Beckhoffcfg.xml 49 KB

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  1. <?xml version="1.0" encoding="utf-8"?>
  2. <BeckhoffCfg>
  3. <Controller Name="MASTER" IPAddress="192.168.0.200.1.1" PortAddress="851">
  4. <!-- Need to have at least one input and one output before Axis stuff -->
  5. <!-- All inputs first, then all outputs -->
  6. <!--////////////////////////////////////////////////// ALL INPUTS START //////////////////////////////////////////////////-->
  7. <!-- Safety inputs start -->
  8. <Input Name="r_EtherCat_State" Address="Task 2.Inputs.EtherCAT_State" Invert="false" Type="Analog" Scaling="0=0,1=1" DataType="uint"/>
  9. <Input Name="r_Safety_ComErr" Address="Task 2.Inputs.Safety_ComErr" Invert="false" Type="Digital" DataType="bool"/>
  10. <Input Name="r_Safety_FbErr" Address="Task 2.Inputs.Safety_FbErr" Invert="false" Type="Digital" DataType="bool"/>
  11. <Input Name="r_EtherCat_State_HotConnect_VPW" Address="Task 2.Inputs.EtherCat_State_HotConnect_VPW" Invert="false" Type="Analog" Scaling="0=0,1=1" DataType="uint"/>
  12. <Input Name="r_Safety_ComErr_VPW" Address="Task 2.Inputs.Safety_ComErr_VPW" Invert="false" Type="Digital" DataType="bool"/>
  13. <Input Name="r_Safety_FbErr_VPW" Address="Task 2.Inputs.Safety_FbErr_VPW" Invert="false" Type="Digital" DataType="bool"/>
  14. <Input Name="r_EtherCat_State_HotConnect_RES1_2" Address="Task 2.Inputs.EtherCat_State_HotConnect_RES1_2" Invert="false" Type="Analog" Scaling="0=0,1=1" DataType="uint"/>
  15. <Input Name="r_Safety_ComErr_RES1_2" Address="Task 2.Inputs.Safety_ComErr_RES1_2" Invert="false" Type="Digital" DataType="bool"/>
  16. <Input Name="r_Safety_FbErr_RES1_2" Address="Task 2.Inputs.Safety_FbErr_RES1_2" Invert="false" Type="Digital" DataType="bool"/>
  17. <Input Name="r_EtherCat_State_HotConnect_RES3_4" Address="Task 2.Inputs.EtherCat_State_HotConnect_RES3_4" Invert="false" Type="Analog" Scaling="0=0,1=1" DataType="uint"/>
  18. <Input Name="r_Safety_ComErr_RES3_4" Address="Task 2.Inputs.Safety_ComErr_RES3_4" Invert="false" Type="Digital" DataType="bool"/>
  19. <Input Name="r_Safety_FbErr_RES3_4" Address="Task 2.Inputs.Safety_FbErr_RES3_4" Invert="false" Type="Digital" DataType="bool"/>
  20. <Input Name="r_EtherCat_State_HotConnect_Facility" Address="Task 2.Inputs.EtherCat_State_HotConnect_Facility" Invert="false" Type="Analog" Scaling="0=0,1=1" DataType="uint"/>
  21. <Input Name="r_Safety_ComErr_Facility" Address="Task 2.Inputs.Safety_ComErr_Facility" Invert="false" Type="Digital" DataType="bool"/>
  22. <Input Name="r_Safety_FbErr_Facility" Address="Task 2.Inputs.Safety_FbErr_Facility" Invert="false" Type="Digital" DataType="bool"/>
  23. <Input Name="r_EtherCat_State_HotConnect_PlatingCell1_2" Address="Task 2.Inputs.EtherCat_State_HotConnect_PlatingCell1_2" Invert="false" Type="Analog" Scaling="0=0,1=1" DataType="uint"/>
  24. <Input Name="r_Safety_ComErr_PlatingCell1_2" Address="Task 2.Inputs.Safety_ComErr_PlatingCell1_2" Invert="false" Type="Digital" DataType="bool"/>
  25. <Input Name="r_Safety_FbErr_PlatingCell1_2" Address="Task 2.Inputs.Safety_FbErr_PlatingCell1_2" Invert="false" Type="Digital" DataType="bool"/>
  26. <Input Name="r_EtherCat_State_HotConnect_PlatingCell3_4" Address="Task 2.Inputs.EtherCat_State_HotConnect_PlatingCell3_4" Invert="false" Type="Analog" Scaling="0=0,1=1" DataType="uint"/>
  27. <Input Name="r_Safety_ComErr_PlatingCell3_4" Address="Task 2.Inputs.Safety_ComErr_PlatingCell3_4" Invert="false" Type="Digital" DataType="bool"/>
  28. <Input Name="r_Safety_FbErr_PlatingCell3_4" Address="Task 2.Inputs.Safety_FbErr_PlatingCell3_4" Invert="false" Type="Digital" DataType="bool"/>
  29. <Input Name="r_EtherCat_State_HotConnect_SRD" Address="Task 2.Inputs.EtherCat_State_HotConnect_SRD" Invert="false" Type="Analog" Scaling="0=0,1=1" DataType="uint"/>
  30. <Input Name="r_Safety_ComErr_SRD" Address="Task 2.Inputs.Safety_ComErr_SRD" Invert="false" Type="Digital" DataType="bool"/>
  31. <Input Name="r_Safety_FbErr_SRD" Address="Task 2.Inputs.Safety_FbErr_SRD" Invert="false" Type="Digital" DataType="bool"/>
  32. <Input Name="r_Cell1_2_Doors_Left_Locked" Address="Task 2.Inputs.Safety_SDI_CHANNEL_EL1904_NS100_1" Invert="false" Type="Digital" DataType="bool"/>
  33. <Input Name="r_Cell1_2_Doors_Right_Locked" Address="Task 2.Inputs.Safety_SDI_CHANNEL_EL1904_NS100_2" Invert="false" Type="Digital" DataType="bool"/>
  34. <Input Name="r_Cell3_4_Doors_Left_Locked" Address="Task 2.Inputs.Safety_SDI_CHANNEL_EL1904_NS100_3" Invert="false" Type="Digital" DataType="bool"/>
  35. <Input Name="r_Cell3_4_Doors_Right_Locked" Address="Task 2.Inputs.Safety_SDI_CHANNEL_EL1904_NS100_4" Invert="false" Type="Digital" DataType="bool"/>
  36. <Input Name="r_Aligner_Door_Closed" Address="Task 2.Inputs.Safety_SDI_CHANNEL_EL1904_NS101_1" Invert="false" Type="Digital" DataType="bool"/>
  37. <Input Name="r_Cassette_Doors_Left_Locked" Address="Task 2.Inputs.Safety_SDI_CHANNEL_EL1904_NS101_2" Invert="false" Type="Digital" DataType="bool"/>
  38. <Input Name="r_Cassette_Doors_Right_Locked" Address="Task 2.Inputs.Safety_SDI_CHANNEL_EL1904_NS101_3" Invert="false" Type="Digital" DataType="bool"/>
  39. <Input Name="r_RES1_2_Door_Closed" Address="Task 2.Inputs.Safety_SDI_CHANNEL_EL1904_NS101_4" Invert="false" Type="Digital" DataType="bool"/>
  40. <Input Name="r_RES3_4_Door_Closed" Address="Task 2.Inputs.Safety_SDI_CHANNEL_EL1904_NS102_1" Invert="false" Type="Digital" DataType="bool"/>
  41. <Input Name="r_VPW_Door_Closed" Address="Task 2.Inputs.Safety_SDI_CHANNEL_EL1904_NS102_2" Invert="false" Type="Digital" DataType="bool"/>
  42. <Input Name="r_Plumbing_Door_Closed" Address="Task 2.Inputs.Safety_SDI_CHANNEL_EL1904_NS102_3" Invert="false" Type="Digital" DataType="bool"/>
  43. <Input Name="r_SRD_Panel_Closed" Address="Task 2.Inputs.Safety_SDI_CHANNEL_EL1904_NS102_4" Invert="false" Type="Digital" DataType="bool"/>
  44. <Input Name="r_Halt_Button_Left" Address="Task 2.Inputs.Safety_SDI_CHANNEL_EL1904_NS103_1" Invert="true" Type="Digital" DataType="bool"/>
  45. <Input Name="r_Halt_Button_Right" Address="Task 2.Inputs.Safety_SDI_CHANNEL_EL1904_NS103_2" Invert="true" Type="Digital" DataType="bool"/>
  46. <Input Name="r_VPW_LEAK_DETECT" Address="Task 2.Inputs.VPW_DI_16CHANNEL_EL1819_N100_3" Invert="false" Type="Digital" DataType="bool"/>
  47. <Input Name="r_PlatingCell1_2_Leak_Detected" Address="Task 2.Inputs.RES1_2_DI_16CHANNEL_4_20MA_EL1819_N200_7" Invert="false" Type="Digital" DataType="bool"/>
