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- using Aitex.Core.RT.Device;
- using Aitex.Core.RT.Log;
- using Aitex.Core.RT.Routine;
- using Aitex.Core.Util;
- using MECF.Framework.Common.Beckhoff.AxisProvider;
- using MECF.Framework.Common.Beckhoff.Station;
- using MECF.Framework.Common.CommonData.PowerSupplier;
- using MECF.Framework.Common.RecipeCenter;
- using MECF.Framework.Common.Routine;
- using MECF.Framework.Common.SubstrateTrackings;
- using MECF.Framework.Common.ToolLayout;
- using MECF.Framework.Common.Utilities;
- using PunkHPX8_Core;
- using PunkHPX8_RT.Devices.AXIS;
- using PunkHPX8_RT.Devices.Facilities;
- using PunkHPX8_RT.Devices.PlatingCell;
- using PunkHPX8_RT.Devices.PowerSupplier;
- using PunkHPX8_RT.Modules.Reservoir;
- using SecsGem.Core.ItemModel;
- using System;
- using System.Collections.Generic;
- using System.Diagnostics;
- using System.Linq;
- using System.Text;
- using System.Threading.Tasks;
- using static Mono.Security.X509.X520;
- namespace PunkHPX8_RT.Modules.PlatingCell
- {
- public class PlatingCellRunRecipeRoutine : RoutineBase, IRoutine
- {
- private enum RunRecipeStep
- {
- InterRinse,
- CheckInterRinse,
- Entry,
- CheckEntry,
- Deposition,
- CheckDeposition,
- End
- }
- #region 常量
- private const int ALL_DAY_MILLOSECONDS = 24 * 60 * 60 * 1000;
- /// <summary>
- /// ROTATION电机转速比例
- /// </summary>
- private const int SPEED_RATIO = 1;
- #endregion
- #region 内部变量
- /// <summary>
- /// recipe
- /// </summary>
- private DepRecipe _recipe;
- /// <summary>
- /// Platingcell device
- /// </summary>
- private PlatingCellDevice _device;
- /// <summary>
- /// Rotation axis
- /// </summary>
- private JetAxisBase _rotationAxis;
- /// <summary>
- ///rotation Provider对象
- /// </summary>
- private BeckhoffProviderAxis _rotationProviderAxis;
- ///是否选中dummy load
- /// </summary>
- private bool _isDummyLoad;
- /// cycle次数
- /// </summary>
- private int _cycle;
- /// <summary>
- /// 当前完成的Cycle次数
- /// </summary>
- private int _currentCycle;
- /// <summary>
- /// platingcell entity
- /// </summary>
- private PlatingCellEntity _platingCellEntity;
- /// <summary>
- /// 对应reservoir entity
- /// </summary>
- private ReservoirEntity _reservoirEntity;
- /// <summary>
- /// vertical axis entity
- /// </summary>
- private PlatingCellVerticalEntity _verticalEntity;
- /// <summary>
- /// vertical 轴的位置数据
- /// </summary>
- private BeckhoffStationAxis _verticalBeckhoffStation;
- /// <summary>
- /// recipe中是否存在电机反转
- /// </summary>
- private bool _isRecipeContainsRevserseRotation = false;
- /// <summary>
- /// run recipe 过程中电机会停的位置(需要根据recipe计算出来)
- /// </summary>
- private List<int> _targetPositionList = new List<int>();
- #region 电镀通电相关
- /// <summary>
- /// 不通电
- /// </summary>
- private bool _isZeroCurrent = false;
- /// <summary>
- /// Power step集合
- /// </summary>
- List<PowerSupplierStepPeriodData> _powerSupplierStepPeriodDatas = new List<PowerSupplierStepPeriodData>();
- /// <summary>
- /// 记录dep recipe中出现的最大电流,用于启动电源前切换挡位
- /// </summary>
- private double _maxCurrent = 0;
- /// <summary>
- /// 通电总时长
- /// </summary>
- private int _totalMicrosecond = 0;
- /// <summary>
