PunkHPX8/PunkHPX8_RT/Modules/VpwCell/VpwVentPrewetRoutine.cs

using Aitex.Core.RT.Device;
using Aitex.Core.RT.Log;
using Aitex.Core.RT.Routine;
using Aitex.Core.RT.SCCore;
using Aitex.Core.Util;
using MECF.Framework.Common.Alarm;
using MECF.Framework.Common.Equipment;
using MECF.Framework.Common.RecipeCenter;
using MECF.Framework.Common.Routine;
using MECF.Framework.Common.SubstrateTrackings;
using PunkHPX8_Core;
using PunkHPX8_RT.Devices.AXIS;
using PunkHPX8_RT.Devices.VpwCell;
using PunkHPX8_RT.Devices.VpwMain;
using PunkHPX8_RT.Modules.VpwMain;
using System;
using System.Collections.Generic;
using System.Diagnostics;
using System.Linq;
using System.Text;
using System.Threading.Tasks;

namespace PunkHPX8_RT.Modules.VpwCell
{
    public class VpwVentPrewetRoutine : RoutineBase, IRoutine
    {
        private enum PrepareStep
        {
            CloseVacuumpumpAndValve,
            OpenVentValve,
            CheckLidReleaseVacuum,
            CloseVentValve,
            OpenCellValve,
            LoopStart,
            LoopRun,
            LoopEnd,
            End
        }
        #region 内部变量
        /// <summary>
        /// recipe
        /// </summary>
        private VpwRecipe _recipe;
        /// <summary>
        /// 设备
        /// </summary>
        private VpwCellDevice _vpwCellDevice;
        /// <summary>
        /// Main设备
        /// </summary>
        private VpwMainDevice _mainDevice;
        /// <summary>
        /// Lid Release Pressure
        /// </summary>
        private int _lidReleasePressure = 730;
        /// <summary>
        /// Lid Release Pressure 
        /// </summary>
        private int _lidReleasePressureTimeout = 10000;
        /// <summary>
        /// 总时长
        /// </summary>
        private int _totalMicrosecond = 0;
        /// <summary>
        /// 步骤
        /// </summary>
        private int _stepIndex = 0;
        /// <summary>
        /// 启动步骤时间
        /// </summary>
        private DateTime _startStepTime = DateTime.Now;
        #endregion
        /// <summary>
        /// 构造函数
        /// </summary>
        /// <param name="module"></param>
        public VpwVentPrewetRoutine(string module) : base(module)
        {
        }
        /// <summary>
        /// 中止
        /// </summary>
        public void Abort()
        {
            Runner.Stop("Manual abort");
        }
        /// <summary>
        /// 监控
        /// </summary>
        /// <returns></returns>
        public RState Monitor()
        {
            Runner.Run(PrepareStep.CloseVacuumpumpAndValve, CloseVacuumpumpAndValve, _delay_1ms)
                .Run(PrepareStep.OpenVentValve, OpenVentValve, _delay_1ms)
                .Wait(PrepareStep.CheckLidReleaseVacuum, CheckLidReleaseVacuum, _lidReleasePressureTimeout)
                .Run(PrepareStep.CloseVentValve, CloseVentValve, _delay_1ms)
                .Run(PrepareStep.OpenCellValve,OpenCellValve,_delay_1ms)
                .LoopStart(PrepareStep.LoopStart,"Loop Step",_recipe.VentRinseStep.Count,NullFun,_delay_1ms)
                .LoopRunWithStopStatus(PrepareStep.LoopRun, CheckStepComplete, () => { return false; }, _totalMicrosecond + 60 * 1000)//总时长再延迟1分种
                .LoopEnd(PrepareStep.LoopEnd,NullFun,_delay_1ms)
                .End(PrepareStep.End,NullFun,_delay_1ms);
            return Runner.Status;
        }
        /// <summary>
        /// 关闭真空泵和阀
        /// </summary>
        /// <returns></returns>
        private bool CloseVacuumpumpAndValve()
        {
            bool result = _mainDevice.VacuumPumpDisable();
            result &= _vpwCellDevice.VacuumValveOff();
            if (!result)
            {
                NotifyError(eEvent.ERR_VPW, "close vacuum pump and vavuum valve failed", 0);
            }
            return result;
        }
        /// <summary>
        /// 检验Lid Release真空数值
        /// </summary>
        /// <returns></returns>
        private bool CheckLidReleaseVacuum()
        {
            double vacuumValue = _vpwCellDevice.CommonData.VacuumPressure;
            return vacuumValue >= _lidReleasePressure;
        }
        /// <summary>
        /// open vent valve
        /// </summary>
        /// <returns></returns>
        private bool OpenVentValve()
        {
            bool result = _vpwCellDevice.VentValveOn();
            if (!result)
            {
                NotifyError(eEvent.ERR_VPW, "open vent valve failed", 0);
            }
            return result;
        }
        /// <summary>
        /// close vent valve
        /// </summary>
        /// <returns></returns>
        private bool CloseVentValve()
        {
            bool result = _vpwCellDevice.VentValveOff();
            if (!result)
            {
                NotifyError(eEvent.ERR_VPW, "close vent valve failed", 0);
            }
            return result;
        }
        /// <summary>
        /// 打开相应的cell valve
        /// </summary>
        /// <returns></returns>
        private bool OpenCellValve()
        {
            int count = 0;
            int enableCount = 0;
            if (_recipe.VentPrewetDripEnable)
            {
                count += _vpwCellDevice.FlowDripOn()?1:0;
                enableCount++;
            }
            else
            {
                _vpwCellDevice.FlowDripOff();
            }
            if (_recipe.VentPrewetLargeEnable)
            {
                count += _vpwCellDevice.FlowLargeOn() ? 1 : 0;
                enableCount++;
            }
            else
            {
                _vpwCellDevice.FlowLargeOff();
            }
            if (_recipe.VentPrewetSmallEnable)
            {
                count += _vpwCellDevice.FlowSmallOn() ? 1 : 0;
                enableCount++;
            }
            else
            {
                _vpwCellDevice.FlowSmallOff();
            }
            bool result = count == enableCount;
            if (!result)
            {
                NotifyError(eEvent.ERR_VPW, "open cell valve failed", 0);
            }

