VpwCellEntity.cs 21 KB

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  1. using Aitex.Core.RT.DataCenter;
  2. using Aitex.Core.RT.Device;
  3. using Aitex.Core.RT.Fsm;
  4. using Aitex.Core.RT.Log;
  5. using Aitex.Core.RT.OperationCenter;
  6. using Aitex.Core.RT.RecipeCenter;
  7. using Aitex.Core.Util;
  8. using Aitex.Core.Utilities;
  9. using CyberX12_RT.Modules.VpwCell;
  10. using MECF.Framework.Common.Alarm;
  11. using MECF.Framework.Common.CommonData;
  12. using MECF.Framework.Common.Equipment;
  13. using MECF.Framework.Common.Persistent.Temperature;
  14. using MECF.Framework.Common.Persistent.VpwCell;
  15. using MECF.Framework.Common.Persistent.VpwMain;
  16. using MECF.Framework.Common.RecipeCenter;
  17. using MECF.Framework.Common.Routine;
  18. using MECF.Framework.Common.SubstrateTrackings;
  19. using MECF.Framework.Common.ToolLayout;
  20. using PunkHPX8_Core;
  21. using PunkHPX8_RT.Devices.LinMot;
  22. using PunkHPX8_RT.Devices.VpwCell;
  23. using PunkHPX8_RT.Modules.VpwCell;
  24. using System;
  25. using System.Collections.Generic;
  26. using System.Linq;
  27. using System.Text;
  28. using System.Threading;
  29. using System.Threading.Tasks;
  30. namespace PunkHPX8_RT.Modules.VpwMain
  31. {
  32. public class VpwCellEntity : Entity, IEntity, IModuleEntity
  33. {
  34. public enum MSG
  35. {
  36. Home
  37. }
  38. #region 常量
  39. private const string STRATUS = "Stratus";
  40. private const string AUTO = "Auto";
  41. private const string MANUAL = "Manual";
  42. private const string DISABLED = "Disabled";
  43. private const string ENGINEERING = "Engineering";
  44. private const string PRODUCTION = "Production";
  45. #endregion
  46. #region 内部变量
  47. /// <summary>
  48. /// 持久化数值
  49. /// </summary>
  50. private VpwCellPersistentValue _persistentValue;
  51. /// <summary>
  52. /// VPW cell集合
  53. /// </summary>
  54. private List<VpwCellDevice> _vpwCellDevices = new List<VpwCellDevice>();
  55. /// <summary>
  56. /// Home Routine
  57. /// </summary>
  58. private VPWHomeRoutine _homeRoutine;
  59. /// <summary>
  60. /// Prepare
  61. /// </summary>
  62. private VpwPrepareRoutine _prepareRoutine;
  63. /// <summary>
  64. /// recipe routine
  65. /// </summary>
  66. private VpwRecipeRoutine _recipeRoutine;
  67. /// <summary>
  68. /// 循环routine
  69. /// </summary>
  70. private VpwCycleManualProcessRecipeRoutine _cycleManualProcessRoutine;
  71. /// <summary>
  72. /// recipe完成次数
  73. /// </summary>
  74. private int _achievedCycle;
  75. /// <summary>
  76. /// Cycle次数
  77. /// </summary>
  78. private int _cycle = 0;
  79. /// <summary>
  80. /// 是否Retry
  81. /// </summary>
  82. private bool _isRetry = false;
  83. /// <summary>
  84. /// recipe时长
  85. /// </summary>
  86. private int _recipeTime;
  87. /// <summary>
  88. /// 当前Recipe
  89. /// </summary>
  90. private VpwRecipe _currentRecipe;
  91. /// <summary>
  92. /// run recipe start time
  93. /// </summary>
  94. private DateTime _runRecipeStartTime;
  95. /// <summary>
  96. /// run recipe complete time
  97. /// </summary>
  98. private DateTime _runRecipeCompleteTime;
  99. /// <summary>
  100. /// 工艺当前执行小步骤
