| 123456789101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960616263646566676869707172737475767778798081828384858687888990 | using Aitex.Core.RT.Device;using Aitex.Core.RT.Log;using Aitex.Core.RT.Routine;using Aitex.Core.RT.SCCore;using Aitex.Core.Util;using MECF.Framework.Common.Equipment;using MECF.Framework.Common.RecipeCenter;using MECF.Framework.Common.Routine;using MECF.Framework.Common.SubstrateTrackings;using PunkHPX8_Core;using PunkHPX8_RT.Devices.AXIS;using PunkHPX8_RT.Devices.VpwCell;using PunkHPX8_RT.Devices.VpwMain;using PunkHPX8_RT.Modules.VpwMain;using PunkHPX8_RT.Schedulers;using System;using System.Collections.Generic;using System.Linq;using System.Text;using System.Threading.Tasks;namespace PunkHPX8_RT.Modules.VpwMain{    public class VPWChamberDownRoutine : RoutineBase, IRoutine    {        private enum PrepareStep        {            ChamerDown,            Delay,            End        }        #region 内部变量        /// <summary>        /// Main设备        /// </summary>        private VpwMainDevice _mainDevice;        #endregion        /// <summary>        /// 构造函数        /// </summary>        /// <param name="module"></param>        public VPWChamberDownRoutine(string module) : base(module)        {        }        /// <summary>        /// 中止        /// </summary>        public void Abort()        {            Runner.Stop("Manual abort");        }        /// <summary>        /// 监控        /// </summary>        /// <returns></returns>        public RState Monitor()        {            Runner.Run(PrepareStep.ChamerDown, ChamberDown, CheckChamberOpend,_delay_10s)                              .End(PrepareStep.End,NullFun,_delay_1ms);            return Runner.Status;        }        /// <summary>        /// 打开 Chamber        /// </summary>        /// <returns></returns>        private bool ChamberDown()        {            return _mainDevice.ChamberDown();        }        /// <summary>        /// 检验Chamber是否打开        /// </summary>        /// <returns></returns>        private bool CheckChamberOpend()        {            return _mainDevice.CommonData.ChamberOpened && !_mainDevice.CommonData.ChamberClosed;        }        /// <summary>        /// 启动        /// </summary>        /// <param name="objs"></param>        /// <returns></returns>        public RState Start(params object[] objs)        {            _mainDevice = DEVICE.GetDevice<VpwMainDevice>(Module);            return Runner.Start(Module, $"{Module} chamber down");        }    }}
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