  48. <Input Name="r_PlatingCell3_4_Leak_Detected" Address="Task 2.Inputs.RES3_4_DI_8CHANNEL_4_20MA_EL1008_N230_7" Invert="false" Type="Digital" DataType="bool"/>
  49. <Input Name="r_SAMPLE_SYS1_FLUID_PRESENT" Address="Task 2.Inputs.Facility_DI_16CHANNEL_EL1819_N000_1" Invert="false" Type="Digital" DataType="bool"/>
  50. <Input Name="r_SAMPLE_SYS2_FLUID_PRESENT" Address="Task 2.Inputs.Facility_DI_16CHANNEL_EL1819_N000_2" Invert="false" Type="Digital" DataType="bool"/>
  51. <Input Name="r_CONTAINMENT_FLUID" Address="Task 2.Inputs.Facility_DI_16CHANNEL_EL1819_N000_10" Invert="false" Type="Digital" DataType="bool"/>
  52. <Input Name="r_RES1_2_Pump_EDM" Address="Task 2.Inputs.RES1_2_SDI_4CHANNEL_EL1904_NS401_1" Invert="false" Type="Digital" DataType="bool"/>
  53. <Input Name="r_RES3_4_Pump_EDM" Address="Task 2.Inputs.RES3_4_SDI_4CHANNEL_EL1904_NS431_1" Invert="false" Type="Digital" DataType="bool"/>
  54. <Input Name="r_Degas1_Pump_EDM" Address="Task 2.Inputs.RES1_2_SDI_4CHANNEL_EL1904_NS400_1" Invert="false" Type="Digital" DataType="bool"/>
  55. <Input Name="r_Degas2_Pump_EDM" Address="Task 2.Inputs.RES3_4_SDI_4CHANNEL_EL1904_NS430_1" Invert="false" Type="Digital" DataType="bool"/>
  56. <Input Name="r_Vacuum_Pump_STO_EDM" Address="Task 2.Inputs.VPW_SDI_4CHANNEL_EL1904_NS300_2" Invert="false" Type="Digital" DataType="bool"/>
  57. <Input Name="r_Booster_Pump_STO_EDM" Address="Task 2.Inputs.VPW_SDI_4CHANNEL_EL1904_NS300_2" Invert="false" Type="Digital" DataType="bool"/>
  58. <Input Name="r_External_Fluid_EDM" Address="Task 2.Inputs.Facility_SDI_4CHANNEL_EL1904_NS200_1" Invert="false" Type="Digital" DataType="bool"/>
  59. <Input Name="r_RES1_High_High" Address="Task 2.Inputs.RES1_2_SDI_4CHANNEL_EL1904_NS400_2" Invert="false" Type="Digital" DataType="bool"/>
  60. <Input Name="r_RES2_High_High" Address="Task 2.Inputs.RES1_2_SDI_4CHANNEL_EL1904_NS400_3" Invert="false" Type="Digital" DataType="bool"/>
  61. <Input Name="r_RES3_High_High" Address="Task 2.Inputs.RES3_4_SDI_4CHANNEL_EL1904_NS430_2" Invert="false" Type="Digital" DataType="bool"/>
  62. <Input Name="r_RES4_High_High" Address="Task 2.Inputs.RES3_4_SDI_4CHANNEL_EL1904_NS430_3" Invert="false" Type="Digital" DataType="bool"/>
  63. <Input Name="r_VPW1_Rotate_STO_EDM" Address="Task 2.Inputs.VPW_SDI_4CHANNEL_EL1904_NS300_1" Invert="false" Type="Digital" DataType="bool"/>
  64. <Input Name="r_VPW2_Rotate_STO_EDM" Address="Task 2.Inputs.VPW_SDI_4CHANNEL_EL1904_NS300_4" Invert="false" Type="Digital" DataType="bool"/>
  65. <Input Name="r_PlatingCell1_2_Left_STO_EDM" Address="Task 2.Inputs.RES1_2_SDI_4CHANNEL_EL1904_NS500_2" Invert="false" Type="Digital" DataType="bool"/>
  66. <Input Name="r_PlatingCell1_2_Right_STO_EDM" Address="Task 2.Inputs.RES1_2_SDI_4CHANNEL_EL1904_NS500_3" Invert="false" Type="Digital" DataType="bool"/>
  67. <Input Name="r_PlatingCell3_4_Left_STO_EDM" Address="Task 2.Inputs.RES1_2_SDI_4CHANNEL_EL1904_NS531_2" Invert="false" Type="Digital" DataType="bool"/>
  68. <Input Name="r_PlatingCell3_4_Right_STO_EDM" Address="Task 2.Inputs.RES3_4_SDI_4CHANNEL_EL1904_NS531_1" Invert="false" Type="Digital" DataType="bool"/>
  69. <Input Name="r_PlatingCell1_2_Vertical_STO_EDM" Address="Task 2.Inputs.RES1_2_SDI_4CHANNEL_EL1904_NS500_1" Invert="false" Type="Digital" DataType="bool"/>
  70. <Input Name="r_PlatingCell3_4_Vertical_STO_EDM" Address="Task 2.Inputs.RES1_2_SDI_4CHANNEL_EL1904_NS531_1" Invert="false" Type="Digital" DataType="bool"/>
  71. <Input Name="r_SRD1_ROTATE_STO_EDM" Address="Task 2.Inputs.SRD1_SDI_4CHANNEL_EL1904_NS300_1" Invert="false" Type="Digital" DataType="bool"/>
  72. <Input Name="r_SRD2_ROTATE_STO_EDM" Address="Task 2.Inputs.SRD2_SDI_4CHANNEL_EL1904_NS300_4" Invert="false" Type="Digital" DataType="bool"/>
  73. <!-- Safety inputs end -->
  74. <!-- facility inputs start -->
  75. <Input Name="r_SAMPLE_SYS_1_FLUID_PRESENT" Address="Task 2.Inputs.Facility_DI_16CHANNEL_EL1819_N000_1" Invert="false" Type="Digital" DataType="bool"/>
  76. <Input Name="r_SAMPLE_SYS_2_FLUID_PRESENT" Address="Task 2.Inputs.Facility_DI_16CHANNEL_EL1819_N000_2" Invert="false" Type="Digital" DataType="bool"/>
  77. <Input Name="r_CONTAINMENT_FLUID" Address="Task 2.Inputs.Facility_DI_16CHANNEL_EL1819_N000_10" Invert="false" Type="Digital" DataType="bool"/>
  78. <Input Name="r_pH3" Address="Task 2.Inputs.Facility_AI_8CHANNEL_4_20mA_EL3058_N005_1" Scaling="0=0, 40=32767" Type="Analog" DataType="int"/>
  79. <Input Name="r_DIWRETURN_FLOW" Address="Task 2.Inputs.Facility_AI_8CHANNEL_4_20mA_EL3058_N006_106" Scaling="0=0, 40=32767" Type="Analog" DataType="int"/>
  80. <Input Name="r_HCW_FLOW" Address="Task 2.Inputs.Facility_AI_8CHANNEL_4_20mA_EL3058_N005_5" Scaling="0=0, 40=32767" Type="Analog" DataType="int"/>
  81. <Input Name="r_SYSTEM_EXHAUST_1" Address="Task 2.Inputs.Facility_AI_8CHANNEL_4_20mA_EL3058_N006_1" Scaling="0=0, 2=32767" Type="Analog" DataType="int"/>
  82. <Input Name="r_SYSTEM_EXHAUST_2" Address="Task 2.Inputs.Facility_AI_8CHANNEL_4_20mA_EL3058_N006_2" Scaling="0=0, 2=32767" Type="Analog" DataType="int"/>
  83. <Input Name="r_DI_WATER_PRESSURE" Address="Task 2.Inputs.Facility_AI_8CHANNEL_4_20mA_EL3058_N006_5" Scaling="0=0, 100=32767" Type="Analog" DataType="int"/>
  84. <Input Name="r_N2_1B_PRESSURE" Address="Task 2.Inputs.Facility_AI_8CHANNEL_0_10V_EL3068_N007_1" Scaling="0=3276.7, 145=16383.5" Type="Analog" DataType="int"/>
  85. <Input Name="r_N2_1A_PRESSURE" Address="Task 2.Inputs.Facility_AI_8CHANNEL_0_10V_EL3068_N007_2" Scaling="0=3276.7, 145=16383.5" Type="Analog" DataType="int"/>
  86. <Input Name="r_N2_2B_PRESSURE" Address="Task 2.Inputs.Facility_AI_8CHANNEL_0_10V_EL3068_N007_3" Scaling="0=3276.7, 145=16383.5" Type="Analog" DataType="int"/>
  87. <Input Name="r_N2_2A_PRESSURE" Address="Task 2.Inputs.Facility_AI_8CHANNEL_0_10V_EL3068_N007_4" Scaling="0=3276.7, 145=16383.5" Type="Analog" DataType="int"/>
  88. <Input Name="r_CDA_2_PRESSURE" Address="Task 2.Inputs.Facility_AI_8CHANNEL_0_10V_EL3068_N007_5" Scaling="0=3276.7, 145=16383.5" Type="Analog" DataType="int"/>
  89. <Input Name="r_CDA_1_PRESSURE" Address="Task 2.Inputs.Facility_AI_8CHANNEL_0_10V_EL3068_N007_6" Scaling="0=3276.7, 145=16383.5" Type="Analog" DataType="int"/>
  90. <Input Name="r_CDA_EXTERNAL_PRESSURE" Address="Task 2.Inputs.Facility_AI_8CHANNEL_0_10V_EL3068_N007_7" Scaling="0=3276.7, 145=16383.5" Type="Analog" DataType="int"/>
