PlatingCellEntity.cs 16 KB

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  1. using Aitex.Core.Common;
  2. using Aitex.Core.RT.DataCenter;
  3. using Aitex.Core.RT.Device;
  4. using Aitex.Core.RT.Fsm;
  5. using Aitex.Core.RT.Log;
  6. using Aitex.Core.RT.OperationCenter;
  7. using Aitex.Core.RT.RecipeCenter;
  8. using Aitex.Core.RT.SCCore;
  9. using Aitex.Core.Util;
  10. using Aitex.Core.Utilities;
  11. using MECF.Framework.Common.Equipment;
  12. using MECF.Framework.Common.Persistent.Reservoirs;
  13. using MECF.Framework.Common.ProcessCell;
  14. using MECF.Framework.Common.RecipeCenter;
  15. using MECF.Framework.Common.Routine;
  16. using MECF.Framework.Common.SubstrateTrackings;
  17. using MECF.Framework.Common.ToolLayout;
  18. using PunkHPX8_Core;
  19. using PunkHPX8_RT.Devices.PlatingCell;
  20. using PunkHPX8_RT.Devices.PowerSupplier;
  21. using PunkHPX8_RT.Devices.Reservoir;
  22. using PunkHPX8_RT.Devices.Temperature;
  23. using PunkHPX8_RT.Modules.Reservoir;
  24. using PunkHPX8_RT.Modules.VpwCell;
  25. using System;
  26. using System.Collections.Generic;
  27. using System.Linq;
  28. using System.Text;
  29. using System.Threading.Tasks;
  30. namespace PunkHPX8_RT.Modules.PlatingCell
  31. {
  32. public class PlatingCellEntity : Entity, IEntity, IModuleEntity
  33. {
  34. public enum PlatingCellMsg
  35. {
  36. NONE,
  37. Error,
  38. ResumeError,
  39. Initialize,
  40. Manual,
  41. Auto,
  42. CurrentShortTest,
  43. CloseFlowValve,
  44. OpenFlowValve,
  45. RunRecipe,
  46. Abort,
  47. Init,
  48. CCR,
  49. CCRAbort
  50. }
  51. #region 常量
  52. private const string STRATUS = "Stratus";
  53. private const string AUTO = "Auto";
  54. private const string MANUAL = "Manual";
  55. private const string DISABLED = "Disabled";
  56. private const string ENGINEERING = "Engineering";
  57. private const string PRODUCTION = "Production";
  58. #endregion
  59. #region 内部变量
  60. /// <summary>
  61. /// 持久化数值
  62. /// </summary>
  63. private PlatingCellPersistentValue _persistentValue;
  64. /// <summary>
  65. /// 当前recipe
  66. /// </summary>
  67. private DepRecipe _currentRecipe;
  68. /// <summary>
  69. /// recipe时间
  70. /// </summary>
  71. private int _recipeTime;
  72. /// <summary>
  73. /// 当前RunRecipe Routine
  74. /// </summary>
  75. private RoutineBase _currentRunRecipeRoutine;
  76. /// <summary>
  77. /// c&m Initialize routine
  78. /// </summary>
  79. private PlatingCellInitializeRoutine _initializeRoutine;
  80. /// <summary>
  81. /// CCR
  82. /// </summary>
  83. private PlatingCellCCRRoutine _cCRRoutine;
  84. #endregion
  85. #region 属性
  86. /// <summary>
  87. /// 模块名称
  88. /// </summary>
  89. public ModuleName Module { get; private set; }
  90. /// <summary>
  91. /// 是否Init
  92. /// </summary>
  93. public bool IsInit
  94. {
  95. get { return fsm.State == (int)PlatingCellState.Init; }
  96. }
  97. /// <summary>
  98. /// 是否Idle
  99. /// </summary>
  100. public bool IsIdle
  101. {
  102. get
  103. {
  104. return fsm.State == (int)PlatingCellState.Idle;
  105. }
  106. }
  107. /// <summary>
  108. /// 是否错误
  109. /// </summary>
  110. public bool IsError
  111. {
  112. get { return fsm.State == (int)PlatingCellState.Error; }
  113. }
  114. /// <summary>
  115. /// 正在忙碌
  116. /// </summary>
  117. public bool IsBusy
  118. {
  119. get { return fsm.State == (int)PlatingCellState.Initializing; }
  120. }
  121. /// <summary>
  122. /// 化学液
  123. /// </summary>
  124. public string Chemistry
  125. {
  126. get { return _currentRecipe != null ? _currentRecipe.Chemistry : ""; }
  127. }
  128. /// <summary>
  129. /// 是否禁用
  130. /// </summary>
  131. public bool IsDisable { get { return _persistentValue == null || _persistentValue.OperatingMode == DISABLED; } }
