| 123456789101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960616263646566676869707172737475767778798081828384858687888990919293949596979899100101102103104105106107108109110111112113114115116117118119120121122123124125126127128129130131132133134135136137138139140141142143144145146147148149150151152153154155156157158159160161162163164165166167168169170171172173174175176177178179180181182183184185186187188189190191192193194195196197198199200201202203204205206207208209210211212213214215216217218219220221222223224225226227228229230231232233234235236237238239240241242243244245246247248249250251252253254255256257258259260261262263264265266267268269270271272273274275276277278279280281282283284285286287288289290291292293294295296297298299300301302303304305306307308309310311312313314315316317318319320321322323324325326327328329330331 | using Aitex.Core.RT.Routine;using Aitex.Core.RT.SCCore;using Aitex.Sorter.Common;using PunkHPX8_RT.Devices;using MECF.Framework.Common.Routine;using MECF.Framework.Common.Equipment;using MECF.Framework.Common.SubstrateTrackings;using PunkHPX8_Core;using Aitex.Core.RT.Log;using Aitex.Core.Util;using MECF.Framework.Common.Schedulers;using System.Collections.Generic;using PunkHPX8_RT.Devices.EFEM;using PunkHPX8_RT.Modules.SRD;using PunkHPX8_RT.Devices.AXIS;using Aitex.Core.RT.Device;using MECF.Framework.Common.Utilities;using System;using PunkHPX8_RT.Modules.LPs;namespace PunkHPX8_RT.Modules.EFEM{    class EfemPlaceRoutine : RoutineBase, IRoutine    {        private enum PlaceStep        {            WaitIdle,            SetAlignWaferSize,            WaitWaferSizeIdle,            SetAlignDistance,            WaitAlignDistanceIdle,            WaitModuleReady,            Placing1,            Placing2,            End,        }        private int _moveTimeout = 20 * 1000;        private ModuleName _targetModule = ModuleName.System;        int _targetSlot;        string _targetPufSlot;        int _targetSlot2;        Hand _hand;        Hand _hand2;        Flip _flip;        EfemBase _efem;        bool _bDoublePlace = false;        private SRDEntity _srdModule;        private Queue<MoveItem> _moveItems;        private bool _isAligner;        public EfemPlaceRoutine(EfemBase efem) : base(ModuleName.EfemRobot.ToString())        {            _efem = efem;        }        public RState Start(params object[] objs)        {            _bDoublePlace = false;            _moveItems = (Queue<MoveItem>)objs[0];            MoveItem moveItem = _moveItems.Peek();            _targetModule = moveItem.DestinationModule;            _targetSlot = moveItem.DestinationSlot;            _hand = moveItem.RobotHand;            _flip = moveItem.PlaceRobotFlip;            if (!CheckPreCondition())            {                return RState.Failed;            }            _isAligner = ModuleHelper.IsAligner(_targetModule);            _moveTimeout = SC.GetValue<int>($"EFEM.MotionTimeout") * 1000;            return Runner.Start(Module, $"Place to {_targetModule}");        }        private Loadport GetLoadPort(ModuleName station)        {            LoadPortModule loadPortModule = Singleton<RouteManager>.Instance.EFEM.GetLoadportModule(station - ModuleName.LP1);            return loadPortModule.LPDevice;        }        private bool CheckPreCondition()        {            if (ModuleHelper.IsDummy(_targetModule) || ModuleHelper.IsAligner(_targetModule) || ModuleHelper.IsLoadPort(_targetModule))            {                if (_hand == Hand.Blade2)                {                    NotifyError(eEvent.ERR_EFEM_ROBOT, $"cannot use upper arm to place to {_targetModule}", -1);                    return false;                }            }            if (ModuleHelper.IsPlatingCell(_targetModule))            {                if (_hand == Hand.Blade1)                {                    NotifyError(eEvent.ERR_EFEM_ROBOT, $"cannot use lower arm to place to {_targetModule}", -1);                    return false;                }            }            if (_hand == Hand.Blade1 && _flip == Flip.Down)            {                NotifyError(eEvent.ERR_EFEM_ROBOT, $"lower arm cannot