoadportModule(station - ModuleName.LP1);
            return loadPortModule.LPDevice;
        }
        public override bool Place(ModuleName station, int slot, Hand hand,Flip flip)
        {
            if (_status == RState.Running && _currentMessage != null)
            {
                LOG.WriteLog(eEvent.ERR_EFEM_COMMON_FAILED, Module.ToString(), $"Current Msg {_currentMessage.Operation} is Running,cannot place");
                return false;
            }
            //判断socket是否链接
            if (!_socket.IsConnected)
            {
                LOG.WriteLog(eEvent.ERROR_EFEM_COMMUNICATION, Module.ToString(), $"Socket is not Conntected");
                return false;
            }
            //判断Loadport的门是否打开
            //if (ModuleHelper.IsLoadPort(station) && !GetLoadPort(station).IsDoorOpened)
            //{
            //    LOG.WriteLog(eEvent.ERR_EFEM_COMMON_FAILED, Module.ToString(), $"{station}'s Door is Closed, Cannot Execute Pick Action");
            //    return false;
            //}

            if (!CheckEfemStatus())
                return false;

            int waferSize = GetModuleSlotWaferSize(ModuleName.EfemRobot, (int)hand);
            if (waferSize == 0)
            {
                LOG.WriteLog(eEvent.ERR_EFEM_COMMON_FAILED, Module.ToString(), $"{station} slot {slot} wafer size is 0, Cannot Execute Place Action");
                return false;
            }
            string strModuleWaferSize = $"{station}_{waferSize}";
            _currentMessage = new EfemMessage()
            {
                Operation = EfemOperation.Place
            };
            _status = RState.Running;
            int stationNumber = _moduleStationNumberDictionary[strModuleWaferSize];
            string strFlip = flip == Flip.Flip ? " Flip" : "";
            string cmd = $"PLACE {stationNumber} SLOT {slot+1} ARM {_armString[hand]}{strFlip}\r";
            if (ModuleHelper.IsSRD(station) || ModuleHelper.IsVPWCell(station) || ModuleHelper.IsPlatingCell(station))
            {
                cmd = $"PLACE {stationNumber} SLOT 1 ARM {_armString[hand]}\r";
            }
            if (ModuleHelper.IsAligner(station))
            {
                cmd = $"PLACE {stationNumber} PHOME\r";
            }
            SetRobotMovingInfo(RobotAction.Placing, hand, station);
            return WriteCommand(cmd);
        }


        public override bool Goto(ModuleName station, Hand hand, string updown = "UP")
        {
            if (_status == RState.Running && _currentMessage != null)
            {
                LOG.WriteLog(eEvent.ERR_EFEM_COMMON_FAILED, Module.ToString(), $"Current Msg {_currentMessage.Operation} is Running,cannot goto");
                return false;
            }
            if (!CheckEfemStatus())
                return false;
            //判断socket是否链接
            if (!_socket.IsConnected)
            {
                LOG.WriteLog(eEvent.ERROR_EFEM_COMMUNICATION, Module.ToString(), $"Socket is not Conntected");
                return false;
            }
            _currentMessage = new EfemMessage()
            {
                Operation = EfemOperation.Goto
            }; 
            int waferSize = GetModuleNameWaferSize(station);
            if (waferSize == 0)
            {
                LOG.WriteLog(eEvent.ERROR_EFEM_COMMUNICATION, Module.ToString(), $"wafersize is 0");
                return false;
            }
            string strModuleWaferSize = $"{station}_{waferSize}";
            int stationNumber = _moduleStationNumberDictionary[strModuleWaferSize];
            string cmd = $"GOTO N {stationNumber} R EX Z {updown} ARM SLOT 1 {_armString[hand]}\r";
            _status = RState.Running;
            return WriteCommand(cmd);
        }

        public override bool Grip(Hand blade, bool isGrip)
        {
            LOG.WriteLog(eEvent.ERR_EFEM_COMMON_FAILED, Module.ToString(), $"System cannot support {EfemConstant.OperationString[EfemOperation.Grip]}");
            return false;
        }