  101. /// </summary>
  102. private string _currentStateMachine = "Init";
  103. /// <summary>
  104. /// 工艺当前执行大步骤
  105. /// </summary>
  106. private string _currentStatus = "Init";
  107. #endregion
  108. #region 属性
  109. public ModuleName Module { get; private set; }
  110. /// <summary>
  111. /// 是否Init
  112. /// </summary>
  113. public bool IsInit
  114. {
  115. get { return fsm.State == (int)VPWCellState.Init; }
  116. }
  117. /// <summary>
  118. /// 是否Idle
  119. /// </summary>
  120. public bool IsIdle
  121. {
  122. get
  123. {
  124. return fsm.State == (int)VPWCellState.Idle;
  125. }
  126. }
  127. /// <summary>
  128. /// 是否错误
  129. /// </summary>
  130. public bool IsError
  131. {
  132. get { return fsm.State == (int)VPWCellState.Error; }
  133. }
  134. /// <summary>
  135. /// 正在忙碌
  136. /// </summary>
  137. public bool IsBusy
  138. {
  139. get { return fsm.State == (int)VPWCellState.Initializing; }
  140. }
  141. /// <summary>
  142. /// 是否禁用
  143. /// </summary>
  144. public bool IsDisable { get { return _persistentValue == null || _persistentValue.OperatingMode == DISABLED; } }
  145. /// <summary>
  146. /// 自动模式
  147. /// </summary>
  148. public bool IsAuto { get { return _persistentValue != null && _persistentValue.OperatingMode == AUTO; } }
  149. /// <summary>
  150. /// 自动模式
  151. /// </summary>
  152. public bool IsManual { get { return _persistentValue != null && _persistentValue.OperatingMode == MANUAL; } }
  153. /// <summary>
  154. /// 是否为工程模式
  155. /// </summary>
  156. public bool IsEngineering { get { return _persistentValue != null && _persistentValue.RecipeOperatingMode == ENGINEERING; } }
  157. /// <summary>
  158. /// 是否为产品模式
  159. /// </summary>
  160. public bool IsProduction { get { return _persistentValue != null && _persistentValue.RecipeOperatingMode == PRODUCTION; } }
  161. /// <summary>
  162. /// recipe时长
  163. /// </summary>
  164. public int RecipeTime { get { return _recipeTime; } }
  165. #endregion
  166. /// <summary>
  167. /// 构造函数
  168. /// </summary>
  169. /// <param name="module"></param>
  170. public VpwCellEntity(ModuleName module)
  171. {
  172. this.Module = module;
  173. }
  174. /// <summary>
  175. /// 初始化
  176. /// </summary>
  177. /// <returns></returns>
  178. protected override bool Init()
  179. {
  180. InitialFsm();
  181. InitializeParameter();
  182. InitializeRoutine();
  183. InitializeDATA();
  184. InitializeOperation();
  185. return true;
  186. }
  187. /// <summary>
  188. /// 初始化参数
  189. /// </summary>
  190. private void InitializeParameter()
  191. {
  192. WaferManager.Instance.SubscribeLocation(Module, 1);
  193. _persistentValue = VpwCellPersistentManager.Instance.GetPersistentValue(Module.ToString());
  194. if (_persistentValue == null)
  195. {
  196. LOG.WriteLog(eEvent.ERR_VPW, Module.ToString(), "Persistent Value Object is not exist");
  197. }
  198. _vpwCellDevices.Clear();
  199. VpwMainItem vpwMainItem = VpwMainItemManager.Instance.GetItem(ModuleName.VPWMain1.ToString());
  200. if (vpwMainItem == null || vpwMainItem.VpwCells == null)
  201. {
  202. return;
  203. }
  204. foreach (var item in vpwMainItem.VpwCells)
