Home Explore Help
Register Sign In
JetPlasma
/
PunkHPX8
Watch 2
Star 0
Fork 0
Files Issues 0 Pull Requests 0 Wiki
Tree: 5dfc09d488
Branches Tags
PunkHPX8
/
PunkHPX8_RT
/
Config
/
Devices
/
ModuleIOCfg.xml

ModuleIOCfg.xml 15 KB
History Raw

123456789101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960616263646566676869707172737475767778798081828384858687888990919293949596979899100101102103104105106107108109110111112113114115116117118119120121122123124125126127128129130131132133134135136137138139140141142143144145146147148149150151152153154155156157158159160161162163164165166167168169170171172173174175176177178179180181182183184185186187188189190191192193194195196197198199200201202203204205206207208209210211212213214215216217218219220221222223224225226227228229230231232233234235236237238239240241242243244245 
  1. <?xml version="1.0" encoding="utf-8"?>
    2. 

  2. <BeckhoffModuleIOCfg xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:xsd="http://www.w3.org/2001/XMLSchema">
    3. 

  3. 	<Module Name="EFEM">
    4. 

  4. 		<IO Name="EFEM.VacuumValue" IOName="r_EFEM_VACUUM"/>
    5. 

  5. 		<IO Name="EFEM.DoorUnlock" IOName="c_Door_Unlock"/>
    6. 

  6. 		<IO Name="EFEM.DoorLocked" IOName="r_Door_Locked"/>
    7. 

  7. 	</Module>
    8. 

  8. 	<Module Name="LP1">
    9. 

  9. 		<IO Name="LP1.Cassete200Present" IOName="r_Cassette_1_200"/>
    10. 

  10. 		<IO Name="LP1.Cassete150Present" IOName="r_Cassette_1_150"/>
    11. 

  11. 		<IO Name="LP1.Cassete100Present" IOName="r_Cassette_1_100"/>
    12. 

  12. 	</Module>
    13. 

  13. 	<Module Name="LP2">
    14. 

  14. 		<IO Name="LP2.Cassete200Present" IOName="r_Cassette_2_200"/>
    15. 

  15. 		<IO Name="LP2.Cassete150Present" IOName="r_Cassette_2_150"/>
    16. 

  16. 		<IO Name="LP2.Cassete100Present" IOName="r_Cassette_2_100"/>
    17. 

  17. 	</Module>
    18. 

  18. 	<Module Name="LP3">
    19. 

  19. 		<IO Name="LP3.Cassete200Present" IOName="r_Cassette_3_200"/>
    20. 

  20. 		<IO Name="LP3.Cassete150Present" IOName="r_Cassette_3_150"/>
    21. 

  21. 		<IO Name="LP3.Cassete100Present" IOName="r_Cassette_3_100"/>
    22. 

  22. 	</Module>
    23. 

  23. 	<Module Name="Dummy1">
    24. 

  24. 		<IO Name="Dummy1.Cassete200Present" IOName="r_Dummy_1_200"/>
    25. 

  25. 		<IO Name="Dummy1.Cassete150Present" IOName="r_Dummy_1_150"/>
    26. 

  26. 		<IO Name="Dummy1.Cassete100Present" IOName="r_Dummy_1_100"/>
    27. 

  27. 	</Module>
    28. 

  28. 	<Module Name="Dummy2">
    29. 

  29. 		<IO Name="Dummy2.Cassete200Present" IOName="r_Dummy_2_200"/>
    30. 

  30. 		<IO Name="Dummy2.Cassete150Present" IOName="r_Dummy_2_150"/>
    31. 

  31. 		<IO Name="Dummy2.Cassete100Present" IOName="r_Dummy_2_100"/>
    32. 

  32. 	</Module>
    33. 

  33. 	<Module Name="LightTower">
    34. 

  34. 		<IO Name="LightTower.Buzzer" IOName="c_System_Alarm"/>
    35. 