  91. <Input Name="r_SYSTEM_VACUUM" Address="Task 2.Inputs.Facility_AI_8CHANNEL_0_10V_EL3068_N007_8" Scaling="-750=3276.7, 750=16383.5" Type="Analog" DataType="int"/>
  92. <Input Name="r_N2_BLANKET_PRESSURE" Address="Task 2.Inputs.Facility_AI_8CHANNEL_0_10V_EL3068_N008_1" Scaling="-14.5=3276.7, 14.5=16383.5" Type="Analog" DataType="int"/>
  93. <Input Name="r_N2_OVERFLOW_PRESSURE" Address="Task 2.Inputs.Facility_AI_8CHANNEL_0_10V_EL3068_N008_2" Scaling="-14.5=3276.7, 14.5=16383.5" Type="Analog" DataType="int"/>
  94. <Input Name="r_CLAMSHELL_CYLINDER_PRESSURE" Address="Task 2.Inputs.PlatingCell1_2_AI_8CHANNEL_0_10V_EL3086_N402_3" Scaling="0=0, 100=32767" Type="Analog" DataType="udint"/>
  95. <Input Name="r_TILT_CYLINDER_PRESSURE" Address="Task 2.Inputs.PlatingCell1_2_AI_8CHANNEL_0_10V_EL3086_N402_4" Scaling="0=0, 100=32767" Type="Analog" DataType="udint"/>
  96. <!-- facility inputs end -->
  97. <!--PlatingCell1 inputs Start-->
  98. <Input Name="r_PlatingCell1_2_HEAD_TILTED" Address="Task 2.Inputs.PlatingCell1_2_DI_16CHANNEL_EL1819_N400_4" Invert="false" Type="Digital" DataType="bool"/>
  99. <Input Name="r_PlatingCell1_2_HEAD_VERTICAL" Address="Task 2.Inputs.PlatingCell1_2_DI_16CHANNEL_EL1819_N400_5" Invert="false" Type="Digital" DataType="bool"/>
  100. <Input Name="r_CELL1_CLAMSHELL_DISTANCE" Address="Task 2.Inputs.PlatingCell1_2_AI_8CHANNEL_0_10V_EL3068_N402_1" Scaling="0=0,100=32767" Type="Analog" DataType="int"/>
  101. <Input Name="r_CLAMSHELL_CYLINDER_PRESSURE" Address="Task 2.Inputs.PlatingCell1_2_AI_8CHANNEL_0_10V_EL3068_N402_3" Scaling="0=0,20=32767" Type="Analog" DataType="int"/>
  102. <Input Name="r_CELL1_OVERFLOW_LEVEL" Address="Task 2.Inputs.PlatingCell1_2_AI_8CHANNEL_4_20MA_EL3058_N403_1" Scaling="4=0,20=32767" Type="Analog" DataType="int"/>
  103. <!--PlatingCell1 inputs End-->
  104. <!--PlatingCell2 inputs Start-->
  105. <Input Name="r_CELL2_CLAMSHELL_DISTANCE" Address="Task 2.Inputs.PlatingCell1_2_AI_8CHANNEL_0_10V_EL3068_N402_2" Scaling="0=0,100=32767" Type="Analog" DataType="int"/>
  106. <Input Name="r_CELL2_OVERFLOW_LEVEL" Address="Task 2.Inputs.PlatingCell1_2_AI_8CHANNEL_4_20MA_EL3058_N403_2" Scaling="4=0,20=32767" Type="Analog" DataType="int"/>
  107. <!--PlatingCell2 inputs End-->
  108. <!--PlatingCell3 inputs Start-->
  109. <Input Name="r_PlatingCell3_4_HEAD_TILTED" Address="Task 2.Inputs.PlatingCell3_4_DI_16CHANNEL_EL1819_N430_4" Invert="false" Type="Digital" DataType="bool"/>
  110. <Input Name="r_PlatingCell3_4_HEAD_VERTICAL" Address="Task 2.Inputs.PlatingCell3_4_DI_16CHANNEL_EL1819_N430_5" Invert="false" Type="Digital" DataType="bool"/>
  111. <Input Name="r_CELL3_CLAMSHELL_DISTANCE" Address="Task 2.Inputs.PlatingCell3_4_AI_8CHANNEL_0_10V_EL3068_N432_1" Scaling="0=0,100=32767" Type="Analog" DataType="int"/>
  112. <Input Name="r_CELL3_OVERFLOW_LEVEL" Address="Task 2.Inputs.PlatingCell3_4_AI_8CHANNEL_4_20MA_EL3058_N433_1" Scaling="4=0,20=32767" Type="Analog" DataType="int"/>
  113. <!--PlatingCell3 inputs End-->
  114. <!--PlatingCell4 inputs Start-->
  115. <Input Name="r_CELL4_CLAMSHELL_DISTANCE" Address="Task 2.Inputs.PlatingCell3_4_AI_8CHANNEL_0_10V_EL3068_N432_2" Scaling="0=0,100=32767" Type="Analog" DataType="int"/>
  116. <Input Name="r_CELL4_OVERFLOW_LEVEL" Address="Task 2.Inputs.PlatingCell3_4_AI_8CHANNEL_4_20MA_EL3058_N433_2" Scaling="4=0,20=32767" Type="Analog" DataType="int"/>
  117. <!--PlatingCell4 inputs End-->
  118. <!--Reservoir1 inputs Start-->
  119. <Input Name="r_RES1_CA_PUMP" Address="Task 2.Inputs.RES1_2_DI_8CHANNEL_EL1008_N200_1" Invert="false" Type="Digital" DataType="bool"/>
  120. <Input Name="r_RES1_AN_TOWER_HIGH" Address="Task 2.Inputs.RES1_2_DI_8CHANNEL_EL1008_N200_3" Invert="false" Type="Digital" DataType="bool"/>
  121. <Input Name="r_RES1_AN_TOWER_LOW" Address="Task 2.Inputs.RES1_2_DI_8CHANNEL_EL1008_N200_4" Invert="false" Type="Digital" DataType="bool"/>
  122. <Input Name="r_CELL1_AN_FLOW" Address="Task 2.Inputs.RES1_2_AI_8CHANNEL_4_20MA_EL3058_N202_1" Scaling="0=0,20=32767" Type="Analog" DataType="int"/>
  123. <Input Name="r_CELL1_CA_FLOW" Address="Task 2.Inputs.RES1_2_AI_8CHANNEL_4_20MA_EL3058_N202_3" Scaling="0=0,20=32767" Type="Analog" DataType="int"/>
  124. <Input Name="r_RES1_CA_LEVEL_RAW" Address="Task 2.Inputs.RES1_2_AI_8CHANNEL_4_20MA_EL3058_N202_5" Scaling="0=0,100=32767" Type="Analog" DataType="int"/>
  125. <!--Reservoir1 inputs End-->
  126. <!--Reservoir2 inputs Start-->
  127. <Input Name="r_RES2_CA_PUMP" Address="Task 2.Inputs.RES1_2_DI_8CHANNEL_EL1008_N200_2" Invert="false" Type="Digital" DataType="bool"/>
  128. <Input Name="r_RES2_AN_TOWER_HIGH" Address="Task 2.Inputs.RES1_2_DI_8CHANNEL_EL1008_N200_5" Invert="false" Type="Digital" DataType="bool"/>
  129. <Input Name="r_RES2_AN_TOWER_LOW" Address="Task 2.Inputs.RES1_2_DI_8CHANNEL_EL1008_N200_6" Invert="false" Type="Digital" DataType="bool"/>
  130. <Input Name="r_CELL2_AN_FLOW" Address="Task 2.Inputs.RES1_2_AI_8CHANNEL_4_20MA_EL3058_N202_2" Scaling="0=0,20=32767" Type="Analog" DataType="int"/>
  131. <Input Name="r_CELL2_CA_FLOW" Address="Task 2.Inputs.RES1_2_AI_8CHANNEL_4_20MA_EL3058_N202_4" Scaling="0=0,20=32767" Type="Analog" DataType="int"/>
  132. <Input Name="r_RES2_CA_LEVEL_RAW" Address="Task 2.Inputs.RES1_2_AI_8CHANNEL_4_20MA_EL3058_N202_6" Scaling="0=0,100=32767" Type="Analog" DataType="int"/>
  133. <!--Reservoir2 inputs End-->
  134. <!--Reservoir3 inputs Start-->
  135. <Input Name="r_RES3_CA_PUMP" Address="Task 2.Inputs.RES3_4_DI_8CHANNEL_EL1008_N230_1" Invert="false" Type="Digital" DataType="bool"/>
  136. <Input Name="r_RES3_AN_TOWER_HIGH" Address="Task 2.Inputs.RES3_4_DI_8CHANNEL_EL1008_N230_3" Invert="false" Type="Digital" DataType="bool"/>
  137. <Input Name="r_RES3_AN_TOWER_LOW" Address="Task 2.Inputs.RES3_4_DI_8CHANNEL_EL1008_N230_4" Invert="false" Type="Digital" DataType="bool"/>
  138. <Input Name="r_CELL3_AN_FLOW" Address="Task 2.Inputs.RES3_4_AI_8CHANNEL_4_20MA_EL3058_N232_1" Scaling="0=0,20=32767" Type="Analog" DataType="int"/>
  139. <Input Name="r_CELL3_CA_FLOW" Address="Task 2.Inputs.RES3_4_AI_8CHANNEL_4_20MA_EL3058_N232_3" Scaling="0=0,20=32767" Type="Analog" DataType="int"/>
  140. <Input Name="r_RES3_CA_LEVEL_RAW" Address="Task 2.Inputs.RES3_4_AI_8CHANNEL_4_20MA_EL3058_N232_5" Scaling="0=0,100=32767" Type="Analog" DataType="int"/>
  141. <!--Reservoir3inputs End-->
  142. <!--Reservoir4 inputs Start-->
  143. <Input Name="r_RES4_CA_PUMP" Address="Task 2.Inputs.RES3_4_DI_8CHANNEL_EL1008_N230_2" Invert="false" Type="Digital" DataType="bool"/>
