| 123456789101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960616263646566676869707172737475767778798081828384858687888990919293949596979899100101102103104105106107108109110111112113114115116117118119120121122123124125126127128129130131132133134135136137138139140141142143144145146147148149150151152153154155156157158159160161162163164165166167168169170171172173174175176177178179180181182183184185186187188189190191192193194195196197198199200201202203204205206207208209210211212213214215216217218219220221222223224225226227228229230231232233234235236237238239240241242243244245246247248249250251252253254255256257258259260261262263264265266267268269270271272273274275276277278279280281282283284285286287288289290291292293294295296297298299300301302303304305306307308309310311312313314315316317318319320321322323324325326327328329330331332333334335336337338339340341342343344345346347348349350351352353354355356357358359360361362363364365366367368369370371372373374375376377378379380381382383384385386387388389390391392393394395396397398399400401402403404405406407408409410411412413414415416417418419420421422423424425426427428429430431432433434435436437438439440441442443444445446447448449450451452453454455456457458459460461462463464465466467468469470471472473474475476477478479480481482483484485486487488489490491492493494495496497498499500501502503504505506507508509510511512513514515516517518519 | using Aitex.Core.Common;using Aitex.Core.RT.DataCenter;using Aitex.Core.RT.Device;using Aitex.Core.RT.Fsm;using Aitex.Core.RT.Log;using Aitex.Core.RT.OperationCenter;using Aitex.Core.RT.RecipeCenter;using Aitex.Core.RT.SCCore;using Aitex.Core.Util;using Aitex.Core.Utilities;using CyberX12_RT.Modules.VpwCell;using MECF.Framework.Common.Equipment;using MECF.Framework.Common.Persistent.Reservoirs;using MECF.Framework.Common.ProcessCell;using MECF.Framework.Common.RecipeCenter;using MECF.Framework.Common.Routine;using MECF.Framework.Common.SubstrateTrackings;using MECF.Framework.Common.ToolLayout;using MECF.Framework.RT.Core.Equipments;using PunkHPX8_Core;using PunkHPX8_RT.Devices.PlatingCell;using PunkHPX8_RT.Devices.PowerSupplier;using PunkHPX8_RT.Devices.Reservoir;using PunkHPX8_RT.Devices.Temperature;using PunkHPX8_RT.Modules.Reservoir;using PunkHPX8_RT.Modules.VpwCell;using PunkHPX8_RT.Modules.VpwMain;using System;using System.Collections.Generic;using System.Linq;using System.Text;using System.Threading.Tasks;namespace PunkHPX8_RT.Modules.PlatingCell{    public class PlatingCellEntity : Entity, IEntity, IModuleEntity    {        public enum PlatingCellMsg        {            NONE,            Error,            ResumeError,            Initialize,            Manual,            Auto,            CloseFlowValve,            OpenFlowValve,            RunRecipe,            Abort,            Init,            CCR,            CCRAbort        }        #region 常量        private const string STRATUS = "Stratus";        private const string AUTO = "Auto";        private const string MANUAL = "Manual";        private const string DISABLED = "Disabled";        private const string ENGINEERING = "Engineering";        private const string PRODUCTION = "Production";        #endregion        #region 内部变量        /// <summary>        /// 持久化数值        /// </summary>        private PlatingCellPersistentValue _persistentValue;        /// <summary>        /// 当前recipe        /// </summary>        private DepRecipe _currentRecipe;        /// <summary>        /// recipe时间        /// </summary>        private int _recipeTime;        /// <summary>        /// c&m Initialize routine        /// </summary>        private PlatingCellInitializeRoutine _initializeRoutine;        /// <summary>        /// CCR routine        /// </summary>        private PlatingCellCCRRoutine _platingCellCRRoutine;        /// <summary>        /// Run recipe routine        /// </summary>        private PlatingCellRunRecipeRoutine _runRecipeRoutine;        /// <summary>        /// 工艺当前执行小步骤        /// </summary>        private string _currentStepState = "Init";        #endregion        #region 属性        /// <summary>        /// 模块名称        /// </summary>        public ModuleName Module { get; private set; }        /// <summary>        /// 是否Init        /// </summary>        public bool IsInit        {            get { return fsm.State == (int)PlatingCellState.Init; }        }        /// <summary>        /// 是否Idle        /// </summary>        public bool IsIdle        {            get            {                return fsm.State == (int)PlatingCellState.Idle;            }        }        /// <summary>        /// 是否错误        /// </summary>        public bool IsError        {            get { return fsm.State == (int)PlatingCellState.Error; }        }        /// <summary>        /// 正在忙碌        /// </summary>        public bool IsBusy        {            get { return fsm.State == (int)PlatingCellState.Initializing; }        }        /// <summary>        /// 化学液        /// </summary>        public string Chemistry        {            get { return _currentRecipe != null ? _currentRecipe.Chemistry : ""; }        }        /// <summary>        /// 是否禁用        /// </summary>        public bool IsDisable { get { return _persistentValue == null || _persistentValue.OperatingMode == DISABLED; } }        /// <summary>        /// 自动模式        /// </summary>        public bool IsAuto { get { return _persistentValue != null && _persistentValue.OperatingMode == AUTO; } }        /// <summary>        /// 自动模式        /// </summary>        public bool IsManual { get { return _persistentValue != null && _persistentValue.OperatingMode == MANUAL; } }        /// <summary>        /// 是否为工程模式        /// </summary>        public bool IsEngineering { get { return _persistentValue != null && _persistentValue.RecipeOperatingMode == ENGINEERING; } }        /// <summary>        /// 是否为产品模式        /// </summary>        public bool IsProduction { get { return _persistentValue != null && _persistentValue.RecipeOperatingMode == PRODUCTION; } }        /// <summary>        /// 当前状态机状态        /// </summary>        public int State { get { return fsm.State; } }        /// <summary>        /// 是否初始化完成        /// </summary>        public bool IsInitialized { get { return fsm.State >= (int)PlatingCellState.Initialized; } }        /// <summary>        /// Reservoir项        /// </summary>        private ReservoirItem _reservoirItem;        /// <summary>        /// Wafer信息        /// </summary>        public WaferInfo WaferInfo { get { return WaferManager.Instance.GetWafer(Module,0); } }        /// <summary>        /// 当前Metal设置的WaferSize        /// </summary>        public int MetalWaferSize { get { return _persistentValue.PlatingCellWaferSize; } }        /// <summary>        /// 当前工步        /// </summary>        public string CurrentStepState { get { return _currentStepState; } }        #endregion        /// <summary>        /// 构造函数        /// </summary>        /// <param name="module"></param>        public PlatingCellEntity(ModuleName module)        {            this.Module = module;            InitialFsm();        }        /// <summary>        /// 初始化        /// </summary>        /// <returns></returns>        protected override bool Init()        {            WaferManager.Instance.SubscribeLocation(Module, 1);            InitializeRoutine();            InitializeDATA();            InitializeOperation();            InitializeParameter();            return true;        }        /// <summary>        /// 初始化参数        /// </summary>        private void InitializeParameter()        {            _persistentValue = PlatingCellPersistentManager.Instance.GetPlatingCellPersistentValue(Module.ToString());            if (_persistentValue == null)            {                LOG.WriteLog(eEvent.ERR_PLATINGCELL, Module.ToString(), "Persistent Value Object is not exist");            }        }              /// <summary>        /// 初始化Routine        /// </summary>        private void InitializeRoutine()        {            _initializeRoutine = new PlatingCellInitializeRoutine(Module.ToString());            _platingCellCRRoutine = new PlatingCellCCRRoutine(Module.ToString());            _runRecipeRoutine=new PlatingCellRunRecipeRoutine(Module.ToString());           }        /// <summary>        /// 初始化DATA        /// </summary>        private void InitializeDATA()        {            DATA.Subscribe($"{Module}.FsmState", () => ((PlatingCellState)fsm.State).ToString(), SubscriptionAttribute.FLAG.IgnoreSaveDB);            DATA.Subscribe($"{Module}.CurrentRecipe", () => _currentRecipe != null ? _currentRecipe.Ppid : "", SubscriptionAttribute.FLAG.IgnoreSaveDB);            DATA.Subscribe($"{Module}.TotalTime", () => _recipeTime, SubscriptionAttribute.FLAG.IgnoreSaveDB);            DATA.Subscribe($"{Module}.TimeRemain", () => _recipeTime != 0 && _runRecipeRoutine != null ? (_recipeTime - Math.Round((double)_runRecipeRoutine.ElapsedMilliseconds / 1000, 0)) : 0, SubscriptionAttribute.FLAG.IgnoreSaveDB);            DATA.Subscribe($"{Module}.Chemistry", () => _currentRecipe != null ? _currentRecipe.Chemistry : "", SubscriptionAttribute.FLAG.IgnoreSaveDB);            DATA.Subscribe($"{Module}.IsInit", () => IsInit, SubscriptionAttribute.FLAG.IgnoreSaveDB);            DATA.Subscribe($"{Module}.IsIdle", () => IsIdle, SubscriptionAttribute.FLAG.IgnoreSaveDB);            DATA.Subscribe($"{Module}.IsError", () => IsError, SubscriptionAttribute.FLAG.IgnoreSaveDB);            DATA.Subscribe($"{Module}.IsBusy", () => IsBusy, SubscriptionAttribute.FLAG.IgnoreSaveDB);            DATA.Subscribe($"{Module}.IsDisable", () => IsDisable, SubscriptionAttribute.FLAG.IgnoreSaveDB);        }        /// <summary>        /// 初始化Operation        /// </summary>        private void InitializeOperation()        {            