  35. 		<IO Name="LightTower.RedLight" IOName="c_Pole_Red"/>
    36. 

  36. 		<IO Name="LightTower.YellowLight" IOName="c_Pole_Amber"/>
    37. 

  37. 		<IO Name="LightTower.GreenLight" IOName="c_Pole_Green"/>
    38. 

  38. 		<IO Name="LightTower.BlueLight" IOName="c_Pole_Blue"/>
    39. 

  39. 	</Module>	
    40. 

  40. 	<Module Name="Facilities">
    41. 

  41. 		<IO Name="Facilities.N2Enable" IOName="c_N2_ENABLE"/>
    42. 

  42. 		<IO Name="Facilities.CDAEnable" IOName="c_CDA_ENABLE"/>
    43. 

  43. 		<IO Name="Facilities.ExternalCDAEnable" IOName="c_EXTERNAL_CDA_ENABLE"/>
    44. 

  44. 		<IO Name="Facilities.DiWaterEnable" IOName="c_DI_MAIN_ENABLE"/>
    45. 

  45. 		<IO Name="Facilities.HouseChilledWaterEnable" IOName="c_HCW_ENABLE"/>
    46. 

  46. 		<IO Name="Facilities.DiReplenEnable" IOName="c_DI_REPLEN_ENABLE"/>
    47. 

  47. 		<IO Name="Facilities.DiFillEnable" IOName="c_DI_FILL_ENABLE"/>
    48. 

  48. 		<IO Name="Facilities.LoaderDiEnable" IOName="c_DI_LOADER_ENABLE"/>
    49. 

  49. 		<IO Name="Facilities.FilterPurgeEnable" IOName="c_FILTER_PURGE_ENABLE"/>
    50. 

  50. 		<IO Name="Facilities.Nitrogen1BPressure" IOName="r_N2_1B_PRESSURE"/>
    51. 

  51. 		<IO Name="Facilities.Nitrogen1APressure" IOName="r_N2_1A_PRESSURE"/>
    52. 

  52. 		<IO Name="Facilities.Nitrogen2BPressure" IOName="r_N2_2B_PRESSURE"/>
    53. 

  53. 		<IO Name="Facilities.Nitrogen2APressure" IOName="r_N2_2A_PRESSURE"/>
    54. 

  54. 		<IO Name="Facilities.CDA2Pressure" IOName="r_CDA_HIGH_PRESSURE"/>
    55. 

  55. 		<IO Name="Facilities.CDA1Pressure" IOName="r_CDA_LOW_PRESSURE"/>
    56. 

  56. 		<IO Name="Facilities.ExternalCDAPressure" IOName="r_CDA_EXTERNAL_PRESSURE"/>
    57. 

  57. 		<IO Name="Facilities.DiWaterPressure" IOName="r_DI_WATER_PRESSURE"/>
    58. 

  58. 		<IO Name="Facilities.HouseChilledWaterPressure" IOName="r_HCW_FLOW"/>
    59. 

  59. 		<IO Name="Facilities.ExhaustPressure" IOName="r_SYSTEM_EXHAUST"/>
    60. 

  60. 		<IO Name="Facilities.VacuumPressure" IOName="r_SYSTEM_VACUUM"/>
    61. 

  61. 		<IO Name="Facilities.N2BlanketPressure" IOName="r_N2_BLANKET_PRESSURE"/>
    62. 

  62. 		<IO Name="Facilities.SampleEnable" IOName="c_SAMPLE_STATION_ENABLE"/>
    63. 

  63. 		<IO Name="Facilities.SampleFlow1Enable" IOName="c_SAMPLE_STATION_FLOW_1_ENABLE"/>
    64. 

  64. 		<IO Name="Facilities.SampleFlow2Enable" IOName="c_SAMPLE_STATION_FLOW_2_ENABLE"/>
    65. 

  65. 		<IO Name="Facilities.SampleFlow3Enable" IOName="c_SAMPLE_STATION_FLOW_3_ENABLE"/>
    66. 