  144. <Input Name="r_RES4_AN_TOWER_HIGH" Address="Task 2.Inputs.RES3_4_DI_8CHANNEL_EL1008_N230_5" Invert="false" Type="Digital" DataType="bool"/>
  145. <Input Name="r_RES4_AN_TOWER_LOW" Address="Task 2.Inputs.RES3_4_DI_8CHANNEL_EL1008_N230_6" Invert="false" Type="Digital" DataType="bool"/>
  146. <Input Name="r_CELL4_AN_FLOW" Address="Task 2.Inputs.RES3_4_AI_8CHANNEL_4_20MA_EL3058_N232_2" Scaling="0=0,20=32767" Type="Analog" DataType="int"/>
  147. <Input Name="r_CELL4_CA_FLOW" Address="Task 2.Inputs.RES3_4_AI_8CHANNEL_4_20MA_EL3058_N232_4" Scaling="0=0,20=32767" Type="Analog" DataType="int"/>
  148. <Input Name="r_RES4_CA_LEVEL_RAW" Address="Task 2.Inputs.RES3_4_AI_8CHANNEL_4_20MA_EL3058_N232_6" Scaling="0=0,100=32767" Type="Analog" DataType="int"/>
  149. <!--Reservoir4 inputs End-->
  150. <!--VPW Main Start-->
  151. <Input Name="r_VPW_CHAMBER_CLOSED" Address="Task 2.Inputs.VPW_DI_16CHANNEL_EL1819_N100_1" Invert="false" Type="Digital" DataType="bool"/>
  152. <Input Name="r_VPW_CHAMBER_OPENED" Address="Task 2.Inputs.VPW_DI_16CHANNEL_EL1819_N100_2" Invert="false" Type="Digital" DataType="bool"/>
  153. <Input Name="r_VPW_VAC_PUMP_PRESSURE" Address="Task 2.Inputs.VPW_AI_8CHANNEL_4_20mA_EL3058_N102_6" Scaling="758=0,0=32767" Type="Analog" DataType="int"/>
  154. <Input Name="r_VPW_BOOSTER_PUMP_STATUS" Address="Task 2.Inputs.VPW_DI_16CHANNEL_EL1819_N100_9" Invert="true" Type="Digital" DataType="bool"/>
  155. <Input Name="r_VPW_DIW_TOTAL_FLOW" Address="Task 2.Inputs.VPW_AI_8CHANNEL_4_20mA_EL3058_N102_1" Scaling="0=0,20=32767" Type="Analog" DataType="int"/>
  156. <Input Name="r_VPW_DIW_PRESSURE" Address="Task 2.Inputs.VPW_AI_8CHANNEL_4_20mA_EL3058_N102_4" Scaling="0=0,100=32767" Type="Analog" DataType="int"/>
  157. <Input Name="r_VPW_DEGAS_PUMP_PRESSURE" Address="Task 2.Inputs.VPW_AI_8CHANNEL_4_20mA_EL3058_N102_5" Scaling="758=0,100=32767" Type="Analog" DataType="int"/>
  158. <!--VPW Main End-->
  159. <!--VPW1 Start-->
  160. <Input Name="r_VPW_DIW_CELL_1_FLOW" Address="Task 2.Inputs.VPW_AI_8CHANNEL_4_20mA_EL3058_N102_2" Scaling="0=0,8=32767" Type="Analog" DataType="int"/>
  161. <Input Name="r_VPW_CELL_1_VAC_PRESSURE" Address="Task 2.Inputs.VPW_AI_8CHANNEL_0_10V_EL3068_N105_1" Scaling="0=0,10=32767" Type="Analog" DataType="int"/>
  162. <!--VPW1 End-->
  163. <!--VPW2 Start-->
  164. <Input Name="r_VPW_DIW_CELL_2_FLOW" Address="Task 2.Inputs.VPW_AI_8CHANNEL_4_20mA_EL3058_N102_3" Scaling="0=0,8=32767" Type="Analog" DataType="int"/>
  165. <Input Name="r_VPW_CELL_2_VAC_PRESSURE" Address="Task 2.Inputs.VPW_AI_8CHANNEL_0_10V_EL3068_N105_2" Scaling="0=0,10=32767" Type="Analog" DataType="int"/>
  166. <!--VPW2 End-->
  167. <!--EFEM Start-->
  168. <Input Name="r_EFEM_VACUUM" Address="Task 2.Inputs.Facility_AI_8CHANNEL_0_10V_EL3068_N007_8" Scaling="-750=3276.7, 750=16383.5" Type="Analog" DataType="int"/>
  169. <Input Name="r_Cassette_A_Present" Address="Task 2.Inputs.Facility_DI_16CHANNEL_EL1819_N000_11" Invert="false" Type="Digital" DataType="bool"/>
  170. <Input Name="r_Cassette_A_100MM" Address="Task 2.Inputs.Facility_DI_16CHANNEL_EL1819_N000_12" Invert="false" Type="Digital" DataType="bool"/>
  171. <Input Name="r_Cassette_A_200MM" Address="Task 2.Inputs.Facility_DI_16CHANNEL_EL1819_N000_13" Invert="false" Type="Digital" DataType="bool"/>
  172. <Input Name="r_Cassette_B_Present" Address="Task 2.Inputs.Facility_DI_16CHANNEL_EL1819_N000_14" Invert="false" Type="Digital" DataType="bool"/>
  173. <Input Name="r_Cassette_B_100MM" Address="Task 2.Inputs.Facility_DI_16CHANNEL_EL1819_N000_15" Invert="false" Type="Digital" DataType="bool"/>
  174. <Input Name="r_Cassette_B_200MM" Address="Task 2.Inputs.Facility_DI_16CHANNEL_EL1819_N000_16" Invert="false" Type="Digital" DataType="bool"/>
  175. <!--EFEM End-->
  176. <!--////////////////////////////////////////////////// ALL INPUTS END //////////////////////////////////////////////////-->
  177. <!--////////////////////////////////////////////////// ALL COUNTERS BEGIN //////////////////////////////////////////////////-->
  178. <Counter Name="r_DIREPLEN_FLOW" Address="Task 2.Outputs.Facility_COUNTER_2CHANNEL_EL1512_N009_1_Counter_value" DataType="udint" Mode="2" Period="2000" Scaling="0=0,1=22">
  179. <Output Address="Task 2.Outputs.Facility_COUNTER_2CHANNEL_EL1512_N009_1_Set_counter" Type="Start" DataType="bool"/>
  180. <Output Address="Task 2.Outputs.Facility_COUNTER_2CHANNEL_EL1512_N009_1_Inhibit_counter" Type="Stop" DataType="bool"/>
  181. <Output Address="Task 2.Outputs.Facility_COUNTER_2CHANNEL_EL1512_N009_1_Set_counter_value" Type="Reset" DataType="udint"/>
  182. </Counter>
  183. <!--////////////////////////////////////////////////// ALL COUNTERS END //////////////////////////////////////////////////-->
  184. <!--////////////////////////////////////////////////// ALL OUTPUTS BEGIN //////////////////////////////////////////////////-->
  185. <!-- Safety outputs start -->
  186. <Output Name="c_Safety_RunStop" Address="Task 2.Outputs.Safety_RunStop" Type="Digital" DataType="bool"/>
  187. <Output Name="c_Safety_ErrAck" Address="Task 2.Outputs.Safety_ErrAck" Type="Digital" DataType="bool"/>
  188. <Output Name="c_Safety_VPW_STO_EStop_Restart" Address="Task 2.Outputs.Safety_VPW_STO_EStop_Restart" Type="Digital" DataType="bool"/>
  189. <Output Name="c_Safety_RES1_2_STO_EStop_Restart" Address="Task 2.Outputs.Safety_RES1_2_STO_EStop_Restart" Type="Digital" DataType="bool"/>
  190. <Output Name="c_Safety_RES3_4_STO_EStop_Restart" Address="Task 2.Outputs.Safety_RES3_4_STO_EStop_Restart" Type="Digital" DataType="bool"/>
  191. <Output Name="c_Safety_PlatingCell1_2_STO_1_EStop_Restart" Address="Task 2.Outputs.Safety_PlatingCell1_2_STO_1_EStop_Restart" Type="Digital" DataType="bool"/>
  192. <Output Name="c_Safety_PlatingCell1_2_STO_2_EStop_Restart" Address="Task 2.Outputs.Safety_PlatingCell1_2_STO_2_EStop_Restart" Type="Digital" DataType="bool"/>
  193. <Output Name="c_Safety_PlatingCell3_4_STO_1_EStop_Restart" Address="Task 2.Outputs.Safety_PlatingCell3_4_STO_1_EStop_Restart" Type="Digital" DataType="bool"/>
  194. <Output Name="c_Safety_PlatingCell3_4_STO_2_EStop_Restart" Address="Task 2.Outputs.Safety_PlatingCell3_4_STO_2_EStop_Restart" Type="Digital" DataType="bool"/>
  195. <Output Name="c_Safety_Facility_STO_EStop_Restart" Address="Task 2.Outputs.Safety_Facility_STO_EStop_Restart" Type="Digital" DataType="bool"/>
  196. <Output Name="c_Safety_SRD_STO_EStop_Restart" Address="Task 2.Outputs.Safety_SRD_STO_EStop_Restart" Type="Digital" DataType="bool"/>
