PunkHPX8/PunkHPX8_RT/Config/RecipeFormat.xml

<?xml version="1.0" encoding="utf-8"?>
<Aitex>
  <TableRecipeFormat RecipeVersion="Venus">
    <!--###########################################-->
    <Catalog DisplayName="StepInfo">
      <Group DisplayName="Set">
        <Step ModuleName="" DeviceType="" DisplayName="No." ControlName="StepNo" InputType="ReadOnly" />
        <Step ModuleName="" DeviceType="" DisplayName="Name" ControlName="Name" InputType="TextInput" />
        <Step ModuleName="" DeviceType="" DisplayName="Loop" ControlName="Loop" InputType="EditableSelection" Description="Loop set：set as  Loop Num ... LoopEnd">
          <Item DisplayName=" " ControlName="None" />
          <Item DisplayName="Loop 10" ControlName="LoopStart" />
          <Item DisplayName="Loop End" ControlName="LoopEnd" />
        </Step>

        <Step ModuleName="" DeviceType="" DisplayName="Step Mode" ControlName="EndBy" InputType="ReadOnlySelection" Description="End by step time or RF time">
          <Item DisplayName="Step Time" ControlName="EndByStepTime" />
          <Item DisplayName="RF Time" ControlName="EndByRfTime" />
        </Step>
        <Step ModuleName="" DeviceType="" DisplayName="Step Time" ControlName="Time" InputType="TimeInput" Min="0" Max="600" />
      </Group>
    </Catalog>
    <!--###########################################-->
    <Catalog DisplayName="Chamber Pressure Setting">
      <Group DisplayName="Chamber Pressure">
        <Step ModuleName="Pressure" DeviceType="PressureControl" DisplayName="控压模式" ControlName="PressureControl.SetTVMode" InputType="ReadOnlySelection" Description="Throttle Mode">
          <Item DisplayName="压力模式" ControlName="TVPressureCtrl" />
          <Item DisplayName="位置模式" ControlName="TVPositionCtrl" />
        </Step>
        <Step ModuleName="Pressure" DeviceType="PressureControl" DisplayName="蝶阀位置" ControlName="PressureControl.SetTVPosition" InputType="NumInput" Min="0" Max="100" Description="Throttle valve position" />
        <Step ModuleName="Pressure" DeviceType="PressureControl" DisplayName="蝶阀压力" ControlName="PressureControl.SetTVPressure" InputType="NumInput" Min="0" Max="760000" Description="Throttle valve pressure" />
      </Group>
    </Catalog>
    <!--###########################################-->
    <Catalog DisplayName="LiftPin State Setting">
      <Group DisplayName="LiftPin State">
        <Step ModuleName="Pin" DeviceType="PinControl" DisplayName="LiftPin State" ControlName="LiftPin.SetState" InputType="ReadOnlySelection" Description="LiftPin State">
          <Item DisplayName="Up" ControlName="Up" />
          <Item DisplayName="Down" ControlName="Down" />
        </Step>
      </Group>
    </Catalog>
    <!--###########################################-->
    <Catalog DisplayName="RF Setting">
      <Group DisplayName="RF">
        <Step ModuleName="RF" DeviceType="RF" DisplayName="RF Time" ControlName="Rf.SetPowerOnTime" InputType="TimeInput" Min="0" Max="100000" Description="RF Power On Time" />
        <Step ModuleName="RF" DeviceType="RF" DisplayName="RFPower" ControlName="Rf.SetPower" InputType="NumInput" Min="0" Max="1000" Description="RF Power value" />
      </Group>
    </Catalog>
    <!--###########################################-->
    <Catalog DisplayName="GasFlow">
      <Group DisplayName="MFC">
        <Step ModuleName="Mfc" DeviceType="MFC" DisplayName="O2" ControlName="MfcGas1" InputType="NumInput" Min="0" Max="5000" Description="M202" />
        <Step ModuleName="Mfc" DeviceType="MFC" DisplayName="AR" ControlName="MfcGas2" InputType="NumInput" Min="0" Max="2000" Description="M204" />
        <Step ModuleName="Mfc" DeviceType="MFC" DisplayName="N2" ControlName="MfcGas3" InputType="NumInput" Min="0" Max="1000" Description="M203" />
      </Group>
    </Catalog>
    <!--###########################################-->