  66. 		<IO Name="Facilities.SampleFlow4Enable" IOName="c_SAMPLE_STATION_FLOW_4_ENABLE"/>
    67. 

  67. 		<IO Name="Facilities.FFULoaderError" IOName="r_FFUFaultLoader"/>
    68. 

  68. 		<IO Name="Facilities.FFUProcessError" IOName="r_FFUFaultProcess"/>
    69. 

  69. 		<IO Name="Facilities.FFULoaderPressure" IOName="r_FFUPressureLoader"/>
    70. 

  70. 		<IO Name="Facilities.FFUProcessPressure" IOName="r_FFUPressureProcess"/>
    71. 

  71. 		<IO Name="Facilities.ArsFluidDetect" IOName="r_SLIPSTREAM_FLUID_PRESENT"/>
    72. 

  72. 		<IO Name="Facilities.ProcessFluidDetect" IOName="r_CONTAINMENT_FLUID"/>
    73. 

  73. 		<IO Name="Facilities.SampleFluidDetect" IOName="r_SAMPLE_SYS_FLUID_PRESENT"/>
    74. 

  74. 	</Module>
    75. 

  75. 	<Module Name="SRD">
    76. 

  76. 		<IO Name="SRD.FluidContainment" IOName="r_SRD_FLUID_LEVEL"/> 
    77. 

  77. 		<IO Name="SRD.WaterPressure" IOName="r_SRD_SUPPLY_WATER_PRESS"/>  
    78. 

  78. 	</Module>
    79. 

  79. 	<Module Name="SRD1">
    80. 

  80. 		<IO Name="SRD1.WaterAbove" IOName="c_SRD1_Water_Above_Wafer"/>
    81. 

  81. 		<IO Name="SRD1.WaterBelow" IOName="c_SRD1_Water_Below_Wafer"/>
    82. 

  82. 		<IO Name="SRD1.ExhaustOn" IOName="c_SRD1_Exhaust_Fan_On"/>
    83. 

  83. 		<IO Name="SRD1.WaferPresence" IOName="r_SRD1_WAFER_PRESENT_anlg"/>
    84. 

  84. 

  85. 		<IO Name="SRD1.VacuumValue" IOName="r_SRD1_CHUCK_VACUUM_anlg"/>  
    86. 

  86. 		<IO Name="SRD1.DoorClose" IOName="c_SRD1_Shutter_Close"/>  
    87. 

  87. 		<IO Name="SRD1.DoorClosed" IOName="r_SRD1_SHUTTER_CLOSED"/>  
    88. 

  88. 		<IO Name="SRD1.DoorOpened" IOName="r_SRD1_SHUTTER_OPEN"/>  	
    89. 

  89. 		<IO Name="SRD1.ChuckVacuum" IOName="c_SRD1_CHUCK_VACUUM"/>
    90. 

  90. 		<IO Name="SRD1.ChuckATMOn" IOName="c_SRD1_CHUCK_ATM_ON"/>
    91. 

  91. 		<IO Name="SRD1.ChuckVacuumOK" IOName="r_SRD1_CHUCK_VAC_OK"/>	
    92. 

  92. 		<IO Name="SRD1.WaferPresent" IOName="r_SRD1_WAFER_PRESENT"/>	
    93. 

  93. 		<IO Name="SRD1.LiftUp" IOName="c_SRD1_LIFT_UP"/>
    94. 

  94. 		<IO Name="SRD1.LiftUpStatus" IOName="r_SRD1_LIFT_UP"/>
    95. 

  95. 		<IO Name="SRD1.Flipper1Out100Status" IOName="r_SRD1_100_FLIPPER1_OUT"/>
    96. 

  96. 		<IO Name="SRD1.Flipper2Out100Status" IOName="r_SRD1_100_FLIPPER2_OUT"/>
    97. 

  97. 		<IO Name="SRD1.Flipper3Out100Status" IOName="r_SRD1_100_FLIPPER3_OUT"/>
    98. 