  132. /// <summary>
  133. /// 自动模式
  134. /// </summary>
  135. public bool IsAuto { get { return _persistentValue != null && _persistentValue.OperatingMode == AUTO; } }
  136. /// <summary>
  137. /// 自动模式
  138. /// </summary>
  139. public bool IsManual { get { return _persistentValue != null && _persistentValue.OperatingMode == MANUAL; } }
  140. /// <summary>
  141. /// 是否为工程模式
  142. /// </summary>
  143. public bool IsEngineering { get { return _persistentValue != null && _persistentValue.RecipeOperatingMode == ENGINEERING; } }
  144. /// <summary>
  145. /// 是否为产品模式
  146. /// </summary>
  147. public bool IsProduction { get { return _persistentValue != null && _persistentValue.RecipeOperatingMode == PRODUCTION; } }
  148. /// <summary>
  149. /// 状态机状态
  150. /// </summary>
  151. public PlatingCellState State { get { return (PlatingCellState)fsm.State; } }
  152. /// <summary>
  153. /// 是否初始化完成
  154. /// </summary>
  155. public bool IsInitialized { get { return fsm.State >= (int)PlatingCellState.Initialized; } }
  156. /// <summary>
  157. /// Reservoir项
  158. /// </summary>
  159. private ReservoirItem _reservoirItem;
  160. /// <summary>
  161. /// Wafer信息
  162. /// </summary>
  163. public WaferInfo WaferInfo { get { return WaferManager.Instance.GetWafer(Module,0); } }
  164. #endregion
  165. /// <summary>
  166. /// 构造函数
  167. /// </summary>
  168. /// <param name="module"></param>
  169. public PlatingCellEntity(ModuleName module)
  170. {
  171. this.Module = module;
  172. InitialFsm();
  173. }
  174. /// <summary>
  175. /// 初始化
  176. /// </summary>
  177. /// <returns></returns>
  178. protected override bool Init()
  179. {
  180. InitializeRoutine();
  181. InitializeDATA();
  182. InitializeOperation();
  183. InitializeParameter();
  184. return true;
  185. }
  186. /// <summary>
  187. /// 初始化参数
  188. /// </summary>
  189. private void InitializeParameter()
  190. {
  191. _persistentValue = PlatingCellPersistentManager.Instance.GetPlatingCellPersistentValue(Module.ToString());
  192. if (_persistentValue == null)
  193. {
  194. LOG.WriteLog(eEvent.ERR_PLATINGCELL, Module.ToString(), "Persistent Value Object is not exist");
  195. }
  196. }
  197. /// <summary>
  198. /// 初始化Routine
  199. /// </summary>
  200. private void InitializeRoutine()
  201. {
  202. _initializeRoutine = new PlatingCellInitializeRoutine(Module.ToString());
  203. _cCRRoutine = new PlatingCellCCRRoutine(Module.ToString());
  204. }
  205. /// <summary>
  206. /// 初始化DATA
  207. /// </summary>
  208. private void InitializeDATA()
  209. {
  210. DATA.Subscribe($"{Module}.FsmState", () => ((PlatingCellState)fsm.State).ToString(), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  211. DATA.Subscribe($"{Module}.CurrentRecipe", () => _currentRecipe != null ? _currentRecipe.Ppid : "", SubscriptionAttribute.FLAG.IgnoreSaveDB);
  212. DATA.Subscribe($"{Module}.TotalTime", () => _recipeTime, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  213. DATA.Subscribe($"{Module}.TimeRemain", () => _recipeTime != 0 && _currentRunRecipeRoutine != null ? (_recipeTime - Math.Round((double)_currentRunRecipeRoutine.ElapsedMilliseconds / 1000, 0)) : 0, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  214. DATA.Subscribe($"{Module}.Chemistry", () => _currentRecipe != null ? _currentRecipe.Chemistry : "", SubscriptionAttribute.FLAG.IgnoreSaveDB);
  215. DATA.Subscribe($"{Module}.IsInit", () => IsInit, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  216. DATA.Subscribe($"{Module}.IsIdle", () => IsIdle, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  217. DATA.Subscribe($"{Module}.IsError", () => IsError, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  218. DATA.Subscribe($"{Module}.IsBusy", () => IsBusy, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  219. DATA.Subscribe($"{Module}.IsDisable", () => IsDisable, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  220. }