flip", -1);                return false;            }            //LoadPort状态判断            if (ModuleHelper.IsLoadPort(_targetModule) && ModuleHelper.IsInstalled(_targetModule))            {                Loadport loadPort = GetLoadPort(_targetModule);                if (loadPort == null)                {                    return false;                }                if (!loadPort.IsLoaded)                {                    NotifyError(eEvent.ERR_EFEM_ROBOT, $"LoadPort not load, cannot do the pick action", -1);                    return false;                }            }            if (ModuleHelper.IsSRD(_targetModule) && ModuleHelper.IsInstalled(_targetModule))            {                _srdModule = Singleton<RouteManager>.Instance.GetModule<SRDEntity>(_targetModule.ToString());                if (!_srdModule.IsHomed)                {                    NotifyError(eEvent.ERR_EFEM_ROBOT,  $"{_targetModule} is not homed, please home it first",-1);                    return false;                }                if (_srdModule.IsSrdDoorClosed)                {                    NotifyError(eEvent.ERR_EFEM_ROBOT, $"{_targetModule} door closed, can not place",-1);                    return false;                }            }            if (WaferManager.Instance.CheckNoWafer(ModuleName.EfemRobot, (int)_hand))            {                NotifyError(eEvent.ERR_EFEM_ROBOT, $"Efem robot arm{_hand} already has no wafer, cannot do the place action",-1);                return false;            }            if (WaferManager.Instance.CheckHasWafer(_targetModule, _targetSlot))            {                NotifyError(eEvent.ERR_EFEM_ROBOT, $"The target: {_targetModule}.{_targetSlot + 1} has a wafer, cannot do the place action",-1);                                return false;            }            if (_moveItems.Count >= 2)            {                if (!ModuleHelper.IsLoadPort(_targetModule))                {                    NotifyError(eEvent.ERR_EFEM_ROBOT,$"Wrong double place command, target is not loadport",-1);                    return false;                }                _hand2 = _hand != Hand.Blade1 ? Hand.Blade1 : Hand.Blade2;                if (WaferManager.Instance.CheckNoWafer(ModuleName.EfemRobot, (int)_hand2))                {                    NotifyError(eEvent.ERR_EFEM_ROBOT,$"Efem robot arm{_hand2} has no wafer, cannot do the double place action",-1);                    return false;                }                _targetSlot2 = _moveItems.ToArray()[1].DestinationSlot;                if (WaferManager.Instance.CheckHasWafer(_targetModule, _targetSlot2))                {                    NotifyError(eEvent.ERR_EFEM_ROBOT, $"The target: {_targetModule}.{_targetSlot2 + 1} has a wafer, cannot do the double pick action",-1);                    return false;                }            }            return true;        }        public RState Monitor()        {            if (_bDoublePlace)            {                Runner.WaitIf(PlaceStep.WaitIdle,_isAligner,WaitModuleReady)                    .RunIf(PlaceStep.SetAlignWaferSize,_isAligner,SetAlignerWaferSize, CheckAlignDone, _delay_5s)                     .Wait(PlaceStep.WaitWaferSizeIdle, WaitModuleReady)                    .RunIf(PlaceStep.SetAlignDistance, _isAligner, SetAlignerDistance,CheckAlignDone, _delay_5s)                     .Wait(PlaceStep.WaitAlignDistanceIdle, WaitModuleReady)                    .Wait(PlaceStep.WaitModuleReady,     WaitModuleReady)                        .Run(PlaceStep.Placing1,           Place1,         Place1Done,     _moveTimeout)                        .Run(PlaceStep.Placing2,           Place2,         Place2Done,     _moveTimeout)                        .End(PlaceStep.End,                ActionDone);            }            else            {                Runner.WaitIf(PlaceStep.WaitIdle, _isAligner, WaitModuleReady)                    .RunIf(PlaceStep.SetAlignWaferSize, _isAligner, SetAlignerWaferSize, _delay_1ms)                     .Wait(PlaceStep.WaitWaferSizeIdle, WaitModuleReady)                    .RunIf(PlaceStep.SetAlignDistance, _isAligner, SetAlignerDistance, _delay_1ms)                     .Wait(PlaceStep.WaitAlignDistanceIdle, WaitModuleReady)                    .Wait(PlaceStep.WaitModuleReady, WaitModuleReady)                        .Run(PlaceStep.Placing1,           Place1,         Place1Done,     _moveTimeout)                        .End(PlaceStep.End,                ActionDone);            }            return Runner.Status;        }        private bool SetAlignerWaferSize()        {            return _efem.SetAlignWaferSize();        }        private bool SetAlignerDistance()        {            return _efem.SetAlignDistance();        }        public void Abort()        {            _efem.Halt();        }        private bool WaitModuleReady()        {            if (_efem.IsInPauseStatus)            {                return false;            }            return _efem.Status == RState.End;        }        private bool Place1()        {            return _efem.Place(_targetModule, _targetSlot, _hand, _flip);        }        private bool Place1Done()        {            if (_efem.Status == RState.End)            {                WaferManager.Instance.WaferMoved(ModuleName.EfemRobot, (int)_hand, _targetModule, _targetSlot);                return true;            }            else if (_efem.Status == RState.Failed)            {                NotifyError(eEvent.ERR_EFEM_ROBOT, $"Efem robot place failed: {_efem.Status}",-1);                return true;            }            return false;        }        private bool CheckAlignDone()        {            if (_efem.Status == RState.End)            {                return true;            }            else if (_efem.Status == RState.Failed)            {                LOG.Write(eEvent.ERR_EFEM_COMMON_FAILED, Module, $"Efem PreAligner align failed: {_efem.Status}");                return true;            }            return false;        }        private bool Place2()        {            return _efem.Place(_targetModule, _targetSlot2, _hand2, _flip);        }        private bool Place2Done()        {            if (_efem.Status == RState.End)            {                WaferManager.Instance.WaferMoved(ModuleName.EfemRobot, (int)_hand2, _targetModule, _targetSlot2);                return true;            }            else if (_efem.Status == RState.Failed)            {                NotifyError(eEvent.ERR_EFEM_ROBOT, $"Efem robot place failed: {_efem.Status}",-1);                return true;            }            return false;        }        private bool ActionDone()        {            return true;        }        /// <summary>        /// 重试        /// </summary>        /// <param name="step"></param>        public RState Retry(int step)        {            if (!CheckPreCondition())            {                return RState.Failed;            }            _efem.Reset();            List<Enum> preStepIds = new List<Enum>();            AddPreSteps(PlaceStep.SetAlignWaferSize, preStepIds);            return Runner.Retry(PlaceStep.SetAlignWaferSize, preStepIds, Module, "Place Retry");        }        /// <summary>        /// 忽略前        /// </summary>        /// <param name="step"></param>        /// <param name="preStepIds"></param>        private void AddPreSteps(PlaceStep step, List<Enum> preStepIds)        {            for (int i = 0; i < (int)step; i++)            {                preStepIds.Add((PlaceStep)i);            }        }        /// <summary>        /// 检验前面完成状态        /// </summary>        /// <returns></returns>        public bool CheckCompleteCondition(int index)        {            if (WaferManager.Instance.CheckHasWafer(ModuleName.EfemRobot, (int)_hand))            {                NotifyError(eEvent.ERR_EFEM_ROBOT, $"Efem robot arm{_hand} has no wafer", -1);                return false;            }            if (WaferManager.Instance.CheckNoWafer(_targetModule, _targetSlot))            {                NotifyError(eEvent.ERR_EFEM_ROBOT, $"{_targetModule} Slot{_targetSlot} has no wafer", -1);                return false;            }            return true;        }    }}
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