  98. 		<IO Name="SRD1.Flipper1Out150Status" IOName="r_SRD1_150_FLIPPER1_OUT"/>
    99. 

  99. 		<IO Name="SRD1.Flipper2Out150Status" IOName="r_SRD1_150_FLIPPER2_OUT"/>
    100. 

  100. 		<IO Name="SRD1.Flipper3Out150Status" IOName="r_SRD1_150_FLIPPER3_OUT"/>
    101. 

  101. 		<IO Name="SRD1.Flipper1Out200Status" IOName="r_SRD1_200_FLIPPER1_OUT"/>
    102. 

  102. 		<IO Name="SRD1.Flipper2Out200Status" IOName="r_SRD1_200_FLIPPER2_OUT"/>
    103. 

  103. 		<IO Name="SRD1.Flipper3Out200Status" IOName="r_SRD1_200_FLIPPER3_OUT"/>
    104. 

  104. 		<IO Name="SRD1.FlippersIn100" IOName="c_SRD1_100_FLIPPERS_IN"/>
    105. 

  105. 		<IO Name="SRD1.FlippersIn150" IOName="c_SRD1_150_FLIPPERS_IN"/>
    106. 

  106. 		<IO Name="SRD1.FlippersIn200" IOName="c_SRD1_200_FLIPPERS_IN"/>
    107. 

  107. 		<IO Name="SRD1.WaterOn" IOName="c_SRD1_WATER_ON"/>
    108. 

  108. 		<IO Name="SRD1.WaterFlow" IOName="r_SRD1_WATER_FLOW"/>
    109. 

  109. 		<IO Name="SRD1.N2On" IOName="c_SRD1_N2_FLOW_ON"/>		
    110. 

  110. 	</Module>
    111. 

  111. 	<Module Name="SRD2">
    112. 

  112. 		<IO Name="SRD2.WaterAbove" IOName="c_SRD2_Water_Above_Wafer"/>
    113. 

  113. 		<IO Name="SRD2.WaterBelow" IOName="c_SRD2_Water_Below_Wafer"/>
    114. 

  114. 		<IO Name="SRD2.WaferPresence" IOName="r_SRD2_WAFER_PRESENT_anlg"/>
    115. 

  115. 		<IO Name="SRD2.ExhaustOn" IOName="c_SRD2_Exhaust_Fan_On"/>
    116. 

  116. 		<IO Name="SRD2.VacuumValue" IOName="r_SRD2_CHUCK_VACUUM_anlg"/>
    117. 

  117. 

  118. 		<IO Name="SRD2.VacuumValue" IOName="r_SRD2_CHUCK_VACUUM_anlg"/>
    119. 

  119. 		<IO Name="SRD2.DoorClose" IOName="c_SRD2_Shutter_Close"/>
    120. 

  120. 		<IO Name="SRD2.DoorClosed" IOName="r_SRD2_SHUTTER_CLOSED"/>
    121. 

  121. 		<IO Name="SRD2.DoorOpened" IOName="r_SRD2_SHUTTER_OPEN"/>
    122. 

  122. 		<IO Name="SRD2.ChuckVacuum" IOName="c_SRD2_CHUCK_VACUUM"/>
    123. 

  123. 		<IO Name="SRD2.ChuckATMOn" IOName="c_SRD2_CHUCK_ATM_ON"/>
    124. 

  124. 		<IO Name="SRD2.ChuckVacuumOK" IOName="r_SRD2_CHUCK_VAC_OK"/>
    125. 

  125. 		<IO Name="SRD2.WaferPresent" IOName="r_SRD2_WAFER_PRESENT"/>
    126. 

  126. 		<IO Name="SRD2.LiftUp" IOName="c_SRD2_LIFT_UP"/>
    127. 

  127. 		<IO Name="SRD2.LiftUpStatus" IOName="r_SRD2_LIFT_UP"/>
    128. 

