PlatingCellEntity.cs 15 KB

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  1. using Aitex.Core.Common;
  2. using Aitex.Core.RT.DataCenter;
  3. using Aitex.Core.RT.Device;
  4. using Aitex.Core.RT.Fsm;
  5. using Aitex.Core.RT.Log;
  6. using Aitex.Core.RT.OperationCenter;
  7. using Aitex.Core.RT.RecipeCenter;
  8. using Aitex.Core.RT.SCCore;
  9. using Aitex.Core.Util;
  10. using Aitex.Core.Utilities;
  11. using MECF.Framework.Common.Equipment;
  12. using MECF.Framework.Common.Persistent.Reservoirs;
  13. using MECF.Framework.Common.ProcessCell;
  14. using MECF.Framework.Common.RecipeCenter;
  15. using MECF.Framework.Common.Routine;
  16. using MECF.Framework.Common.SubstrateTrackings;
  17. using MECF.Framework.Common.ToolLayout;
  18. using PunkHPX8_Core;
  19. using PunkHPX8_RT.Devices.PlatingCell;
  20. using PunkHPX8_RT.Devices.PowerSupplier;
  21. using PunkHPX8_RT.Devices.Reservoir;
  22. using PunkHPX8_RT.Devices.Temperature;
  23. using PunkHPX8_RT.Modules.Reservoir;
  24. using System;
  25. using System.Collections.Generic;
  26. using System.Linq;
  27. using System.Text;
  28. using System.Threading.Tasks;
  29. namespace PunkHPX8_RT.Modules.PlatingCell
  30. {
  31. public class PlatingCellEntity : Entity, IEntity, IModuleEntity
  32. {
  33. public enum PlatingCellMsg
  34. {
  35. NONE,
  36. Error,
  37. ResumeError,
  38. Initialize,
  39. Manual,
  40. Auto,
  41. CurrentShortTest,
  42. CloseFlowValve,
  43. OpenFlowValve,
  44. RunRecipe,
  45. Abort,
  46. Init,
  47. CCR,
  48. CCRAbort
  49. }
  50. #region 常量
  51. private const string STRATUS = "Stratus";
  52. private const string AUTO = "Auto";
  53. private const string MANUAL = "Manual";
  54. private const string DISABLED = "Disabled";
  55. private const string ENGINEERING = "Engineering";
  56. private const string PRODUCTION = "Production";
  57. #endregion
  58. #region 内部变量
  59. /// <summary>
  60. /// 持久化数值
  61. /// </summary>
  62. private PlatingCellPersistentValue _persistentValue;
  63. /// <summary>
  64. /// 当前recipe
  65. /// </summary>
  66. private DepRecipe _currentRecipe;
  67. /// <summary>
  68. /// recipe时间
  69. /// </summary>
  70. private int _recipeTime;
  71. /// <summary>
  72. /// 当前RunRecipe Routine
  73. /// </summary>
  74. private RoutineBase _currentRunRecipeRoutine;
  75. /// <summary>
  76. /// c&m Initialize routine
  77. /// </summary>
  78. private PlatingCellInitializeRoutine _initializeRoutine;
  79. /// <summary>
  80. /// CCR
  81. /// </summary>
  82. private PlatingCellCCRRoutine _cCRRoutine;
  83. #endregion
  84. #region 属性
  85. /// <summary>
  86. /// 模块名称
  87. /// </summary>
  88. public ModuleName Module { get; private set; }
  89. /// <summary>
  90. /// 是否Init
  91. /// </summary>
  92. public bool IsInit
  93. {
  94. get { return fsm.State == (int)PlatingCellState.Init; }
  95. }
  96. /// <summary>
  97. /// 是否Idle
  98. /// </summary>
  99. public bool IsIdle
  100. {
  101. get
  102. {
  103. return fsm.State == (int)PlatingCellState.Idle;
  104. }
  105. }
  106. /// <summary>
  107. /// 是否错误
  108. /// </summary>
  109. public bool IsError
  110. {
  111. get { return fsm.State == (int)PlatingCellState.Error; }
  112. }
  113. /// <summary>
  114. /// 正在忙碌
  115. /// </summary>
  116. public bool IsBusy
  117. {
  118. get { return fsm.State == (int)PlatingCellState.Initializing; }
  119. }
  120. /// <summary>
  121. /// 化学液
  122. /// </summary>
  123. public string Chemistry
  124. {
  125. get { return _currentRecipe != null ? _currentRecipe.Chemistry : ""; }
  126. }
  127. /// <summary>
  128. /// 是否禁用
  129. /// </summary>