        public override bool GotoMap(ModuleName mod,Hand hand,string extend="EX")
        {
            if (_status == RState.Running && _currentMessage != null)
            {
                LOG.WriteLog(eEvent.ERR_EFEM_COMMON_FAILED, Module.ToString(), $"Current Msg {_currentMessage.Operation} is Running,cannot goto map");
                return false;
            }
            //判断socket是否链接
            if (!_socket.IsConnected)
            {
                LOG.WriteLog(eEvent.ERROR_EFEM_COMMUNICATION, Module.ToString(), $"Socket is not Conntected");
                return false;
            }
            if (!CheckEfemStatus())
                return false; 
            int waferSize = GetModuleNameWaferSize(mod);
            if (waferSize == 0)
            {
                LOG.WriteLog(eEvent.ERROR_EFEM_COMMUNICATION, Module.ToString(), $"wafersize is 0");
                return false;
            }
            string strModuleWaferSize = $"{mod}_{waferSize}";
            int stationNumber = _moduleStationNumberDictionary[strModuleWaferSize];
            string cmd = $"GOTO N {stationNumber} MAP {extend} ARM {_armString[hand]}\r";
            _currentMessage = new EfemMessage()
            {
                Operation = EfemOperation.Goto,
                Module= mod
            };
            _status = RState.Running;
            return WriteCommand(cmd);
        }

        public override bool Map(ModuleName mod)
        {
            if (_status == RState.Running && _currentMessage != null)
            {
                LOG.WriteLog(eEvent.ERR_EFEM_COMMON_FAILED, Module.ToString(), $"Current Msg {_currentMessage.Operation} is Running,cannot map");
                return false;
            }
            //判断socket是否链接
            if (!_socket.IsConnected)
            {
                LOG.WriteLog(eEvent.ERROR_EFEM_COMMUNICATION, Module.ToString(), $"Socket is not Conntected");
                return false;
            }
            if (!CheckEfemStatus())
                return false;
            int waferSize = GetModuleNameWaferSize(mod);
            if (waferSize == 0)
            {
                LOG.WriteLog(eEvent.ERROR_EFEM_COMMUNICATION, Module.ToString(), $"wafersize is 0");
                return false;
            }
            string strModuleWaferSize = $"{mod}_{waferSize}";
            int stationNumber = _moduleStationNumberDictionary[strModuleWaferSize];
            _currentMessage = new EfemMessage()
            {
                Operation = EfemOperation.Map,
                Module = mod
            };
            string cmd = $"MAP {stationNumber} ARM {_armString[Hand.Blade1]}\r";
            _status = RState.Running;
            return WriteCommand(cmd);
        }

        public override bool RequestMapResult(ModuleName mod)
        {
            if (_status == RState.Running && _currentMessage != null)
            {
                LOG.WriteLog(eEvent.ERR_EFEM_COMMON_FAILED, Module.ToString(), $"Current Msg {_currentMessage.Operation} is Running,cannot request map");
                return false;
            }
            //判断socket是否链接
            if (!_socket.IsConnected)
            {
                LOG.WriteLog(eEvent.ERROR_EFEM_COMMUNICATION, Module.ToString(), $"Socket is not Conntected");
                return false;
            }
            if (!CheckEfemStatus())
                return false;
            int waferSize = GetModuleNameWaferSize(mod);
            if (waferSize == 0)
            {
                LOG.WriteLog(eEvent.ERROR_EFEM_COMMUNICATION, Module.ToString(), $"wafersize is 0");
                return false;
            }
            string strModuleWaferSize = $"{mod}_{waferSize}";
            int stationNumber = _moduleStationNumberDictionary[strModuleWaferSize];
            _currentMessage = new EfemMessage()
            {
                Operation = EfemOperation.RequestMapResult,
                Module = mod
            };
            string cmd = $"RSR {stationNumber} ARM {_armString[Hand.Blade1]}\r";
            _status = RState.Running;
            return WriteCommand(cmd);
        }