            foreach (var item in _recipe.VentRinseStep)
            {
                _totalMicrosecond += item.DurationSeconds * 1000;
            }
            _startStepTime = DateTime.Now;
            _stepIndex = 0;
            return result;
        }
        /// <summary>
        /// 检验步骤是否完成
        /// </summary>
        /// <returns></returns>
        private bool CheckStepComplete()
        {
            _mainDevice.CellFlow = _vpwCellDevice.CommonData.DiwFlow;
            if (_stepIndex >= _recipe.VentRinseStep.Count)
            {
                LOG.WriteLog(eEvent.INFO_VPW, Module, $"vent step {_stepIndex} is over step count {_recipe.VentRinseStep.Count}");
                return true;
            }

            int length = _recipe.VentRinseStep[_stepIndex].DurationSeconds;
            if (DateTime.Now.Subtract(_startStepTime).TotalSeconds >= length)
            {
                _stepIndex++;
                _startStepTime = DateTime.Now;
                if (_stepIndex >= _recipe.VentRinseStep.Count)
                {
                    LOG.WriteLog(eEvent.INFO_VPW, Module, $"vent step {_stepIndex} is over step count {_recipe.VentRinseStep.Count}");
                    return true;
                }
                bool result = _vpwCellDevice.ChangeRotationSpeed(_recipe.VentRinseStep[_stepIndex].RotationSpeed*6);
                if (result)
                {
                    LOG.WriteLog(eEvent.INFO_VPW, Module, $"vent step {_stepIndex} complete");
                }
                return result;
            }

            int firstDelay = SC.GetValue<int>($"{Module}.FlowCheckDelay") * 1000;
            if (DateTime.Now.Subtract(_startStepTime).TotalMilliseconds >= firstDelay)
            {
                bool abnormal = CheckDisable();
                if (abnormal)
                {
                    return false;
                }
            }
            return false;
        }
        /// <summary>
        /// 检验数据
        /// </summary>
        /// <returns></returns>
        private bool CheckDisable()
        {
            double flow = _vpwCellDevice.CommonData.DiwFlow;
            double lowError = _recipe.VentPrewetFlowSetPoint * (1 - (double)_recipe.VentPrewetFlowErrorPercent / 100);
            double upError = _recipe.VentPrewetFlowSetPoint * (1 + (double)_recipe.VentPrewetFlowErrorPercent / 100);
            double lowWarn = _recipe.VentPrewetFlowSetPoint * (1 - (double)_recipe.VentPrewetFlowWarningPercent / 100);
            double upWarn = _recipe.VentPrewetFlowSetPoint * (1 + (double)_recipe.VentPrewetFlowWarningPercent / 100);
            if (flow<lowError)
            {
                NotifyError(eEvent.ERR_VPW, $"{Module} cell flow {flow} is less than {lowError} ", 0);
                Abort();
                return true;
            }
            if (flow > upError)
            {
                NotifyError(eEvent.ERR_VPW, $"{Module} cell flow {flow} is up than {upError} ", 0);
                Abort();
                return true;
            }
            if ((flow <= upError && flow >= upWarn) || (flow >= lowError && flow <= lowWarn))
            {
                string str = $"{Module} cell flow {flow} is in warning";
                if (AlarmListManager.Instance.AddWarn(Module, $"{Module} cell flow", str))
                {
                    LOG.WriteLog(eEvent.WARN_VPW, Module, str);
                }
            }

            bool isSimulatorMode = SC.GetValue<bool>("System.IsSimulatorMode");
            if (!isSimulatorMode)
            {
                if (!_vpwCellDevice.CheckRotationRunning())
                {
                    NotifyError(eEvent.ERR_VPW, $"{Module} rotation is stopped", 0);
                    Abort();
                    return true;
                }
            }
            return false;
        }

        /// <summary>
        /// 启动
        /// </summary>
        /// <param name="objs"></param>
        /// <returns></returns>
        public RState Start(params object[] objs)
        {
            _recipe=(VpwRecipe)objs[0];
            _vpwCellDevice = DEVICE.GetDevice<VpwCellDevice>(Module);
            _mainDevice = DEVICE.GetDevice<VpwMainDevice>(ModuleName.VPWMain1.ToString());
            _lidReleasePressure = SC.GetValue<int>($"{Module}.LidReleasePressure");
            _lidReleasePressureTimeout = SC.GetValue<int>($"{Module}.LidReleasePressureTimeout")*1000;
            _totalMicrosecond = 0;
            _stepIndex = 0;
            return Runner.Start(Module, $"{Module} vent prewet");
        }
        /// <summary>
        /// 重试
        /// </summary>
        /// <param name="step"></param>
        public RState Retry(int step)
        {
            if (_recipe == null)
            {
                NotifyError(eEvent.ERR_VPW, "recipe is null", -1);
                return RState.Failed;
            }
            List<Enum> preStepIds = new List<Enum>();
            return Runner.Retry(PrepareStep.OpenVentValve, preStepIds, Module, "Vent Prewet Retry");
        }
    }
}