  130. public bool IsDisable { get { return _persistentValue == null || _persistentValue.OperatingMode == DISABLED; } }
  131. /// <summary>
  132. /// 自动模式
  133. /// </summary>
  134. public bool IsAuto { get { return _persistentValue != null && _persistentValue.OperatingMode == AUTO; } }
  135. /// <summary>
  136. /// 自动模式
  137. /// </summary>
  138. public bool IsManual { get { return _persistentValue != null && _persistentValue.OperatingMode == MANUAL; } }
  139. /// <summary>
  140. /// 是否为工程模式
  141. /// </summary>
  142. public bool IsEngineering { get { return _persistentValue != null && _persistentValue.RecipeOperatingMode == ENGINEERING; } }
  143. /// <summary>
  144. /// 是否为产品模式
  145. /// </summary>
  146. public bool IsProduction { get { return _persistentValue != null && _persistentValue.RecipeOperatingMode == PRODUCTION; } }
  147. /// <summary>
  148. /// 状态机状态
  149. /// </summary>
  150. public PlatingCellState State { get { return (PlatingCellState)fsm.State; } }
  151. /// <summary>
  152. /// 是否初始化完成
  153. /// </summary>
  154. public bool IsInitialized { get { return fsm.State >= (int)PlatingCellState.Initialized; } }
  155. /// <summary>
  156. /// Reservoir项
  157. /// </summary>
  158. private ReservoirItem _reservoirItem;
  159. /// <summary>
  160. /// Wafer信息
  161. /// </summary>
  162. public WaferInfo WaferInfo { get { return WaferManager.Instance.GetWafer(Module,0); } }
  163. #endregion
  164. /// <summary>
  165. /// 构造函数
  166. /// </summary>
  167. /// <param name="module"></param>
  168. public PlatingCellEntity(ModuleName module)
  169. {
  170. this.Module = module;
  171. InitialFsm();
  172. }
  173. /// <summary>
  174. /// 初始化
  175. /// </summary>
  176. /// <returns></returns>
  177. protected override bool Init()
  178. {
  179. InitializeRoutine();
  180. InitializeDATA();
  181. InitializeOperation();
  182. InitializeParameter();
  183. return true;
  184. }
  185. /// <summary>
  186. /// 初始化参数
  187. /// </summary>
  188. private void InitializeParameter()
  189. {
  190. _persistentValue = PlatingCellPersistentManager.Instance.GetPlatingCellPersistentValue(Module.ToString());
  191. if (_persistentValue == null)
  192. {
  193. LOG.WriteLog(eEvent.ERR_PLATINGCELL, Module.ToString(), "Persistent Value Object is not exist");
  194. }
  195. }
  196. /// <summary>
  197. /// 初始化Routine
  198. /// </summary>
  199. private void InitializeRoutine()
  200. {
  201. _initializeRoutine = new PlatingCellInitializeRoutine(Module.ToString());
  202. _cCRRoutine = new PlatingCellCCRRoutine(Module.ToString());
  203. }
  204. /// <summary>
  205. /// 初始化DATA
  206. /// </summary>
  207. private void InitializeDATA()
  208. {
  209. DATA.Subscribe($"{Module}.FsmState", () => ((PlatingCellState)fsm.State).ToString(), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  210. DATA.Subscribe($"{Module}.CurrentRecipe", () => _currentRecipe != null ? _currentRecipe.Ppid : "", SubscriptionAttribute.FLAG.IgnoreSaveDB);
  211. DATA.Subscribe($"{Module}.TotalTime", () => _recipeTime, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  212. DATA.Subscribe($"{Module}.TimeRemain", () => _recipeTime != 0 && _currentRunRecipeRoutine != null ? (_recipeTime - Math.Round((double)_currentRunRecipeRoutine.ElapsedMilliseconds / 1000, 0)) : 0, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  213. DATA.Subscribe($"{Module}.Chemistry", () => _currentRecipe != null ? _currentRecipe.Chemistry : "", SubscriptionAttribute.FLAG.IgnoreSaveDB);