        public override bool Vacuum(ModuleName mod,bool VacuumState)
        {
            if (_status == RState.Running && _currentMessage != null)
            {
                LOG.WriteLog(eEvent.ERR_EFEM_COMMON_FAILED, Module.ToString(), $"Current Msg {_currentMessage.Operation} is Running,cannot vacuum");
                return false;
            }
            //判断socket是否链接
            if (!_socket.IsConnected)
            {
                LOG.WriteLog(eEvent.ERROR_EFEM_COMMUNICATION, Module.ToString(), $"Socket is not Conntected");
                return false;
            }
            _currentMessage = new EfemMessage()
            {
                Operation = EfemOperation.Vacuum,
                Module = mod
            };
            _status = RState.Running;
            string strVacuum = VacuumState ? "ON" : "OFF";
            string cmd = "";
            if (ModuleName.Aligner1 == mod)
            {
                 cmd = $"ALIGNER VAC {strVacuum}\r";
            }
            else
            {
                 cmd = $"VAC {strVacuum} ARM {_armString[Hand.Blade1]}\r";
            }
            return WriteCommand(cmd);
        }

        public override bool GetWaferSize(ModuleName mod)
        {
            LOG.WriteLog(eEvent.ERR_EFEM_COMMON_FAILED, Module.ToString(), $"System cannot support GetWaferSize");
            return false;
        }

        public override bool SetWaferSize(ModuleName mod, int WaferSize)
        {

            LOG.WriteLog(eEvent.ERR_EFEM_COMMON_FAILED, Module.ToString(), $"System cannot support SetWaferSize");
            return false;
        }

        public override bool SetPinUp(ModuleName mod)
        {
            LOG.WriteLog(eEvent.ERR_EFEM_COMMON_FAILED, Module.ToString(), $"System cannot support {EfemConstant.OperationString[EfemOperation.Lift]}");
            return false;
        }

        public override bool SetPinDown(ModuleName mod)
        {
            LOG.WriteLog(eEvent.ERR_EFEM_COMMON_FAILED, Module.ToString(), $"System cannot support {EfemConstant.OperationString[EfemOperation.Lift]}");
            return false;
        }

        public override bool SetAlignWaferSize()
        {
            if (_status == RState.Running && _currentMessage != null)
            {
                LOG.WriteLog(eEvent.ERR_EFEM_COMMON_FAILED, Module.ToString(), $"Current Msg {_currentMessage.Operation} is Running,cannot Align Wafer Size");
                return false;
            }
            if (!CheckEfemStatus())
                return false;
            if (!WaferManager.Instance.CheckHasWafer(ModuleName.EfemRobot, 0))
            {
                LOG.WriteLog(eEvent.ERR_EFEM_COMMON_FAILED, Module.ToString(), $"{ModuleName.EfemRobot} has no wafer, Cannot Execute Set aligner wafersize");
                return false;
            }
            int waferSize = GetModuleSlotWaferSize(ModuleName.EfemRobot, 0);
            if (waferSize == 0)
            {
                LOG.WriteLog(eEvent.ERR_EFEM_COMMON_FAILED, Module.ToString(), $"{ModuleName.EfemRobot} wafer size is 0, Cannot Execute Set aligner wafersize");
                return false;
            }
            //判断socket是否链接
            if (!_socket.IsConnected)
            {
                LOG.WriteLog(eEvent.ERROR_EFEM_COMMUNICATION, Module.ToString(), $"Socket is not Conntected");
                return false;
            }
            _currentMessage = new EfemMessage()
            {
                Operation = EfemOperation.AlignWaferSize
            };

            string cmd = $"SET ALIGNER WAFERSIZE {waferSize}\r";
            _status = RState.Running;
            return WriteCommand(cmd);
        }

        public override bool SetAlignFlatType(int flatType)
        {
            if (_status == RState.Running && _currentMessage != null)
            {
                LOG.WriteLog(eEvent.ERR_EFEM_COMMON_FAILED, Module.ToString(), $"Current Msg {_currentMessage.Operation} is Running,cannot Align flat type");
                return false;
            }
            if (!CheckEfemStatus())
                return false;
            //判断socket是否链接
            if (!_socket.IsConnected)
            {
                LOG.WriteLog(eEvent.ERROR_EFEM_COMMUNICATION, Module.ToString(), $"Socket is not Conntected");
                return false;
            }
            _currentMessage = new EfemMessage()
            {
                Operation = EfemOperation.AlignFlatType
            };

            string cmd = $"SET ALIGNER WAFERTYPE {flatType}\r";
            _status = RState.Running;
            return WriteCommand(cmd);
        }