    <Validation>
      <Predefine>
        <Item VarName="Temp_DT_Alarm" Value="50" />
        <Item VarName="Min_Heat_Purge_Setpoint" Value="50" />
        <Item VarName="Min_Reactor_Pressure_Setpoint" Value="30" />
        <Item VarName="Min_Spindle_Speed_Setpoint" Value="120" />
        <Item VarName="Max_Pressure_Ramp_Rate" Value="8" />
        <Item VarName="Max_Spindle_Ramp_Rate" Value="2" />
        <Item VarName="Max_Temperature_Ramp_Up_Rate" Value="2" />
        <Item VarName="Max_Temperature_Ramp_Down_Rate" Value="2" />
        <Item VarName="Max_Temperature_Setpoint" Value="1200" />
        <Item VarName="AZone_Max_Current_Setpoint" Value="375" />
        <Item VarName="BZone_Max_Current_Setpoint" Value="750" />
        <Item VarName="CZone_Max_Current_Setpoint" Value="1125" />
        <Item VarName="DZone_Max_Current_Setpoint" Value="1125" />
        <Item VarName="Pyro900Temp" Value="900" />
        <Item VarName="Pyro500Temp" Value="500" />
        <Item VarName="Pyro900Gas" Value="H2" />
        <Item VarName="Pyro500_MFC_HP" Value="10000" />
        <Item VarName="Pyro900_MFC_HP" Value="20000" />
        <Item VarName="Pyro900_DZone_DT" Value="20" />
      </Predefine>
      <CheckVariable>
        <Var Name="Time" />
        <!--Var Name="Ramp" />
        <Var Name="MFC1" />
        <Var Name="MFC2" />
        <Var Name="MFC3" />
        <Var Name="MFC4" />
        <Var Name="MFC5" />
        <Var Name="Reactor.Pressure" />
        <Var Name="RF.Enable" />
        <Var Name="RF.Setpoint"/-->
      </CheckVariable>
      <Restriction>
      </Restriction>
    </Validation>
  </TableRecipeFormat>
  <TableRecipeData RecipeVersion="Venus" Barcode="" CreatedBy="System" CreationTime="2016-05-13T13:56:44" LastRevisedBy="admin" LastRevisionTime="2015-10-13T13:56:44" PressureMode="TV" BasePressure="0.0" SubstrateTemp="50" PumpingPinState="Down" PumpDownLimit="120" PurgeActive="false" Description="（Empty）">
    <Step StepNo="Step 1" Name="initial" Loop=" " Time="00:00:01" EndBy="EndByStepTime">
      <Pressure PressureControl.SetTVMode="TVPressureCtrl" PressureControl.SetTVPosition="0" PressureControl.SetTVPressure="50" PressureControl.SetBoostPressure="100" PressureControl.SetChamberPressure="100" />
      <Pin LiftPin.SetState="Down"/>
      <RF Rf.SetPowerOnTime ="00:00:00" Rf.SetMode ="ContinuousWaveMode" Match.SetMatchProcessMode="PresetMode" Rf.SetPower="0" Rf.SetPulsingDuty="0" Rf.SetPulsingFrequency="0" Match.SetMatchPositionC1="50" Match.SetMatchPositionC2="50" />
      <Mfc MfcGas1 ="0" MfcGas2="0" MfcGas3="0" MfcGas4="0" MfcGas5="0" />
    </Step>
  </TableRecipeData>
  <TableRecipeSchema>
    <xs:schema attributeFormDefault="unqualified" elementFormDefault="qualified" xmlns:xs="http://www.w3.org/2001/XMLSchema">
      <xs:simpleType name="pressureMode">
        <xs:restriction base="xs:string">
          <xs:enumeration value="TV" />
          <xs:enumeration value="N2Flow" />
        </xs:restriction>
      </xs:simpleType>
      <xs:simpleType name="booleanType">
        <xs:restriction base="xs:string">
          <xs:enumeration value="0" />
          <xs:enumeration value="1" />
          <xs:enumeration value="False" />
          <xs:enumeration value="True" />
          <xs:enumeration value="false" />
          <xs:enumeration value="true" />
        </xs:restriction>
      </xs:simpleType>
      <xs:element name="TableRecipeData">
        <xs:complexType>
          <xs:sequence>
            <xs:element maxOccurs="unbounded" name="Step">
              <xs:complexType>
                <xs:sequence>
                  <xs:element name="Pressure">
                    <xs:complexType>
                      <xs:attribute name="PressureControl.SetTVMode" type="xs:string" use="optional" />
                      <xs:attribute name="PressureControl.SetTVPosition" type="xs:double" use="optional" />