  221. /// <summary>
  222. /// 初始化Operation
  223. /// </summary>
  224. private void InitializeOperation()
  225. {
  226. OP.Subscribe($"{Module}.InitializeAll", (cmd, args) => { return CheckToPostMessage<PlatingCellState, PlatingCellMsg>(eEvent.ERR_RESERVOIR, Module.ToString(), (int)PlatingCellMsg.Initialize); });
  227. OP.Subscribe($"{Module}.ManualCCRStart", (cmd, args) => { return CheckToPostMessage<PlatingCellState, PlatingCellMsg>(eEvent.ERR_RESERVOIR, Module.ToString(), (int)PlatingCellMsg.CCR); });
  228. OP.Subscribe($"{Module}.ManualCCRStop", (cmd, args) => { return CheckToPostMessage<PlatingCellState, PlatingCellMsg>(eEvent.ERR_RESERVOIR, Module.ToString(), (int)PlatingCellMsg.CCRAbort); });
  229. }
  230. /// 初始化状态机
  231. /// </summary>
  232. private void InitialFsm()
  233. {
  234. fsm = new StateMachine<PlatingCellEntity>(Module.ToString(), (int)PlatingCellState.Init, 100);
  235. fsm.EnableRepeatedMsg(true);
  236. AnyStateTransition(PlatingCellMsg.Error, NullFunc, PlatingCellState.Error);
  237. //Initialized
  238. Transition(PlatingCellState.Error, PlatingCellMsg.Initialize, InitializeAll, PlatingCellState.Initializing);
  239. Transition(PlatingCellState.Init, PlatingCellMsg.Initialize, InitializeAll, PlatingCellState.Initializing);
  240. Transition(PlatingCellState.Idle, PlatingCellMsg.Initialize, InitializeAll, PlatingCellState.Initializing);
  241. Transition(PlatingCellState.Initializing, FSM_MSG.TIMER, InitializeAllMonitor, PlatingCellState.Idle);
  242. //CCR
  243. Transition(PlatingCellState.Idle, PlatingCellMsg.CCR, ManualCCRStart, PlatingCellState.CCRing);
  244. Transition(PlatingCellState.CCRing, FSM_MSG.TIMER, CCRMonitor, PlatingCellState.Idle);
  245. Transition(PlatingCellState.CCRing, PlatingCellMsg.CCRAbort, CCRAbort, PlatingCellState.Init);
  246. //直接进入Idle
  247. Transition(PlatingCellState.Initialized, FSM_MSG.TIMER, NullFunc, PlatingCellState.Idle);
  248. //Enter Init
  249. Transition(PlatingCellState.Idle, PlatingCellMsg.Init, NullFunc, PlatingCellState.Init);
  250. EnumLoop<PlatingCellState>.ForEach((item) => { fsm.MapState((int)item, item.ToString()); });
  251. EnumLoop<PlatingCellState>.ForEach((item) => { fsm.MapMessage((int)item, item.ToString()); });
  252. }
  253. /// <summary>
  254. /// 手动CCR
  255. /// </summary>
  256. /// <returns></returns>
  257. private bool ManualCCRStart(object[] param)
  258. {
  259. bool result = _cCRRoutine.Start() == RState.Running;
  260. return result;
  261. }
  262. /// <summary>
  263. /// CCR 监控
  264. /// </summary>
  265. /// <param name="param"></param>
  266. /// <returns></returns>
  267. private bool CCRMonitor(object[] param)
  268. {
  269. RState rsstate = RState.Running;
  270. rsstate = _cCRRoutine.Monitor();
  271. if (rsstate == RState.End)
  272. {
  273. return true;
  274. }
  275. else if (rsstate == RState.Failed || rsstate == RState.Timeout)
  276. {
  277. PostMsg(PlatingCellMsg.Error);
  278. return false;
  279. }
  280. return false;
  281. }
  282. /// <summary>
  283. /// CCR abort
  284. /// </summary>
  285. /// <param name="param"></param>
  286. /// <returns></returns>
  287. private bool CCRAbort(object[] param)
  288. {
  289. if(_cCRRoutine.Monitor() == RState.Running)
  290. {
  291. _cCRRoutine.Abort();
  292. }
  293. return true;
  294. }
  295. /// <summary>
  296. /// 初始化
  297. /// </summary>
  298. /// <returns></returns>
  299. private bool InitializeAll(object[] param)
  300. {
  301. if (_persistentValue == null)
  302. {