        public override bool SetAlignDistance()
        {
            int distance200 = SC.GetValue<int>("EFEM.Aligner1.Aligner200Distance");
            int distance150 = SC.GetValue<int>("EFEM.Aligner1.Aligner150Distance");
            int distance100 = SC.GetValue<int>("EFEM.Aligner1.Aligner100Distance");

            if (_status == RState.Running && _currentMessage != null)
            {
                LOG.WriteLog(eEvent.ERR_EFEM_COMMON_FAILED, Module.ToString(), $"Current Msg {_currentMessage.Operation} is Running,cannot Align flat type");
                return false;
            }
            if (!CheckEfemStatus())
                return false;
            //判断socket是否链接
            if (!_socket.IsConnected)
            {
                LOG.WriteLog(eEvent.ERROR_EFEM_COMMUNICATION, Module.ToString(), $"Socket is not Conntected");
                return false;
            }
            if (!WaferManager.Instance.CheckHasWafer(ModuleName.EfemRobot, 0))
            {
                LOG.WriteLog(eEvent.ERR_EFEM_COMMON_FAILED, Module.ToString(), $"{ModuleName.EfemRobot} has no wafer, Cannot Execute Set aligner wafersize");
                return false;
            }
            int waferSize = GetModuleSlotWaferSize(ModuleName.EfemRobot, 0);
            if (waferSize == 0)
            {
                LOG.WriteLog(eEvent.ERR_EFEM_COMMON_FAILED, Module.ToString(), $"{ModuleName.EfemRobot} wafer size is 0, Cannot Execute Set aligner wafersize");
                return false;
            }
            _currentMessage = new EfemMessage()
            {
                Operation = EfemOperation.AlignDistance
            };
            int distance = distance200;
            if (waferSize == (int)WaferSize.WS6)
            {
                distance = distance150;
            }
            else if (waferSize == (int)WaferSize.WS4)
            {
                distance = distance100;
            }

            string cmd = $"SET ALIGNER WAFERDISTANCE {distance}\r";
            _status = RState.Running;
            return WriteCommand(cmd);
        }


        public override bool SetAlignAngle(ModuleName mod, double angle)
        {
            if (_status == RState.Running && _currentMessage != null)
            {
                LOG.WriteLog(eEvent.ERR_EFEM_COMMON_FAILED, Module.ToString(), $"Current Msg {_currentMessage.Operation} is Running,cannot Align Angle");
                return false;
            }
            if (!CheckEfemStatus())
                return false;

            //判断socket是否链接
            if (!_socket.IsConnected)
            {
                LOG.WriteLog(eEvent.ERROR_EFEM_COMMUNICATION, Module.ToString(), $"Socket is not Conntected");
                return false;
            }
            _currentMessage = new EfemMessage()
            {
                Operation = EfemOperation.Align,
            };
            string cmd = $"SET ALIGNER POSTPOS 1 POS {angle*1000}\r";
            _status = RState.Running;
            return WriteCommand(cmd);
        }

        public override bool SetRobotSpeed(ModuleName mod, int speed)
        {
            if (_status == RState.Running && _currentMessage != null)
            {
                LOG.WriteLog(eEvent.ERR_EFEM_COMMON_FAILED, Module.ToString(), $"Current Msg {_currentMessage.Operation} is Running,cannot Speed");
                return false;
            }
            //判断socket是否链接
            if (!_socket.IsConnected)
            {
                LOG.WriteLog(eEvent.ERROR_EFEM_COMMUNICATION, Module.ToString(), $"Socket is not Conntected");
                return false;
            }
            _currentMessage = new EfemMessage()
            {
                Operation = EfemOperation.Speed
            };
            string cmd = $"SET ACTION SPEEDS {speed}\r";
            _status = RState.Running;
            return WriteCommand(cmd);
        }