  214. DATA.Subscribe($"{Module}.IsInit", () => IsInit, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  215. DATA.Subscribe($"{Module}.IsIdle", () => IsIdle, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  216. DATA.Subscribe($"{Module}.IsError", () => IsError, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  217. DATA.Subscribe($"{Module}.IsBusy", () => IsBusy, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  218. DATA.Subscribe($"{Module}.IsDisable", () => IsDisable, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  219. }
  220. /// <summary>
  221. /// 初始化Operation
  222. /// </summary>
  223. private void InitializeOperation()
  224. {
  225. OP.Subscribe($"{Module}.InitializeAll", (cmd, args) => { return CheckToPostMessage<PlatingCellState, PlatingCellMsg>(eEvent.ERR_RESERVOIR, Module.ToString(), (int)PlatingCellMsg.Initialize); });
  226. OP.Subscribe($"{Module}.ManualCCRStart", (cmd, args) => { return CheckToPostMessage<PlatingCellState, PlatingCellMsg>(eEvent.ERR_RESERVOIR, Module.ToString(), (int)PlatingCellMsg.CCR); });
  227. OP.Subscribe($"{Module}.ManualCCRStop", (cmd, args) => { return CheckToPostMessage<PlatingCellState, PlatingCellMsg>(eEvent.ERR_RESERVOIR, Module.ToString(), (int)PlatingCellMsg.CCRAbort); });
  228. }
  229. /// 初始化状态机
  230. /// </summary>
  231. private void InitialFsm()
  232. {
  233. fsm = new StateMachine<PlatingCellEntity>(Module.ToString(), (int)PlatingCellState.Init, 100);
  234. fsm.EnableRepeatedMsg(true);
  235. AnyStateTransition(PlatingCellMsg.Error, NullFunc, PlatingCellState.Error);
  236. //Initialized
  237. Transition(PlatingCellState.Error, PlatingCellMsg.Initialize, InitializeAll, PlatingCellState.Initializing);
  238. Transition(PlatingCellState.Init, PlatingCellMsg.Initialize, InitializeAll, PlatingCellState.Initializing);
  239. Transition(PlatingCellState.Idle, PlatingCellMsg.Initialize, InitializeAll, PlatingCellState.Initializing);
  240. Transition(PlatingCellState.Initializing, FSM_MSG.TIMER, InitializeAllMonitor, PlatingCellState.Idle);
  241. //CCR
  242. Transition(PlatingCellState.Idle, PlatingCellMsg.CCR, ManualCCRStart, PlatingCellState.CCRing);
  243. Transition(PlatingCellState.CCRing, FSM_MSG.TIMER, CCRMonitor, PlatingCellState.Idle);
  244. Transition(PlatingCellState.CCRing, PlatingCellMsg.CCRAbort, CCRAbort, PlatingCellState.Init);
  245. //直接进入Idle
  246. Transition(PlatingCellState.Initialized, FSM_MSG.TIMER, NullFunc, PlatingCellState.Idle);
  247. //Enter Init
  248. Transition(PlatingCellState.Idle, PlatingCellMsg.Init, NullFunc, PlatingCellState.Init);
  249. EnumLoop<PlatingCellState>.ForEach((item) => { fsm.MapState((int)item, item.ToString()); });
  250. EnumLoop<PlatingCellState>.ForEach((item) => { fsm.MapMessage((int)item, item.ToString()); });
  251. }
  252. /// <summary>
  253. /// 手动CCR
  254. /// </summary>
  255. /// <returns></returns>
  256. private bool ManualCCRStart(object[] param)
  257. {
  258. bool result = _cCRRoutine.Start() == RState.Running;
  259. return result;
  260. }
  261. /// <summary>
  262. /// CCR 监控
  263. /// </summary>
  264. /// <param name="param"></param>
  265. /// <returns></returns>
  266. private bool CCRMonitor(object[] param)
  267. {
  268. RState rsstate = RState.Running;
  269. rsstate = _cCRRoutine.Monitor();
  270. if (rsstate == RState.End)
  271. {
  272. return true;
  273. }
  274. else if (rsstate == RState.Failed || rsstate == RState.Timeout)
  275. {
  276. PostMsg(PlatingCellMsg.Error);
  277. return false;
  278. }
  279. return false;
  280. }
  281. /// <summary>
  282. /// CCR abort
  283. /// </summary>
  284. /// <param name="param"></param>
  285. /// <returns></returns>
  286. private bool CCRAbort(object[] param)
  287. {
  288. if(_cCRRoutine.Monitor() == RState.Running)
  289. {
  290. _cCRRoutine.Abort();