  303. LOG.WriteLog(eEvent.ERR_RESERVOIR, Module.ToString(), "persistent is null");
  304. return false;
  305. }
  306. if (fsm.State == (int)PlatingCellState.Initializing)
  307. {
  308. LOG.WriteLog(eEvent.WARN_PLATINGCELL, Module.ToString(), "state is Initializing,cannot do initialize");
  309. return false;
  310. }
  311. if (!CheckReservoirInitialized())
  312. {
  313. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), "Reservoir is not initialized");
  314. return false;
  315. }
  316. if (!MetalUsageMointor(Module.ToString()))
  317. {
  318. return false;
  319. }
  320. if ("Auto".Equals(_persistentValue.OperatingMode))
  321. {
  322. if (!CheckReservoirIsAuto())
  323. {
  324. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), "Reservoir is not in Auto OperationMode");
  325. return false;
  326. }
  327. }
  328. bool result = _initializeRoutine.Start(_persistentValue) == RState.Running;
  329. return result;
  330. }
  331. /// <summary>
  332. /// 检验Reservoir是否Auto
  333. /// </summary>
  334. /// <returns></returns>
  335. private bool CheckReservoirIsAuto()
  336. {
  337. string reservoir = ReservoirItemManager.Instance.GetReservoirByPlatingCell(Module.ToString());
  338. ReservoirsPersistentValue reservoirsPersistentValue = ReservoirsPersistentManager.Instance.GetReservoirsPersistentValue(reservoir);
  339. if ("Auto".Equals(reservoirsPersistentValue.OperatingMode))
  340. {
  341. return true;
  342. }
  343. return false;
  344. }
  345. /// <summary>
  346. /// 检验Reservoir是否Initialized
  347. /// </summary>
  348. /// <returns></returns>
  349. private bool CheckReservoirInitialized()
  350. {
  351. string reservoir = ReservoirItemManager.Instance.GetReservoirByPlatingCell(Module.ToString());
  352. ReservoirEntity reservoirEntity = Singleton<RouteManager>.Instance.GetModule<ReservoirEntity>(reservoir);
  353. if (reservoirEntity != null)
  354. {
  355. return reservoirEntity.IsInitialized;
  356. }
  357. return false;
  358. }
  359. /// <summary>
  360. /// 监控 PM Counter Metal用量
  361. /// </summary>
  362. private bool MetalUsageMointor(string Module)
  363. {
  364. return true;
  365. }
  366. /// <summary>
  367. /// Initialize 监控
  368. /// </summary>
  369. /// <param name="param"></param>
  370. /// <returns></returns>
  371. private bool InitializeAllMonitor(object[] param)
  372. {
  373. RState rsstate = RState.Running;
  374. rsstate = _initializeRoutine.Monitor();
  375. if (rsstate == RState.End)
  376. {
  377. return true;
  378. }
  379. else if (rsstate == RState.Failed || rsstate == RState.Timeout)
  380. {
  381. PostMsg(PlatingCellMsg.Error);
  382. return false;
  383. }
  384. return false;
  385. }
  386. /// <summary>
  387. /// EnterInit
  388. /// </summary>
  389. public void EnterInit()
  390. {
  391. if ((PlatingCellState)fsm.State != PlatingCellState.Idle) return;
  392. else
  393. {
  394. CheckToPostMessage<PlatingCellState, PlatingCellMsg>(eEvent.ERR_PLATINGCELL, Module.ToString(), (int)PlatingCellMsg.Init);
  395. }
  396. }
  397. public bool Check(int msg, out string reason, params object[] args)
  398. {
  399. reason = "";
  400. return true;
  401. }
  402. public bool CheckAcked(int msg)
  403. {
  404. throw new NotImplementedException();
  405. }
  406. public int Invoke(string function, params object[] args)
  407. {
  408. switch (function)
  409. {
  410. case "HomeAll":
  411. if (IsIdle)
  412. {
  413. return (int)FSM_MSG.NONE;
  414. }
  415. if (CheckToPostMessage<PlatingCellState, PlatingCellMsg>(eEvent.ERR_PLATINGCELL, Module.ToString(), (int)PlatingCellMsg.Initialize))
  416. {
  417. return (int)PlatingCellMsg.Initialize;
  418. }
  419. else
  420. {
  421. return (int)FSM_MSG.NONE;
  422. }
  423. }
  424. return (int)FSM_MSG.NONE;
  425. }
  426. }
  427. }