        public override bool RobotPowerOn(ModuleName mod, bool Status)
        {
            if (_status == RState.Running && _currentMessage != null)
            {
                LOG.WriteLog(eEvent.ERR_EFEM_COMMON_FAILED, Module.ToString(), $"Current Msg {_currentMessage.Operation} is Running,cannot PowerOn");
                return false;
            }
            //判断socket是否链接
            if (!_socket.IsConnected)
            {
                LOG.WriteLog(eEvent.ERROR_EFEM_COMMUNICATION, Module.ToString(), $"Socket is not Conntected");
                return false;
            }
            string status = Status? "ON":"OFF";
            _currentMessage = new EfemMessage()
            {
                Operation = EfemOperation.PowerOn
            };
            string cmd = $"SET SERVOS {status}\r";
            _status = RState.Running;
            return WriteCommand(cmd);
        }
        public override bool Align(ModuleName mod, double angle, float delayTime, WaferSize size)
        {
            if (_status == RState.Running && _currentMessage != null)
            {
                LOG.WriteLog(eEvent.ERR_EFEM_COMMON_FAILED, Module.ToString(), $"Current Msg {_currentMessage.Operation} is Running,cannot Align");
                return false;
            }
            //判断socket是否链接
            if (!_socket.IsConnected)
            {
                LOG.WriteLog(eEvent.ERROR_EFEM_COMMUNICATION, Module.ToString(), $"Socket is not Conntected");
                return false;
            }
            if (!CheckEfemStatus())
                return false;
            _currentMessage = new EfemMessage()
            {
                Operation = EfemOperation.Align
            };
            _status = RState.Running;
            string cmd = "ALIGNER ALGN\r";
            return WriteCommand(cmd);
        }

        public override bool SetLamp(LightType light, LightStatus status)
        {
            return false;
        }

        public override bool Load(ModuleName mod)
        {
            LOG.WriteLog(eEvent.ERR_EFEM_COMMON_FAILED, Module.ToString(), $"System cannot support Load");
            return false;
        }

        public override bool Unload(ModuleName mod)
        {
            LOG.WriteLog(eEvent.ERR_EFEM_COMMON_FAILED, Module.ToString(), $"System cannot support Unload");
            return false;
        }

        public override bool ReadCarrierId(ModuleName mod)
        {
            LOG.WriteLog(eEvent.ERR_EFEM_COMMON_FAILED, Module.ToString(), $"System cannot support ReadCarrierId");
            return false;
        }

        public override bool WriteCarrierId(ModuleName mod, string id)
        {
            LOG.WriteLog(eEvent.ERR_EFEM_COMMON_FAILED, Module.ToString(), $"System cannot support WriteCarrierId");
            return false;
        }
        public override bool ReadTagData(ModuleName mod)
        {
            return ReadCarrierId(mod);
        }
        public override bool WriteTagData(ModuleName mod, string tagData)
        {
            return WriteCarrierId(mod, tagData);
        }

        public override bool Dock(ModuleName mod)
        {
            LOG.WriteLog(eEvent.ERR_EFEM_COMMON_FAILED, Module.ToString(), $"System cannot support Dock");
            return false;
        }

        public override bool Undock(ModuleName mod)
        {
            LOG.WriteLog(eEvent.ERR_EFEM_COMMON_FAILED, Module.ToString(), $"System cannot support Undock");
            return false;
        }

        public override bool Clamp(ModuleName mod, bool isUnloadClamp)
        {
            LOG.WriteLog(eEvent.ERR_EFEM_COMMON_FAILED, Module.ToString(), $"System cannot support Clamp");
            return false;
        }
        public override bool Unclamp(ModuleName mod)
        {
            LOG.WriteLog(eEvent.ERR_EFEM_COMMON_FAILED, Module.ToString(), $"System cannot support Unclamp");
            return false;
        }

        public override bool SetThickness(ModuleName mod, string thickness)
        {
            LOG.WriteLog(eEvent.ERR_EFEM_COMMON_FAILED, Module.ToString(), $"System cannot support {EfemConstant.OperationString[EfemOperation.SetThickness]}");
            return false;
        }
        public override void SetRobotMovingInfo(RobotAction action, Hand hand, ModuleName target)
        {
            blockingCollection.Add(new RobotAnimationData(action, hand, target));
        }