  128. 		<IO Name="SRD2.Flipper1Out100Status" IOName="r_SRD2_100_FLIPPER1_OUT"/>
    129. 

  129. 		<IO Name="SRD2.Flipper2Out100Status" IOName="r_SRD2_100_FLIPPER2_OUT"/>
    130. 

  130. 		<IO Name="SRD2.Flipper3Out100Status" IOName="r_SRD2_100_FLIPPER3_OUT"/>
    131. 

  131. 		<IO Name="SRD2.Flipper1Out150Status" IOName="r_SRD2_150_FLIPPER1_OUT"/>
    132. 

  132. 		<IO Name="SRD2.Flipper2Out150Status" IOName="r_SRD2_150_FLIPPER2_OUT"/>
    133. 

  133. 		<IO Name="SRD2.Flipper3Out150Status" IOName="r_SRD2_150_FLIPPER3_OUT"/>
    134. 

  134. 		<IO Name="SRD2.Flipper1Out200Status" IOName="r_SRD2_200_FLIPPER1_OUT"/>
    135. 

  135. 		<IO Name="SRD2.Flipper2Out200Status" IOName="r_SRD2_200_FLIPPER2_OUT"/>
    136. 

  136. 		<IO Name="SRD2.Flipper3Out200Status" IOName="r_SRD2_200_FLIPPER3_OUT"/>
    137. 

  137. 		<IO Name="SRD2.FlippersIn100" IOName="c_SRD2_100_FLIPPERS_IN"/>
    138. 

  138. 		<IO Name="SRD2.FlippersIn150" IOName="c_SRD2_150_FLIPPERS_IN"/>
    139. 

  139. 		<IO Name="SRD2.FlippersIn200" IOName="c_SRD2_200_FLIPPERS_IN"/>
    140. 

  140. 		<IO Name="SRD2.WaterOn" IOName="c_SRD2_WATER_ON"/>
    141. 

  141. 		<IO Name="SRD2.WaterFlow" IOName="r_SRD2_WATER_FLOW"/>
    142. 

  142. 		<IO Name="SRD2.N2On" IOName="c_SRD2_N2_FLOW_ON"/>		
    143. 

  143. 	</Module>
    144. 

  144. 	<Module Name="VPWMain1">
    145. 

  145. 		<IO Name="VPWMain1.ChamberClosed" IOName="r_VPW_CHAMBER_CLOSED"/>
    146. 

  146. 		<IO Name="VPWMain1.ChamberOpened" IOName="r_VPW_CHAMBER_OPENED"/>
    147. 

  147. 		<IO Name="VPWMain1.ChamberClose" IOName="c_VPW_CHAMBER_CLOSE"/>
    148. 

  148. 		<IO Name="VPWMain1.LeakDetected" IOName="r_VPW_LEAK_DETECT"/>
    149. 

  149. 		<IO Name="VPWMain1.VacuumPumpPressure" IOName="r_VPW_VAC_PUMP_PRESSURE"/>
    150. 

  150. 		<IO Name="VPWMain1.VacuumPumpPower" IOName="c_VPW_VACUUM_PUMP_POWER"/>
    151. 

  151. 		<IO Name="VPWMain1.VacuumPumpEnable" IOName="c_VPW_VACUUM_PUMP_ENABLE"/>
    152. 

  152. 		<IO Name="VPWMain1.VacuumPumpSpeedEnable" IOName="c_VPW_VACUUM_PUMP_SPEED_ENABLE"/>
    153. 

  153. 		<IO Name="VPWMain1.VacuumPumpSpeed" IOName="c_VPW_VACUUM_PUMP_SPEED"/>
    154. 

  154. 		<IO Name="VPWMain1.BoosterPumpCurrent" IOName="r_VPW_BOOSTER_PUMP_CURRENT"/>
    155. 

  155. 		<IO Name="VPWMain1.BoosterPumpSpeed" IOName="c_VPW_BOOSTER_PUMP_SPPED"/>
    156. 