OP.Subscribe($"{Module}.InitializeAll", (cmd, args) => { return CheckToPostMessage<PlatingCellState, PlatingCellMsg>(eEvent.ERR_RESERVOIR, Module.ToString(), (int)PlatingCellMsg.Initialize); });            OP.Subscribe($"{Module}.ManualCCRStart", (cmd, args) => { return CheckToPostMessage<PlatingCellState, PlatingCellMsg>(eEvent.ERR_RESERVOIR, Module.ToString(), (int)PlatingCellMsg.CCR); });            OP.Subscribe($"{Module}.ManualCCRStop", (cmd, args) => { return CheckToPostMessage<PlatingCellState, PlatingCellMsg>(eEvent.ERR_RESERVOIR, Module.ToString(), (int)PlatingCellMsg.CCRAbort); });        }        /// 初始化状态机        /// </summary>        private void InitialFsm()        {            fsm = new StateMachine<PlatingCellEntity>(Module.ToString(), (int)PlatingCellState.Idle, 100);            fsm.EnableRepeatedMsg(true);            AnyStateTransition(PlatingCellMsg.Error, NullFunc, PlatingCellState.Error);            //Initialized            Transition(PlatingCellState.Error, PlatingCellMsg.Initialize, InitializeAll, PlatingCellState.Initializing);            Transition(PlatingCellState.Init, PlatingCellMsg.Initialize, InitializeAll, PlatingCellState.Initializing);            Transition(PlatingCellState.Idle, PlatingCellMsg.Initialize, InitializeAll, PlatingCellState.Initializing);            Transition(PlatingCellState.Initializing, FSM_MSG.TIMER, InitializeAllMonitor, PlatingCellState.Idle);            //CCR            Transition(PlatingCellState.Idle, PlatingCellMsg.CCR, ManualCCRStart, PlatingCellState.CCRing);            Transition(PlatingCellState.CCRing, FSM_MSG.TIMER, CCRMonitor, PlatingCellState.Idle);            Transition(PlatingCellState.CCRing, PlatingCellMsg.CCRAbort, CCRAbort, PlatingCellState.Init);            //Cycle Manual Process            Transition(PlatingCellState.Idle, PlatingCellMsg.RunRecipe, CycleManualProcess, PlatingCellState.RunReciping);            Transition(PlatingCellState.RunReciping, FSM_MSG.TIMER, CycleManualMonitor, PlatingCellState.Idle);            Transition(PlatingCellState.RunReciping, VPWCellMsg.Abort, RunRecipeAbort, PlatingCellState.Idle);            //直接进入Idle            Transition(PlatingCellState.Initialized, FSM_MSG.TIMER, NullFunc, PlatingCellState.Idle);            //Enter Init            Transition(PlatingCellState.Idle, PlatingCellMsg.Init, NullFunc, PlatingCellState.Init);            EnumLoop<PlatingCellState>.ForEach((item) => { fsm.MapState((int)item, item.ToString()); });            EnumLoop<PlatingCellState>.ForEach((item) => { fsm.MapMessage((int)item, item.ToString()); });        }        /// <summary>        /// 手动CCR        /// </summary>        /// <returns></returns>        private bool ManualCCRStart(object[] param)        {            bool result = _platingCellCRRoutine.Start() == RState.Running;            return result;        }        /// <summary>        /// CCR 监控        /// </summary>        /// <param name="param"></param>        /// <returns></returns>        private bool CCRMonitor(object[] param)        {            RState rsstate = RState.Running;            rsstate = _platingCellCRRoutine.Monitor();            if (rsstate == RState.End)            {                return true;            }            else if (rsstate == RState.Failed || rsstate == RState.Timeout)            {                PostMsg(PlatingCellMsg.Error);                return false;            }            return false;        }        /// <summary>        /// CCR abort        /// </summary>        /// <param name="param"></param>        /// <returns></returns>        private bool CCRAbort(object[] param)        {            if(_platingCellCRRoutine.Monitor() == RState.Running)            {                _platingCellCRRoutine.Abort();            }            return true;        }        /// <summary>        /// 初始化        /// </summary>        /// <returns></returns>        private bool InitializeAll(object[] param)        {            if (_persistentValue == null)            {                LOG.WriteLog(eEvent.ERR_RESERVOIR, Module.ToString(), "persistent is null");                return false;            }            if (fsm.State == (int)PlatingCellState.Initializing)            {                LOG.WriteLog(eEvent.WARN_PLATINGCELL, Module.ToString(), "state is Initializing,cannot do initialize");                return false;            }            if (!CheckReservoirInitialized())            {                LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), "Reservoir is not initialized");                return false;            }            if (!MetalUsageMointor(Module.ToString()))            {                return false;            }            if ("Auto".Equals(_persistentValue.OperatingMode))            {                if (!CheckReservoirIsAuto())                {                    LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), "Reservoir is not in Auto