        private void OnReceiveMessage(string msg)
        {
            LOG.WriteLog(eEvent.EV_EFEM_COMMON_INFO, Module.ToString(), msg.Replace("\r",""));
            if (_currentMessage == null)
            {
                return;
            }
            if(msg.Contains("_ERR"))
            {
                string error = msg.Replace("_ERR", "").Trim();
                OnErrorOccurred(error);
                _currentMessage = null;
                SetRobotMovingInfo(RobotAction.None, Hand.Both, ModuleName.EFEM);
                return;
            }
            else if (msg.StartsWith("ACTION_RDY"))
            {
                _status = RState.End;
                IsResumeRDYReceived = false;
                IsPauseRDYReceived = false;
                IsActionRDYReceived = true;
            }
            else if (msg.StartsWith("_RDY"))
            {
                _status = RState.End;
                switch (_currentMessage.Operation)
                {
                    case EfemOperation.Home:
                        SetRobotMovingInfo(RobotAction.Homing, Hand.Both, ModuleName.EFEM);
                        break;
                    case EfemOperation.Map:
                    case EfemOperation.GotoMap:
                        if (ModuleHelper.IsLoadPort(_currentMessage.Module))
                        {
                            GetLoadPort(_currentMessage.Module).OnMaped();
                        }
                        break;
                    case EfemOperation.Pick:
                    case EfemOperation.Place:
                        SetRobotMovingInfo(RobotAction.None, Hand.Both, ModuleName.EfemRobot);
                        break;
                }
            }
            else if (msg.Contains("PAUSE_RDY") || msg.Contains("RESUME_RDY"))
            {
                switch (_currentMessage.Operation)
                {
                    case EfemOperation.Pause:
                        //SetRobotMovingInfo(RobotAction.None, Hand.Both, ModuleName.EfemRobot);
                        IsPauseRDYReceived = true;
                        break;
                    case EfemOperation.Resume:
                        IsResumeRDYReceived = true;
                        break;
                }
            }
            else
            {
                switch (_currentMessage.Operation)
                {
                    case EfemOperation.StateTrack:
                        DealStateTrack(msg);
                        break;
                    case EfemOperation.RequestMapResult:
                        DealMapResult(msg);
                        break;
                }
                _status = RState.End;
                _currentMessage = null;
            }
        }
        /// <summary>
        /// 处理StateTrack结果
        /// </summary>
        /// <param name="msg"></param>
        private void DealStateTrack(string msg)
        {
            if (msg.StartsWith("LOAD"))
            {
                string[] strAry = msg.Trim().Split(' ');
                if (strAry.Length >= 2)
                {
                    bool hasWafer = strAry[2] == "ON" ? true : false;
                    if (strAry[1] == _armString[Hand.Blade1])
                    {
                        if (WaferManager.Instance.CheckNoWafer(ModuleName.EfemRobot, 0)&& hasWafer)
                        {
                            WaferManager.Instance.CreateWafer(ModuleName.EfemRobot, 0, WaferStatus.Normal);
                        }
                    }
                    else if (strAry[1] == _armString[Hand.Blade2])
                    {
                        if (WaferManager.Instance.CheckNoWafer(ModuleName.EfemRobot, 1) && hasWafer)
                        {
                            WaferManager.Instance.CreateWafer(ModuleName.EfemRobot, 1, WaferStatus.Normal);
                        }
                    }
                }
            }

        }
        /// <summary>
        /// 处理Map结果
        /// </summary>
        /// <param name="msg"></param>
        private void DealMapResult(string msg)
        {
            if (_currentMessage.Operation != EfemOperation.RequestMapResult)
            {
                return;
            }
            if(!msg.StartsWith("MAP"))
            {
                return;
            }

            string[] sWaferInfo = msg.Split(new char[] { ' ', '\r', '\n' });
            if (sWaferInfo.Length <= 2)
            {
                return;
            }

            int slotMap = SC.GetValue<int>("EFEM.LoadPort.SlotNumber");
            WaferType waferType = WaferType.Production;
            if (ModuleHelper.IsDummy(_currentMessage.Module))
            {
                DummyCassetteItem item = DummyCasseteItemManager.Instance.GetDummyCassetteItem(_currentMessage.Module.ToString());
                if (item != null)
                {
                    slotMap = item.MaxNumberOfSlots;
                }
                waferType = WaferType.Assit;
            }
            int waferSize = GetModuleNameWaferSize(_currentMessage.Module);
            //Map 结果(1 1 1 1 1 1 1 ...0)
            int startIndex = 1;
            int count = slotMap >= sWaferInfo.Length-startIndex? sWaferInfo.Length-startIndex : slotMap;
            bool result = true;