  156. 		<IO Name="VPWMain1.BoosterPumpEnable" IOName="c_VPW_BOOSTER_PUMP_ENABLE"/>
    157. 

  157. 		<IO Name="VPWMain1.BoosterPumpStatus" IOName="r_VPW_BOOSTER_PUMP_STATUS"/>
    158. 

  158. 		<IO Name="VPWMain1.DiwEnable" IOName="c_VPW_DIW_ENABLE"/>
    159. 

  159. 		<IO Name="VPWMain1.DiwProcess" IOName="c_VPW_DIW_PROCESS"/>
    160. 

  160. 		<IO Name="VPWMain1.DiwDegas" IOName="c_VPW_DIW_DEGAS"/>
    161. 

  161. 		<IO Name="VPWMain1.DiwTotalFlow" IOName="r_VPW_DIW_TOTAL_FLOW"/>
    162. 

  162. 		<IO Name="VPWMain1.DiwPressure" IOName="r_VPW_DIW_PRESSURE"/>
    163. 

  163. 		<IO Name="VPWMain1.DegasAdjust" IOName="c_VPW_DEGAS_ADJUST"/>
    164. 

  164. 		<IO Name="VPWMain1.DegasPurge" IOName="c_VPW_DEGAS_PURGE"/>
    165. 

  165. 		<IO Name="VPWMain1.DegasPumpEnable" IOName="c_VPW_DEGAS_PUMP_ENABLE"/>
    166. 

  166. 		<IO Name="VPWMain1.DegasPumpPressure" IOName="r_VPW_DEGAS_PUMP_PRESSURE"/>
    167. 

  167. 	</Module>
    168. 

  168. 	<Module Name="VPW1">
    169. 

  169. 		<IO Name="VPW1.DiwFlow" IOName="r_VPW_DIW_CELL_1_FLOW"/>
    170. 

  170. 		<IO Name="VPW1.VacuumPressure" IOName="r_VPW_CELL_1_VAC_PRESSURE"/>
    171. 

  171. 		<IO Name="VPW1.FlowDrip" IOName="c_VPW_1_FLOW_DRIP"/>
    172. 

  172. 		<IO Name="VPW1.FlowSmall" IOName="c_VPW_1_FLOW_SMALL"/>
    173. 

  173. 		<IO Name="VPW1.FlowLarge" IOName="c_VPW_1_FLOW_LARGE"/>
    174. 

  174. 		<IO Name="VPW1.VacuumValve" IOName="c_VPW_1_VACUUM_VALVE"/>
    175. 

  175. 		<IO Name="VPW1.DrainValve" IOName="c_VPW_1_DIW_DRAIN"/>
    176. 

  176. 		<IO Name="VPW1.VentValve" IOName="c_VPW_1_VENT_VALVE"/>
    177. 

  177. 	</Module>
    178. 

  178. 	<Module Name="VPW2">
    179. 

  179. 		<IO Name="VPW2.DiwFlow" IOName="r_VPW_DIW_CELL_2_FLOW"/>
    180. 

  180. 		<IO Name="VPW2.VacuumPressure" IOName="r_VPW_CELL_2_VAC_PRESSURE"/>
    181. 

  181. 		<IO Name="VPW2.FlowDrip" IOName="c_VPW_2_FLOW_DRIP"/>
    182. 

  182. 		<IO Name="VPW2.FlowSmall" IOName="c_VPW_2_FLOW_SMALL"/>
    183. 

  183. 		<IO Name="VPW2.FlowLarge" IOName="c_VPW_2_FLOW_LARGE"/>
    184. 

  184. 		<IO Name="VPW2.VacuumValve" IOName="c_VPW_2_VACUUM_VALVE"/>
    185. 

  185. 		<IO Name="VPW2.DrainValve" IOName="c_VPW_2_DIW_DRAIN"/>
    186. 

  186. 		<IO Name="VPW2.VentValve" IOName="c_VPW_2_VENT_VALVE"/>
    187. 