OperationMode");                    return false;                }            }            bool result = _initializeRoutine.Start(_persistentValue) == RState.Running;            return result;                   }        /// <summary>        /// 检验Reservoir是否Auto        /// </summary>        /// <returns></returns>        private bool CheckReservoirIsAuto()        {            string reservoir = ReservoirItemManager.Instance.GetReservoirByPlatingCell(Module.ToString());            ReservoirsPersistentValue reservoirsPersistentValue = ReservoirsPersistentManager.Instance.GetReservoirsPersistentValue(reservoir);            if ("Auto".Equals(reservoirsPersistentValue.OperatingMode))            {                return true;            }            return false;        }        /// <summary>        /// 检验Reservoir是否Initialized        /// </summary>        /// <returns></returns>        private bool CheckReservoirInitialized()        {            string reservoir = ReservoirItemManager.Instance.GetReservoirByPlatingCell(Module.ToString());            ReservoirEntity reservoirEntity = Singleton<RouteManager>.Instance.GetModule<ReservoirEntity>(reservoir);            if (reservoirEntity != null)            {                return reservoirEntity.IsInitialized;            }            return false;        }        /// <summary>        /// 监控 PM Counter Metal用量        /// </summary>        private bool MetalUsageMointor(string Module)        {            return true;        }        /// <summary>        /// Initialize 监控        /// </summary>        /// <param name="param"></param>        /// <returns></returns>        private bool InitializeAllMonitor(object[] param)        {            RState rsstate = RState.Running;            rsstate = _initializeRoutine.Monitor();            if (rsstate == RState.End)            {                return true;            }            else if (rsstate == RState.Failed || rsstate == RState.Timeout)            {                PostMsg(PlatingCellMsg.Error);                return false;            }            return false;        }        /// <summary>        /// EnterInit        /// </summary>        public void EnterInit()        {            if ((PlatingCellState)fsm.State != PlatingCellState.Idle) return;            else            {                CheckToPostMessage<PlatingCellState, PlatingCellMsg>(eEvent.ERR_PLATINGCELL, Module.ToString(), (int)PlatingCellMsg.Init);            }        }        #region cycle manual process        /// <summary>        /// process        /// </summary>        /// <param name="param"></param>        /// <returns></returns>        private bool CycleManualProcess(object[] param)        {            bool result = _runRecipeRoutine.Start(param) == RState.Running;            _currentStepState = "";            return result;        }        /// <summary>        /// 监控        /// </summary>        /// <param name="param"></param>        /// <returns></returns>        private bool CycleManualMonitor(object[] param)        {            RState state = _runRecipeRoutine.Monitor();            _currentStepState = _runRecipeRoutine.CurrentStep;            LOG.WriteLog(eEvent.INFO_PLATINGCELL, Module.ToString(), _currentStepState);            if (state == RState.Failed || state == RState.Timeout)            {                PostMsg(PlatingCellMsg.Error);                _currentStepState = "";                return false;            }            bool result = state == RState.End;            if (result)            {                _currentStepState = "";            }            return result;        }        /// <summary>        /// 中止        /// </summary>        /// <param name="param"></param>        /// <returns></returns>        private bool RunRecipeAbort(object[] param)        {            _runRecipeRoutine.Abort();            _currentStepState = "";            return true;        }        #endregion        public bool Check(int msg, out string reason, params object[] args)        {            reason = "";            return true;        }        public bool CheckAcked(int msg)        {            throw new NotImplementedException();        }        public int Invoke(string function, params object[] args)        {            switch (function)            {                case "HomeAll":                    if (IsIdle)                    {                        return (int)FSM_MSG.NONE;                    }                    if (CheckToPostMessage<PlatingCellState, PlatingCellMsg>(eEvent.ERR_PLATINGCELL, Module.ToString(), (int)PlatingCellMsg.Initialize))                    {                        return (int)PlatingCellMsg.Initialize;                    }                    else                    {                        return (int)FSM_MSG.NONE;                    }            }            return (int)FSM_MSG.NONE;        }    }}
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