- /// Plating启动时间
- /// </summary>
- private DateTime _platingStartTime;
- #endregion
- #region routine
- /// <summary>
- /// interbal rinse routien
- /// </summary>
- private PlatingCellInterRinseRoutine _interRinseRoutine;
- /// <summary>
- /// entry routien
- /// </summary>
- private PlatingCellEntryRoutine _entryRoutine;
- /// <summary>
- /// entry routien
- /// </summary>
- private PlatingCellDepositionRoutine _depositionRoutine;
- #endregion
- #region 属性
- #endregion
- #endregion
- /// <summary>
- /// 构造函数
- /// </summary>
- /// <param name="module"></param>
- public PlatingCellRunRecipeRoutine(string module) : base(module)
- {
- _interRinseRoutine = new PlatingCellInterRinseRoutine(module);
- _entryRoutine = new PlatingCellEntryRoutine(module);
- _depositionRoutine = new PlatingCellDepositionRoutine(module);
- }
- /// <summary>
- /// 中止
- /// </summary>
- public void Abort()
- {
- Runner.Stop("Manual Abort");
- }
- /// <summary>
- /// 监控
- /// </summary>
- /// <returns></returns>
- public RState Monitor()
- { //interval rinse
- Runner.RunIf(RunRecipeStep.InterRinse, _recipe.RinseBeforeEntryEnable, () => { return _interRinseRoutine.Start(_recipe, _targetPositionList[0]) == RState.Running; })
- .WaitWithStopConditionIf(RunRecipeStep.CheckInterRinse, _recipe.RinseBeforeEntryEnable, CheckInterRinseEndStatus,
- () => CommonFunction.CheckRoutineStopState(_interRinseRoutine))
- //entry
- .Run(RunRecipeStep.Entry, () => { return _entryRoutine.Start(_recipe, _targetPositionList[0], _powerSupplierStepPeriodDatas,_platingStartTime) == RState.Running; })
- .WaitWithStopCondition(RunRecipeStep.CheckEntry, CheckInterRinseEndStatus,
- () => CommonFunction.CheckRoutineStopState(_entryRoutine))
- //Deposition
- .Run(RunRecipeStep.Deposition, () => { return _depositionRoutine.Start(_recipe, _isZeroCurrent, _isRecipeContainsRevserseRotation,_powerSupplierStepPeriodDatas, _platingStartTime) == RState.Running; })
- .WaitWithStopCondition(RunRecipeStep.CheckDeposition, CheckInterRinseEndStatus,
- () => CommonFunction.CheckRoutineStopState(_depositionRoutine))
- .End(RunRecipeStep.End, NullFun);
- return Runner.Status;
- }
- private bool CheckInterRinseEndStatus()
- {
- bool result = CommonFunction.CheckRoutineEndState(_interRinseRoutine);
- SubRoutineStep = _interRinseRoutine.CurrentStep;
- return result;
- }
- /// <summary>
- /// 启动
- /// </summary>
- /// <param name="objs"></param>
- /// <returns></returns>
- public RState Start(params object[] objs)
- {
- _recipe = objs[0] as DepRecipe;
- if (_recipe == null)
- {
- LOG.WriteLog(eEvent.ERR_METAL, Module, "recipe is null");
- return RState.Failed;
- }
- if (objs.Length > 1)
- {
- _isDummyLoad = (bool)objs[1];
- }
- if (objs.Length > 2)
- {
- _cycle = (int)objs[2];
- }
- _device = DEVICE.GetDevice<PlatingCellDevice>(Module);
- _rotationAxis = DEVICE.GetDevice<JetAxisBase>($"{Module}.Rotation");
- _rotationProviderAxis = BeckhoffAxisProviderManager.Instance.GetAxisProvider($"{Module}.Rotation");
- if (_rotationProviderAxis == null)
- {
- NotifyError(eEvent.ERR_PLATINGCELL, $"{Module}.Rotation Provider is not exist", 0);
- return RState.Failed;
- }