                      <xs:attribute name="PressureControl.SetTVPressure" type="xs:double" use="optional" />
                      <xs:attribute name="PressureControl.SetBoostPressure" type="xs:double" use="optional" />
                      <xs:attribute name="PressureControl.SetChamberPressure" type="xs:double" use="optional" />
                    </xs:complexType>
                  </xs:element>
                  <xs:element name="Pin">
                    <xs:complexType>
                      <xs:attribute name="LiftPin.SetState" type="xs:string" use="optional" />
                    </xs:complexType>
                  </xs:element>
                  <xs:element name="RF">
                    <xs:complexType>
                      <xs:attribute name="Rf.SetPowerOnTime" type="xs:time" use="required" />
                      <xs:attribute name="Rf.SetMode" type="xs:string" use="required" />
                      <xs:attribute name="Rf.SetPulsingFrequency" type="xs:double" use="optional" />
                      <xs:attribute name="Rf.SetPulsingDuty" type="xs:double" use="optional" />
                      <xs:attribute name="Rf.SetPower" type="xs:double" use="required" />
                      <xs:attribute name="Match.SetMatchProcessMode" type="xs:string" use="required" />
                      <xs:attribute name="Match.SetMatchPositionC1" type="xs:double" use="required" />
                      <xs:attribute name="Match.SetMatchPositionC2" type="xs:double" use="required" />
                    </xs:complexType>
                  </xs:element>
                  <xs:element name="Mfc">
                    <xs:complexType>
                      <xs:attribute name="MfcGas1" type="xs:double" use="optional" />
                      <xs:attribute name="MfcGas2" type="xs:double" use="optional" />
                      <xs:attribute name="MfcGas3" type="xs:double" use="optional" />
                      <xs:attribute name="MfcGas4" type="xs:double" use="optional" />
                      <xs:attribute name="MfcGas5" type="xs:double" use="optional" />
                    </xs:complexType>
                  </xs:element>
                </xs:sequence>
                <xs:attribute name="StepNo" type="xs:string" use="required" />
                <xs:attribute name="Name" type="xs:string" use="required" />
                <xs:attribute name="Loop" type="xs:string" use="required" />
                <xs:attribute name="Time" type="xs:time" use="required" />
                <xs:attribute name="EndBy" type="xs:string" use="required" />
              </xs:complexType>
            </xs:element>
          </xs:sequence>
          <xs:attribute name="RecipeVersion" type="xs:string" fixed="Venus" use="required" />
          <xs:attribute name="CreatedBy" type="xs:string" use="required" />
          <xs:attribute name="CreationTime" type="xs:dateTime" use="required" />
          <xs:attribute name="LastRevisedBy" type="xs:string" use="required" />
          <xs:attribute name="LastRevisionTime" type="xs:dateTime" use="required" />
          <xs:attribute name="PressureMode" type="xs:string" use="required" />
          <xs:attribute name="BasePressure" type="xs:string" use="required" />
          <xs:attribute name="PumpDownLimit" type="xs:string" use="required" />
          <xs:attribute name="PurgeActive" type="xs:string" use="required" />
          <xs:attribute name="Barcode" type="xs:string" use="required" />
          <xs:attribute name="Description" type="xs:string" use="required" />
          <xs:attribute name="SubstrateTemp" type="xs:string" use="required" />
          <xs:attribute name="PumpingPinState" type="xs:string" use="required" />
        </xs:complexType>
      </xs:element>
    </xs:schema>
  </TableRecipeSchema>
  <Signature>axPPcBt+girefGdBoafkJf+pBhY=</Signature>
</Aitex>