  291. }
  292. return true;
  293. }
  294. /// <summary>
  295. /// 初始化
  296. /// </summary>
  297. /// <returns></returns>
  298. private bool InitializeAll(object[] param)
  299. {
  300. if (_persistentValue == null)
  301. {
  302. LOG.WriteLog(eEvent.ERR_RESERVOIR, Module.ToString(), "persistent is null");
  303. return false;
  304. }
  305. if (fsm.State == (int)PlatingCellState.Initializing)
  306. {
  307. LOG.WriteLog(eEvent.WARN_PLATINGCELL, Module.ToString(), "state is Initializing,cannot do initialize");
  308. return false;
  309. }
  310. if (!CheckReservoirInitialized())
  311. {
  312. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), "Reservoir is not initialized");
  313. return false;
  314. }
  315. if (!MetalUsageMointor(Module.ToString()))
  316. {
  317. return false;
  318. }
  319. if ("Auto".Equals(_persistentValue.OperatingMode))
  320. {
  321. if (!CheckReservoirIsAuto())
  322. {
  323. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), "Reservoir is not in Auto OperationMode");
  324. return false;
  325. }
  326. }
  327. bool result = _initializeRoutine.Start(_persistentValue) == RState.Running;
  328. return result;
  329. }
  330. /// <summary>
  331. /// 检验Reservoir是否Auto
  332. /// </summary>
  333. /// <returns></returns>
  334. private bool CheckReservoirIsAuto()
  335. {
  336. string reservoir = ReservoirItemManager.Instance.GetReservoirByPlatingCell(Module.ToString());
  337. ReservoirsPersistentValue reservoirsPersistentValue = ReservoirsPersistentManager.Instance.GetReservoirsPersistentValue(reservoir);
  338. if ("Auto".Equals(reservoirsPersistentValue.OperatingMode))
  339. {
  340. return true;
  341. }
  342. return false;
  343. }
  344. /// <summary>
  345. /// 检验Reservoir是否Initialized
  346. /// </summary>
  347. /// <returns></returns>
  348. private bool CheckReservoirInitialized()
  349. {
  350. string reservoir = ReservoirItemManager.Instance.GetReservoirByPlatingCell(Module.ToString());
  351. ReservoirEntity reservoirEntity = Singleton<RouteManager>.Instance.GetModule<ReservoirEntity>(reservoir);
  352. if (reservoirEntity != null)
  353. {
  354. return reservoirEntity.IsInitialized;
  355. }
  356. return false;
  357. }
  358. /// <summary>
  359. /// 监控 PM Counter Metal用量
  360. /// </summary>
  361. private bool MetalUsageMointor(string Module)
  362. {
  363. return true;
  364. }
  365. /// <summary>
  366. /// Initialize 监控
  367. /// </summary>
  368. /// <param name="param"></param>
  369. /// <returns></returns>
  370. private bool InitializeAllMonitor(object[] param)
  371. {
  372. RState rsstate = RState.Running;
  373. rsstate = _initializeRoutine.Monitor();
  374. if (rsstate == RState.End)
  375. {
  376. return true;
  377. }
  378. else if (rsstate == RState.Failed || rsstate == RState.Timeout)
  379. {
  380. PostMsg(PlatingCellMsg.Error);
  381. return false;
  382. }
  383. return false;
  384. }
  385. /// <summary>
  386. /// EnterInit
  387. /// </summary>
  388. public void EnterInit()
  389. {
  390. if ((PlatingCellState)fsm.State != PlatingCellState.Idle) return;
  391. else
  392. {
  393. CheckToPostMessage<PlatingCellState, PlatingCellMsg>(eEvent.ERR_PLATINGCELL, Module.ToString(), (int)PlatingCellMsg.Init);
  394. }
  395. }
  396. public bool Check(int msg, out string reason, params object[] args)
  397. {
  398. reason = "";
  399. return true;
  400. }
  401. public bool CheckAcked(int msg)
  402. {
  403. throw new NotImplementedException();
  404. }
  405. public int Invoke(string function, params object[] args)
  406. {
  407. throw new NotImplementedException();
  408. }
  409. }
  410. }