- //获取vertical entity
- string vertical = ModuleMatcherManager.Instance.GetPlatingVerticalByCell(Module);
- _verticalEntity = Singleton<RouteManager>.Instance.GetModule<PlatingCellVerticalEntity>(vertical);
- //获取platingcell eneity
- _platingCellEntity = Singleton<RouteManager>.Instance.GetModule<PlatingCellEntity>(Module);
- //获取对应reservoir eneity
- string reservoir = ReservoirItemManager.Instance.GetReservoirByPlatingCell(Module);
- _reservoirEntity = Singleton<RouteManager>.Instance.GetModule<ReservoirEntity>(reservoir);
- //获取vertical station信息对象
- _verticalBeckhoffStation = BeckhoffStationLocationManager.Instance.GetStationAxis($"{_verticalEntity.Module}", "Vertical");
- if (!CheckPreCondition())
- {
- return RState.Failed;
- }
- CalculatVerticalPosition(_recipe);
- UpdatePowerStepDatas();
- _currentCycle = 0;
-
- return Runner.Start(Module, "Run Recipe");
- }
- /// <summary>
- /// 初始化Power step步骤
- /// </summary>
- private bool UpdatePowerStepDatas()
- {
- _isZeroCurrent = false;
- double current = 0;
- _totalMicrosecond = 0;
- _powerSupplierStepPeriodDatas.Clear();
- if (!_recipe.IsEntryTypeCold)//如果entry带上电保护,那么把上电保护的部分加到步阶电流的第一步
- {
- PowerSupplierStepPeriodData step = new PowerSupplierStepPeriodData(); //上电保护时间(提前上电时间+延迟时间)
- step.Hour = 0;
- step.Minute = (ushort)((_recipe.PlatingDelay) / 60);
- step.Second = (ushort)(_recipe.PlatingDelay % 60);
- step.Microsecond = 110; //到达entry位置提前100ms上电,提前一丢丢
- step.Voltage = _recipe.DepMaxVoltageWarning;
- _powerSupplierStepPeriodDatas.Add(step);
- }
- foreach (var item in _recipe.DepSteps)
- {
- PowerSupplierStepPeriodData step = new PowerSupplierStepPeriodData();
- step.Current = item.CurrentValue;
- if(item.CurrentValue > _maxCurrent)
- {
- _maxCurrent = item.CurrentValue;
- }
- step.Hour = (ushort)(item.DurartionSeconds / 3600);
- step.Minute = (ushort)((item.DurartionSeconds - step.Hour * 3600) / 60);
- step.Second = (ushort)(item.DurartionSeconds % 60);
- step.Microsecond = 0;
- step.Voltage = _recipe.DepMaxVoltageWarning;
- _powerSupplierStepPeriodDatas.Add(step);
- current += step.Current;
- _totalMicrosecond += item.DurartionSeconds * 1000;
- }
- if (current == 0)
- {
- _isZeroCurrent = true;
- }
- if(_maxCurrent > 0.6) //设置电源挡位,有超过0.6A的电流则用高档,否则用中挡
- {
- return _device.PowerSupplier.SetPowerGrade("set power grade high", new object[] { 2 });
- }
- else
- {
- return _device.PowerSupplier.SetPowerGrade("set power grade high", new object[] { 1 });
- }
- }
- /// <summary>
- /// 根据dep recipe计算出整个电镀过程中Rotation profile position可能去到的位置
- /// </summary>
- private void CalculatVerticalPosition(DepRecipe recipe)
- {
- foreach(var item in recipe.DepSteps)
- {
- if (item.BiDireaction)
- {
- _isRecipeContainsRevserseRotation = true;
- }
- else
- {
- continue;
- }
- }
- //不存在双向旋转直接给roation一个很大的值,电镀完成后再停止
- if (!_isRecipeContainsRevserseRotation)
- {
- _targetPositionList.Add(12 * 60 * 60 * 500 * 6); //以500rmp 运行12个小时的位置
- }
- else
- {
- }
- }
- /// <summary>
- /// 检验前置条件
- /// </summary>
- /// <returns></returns>
- private bool CheckPreCondition()
- {
- if (_recipe == null)
- {
- LOG.WriteLog(eEvent.ERR_PLATINGCELL, Module, "Recipe is null");
