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- using Aitex.Core.RT.Device;
- using Aitex.Core.RT.Log;
- using Aitex.Core.RT.Routine;
- using Aitex.Core.RT.SCCore;
- using Aitex.Core.Util;
- using MECF.Framework.Common.Equipment;
- using MECF.Framework.Common.RecipeCenter;
- using MECF.Framework.Common.Routine;
- using MECF.Framework.Common.SubstrateTrackings;
- using PunkHPX8_Core;
- using PunkHPX8_RT.Devices.AXIS;
- using PunkHPX8_RT.Devices.VpwCell;
- using PunkHPX8_RT.Devices.VpwMain;
- using PunkHPX8_RT.Modules.VpwMain;
- using PunkHPX8_RT.Schedulers;
- using System;
- using System.Collections.Generic;
- using System.Linq;
- using System.Text;
- using System.Threading.Tasks;
- namespace PunkHPX8_RT.Modules.VpwMain
- {
- public class VPWChamberDownRoutine : RoutineBase, IRoutine
- {
- private enum PrepareStep
- {
- ChamerDown,
- Delay,
- End
- }
- #region 内部变量
- /// <summary>
- /// Main设备
- /// </summary>
- private VpwMainDevice _mainDevice;
- #endregion
- /// <summary>
- /// 构造函数
- /// </summary>
- /// <param name="module"></param>
- public VPWChamberDownRoutine(string module) : base(module)
- {
- }
- /// <summary>
- /// 中止
- /// </summary>
- public void Abort()
- {
- Runner.Stop("Manual abort");
- }
- /// <summary>
- /// 监控
- /// </summary>
- /// <returns></returns>
- public RState Monitor()
- {
- Runner.Run(PrepareStep.ChamerDown, ChamberDown, CheckChamberOpend,_delay_10s)
- .End(PrepareStep.End,NullFun,_delay_1ms);
- return Runner.Status;
- }
- /// <summary>
- /// 打开 Chamber
- /// </summary>
- /// <returns></returns>
- private bool ChamberDown()
- {
- return _mainDevice.ChamberDown();
- }
- /// <summary>
- /// 检验Chamber是否打开
- /// </summary>
- /// <returns></returns>
- private bool CheckChamberOpend()
- {
- return _mainDevice.CommonData.ChamberOpened && !_mainDevice.CommonData.ChamberClosed;
- }
- /// <summary>
- /// 启动
- /// </summary>
- /// <param name="objs"></param>
- /// <returns></returns>
- public RState Start(params object[] objs)
- {
- _mainDevice = DEVICE.GetDevice<VpwMainDevice>(Module);
- return Runner.Start(Module, $"{Module} chamber down");
- }
- }
- }
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