  187. 	</Module>
    188. 

  188. 	<Module Name="Safety">
    189. 

  189. 		<IO Name="Safety.TwincatState" IOName="r_EtherCat_State"/>
    190. 

  190. 		<IO Name="Safety.MainCommErr" IOName="r_Safety_ComErr"/>
    191. 

  191. 		<IO Name="Safety.MainFbErr" IOName="r_Safety_FbErr"/>
    192. 

  192. 		<IO Name="Safety.VpwHotConnectState" IOName="r_EtherCat_State_HotConnect_VPW"/>
    193. 

  193. 		<IO Name="Safety.VpwCommErr" IOName="r_Safety_ComErr_VPW"/>
    194. 

  194. 		<IO Name="Safety.VpwFbErr" IOName="r_Safety_FbErr_VPW"/>
    195. 

  195. 		<IO Name="Safety.Res12HotConnectState" IOName="r_EtherCat_State_HotConnect_RES1_2"/>
    196. 

  196. 		<IO Name="Safety.Res12CommErr" IOName="r_Safety_ComErr_RES1_2"/>
    197. 

  197. 		<IO Name="Safety.Res12FbErr" IOName="r_Safety_FbErr_RES1_2"/>
    198. 

  198. 		<IO Name="Safety.Res34HotConnectState" IOName="r_EtherCat_State_HotConnect_RES3_4"/>
    199. 

  199. 		<IO Name="Safety.Res34CommErr" IOName="r_Safety_ComErr_RES3_4"/>
    200. 

  200. 		<IO Name="Safety.Res34FbErr " IOName="r_Safety_FbErr_RES3_4"/>
    201. 

  201. 		<IO Name="Safety.FacilityHotConnectState" IOName="r_EtherCat_State_HotConnect_Facility"/>
    202. 

  202. 		<IO Name="Safety.FacilityCommErr" IOName="r_Safety_ComErr_Facility"/>
    203. 

  203. 		<IO Name="Safety.FacilityFbErr" IOName="r_Safety_FbErr_Facility"/>
    204. 

  204. 		<IO Name="Safety.Plating12HotConnectState" IOName="r_EtherCat_State_HotConnect_PlatingCell1_2"/>
    205. 

  205. 		<IO Name="Safety.Plating12CommErr" IOName="r_Safety_ComErr_PlatingCell1_2"/>
    206. 

  206. 		<IO Name="Safety.Plating12FbErr" IOName="r_Safety_FbErr_PlatingCell1_2"/>
    207. 

  207. 		<IO Name="Safety.Plating34HotConnectState" IOName="r_EtherCat_State_HotConnect_PlatingCell3_4"/>
    208. 

  208. 		<IO Name="Safety.Plating34CommErr" IOName="r_Safety_ComErr_PlatingCell3_4"/>
    209. 

  209. 		<IO Name="Safety.Plating34FbErr" IOName="r_Safety_FbErr_PlatingCell3_4"/>
    210. 

  210. 		<IO Name="Safety.SrdHotConnectState" IOName="r_EtherCat_State_HotConnect_SRD"/>
    211. 

  211. 		<IO Name="Safety.SrdCommErr" IOName="r_Safety_ComErr_SRD"/>
    212. 

  212. 		<IO Name="Safety.SrdFbErr" IOName="r_Safety_FbErr_SRD"/>
    213. 

  213. 		<IO Name="Safety.Cell12DoorsLeftLocked" IOName="r_Cell1_2_Doors_Left_Locked"/>
    214. 

  214. 		<IO Name="Safety.Cell12DoorsRightLocked" IOName="r_Cell1_2_Doors_Right_Locked"/>
    215. 

  215. 		<IO Name="Safety.Cell34DoorsLeftLocked" IOName="r_Cell3_4_Doors_Left_Locked"/>
    216. 

  216. 		<IO Name="Safety.Cell34DoorsRightLocked" IOName="r_Cell3_4_Doors_Right_Locked"/>
    217. 

