| 123456789101112131415161718192021222324252627 | using System;using System.Collections.Generic;using System.Linq;using System.Text;using System.Threading.Tasks;using MECF.Framework.Common.Equipment;namespace MECF.Framework.RT.EquipmentLibrary.HardwareUnits.TMs{    public interface ITM    {        bool CheckAtm();        bool CheckVacuum();        bool SetFastVentValve(bool isOpen, out string reason);        bool SetSlowVentValve(bool isOpen, out string reason);        bool SetFastPumpValve(bool isOpen, out string reason);        bool SetSlowPumpValve(bool isOpen, out string reason);        bool SetSlitValve(ModuleName module, bool isOpen, out string reason);        bool CheckSlitValveOpen(ModuleName module);        bool CheckSlitValveClose(ModuleName module);    }}
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