- return false;
- }
- //if (_recipe.DepSteps.Count == 0)
- //{
- // LOG.WriteLog(eEvent.ERR_PLATINGCELL, Module, "Recipe DepSteps count is 0");
- // return false;
- //}
- CheckAxisHome();
- CheckFacility();
- CheckModuleAndReservoir();
- return true;
- }
- private bool CheckModuleAndReservoir()
- {
- if (!_platingCellEntity.IsIdle)
- {
- LOG.WriteLog(eEvent.ERR_PLATINGCELL, Module, $"{Module} is not initialized");
- return false;
- }
- if (!_reservoirEntity.IsIdle)
- {
- LOG.WriteLog(eEvent.ERR_PLATINGCELL, Module, $"Releated reseroivr is not initialized");
- return false;
- }
- if (!_reservoirEntity.TemperatureReached)
- {
- LOG.WriteLog(eEvent.ERR_PLATINGCELL, Module, $"Releated reseroivr temperature is not reached");
- return false;
- }
- if ("Manual".Equals(_reservoirEntity.PersistentValue.OperatingMode) && !WaferManager.Instance.CheckHasWafer(Module, 0))
- {
- LOG.WriteLog(eEvent.ERR_PLATINGCELL, Module, $"Run recipe in manual must has wafer!");
- return false;
- }
- return true;
- }
- /// <summary>
- /// 检查马达是否上电且home
- /// </summary>
- /// <returns></returns>
- private bool CheckAxisHome()
- {
- if (!_rotationAxis.IsSwitchOn)
- {
- LOG.WriteLog(eEvent.ERR_PLATINGCELL, Module, "Rotation Axis is off");
- return false;
- }
- if (!_rotationAxis.IsHomed)
- {
- LOG.WriteLog(eEvent.ERR_PLATINGCELL, Module, "Rotation Axis is not home");
- return false;
- }
- if (!_verticalEntity.IsIdle)
- {
- LOG.WriteLog(eEvent.ERR_PLATINGCELL, Module, "Vertical Axis is not home");
- return false;
- }
- return true;
- }
- /// <summary>
- /// 检查facility
- /// </summary>
- /// <returns></returns>
- private bool CheckFacility()
- {
- SystemFacilities systemFacilities = DEVICE.GetDevice<SystemFacilities>("System.Facilities");
- if (systemFacilities == null)
- {
- LOG.WriteLog(eEvent.ERR_PLATINGCELL, Module, "Facility is null");
- return false;
- }
- if (!systemFacilities.CDAEnable)
- {
- LOG.WriteLog(eEvent.ERR_PLATINGCELL, Module, "Facility CDA is off");
- return false;
- }
- if (!systemFacilities.N2Enable)
- {
- LOG.WriteLog(eEvent.ERR_PLATINGCELL, Module, "Facility N2 is off");
- return false;
- }
- if (!systemFacilities.DIFillEnable)
- {
- LOG.WriteLog(eEvent.ERR_PLATINGCELL, Module, "Facility DIW is off");
- return false;
- }
- if (systemFacilities.FacilitiesDataDic["CDA1Pressure"].IsError || systemFacilities.FacilitiesDataDic["CDA2Pressure"].IsError)
- {
- LOG.WriteLog(eEvent.ERR_PLATINGCELL, Module, "Facility CDA Data is in errro range");
- return false;
- }
- if (systemFacilities.FacilitiesDataDic["Nitrogen1APressure"].IsError ||
- systemFacilities.FacilitiesDataDic["Nitrogen1BPressure"].IsError ||
- systemFacilities.FacilitiesDataDic["Nitrogen2APressure"].IsError ||
- systemFacilities.FacilitiesDataDic["Nitrogen2BPressure"].IsError)
- {
- LOG.WriteLog(eEvent.ERR_PLATINGCELL, Module, "Facility N2 Data is in errro range");
- return false;
- }
- if (systemFacilities.FacilitiesDataDic["DiWaterPressure"].IsError)
- {
- LOG.WriteLog(eEvent.ERR_PLATINGCELL, Module, "Facility Diw Pressure value is in errro range");
- return false;
- }
- return true;
- }
- }
- }
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