  217. 		<IO Name="Safety.AlignerDoorClosed" IOName="r_Aligner_Door_Closed"/>
    218. 

  218. 		<IO Name="Safety.CassetteDoorsLeftLocked" IOName="r_Cassette_Doors_Left_Locked"/>
    219. 

  219. 		<IO Name="Safety.CassetteDoorsRightLocked" IOName="r_Cassette_Doors_Right_Locked"/>
    220. 

  220. 		<IO Name="Safety.Res12DoorClosed" IOName="r_RES1_2_Door_Closed"/>
    221. 

  221. 		<IO Name="Safety.Res34DoorClosed" IOName="r_RES3_4_Door_Closed"/>
    222. 

  222. 		<IO Name="Safety.VpwDoorClosed" IOName="r_VPW_Door_Closed"/>
    223. 

  223. 		<IO Name="Safety.PlumblingDoorClosed" IOName="r_Plumbing_Door_Closed"/>
    224. 

  224. 		<IO Name="Safety.SrdPanelClosed" IOName="r_SRD_Panel_Closed"/>	
    225. 

  225. 		<IO Name="Safety.HaltButtonLeft" IOName="r_Halt_Button_Left"/>	
    226. 

  226. 		<IO Name="Safety.HaltButtonRight" IOName="r_Halt_Button_Right"/>	
    227. 

  227. 		
    228. 

  228. 		<IO Name="Safety.RunStop" IOName="c_Safety_RunStop"/>	
    229. 

  229. 		<IO Name="Safety.ErrAck" IOName="c_Safety_ErrAck"/>	
    230. 

  230. 		<IO Name="Safety.VpwStoEstopRestart" IOName="c_Safety_VPW_STO_EStop_Restart"/>	
    231. 

  231. 		<IO Name="Safety.Res12StoEstopRestart" IOName="c_Safety_RES1_2_STO_EStop_Restart"/>	
    232. 

  232. 		<IO Name="Safety.Res34StoEstopRestart" IOName="c_Safety_RES3_4_STO_EStop_Restart"/>		
    233. 

  233. 		<IO Name="Safety.PlatingCell12Sto1EstopRestart" IOName="c_Safety_PlatingCell1_2_STO_1_EStop_Restart"/>	
    234. 

  234. 		<IO Name="Safety.PlatingCell12Sto2EstopRestart" IOName="c_Safety_PlatingCell1_2_STO_2_EStop_Restart"/>	
    235. 

  235. 		<IO Name="Safety.PlatingCell34Sto1EstopRestart" IOName="c_Safety_PlatingCell3_4_STO_1_EStop_Restart"/>	
    236. 

  236. 		<IO Name="Safety.PlatingCell34Sto2EstopRestart" IOName="c_Safety_PlatingCell3_4_STO_2_EStop_Restart"/>	
    237. 

  237. 		<IO Name="Safety.FacilityStoEstopRestart" IOName="c_Safety_Facility_STO_EStop_Restart"/>	
    238. 

  238. 		<IO Name="Safety.SrdStoEstopRestart" IOName="c_Safety_SRD_STO_EStop_Restart"/>	
    239. 

  239. 		<IO Name="Safety.ReqAlignerDoorLock" IOName="c_Safety_ReqAlignerDoorsLock"/>	
    240. 

  240. 		<IO Name="Safety.ReqCassetteDoorsLock" IOName="c_Safety_ReqCassetteDoorsLock"/>	
    241. 

  241. 		<IO Name="Safety.ReqCell12DoorsLock" IOName="c_Safety_ReqCell1_2DoorsLock"/>	
    242. 

  242. 		<IO Name="Safety.ReqCell34DoorsLock" IOName="c_Safety_ReqCell3_4DoorsLock"/>	
    243. 

  243. 		
    244. 

  244. 	</Module>
    245. 

  245. </BeckhoffModuleIOCfg>
    246.