  197. <Output Name="c_Safety_ReqAlignerDoorsLock" Address="Task 2.Outputs.Safety_ReqAlignerDoorsLock" Type="Digital" DataType="bool"/>
  198. <Output Name="c_Safety_ReqCassetteDoorsLock" Address="Task 2.Outputs.Safety_ReqCassetteDoorsLock" Type="Digital" DataType="bool"/>
  199. <Output Name="c_Safety_ReqCell1_2DoorsLock" Address="Task 2.Outputs.Safety_ReqCell1_2DoorsLock" Type="Digital" DataType="bool"/>
  200. <Output Name="c_Safety_ReqCell3_4DoorsLock" Address="Task 2.Outputs.Safety_ReqCell3_4DoorsLock" Type="Digital" DataType="bool"/>
  201. <!-- Safety outputs end -->
  202. <!-- facility outputs start -->
  203. <Output Name="c_N2_ENABLE" Address="Task 2.Outputs.Facility_DO_16CHANNEL_EL2809_N002_1" Type="Digital" DataType="bool"/>
  204. <Output Name="c_CDA_ENABLE" Address="Task 2.Outputs.Facility_DO_16CHANNEL_EL2809_N002_2" Type="Digital" DataType="bool"/>
  205. <Output Name="c_EXTERNAL_CDA_ENABLE" Address="Task 2.Outputs.Facility_DO_16CHANNEL_EL2809_N002_3" Type="Digital" DataType="bool"/>
  206. <Output Name="c_DI_Task 2.Outputs_ENABLE" Address="Task 2.Outputs.Facility_DO_16CHANNEL_EL2809_N002_4" Type="Digital" DataType="bool"/>
  207. <Output Name="c_HCW_ENABLE" Address="Task 2.Outputs.Facility_DO_16CHANNEL_EL2809_N002_5" Type="Digital" DataType="bool"/>
  208. <Output Name="c_DI_REPLEN_ENABLE" Address="Task 2.Outputs.Facility_DO_16CHANNEL_EL2809_N002_6" Type="Digital" DataType="bool"/>
  209. <Output Name="c_DI_FILL_ENABLE" Address="Task 2.Outputs.Facility_DO_16CHANNEL_EL2809_N002_7" Type="Digital" DataType="bool"/>
  210. <Output Name="c_SAMPLE_STATION_ENABLE" Address="Task 2.Outputs.VPW_PNEU_SMC_EX260_BYTE2" Type="Digital" BitOperated="true" Bit="5" DataType="byte"/>
  211. <Output Name="c_FILTER_PURGE_ENABLE" Address="Task 2.Outputs.VPW_PNEU_SMC_EX260_BYTE2" Type="Digital" BitOperated="true" Bit="6" DataType="byte"/>
  212. <Output Name="c_DIW_SRD_ENABLE" Address="Task 2.Outputs.VPW_PNEU_SMC_EX260_BYTE2" Type="Digital" BitOperated="true" Bit="7" DataType="byte"/>
  213. <!-- facility outputs end -->
  214. <!--PlatingCell1 outputs Start-->
  215. <Output Name="c_CELL1_CLAMSHELL_CLOSE" Address="Task 2.Outputs.PlatingCell1_2_DO_16CHANNEL_EL2809_N401_9" Type="Digital" Invert="false" DataType="bool"/>
  216. <Output Name="c_PlatingCell1_2_HEAD_TILT" Address="Task 2.Outputs.PlatingCell1_2_DO_16CHANNEL_EL2809_N401_13" Type="Digital" Invert="false" DataType="bool"/>
  217. <!--PlatingCell1 outputs End-->
  218. <!--PlatingCell2 outputs Start-->
  219. <Output Name="c_CELL2_CLAMSHELL_CLOSE" Address="Task 2.Outputs.PlatingCell1_2_DO_16CHANNEL_EL2809_N401_10" Type="Digital" Invert="false" DataType="bool"/>
  220. <!--PlatingCell2 outputs End-->
  221. <!--PlatingCell3 outputs Start-->
  222. <Output Name="c_CELL3_CLAMSHELL_CLOSE" Address="Task 2.Outputs.PlatingCell1_2_DO_16CHANNEL_EL2809_N401_11" Type="Digital" Invert="false" DataType="bool"/>
  223. <Output Name="c_PlatingCell3_4_HEAD_TILT" Address="Task 2.Outputs.PlatingCell1_2_DO_16CHANNEL_EL2809_N401_14" Type="Digital" Invert="false" DataType="bool"/>
  224. <!--PlatingCell3 outputs End-->
  225. <!--PlatingCell4 outputs Start-->
  226. <Output Name="c_CELL4_CLAMSHELL_CLOSE" Address="Task 2.Outputs.PlatingCell1_2_DO_16CHANNEL_EL2809_N401_12" Type="Digital" Invert="false" DataType="bool"/>
  227. <!--PlatingCell4 outputs End-->
  228. <!--Reservoir1 output Start-->
  229. <Output Name="c_RES1_AN_PUMP_ENABLE" Address="Task 2.Outputs.RES1_DO_16CHANNEL_EL2809_N201_1" Type="Digital" Invert="false" DataType="bool"/>
  230. <Output Name="c_RES1_CA_PUMP_ENABLE" Address="Task 2.Outputs.RES1_DO_16CHANNEL_EL2809_N201_3" Type="Digital" Invert="false" DataType="bool"/>
  231. <Output Name="c_RES1_AN_PUMP_SPEED" Address="Task 2.Outputs.RES1_2_AO_8CHANNEL_0_10V_EL4008_N204_1" Scaling="0=0,100=32767" Type="Analog" DataType="int"/>
  232. <Output Name="c_RES1_CA_PUMP_SPEED" Address="Task 2.Outputs.RES1_2_AO_4CHANNEL_4_20mA_EL4024_N205_1" Scaling="0=0,100=32767" Type="Analog" DataType="int"/>
  233. <Output Name="c_RES1_RETURN_VALVE_OPENING" Address="Task 2.Outputs.RES1_2_AO_4CHANNEL_4_20mA_EL4024_N205_3" Scaling="0=0,100=32767" Type="Analog" DataType="int"/>
  234. <Output Name="c_RES1_CA_DIW_REPLEN" Address="Task 2.Outputs.RES1_2_PNEU_SMC_EX260_V01_V04" Type="Digital" BitOperated="true" Bit="0" DataType="byte"/>
  235. <Output Name="c_RES1_SAMPLE_OUT" Address="Task 2.Outputs.RES1_2_PNEU_SMC_EX260_V01_V04" Type="Digital" BitOperated="true" Bit="1" DataType="byte"/>
  236. <Output Name="c_RES1_DEGAS_ENABLE" Address="Task 2.Outputs.RES1_2_PNEU_SMC_EX260_V01_V04" Type="Digital" BitOperated="true" Bit="2" DataType="byte"/>
  237. <Output Name="c_CELL1_CA_ISOLATION" Address="Task 2.Outputs.RES1_2_PNEU_SMC_EX260_V01_V04" Type="Digital" BitOperated="true" Bit="3" DataType="byte"/>
  238. <Output Name="c_RES1_AN_DIW_REPLEN" Address="Task 2.Outputs.RES1_2_PNEU_SMC_EX260_V01_V04" Type="Digital" BitOperated="true" Bit="4" DataType="byte"/>
  239. <Output Name="c_CELL1_AN_ISOLATION" Address="Task 2.Outputs.RES1_2_PNEU_SMC_EX260_V01_V04" Type="Digital" BitOperated="true" Bit="5" DataType="byte"/>
  240. <!--Reservoir1 output End-->
  241. <!--Reservoir2 outputs Start-->
  242. <Output Name="c_RES2_AN_PUMP_ENABLE" Address="Task 2.Outputs.RES1_2_DO_16CHANNEL_EL2809_N201_2" Type="Digital" Invert="false" DataType="bool"/>
  243. <Output Name="c_RES2_CA_PUMP_ENABLE" Address="Task 2.Outputs.RES1_2_DO_16CHANNEL_EL2809_N201_4" Type="Digital" Invert="false" DataType="bool"/>
  244. <Output Name="c_RES2_AN_PUMP_SPEED" Address="Task 2.Outputs.RES1_2_AO_8CHANNEL_0_10V_EL4008_N204_2" Scaling="0=0,100=32767" Type="Analog" DataType="int"/>
  245. <Output Name="c_RES2_CA_PUMP_SPEED" Address="Task 2.Outputs.RES1_2_AO_4CHANNEL_4_20mA_EL4024_N205_2" Scaling="0=0,100=32767" Type="Analog" DataType="int"/>
  246. <Output Name="c_RES2_RETURN_VALVE_OPENING" Address="Task 2.Outputs.RES1_2_AO_4CHANNEL_4_20mA_EL4024_N205_4" Scaling="0=0,100=32767" Type="Analog" DataType="int"/>
  247. <Output Name="c_RES2_CA_DIW_REPLEN" Address="Task 2.Outputs.RES1_2_PNEU_SMC_EX260_V01_V04" Type="Digital" BitOperated="true" Bit="6" DataType="byte"/>
  248. <Output Name="c_RES2_SAMPLE_OUT" Address="Task 2.Outputs.RES1_2_PNEU_SMC_EX260_V01_V04" Type="Digital" BitOperated="true" Bit="7" DataType="byte"/>
  249. <Output Name="c_RES2_DEGAS_ENABLE" Address="Task 2.Outputs.RES1_2_PNEU_SMC_EX260_V05_V08" Type="Digital" BitOperated="true" Bit="0" DataType="byte"/>