            for (int index = startIndex; index <= count; index++)
            {
                string strState = sWaferInfo[index];
                int waferState = 0;
                //合理的映射到内部支持的叠片/交叉片
                if (strState == "1") waferState = (int)WaferStatus.Normal;
                else if (strState == "2") waferState = (int)WaferStatus.Double;
                else if (strState == "3") waferState = (int)WaferStatus.Crossed;
                else if (strState == "5") waferState = (int)WaferStatus.Thin;
                else if(strState=="?") waferState=(int)WaferStatus.Unknown;

                WaferStatus st = (WaferStatus)waferState;
                if (st != WaferStatus.Empty)
                {
                    WaferManager.Instance.CreateWafer(_currentMessage.Module, index-startIndex, st,(WaferSize)waferSize,waferType);
                    if (st != WaferStatus.Normal)
                    {
                        result = false;
                    }
                }
                else
                {
                    WaferManager.Instance.DeleteWafer(_currentMessage.Module, index-startIndex);
                }
            }
            if (!result)
            {
                LOG.WriteLog(eEvent.ERROR_EFEM_ERROR_WAFER, Module.ToString(), $"{_currentMessage.Module} slot map failed {msg}");
            }
            if (ModuleHelper.IsLoadPort(_currentMessage.Module))
            {
                GetLoadPort(_currentMessage.Module).UpdateMapResult(result);
            }
        }
        private void OnErrorOccurred(string errorCode)
        {
            _status = RState.Failed;
            string description = errorCode;
            if (SumWayRobotErrorCode.ErrorCodeDescription.ContainsKey(errorCode))
            {
                description=SumWayRobotErrorCode.ErrorCodeDescription[errorCode];
            }
            Singleton<RouteManager>.Instance.EFEM.PostMsg(EfemEntity.MSG.Error, description);
            if (_currentMessage != null)
            {
                LOG.Write(eEvent.ERR_EFEM_COMMON_FAILED, ModuleName.EFEM, $"current operation {_currentMessage.Operation} failed,{description}");
            }
            _currentMessage=null;
        }
        private bool WriteCommand(string cmd)
        {
            LOG.WriteLog(eEvent.EV_EFEM_COMMON_INFO, Module.ToString(), cmd.Replace("\r", ""));
            return _socket.Write(cmd);
        }
        /// <summary>
        /// 获取模块Wafer尺寸
        /// </summary>
        /// <param name="moduleName"></param>
        /// <returns></returns>
        private int GetModuleNameWaferSize(ModuleName moduleName)
        {
            if (ModuleHelper.IsLoadPort(moduleName))
            {
                Loadport loadport = GetLoadPort(moduleName);
                if (!loadport.HasCassette)
                {
                    LOG.WriteLog(eEvent.ERR_EFEM_COMMON_FAILED, Module.ToString(), $"{moduleName} does not have cassete.");
                    return 0;
                }
                return (int)loadport.WaferSize;
            }
            else if (ModuleHelper.IsDummy(moduleName))
            {
                DummyDevice dummyDevice = Singleton<RouteManager>.Instance.EFEM.GetDummyDevice(moduleName - ModuleName.Dummy1);
                if (!dummyDevice.HasCassette)
                {
                    LOG.WriteLog(eEvent.ERR_EFEM_COMMON_FAILED, Module.ToString(), $"{moduleName} does not have cassete.");
                    return 0;
                }
                return (int)dummyDevice.WaferSize;
            }
            return 0;
        }
        /// <summary>
        /// 获取模块尺寸
        /// </summary>
        /// <param name="moduleName"></param>
        /// <returns></returns>
        private int GetModuleSlotWaferSize(ModuleName moduleName,int slotNumber)
        {
            if(WaferManager.Instance.CheckHasWafer(moduleName,slotNumber))
            {
                WaferInfo waferInfo=WaferManager.Instance.GetWafer(moduleName, slotNumber);
                return (int)waferInfo.Size;
            }
            else
            {
                return 0;
            }
        }
    }
}