  250. <Output Name="c_CELL2_CA_ISOLATION" Address="Task 2.Outputs.RES1_2_PNEU_SMC_EX260_V05_V08" Type="Digital" BitOperated="true" Bit="1" DataType="byte"/>
  251. <Output Name="c_RES2_AN_DIW_REPLEN" Address="Task 2.Outputs.RES1_2_PNEU_SMC_EX260_V05_V08" Type="Digital" BitOperated="true" Bit="2" DataType="byte"/>
  252. <Output Name="c_CELL2_AN_ISOLATION" Address="Task 2.Outputs.RES1_2_PNEU_SMC_EX260_V05_V08" Type="Digital" BitOperated="true" Bit="3" DataType="byte"/>
  253. <!--Reservoir2 outputs End-->
  254. <!--Reservoir3 outputs Start-->
  255. <Output Name="c_RES3_AN_PUMP_ENABLE" Address="Task 2.Outputs.RES3_4_DO_16CHANNEL_EL2809_N231_1" Type="Digital" Invert="false" DataType="bool"/>
  256. <Output Name="c_RES3_CA_PUMP_ENABLE" Address="Task 2.Outputs.RES3_4_DO_16CHANNEL_EL2809_N231_3" Type="Digital" Invert="false" DataType="bool"/>
  257. <Output Name="c_RES3_AN_PUMP_SPEED" Address="Task 2.Outputs.RES3_4_AO_8CHANNEL_0_10V_EL4008_N234_1" Scaling="0=0,100=32767" Type="Analog" DataType="int"/>
  258. <Output Name="c_RES3_CA_PUMP_SPEED" Address="Task 2.Outputs.RES3_4_AO_4CHANNEL_4_20mA_EL4024_N235_1" Scaling="0=0,100=32767" Type="Analog" DataType="int"/>
  259. <Output Name="c_RES3_RETURN_VALVE_OPENING" Address="Task 2.Outputs.RES3_4_AO_4CHANNEL_4_20mA_EL4024_N235_3" Scaling="0=0,100=32767" Type="Analog" DataType="int"/>
  260. <Output Name="c_RES3_CA_DIW_REPLEN" Address="Task 2.Outputs.RES3_4_PNEU_SMC_EX260_V01_V04" Type="Digital" BitOperated="true" Bit="0" DataType="byte"/>
  261. <Output Name="c_RES3_SAMPLE_OUT" Address="Task 2.Outputs.RES3_4_PNEU_SMC_EX260_V01_V04" Type="Digital" BitOperated="true" Bit="1" DataType="byte"/>
  262. <Output Name="c_RES3_DEGAS_ENABLE" Address="Task 2.Outputs.RES3_4_PNEU_SMC_EX260_V01_V04" Type="Digital" BitOperated="true" Bit="2" DataType="byte"/>
  263. <Output Name="c_CELL3_CA_ISOLATION" Address="Task 2.Outputs.RES3_4_PNEU_SMC_EX260_V01_V04" Type="Digital" BitOperated="true" Bit="3" DataType="byte"/>
  264. <Output Name="c_RES3_AN_DIW_REPLEN" Address="Task 2.Outputs.RES3_4_PNEU_SMC_EX260_V01_V04" Type="Digital" BitOperated="true" Bit="4" DataType="byte"/>
  265. <Output Name="c_CELL3_AN_ISOLATION" Address="Task 2.Outputs.RES3_4_PNEU_SMC_EX260_V01_V04" Type="Digital" BitOperated="true" Bit="5" DataType="byte"/>
  266. <!--Reservoir3 outputs End-->
  267. <!--Reservoir4 outputs Start-->
  268. <Output Name="c_RES4_AN_PUMP_ENABLE" Address="Task 2.Outputs.RES3_4_DO_16CHANNEL_EL2809_N231_2" Type="Digital" Invert="false" DataType="bool"/>
  269. <Output Name="c_RES4_CA_PUMP_ENABLE" Address="Task 2.Outputs.RES3_4_DO_16CHANNEL_EL2809_N231_4" Type="Digital" Invert="false" DataType="bool"/>
  270. <Output Name="c_RES4_AN_PUMP_SPEED" Address="Task 2.Outputs.RES3_4_AO_8CHANNEL_0_10V_EL4008_N234_2" Scaling="0=0,100=32767" Type="Analog" DataType="int"/>
  271. <Output Name="c_RES4_CA_PUMP_SPEED" Address="Task 2.Outputs.RES3_4_AO_4CHANNEL_4_20mA_EL4024_N235_2" Scaling="0=0,100=32767" Type="Analog" DataType="int"/>
  272. <Output Name="c_RES4_RETURN_VALVE_OPENING" Address="Task 2.Outputs.RES3_4_AO_4CHANNEL_4_20mA_EL4024_N235_4" Scaling="0=0,100=32767" Type="Analog" DataType="int"/>
  273. <Output Name="c_RES4_CA_DIW_REPLEN" Address="Task 2.Outputs.RES3_4_PNEU_SMC_EX260_V01_V04" Type="Digital" BitOperated="true" Bit="6" DataType="byte"/>
  274. <Output Name="c_RES4_SAMPLE_OUT" Address="Task 2.Outputs.RES3_4_PNEU_SMC_EX260_V01_V04" Type="Digital" BitOperated="true" Bit="7" DataType="byte"/>
  275. <Output Name="c_RES4_DEGAS_ENABLE" Address="Task 2.Outputs.RES3_4_PNEU_SMC_EX260_V05_V08" Type="Digital" BitOperated="true" Bit="0" DataType="byte"/>
  276. <Output Name="c_CELL4_CA_ISOLATION" Address="Task 2.Outputs.RES3_4_PNEU_SMC_EX260_V05_V08" Type="Digital" BitOperated="true" Bit="1" DataType="byte"/>
  277. <Output Name="c_RES4_AN_DIW_REPLEN" Address="Task 2.Outputs.RES3_4_PNEU_SMC_EX260_V05_V08" Type="Digital" BitOperated="true" Bit="2" DataType="byte"/>
  278. <Output Name="c_CELL4_AN_ISOLATION" Address="Task 2.Outputs.RES3_4_PNEU_SMC_EX260_V05_V08" Type="Digital" BitOperated="true" Bit="3" DataType="byte"/>
  279. <!--Reservoir4 outputs End-->
  280. <!--VPW Main Start-->
  281. <Output Name="c_VPW_CHAMBER_CLOSE" Address="Task 2.Outputs.MOTION_DO_16CHANNEL_EL2809_N401_15" Type="Digital" Invert="true" DataType="bool"/>
  282. <Output Name="c_VPW_VACUUM_PUMP_POWER" Address="Task 2.Outputs.VPW_DO_16CHANNEL_EL2809_N101_5" Type="Digital" Invert="false" DataType="bool"/>
  283. <Output Name="c_VPW_DEGAS_PUMP_ENABLE" Address="Task 2.Outputs.VPW_DO_16CHANNEL_EL2809_N101_6" Type="Digital" Invert="false" DataType="bool"/>
  284. <Output Name="c_VPW_BOOSTER_PUMP_ENABLE" Address="Task 2.Outputs.VPW_DO_16CHANNEL_EL2809_N101_7" Type="Digital" Invert="false" DataType="bool"/>
  285. <Output Name="c_VPW_VACUUM_PUMP_ENABLE" Address="Task 2.Outputs.MAIN_IO_RELAY_4CHANNEL_EL2624_N106_1" Type="Digital" Invert="false" DataType="bool"/>
  286. <Output Name="c_VPW_VACUUM_PUMP_SPEED_ENABLE" Address="Task 2.Outputs.MAIN_IO_RELAY_4CHANNEL_EL2624_N106_2" Type="Digital" Invert="false" DataType="bool"/>
  287. <Output Name="c_VPW_VACUUM_PUMP_SPEED" Address="Task 2.Outputs.VPW_AO_8CHANNEL_0_10V_EL4008_N104_1" Scaling="0=0,20=32767" Type="Analog" DataType="int"/>
  288. <Output Name="c_VPW_BOOSTER_PUMP_SPPED" Address="Task 2.Outputs.VPW_AO_8CHANNEL_0_10V_EL4008_N104_5" Scaling="300=0,10000=32767" Type="Analog" DataType="int"/>
  289. <Output Name="c_VPW_DIW_ENABLE" Address="Task 2.Outputs.VPW_PNEU_SMC_EX260_BYTE0" Type="Digital" BitOperated="true" Bit="0" DataType="byte"/>
  290. <Output Name="c_VPW_DIW_PROCESS" Address="Task 2.Outputs.VPW_PNEU_SMC_EX260_BYTE0" Type="Digital" BitOperated="true" Bit="1" DataType="byte"/>
  291. <Output Name="c_VPW_DIW_DEGAS" Address="Task 2.Outputs.VPW_PNEU_SMC_EX260_BYTE1" Type="Digital" BitOperated="true" Bit="0" DataType="byte"/>
  292. <Output Name="c_VPW_DEGAS_ADJUST" Address="Task 2.Outputs.VPW_PNEU_SMC_EX260_BYTE1" Type="Digital" BitOperated="true" Bit="1" DataType="byte"/>
  293. <Output Name="c_VPW_DEGAS_PURGE" Address="Task 2.Outputs.VPW_PNEU_SMC_EX260_BYTE1" Type="Digital" BitOperated="true" Bit="2" DataType="byte"/>
  294. <!--VPW Main End-->
  295. <!--VPW1 Start-->
  296. <Output Name="c_VPW_1_FLOW_DRIP" Address="Task 2.Outputs.VPW_PNEU_SMC_EX260_BYTE0" Type="Digital" BitOperated="true" Bit="2" DataType="byte"/>
  297. <Output Name="c_VPW_1_FLOW_SMALL" Address="Task 2.Outputs.VPW_PNEU_SMC_EX260_BYTE0" Type="Digital" BitOperated="true" Bit="3" DataType="byte"/>
  298. <Output Name="c_VPW_1_FLOW_LARGE" Address="Task 2.Outputs.VPW_PNEU_SMC_EX260_BYTE0" Type="Digital" BitOperated="true" Bit="4" DataType="byte"/>
  299. <Output Name="c_VPW_1_VACUUM_VALVE" Address="Task 2.Outputs.VPW_PNEU_SMC_EX260_BYTE1" Type="Digital" BitOperated="true" Bit="3" DataType="byte"/>
  300. <Output Name="c_VPW_1_VENT_VALVE" Address="Task 2.Outputs.VPW_PNEU_SMC_EX260_BYTE1" Type="Digital" BitOperated="true" Bit="5" DataType="byte"/>
  301. <Output Name="c_VPW_1_DIW_DRAIN" Address="Task 2.Outputs.VPW_PNEU_SMC_EX260_V09_V12" Type="Digital" BitOperated="true" Bit="0" DataType="byte"/>
  302. <!--VPW1 End-->
  303. <!--VPW2 Start-->
  304. <Output Name="c_VPW_2_FLOW_DRIP" Address="Task 2.Outputs.VPW_PNEU_SMC_EX260_BYTE0" Type="Digital" BitOperated="true" Bit="5" DataType="byte"/>
  305. <Output Name="c_VPW_2_FLOW_SMALL" Address="Task 2.Outputs.VPW_PNEU_SMC_EX260_BYTE0" Type="Digital" BitOperated="true" Bit="6" DataType="byte"/>
  306. <Output Name="c_VPW_2_FLOW_LARGE" Address="Task 2.Outputs.VPW_PNEU_SMC_EX260_BYTE0" Type="Digital" BitOperated="true" Bit="7" DataType="byte"/>
  307. <Output Name="c_VPW_2_VACUUM_VALVE" Address="Task 2.Outputs.VPW_PNEU_SMC_EX260_BYTE1" Type="Digital" BitOperated="true" Bit="4" DataType="byte"/>
  308. <Output Name="c_VPW_2_VENT_VALVE" Address="Task 2.Outputs.VPW_PNEU_SMC_EX260_BYTE1" Type="Digital" BitOperated="true" Bit="6" DataType="byte"/>
  309. <Output Name="c_VPW_2_DIW_DRAIN" Address="Task 2.Outputs.VPW_PNEU_SMC_EX260_V09_V12" Type="Digital" BitOperated="true" Bit="1" DataType="byte"/>
  310. <!--VPW2 End-->
  311. <!--EFEM Start-->
  312. <Output Name="c_System_Alarm" Address="Task 2.Outputs.Facility_DO_16CHANNEL_EL2809_N003_1" Type="Digital" DataType="bool"/>
  313. <Output Name="c_Pole_Red" Address="Task 2.Outputs.Facility_DO_16CHANNEL_EL2809_N003_2" Type="Digital" DataType="bool"/>
  314. <Output Name="c_Pole_Amber" Address="Task 2.Outputs.Facility_DO_16CHANNEL_EL2809_N003_3" Type="Digital" DataType="bool"/>
  315. <Output Name="c_Pole_Green" Address="Task 2.Outputs.Facility_DO_16CHANNEL_EL2809_N003_4" Type="Digital" DataType="bool"/>
  316. <Output Name="c_Pole_Blue" Address="Task 2.Outputs.Facility_DO_16CHANNEL_EL2809_N003_5" Type="Digital" DataType="bool"/>
  317. <Output Name="c_System_Alarm2" Address="Task 2.Outputs.Facility_DO_16CHANNEL_EL2809_N003_6" Type="Digital" DataType="bool"/>
  318. <!--EFEM End-->
  319. <!--////////////////////////////////////////////////// ALL OUTPUTS END //////////////////////////////////////////////////-->
  320. <!--////////////////////////////////////////////////// ALL COUNTERS BEGIN //////////////////////////////////////////////////-->
  321. <!--////////////////////////////////////////////////// ALL COUNTERS END //////////////////////////////////////////////////-->
  322. <!--////////////////////////////////////////////////// ALL AXIS BEGIN //////////////////////////////////////////////////-->
  323. <Axis Name="VPW1.Rotation" MotorType="Kollmorgen" COEAddress="192.168.0.14.4.1" COEPort="1016" DebugLogging="false">
  324. <Input Address="Task 2.Inputs.VPW1RotationStatusWord" Type="StatusWord" DataType="uint"/>
  325. <Input Address="Task 2.Inputs.VPW1RotationDigitalInputs" Type="DigitalInputs" DataType="udint"/>
  326. <Input Address="Task 2.Inputs.VPW1RotationMotorPosition" Type="MotorPosition" DataType="dint"/>
  327. <Input Address="Task 2.Inputs.VPW1RotationPositionError" Type="PositionError" DataType="dint"/>
  328. <Input Address="Task 2.Inputs.VPW1RotationActualVelocity" Type="ActualVelocity" DataType="dint"/>
  329. <Input Address="Task 2.Inputs.VPW1RotationActualTorque" Type="ActualTorque" DataType="int"/>
  330. <!-- Input Address="Task 2.Inputs.Loader1Rotation_DigitalOutputs" Type="DigitalOutputs" DataType="dint"/ -->
  331. <Input Address="0x607D:01" Type="SoftwareLimitMinus" DataType="dint"/>
  332. <Input Address="0x607D:02" Type="SoftwareLimitPlus" DataType="dint"/>
  333. <Input Address="0x6098:00" Type="HomingMethod" DataType="byte"/>
  334. <Input Address="0x607C:00" Type="HomeOffset" DataType="dint"/>
  335. <Input Address="0x6099:01" Type="HomingVelocity" DataType="dint"/>
  336. <Input Address="0x6099:02" Type="HomingVelocitySlow" DataType="dint"/>
  337. <Input Address="0x609A:00" Type="HomingAccel" DataType="dint"/>
  338. <Input Address="0x2403:00" Type="NegativeTorqueLimit" DataType="uint"/>
  339. <Input Address="0x2402:00" Type="PositiveTorqueLimit" DataType="uint"/>
  340. <Input Address="0x6085:00" Type="EStopDecel" DataType="udint"/>
  341. <Input Address="0x2406:00" Type="EStopTorque" DataType="uint"/>
  342. <Input Address="0x607F:00" Type="VelocityLimit" DataType="udint"/>
  343. <Input Address="0x2522:00" Type="PositionWindow" DataType="udint"/>
  344. <Input Address="0x2520:00" Type="FollowingErrorWindow" DataType="udint"/>
  345. <Input Address="0x603F:00" Type="ErrorCode" DataType="uint"/>
  346. <Output Address="Task 2.Outputs.VPW1RotationControlWord" Type="ControlWord" DataType="uint"/>
  347. <Output Address="Task 2.Outputs.VPW1RotationModeOfOperation" Type="ModeOfOperation" DataType="byte"/>
  348. <Output Address="Task 2.Outputs.VPW1RotationTargetPosition" Type="TargetPosition" DataType="dint"/>
  349. <Output Address="Task 2.Outputs.VPW1RotationProfileVelocity" Type="ProfileVelocity" DataType="dint"/>
  350. <Output Address="Task 2.Outputs.VPW1RotationProfileAccel" Type="ProfileAccel" DataType="dint"/>
  351. <Output Address="Task 2.Outputs.VPW1RotationProfileDecel" Type="ProfileDecel" DataType="dint"/>
  352. <!-- Output Address="Task 2.Inputs.Loader1Rotation_DigitalOutputs" Type="DigitalOutputs" DataType="dint"/ -->
  353. <Output Address="0x607D:01" Type="SoftwareLimitMinus" DataType="dint"/>
  354. <Output Address="0x607D:02" Type="SoftwareLimitPlus" DataType="dint"/>
  355. <Output Address="0x607C:00" Type="HomeOffset" DataType="dint"/>
  356. <Output Address="0x6098:00" Type="HomingMethod" DataType="byte"/>
  357. <Output Address="0x6099:01" Type="HomingVelocity" DataType="dint"/>
  358. <Output Address="0x6099:02" Type="HomingVelocitySlow" DataType="dint"/>
  359. <Output Address="0x609A:00" Type="HomingAccel" DataType="dint"/>
  360. <Output Address="0x2403:00" Type="NegativeTorqueLimit" DataType="uint"/>
  361. <Output Address="0x2402:00" Type="PositiveTorqueLimit" DataType="uint"/>
  362. <MotorType>Servo</MotorType>
  363. <MotorDriveDirection>0</MotorDriveDirection>
  364. <EncoderFeedbackDirectionMValue>0</EncoderFeedbackDirectionMValue>
  365. <EncoderFeedbackDirectionNValue>0</EncoderFeedbackDirectionNValue>
  366. <ReverseLimitSwitchPolarity>0</ReverseLimitSwitchPolarity>
  367. <ForwardLimitSwitchPolarity>0</ForwardLimitSwitchPolarity>
  368. <HomeSwitchPolarity>0</HomeSwitchPolarity>
  369. <HomingMethod>24</HomingMethod>
  370. <HomeConfig>0</HomeConfig>
  371. <HomingOffset>0</HomingOffset>
  372. <HomingSpeedHomeSwitch>1500000</HomingSpeedHomeSwitch>
  373. <HomingSpeedEncoderIndex>0</HomingSpeedEncoderIndex>
  374. <HomingAccelDecel>10000000</HomingAccelDecel>
  375. <HomingTimeOut>60000</HomingTimeOut>
  376. <ProportionalGain>0</ProportionalGain>
  377. <IntegralGain>0</IntegralGain>
  378. <DerivativeGain>0</DerivativeGain>
  379. <IntegralLimit>0</IntegralLimit>
  380. <ErrorLimit>0</ErrorLimit>
  381. <VoltageOffset>0</VoltageOffset>
  382. <!-- -193 degrees * 169161 = -32648073 -->
  383. <ReverseSoftwareLimit>0</ReverseSoftwareLimit>
  384. <!-- 13 degrees * 169161 = 2199093 -->
  385. <ForwardSoftwareLimit>0</ForwardSoftwareLimit>
  386. <Speed>360</Speed>
  387. <Acceleration>1000</Acceleration>
  388. <Deceleration>1000</Deceleration>
  389. <Jerk>0</Jerk>
  390. <FeedforwardVelocity>0</FeedforwardVelocity>
  391. <FeedforwardAcceleration>0</FeedforwardAcceleration>
  392. <OffOnError>0</OffOnError>
  393. </Axis>
  394. <Axis Name="VPW2.Rotation" MotorType="Yaskawa" COEAddress="192.168.0.14.4.1" COEPort="1016" DebugLogging="false">
  395. <Input Address="Task 2.Inputs.VPW2RotationStatusWord" Type="StatusWord" DataType="uint"/>
  396. <Input Address="Task 2.Inputs.VPW2RotationDigitalInputs" Type="DigitalInputs" DataType="udint"/>
  397. <Input Address="Task 2.Inputs.VPW2RotationMotorPosition" Type="MotorPosition" DataType="dint"/>
  398. <Input Address="Task 2.Inputs.VPW2RotationPositionError" Type="PositionError" DataType="dint"/>
  399. <Input Address="Task 2.Inputs.VPW2RotationActualVelocity" Type="ActualVelocity" DataType="dint"/>
  400. <Input Address="Task 2.Inputs.VPW2RotationActualTorque" Type="ActualTorque" DataType="int"/>
  401. <!-- Input Address="Task 2.Inputs.Loader1Rotation_DigitalOutputs" Type="DigitalOutputs" DataType="dint"/ -->
  402. <Input Address="0x607D:01" Type="SoftwareLimitMinus" DataType="dint"/>
  403. <Input Address="0x607D:02" Type="SoftwareLimitPlus" DataType="dint"/>
  404. <Input Address="0x6098:00" Type="HomingMethod" DataType="byte"/>
  405. <Input Address="0x607C:00" Type="HomeOffset" DataType="dint"/>
  406. <Input Address="0x6099:01" Type="HomingVelocity" DataType="dint"/>
  407. <Input Address="0x6099:02" Type="HomingVelocitySlow" DataType="dint"/>
  408. <Input Address="0x609A:00" Type="HomingAccel" DataType="dint"/>
  409. <Input Address="0x2403:00" Type="NegativeTorqueLimit" DataType="uint"/>
  410. <Input Address="0x2402:00" Type="PositiveTorqueLimit" DataType="uint"/>
  411. <Input Address="0x6085:00" Type="EStopDecel" DataType="udint"/>
  412. <Input Address="0x2406:00" Type="EStopTorque" DataType="uint"/>
  413. <Input Address="0x607F:00" Type="VelocityLimit" DataType="udint"/>
  414. <Input Address="0x2522:00" Type="PositionWindow" DataType="udint"/>
  415. <Input Address="0x2520:00" Type="FollowingErrorWindow" DataType="udint"/>
  416. <Input Address="0x603F:00" Type="ErrorCode" DataType="uint"/>
  417. <Output Address="Task 2.Outputs.VPW2RotationControlWord" Type="ControlWord" DataType="uint"/>
  418. <Output Address="Task 2.Outputs.VPW2RotationModeOfOperation" Type="ModeOfOperation" DataType="byte"/>
  419. <Output Address="Task 2.Outputs.VPW2RotationTargetPosition" Type="TargetPosition" DataType="dint"/>
  420. <Output Address="Task 2.Outputs.VPW2RotationProfileVelocity" Type="ProfileVelocity" DataType="dint"/>
  421. <Output Address="Task 2.Outputs.VPW2RotationProfileAccel" Type="ProfileAccel" DataType="dint"/>
  422. <Output Address="Task 2.Outputs.VPW2RotationProfileDecel" Type="ProfileDecel" DataType="dint"/>
  423. <!-- Output Address="Task 2.Inputs.Loader1Rotation_DigitalOutputs" Type="DigitalOutputs" DataType="dint"/ -->
  424. <Output Address="0x607D:01" Type="SoftwareLimitMinus" DataType="dint"/>
  425. <Output Address="0x607D:02" Type="SoftwareLimitPlus" DataType="dint"/>
  426. <Output Address="0x607C:00" Type="HomeOffset" DataType="dint"/>
  427. <Output Address="0x6098:00" Type="HomingMethod" DataType="byte"/>
  428. <Output Address="0x6099:01" Type="HomingVelocity" DataType="dint"/>
  429. <Output Address="0x6099:02" Type="HomingVelocitySlow" DataType="dint"/>
  430. <Output Address="0x609A:00" Type="HomingAccel" DataType="dint"/>
  431. <Output Address="0x2403:00" Type="NegativeTorqueLimit" DataType="uint"/>
  432. <Output Address="0x2402:00" Type="PositiveTorqueLimit" DataType="uint"/>
  433. <MotorType>Servo</MotorType>
  434. <MotorDriveDirection>0</MotorDriveDirection>
  435. <EncoderFeedbackDirectionMValue>0</EncoderFeedbackDirectionMValue>
  436. <EncoderFeedbackDirectionNValue>0</EncoderFeedbackDirectionNValue>
  437. <ReverseLimitSwitchPolarity>0</ReverseLimitSwitchPolarity>
  438. <ForwardLimitSwitchPolarity>0</ForwardLimitSwitchPolarity>
  439. <HomeSwitchPolarity>0</HomeSwitchPolarity>
  440. <HomingMethod>24</HomingMethod>
  441. <HomeConfig>0</HomeConfig>
  442. <HomingOffset>0</HomingOffset>
  443. <HomingSpeedHomeSwitch>1500000</HomingSpeedHomeSwitch>
  444. <HomingSpeedEncoderIndex>0</HomingSpeedEncoderIndex>
  445. <HomingAccelDecel>10000000</HomingAccelDecel>
  446. <HomingTimeOut>60000</HomingTimeOut>
  447. <ProportionalGain>0</ProportionalGain>
  448. <IntegralGain>0</IntegralGain>
  449. <DerivativeGain>0</DerivativeGain>
  450. <IntegralLimit>0</IntegralLimit>
  451. <ErrorLimit>0</ErrorLimit>
  452. <VoltageOffset>0</VoltageOffset>
  453. <!-- -193 degrees * 169161 = -32648073 -->
  454. <ReverseSoftwareLimit>0</ReverseSoftwareLimit>
  455. <!-- 13 degrees * 169161 = 2199093 -->
  456. <ForwardSoftwareLimit>0</ForwardSoftwareLimit>
  457. <Speed>360</Speed>
  458. <Acceleration>1000</Acceleration>
  459. <Deceleration>1000</Deceleration>
  460. <Jerk>0</Jerk>
  461. <FeedforwardVelocity>0</FeedforwardVelocity>
  462. <FeedforwardAcceleration>0</FeedforwardAcceleration>
  463. <OffOnError>0</OffOnError>
  464. </Axis>
  465. <!--////////////////////////////////////////////////// ALL AXIS END //////////////////////////////////////////////////-->
  466. </Controller>
  467. </BeckhoffCfg>