  205. {
  206. VpwCellDevice cellDevice = DEVICE.GetDevice<VpwCellDevice>(item.ModuleName);
  207. _vpwCellDevices.Add(cellDevice);
  208. }
  209. }
  210. /// <summary>
  211. /// 初始化状态机
  212. /// </summary>
  213. private void InitialFsm()
  214. {
  215. fsm = new StateMachine<VpwCellEntity>(Module.ToString(), (int)VPWCellState.Init, 100);
  216. fsm.EnableRepeatedMsg(true);
  217. AnyStateTransition(VpwCellMsg.Error, NullFunc, VPWCellState.Error);
  218. //Initialized
  219. Transition(VPWCellState.Error, VpwCellMsg.Initialize, InitializeAll, VPWCellState.Initializing);
  220. Transition(VPWCellState.Init, VpwCellMsg.Initialize, InitializeAll, VPWCellState.Initializing);
  221. Transition(VPWCellState.Idle, VpwCellMsg.Initialize, InitializeAll, VPWCellState.Initializing);
  222. Transition(VPWCellState.Initializing, FSM_MSG.TIMER, InitializeAllMonitor, VPWCellState.Idle);
  223. Transition(VPWCellState.Error, VpwCellMsg.EnterIdle, NullFunc, VPWCellState.Idle);
  224. Transition(VPWCellState.Init, VpwCellMsg.EnterIdle, NullFunc, VPWCellState.Idle);
  225. Transition(VPWCellState.Idle, VpwCellMsg.EnterIdle, NullFunc, VPWCellState.Idle);
  226. //Enter Init
  227. Transition(VPWCellState.Idle, VpwCellMsg.Init, NullFunc, VPWCellState.Init);
  228. //Cycle Manual Process
  229. Transition(VPWCellState.Idle, VpwCellMsg.CycleProcessRecipe, CycleManualProcess, VPWCellState.CycleManualProcessing);
  230. Transition(VPWCellState.CycleManualProcessing, FSM_MSG.TIMER, CycleManualMonitor, VPWCellState.Idle);
  231. //Prepare
  232. Transition(VPWCellState.Idle, VpwCellMsg.Prepare, Prepare, VPWCellState.Preparing);
  233. Transition(VPWCellState.Preparing, FSM_MSG.TIMER, PrepareMonitor, VPWCellState.WaitForRunRecipe);
  234. Transition(VPWCellState.WaitForRunRecipe, VpwCellMsg.RunRecipe, RunRecipe, VPWCellState.RunReciping);
  235. Transition(VPWCellState.RunReciping, FSM_MSG.TIMER, RunRecipeMonitor, VPWCellState.Idle);
  236. //Retry
  237. Transition(VPWCellState.Error, VpwCellMsg.Retry, NullFunc, VPWCellState.Retrying);
  238. Transition(VPWCellState.Retrying, FSM_MSG.TIMER, VpwCellRetry, VPWCellState.Retrying);
  239. Transition(VPWCellState.Retrying, VpwCellMsg.Prepare, RetryPrepare, VPWCellState.Preparing);
  240. Transition(VPWCellState.Retrying, VpwCellMsg.RunRecipe, RetryRunRecipe, VPWCellState.RunReciping);
  241. EnumLoop<VPWCellState>.ForEach((item) => { fsm.MapState((int)item, item.ToString()); });
  242. EnumLoop<VpwCellMsg>.ForEach((item) => { fsm.MapMessage((int)item, item.ToString()); });
  243. }
  244. /// <summary>
  245. /// 初始化数据
  246. /// </summary>
  247. private void InitializeDATA()
  248. {
  249. InitializeSVID();
  250. DATA.Subscribe($"{Module}.FsmState", () => ((VPWCellState)fsm.State).ToString(), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  251. DATA.Subscribe($"{Module}.IsIdle", () => IsIdle, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  252. DATA.Subscribe($"{Module}.IsInit", () => IsInit, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  253. DATA.Subscribe($"{Module}.IsDisable", () => IsDisable, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  254. DATA.Subscribe($"{Module}.IsBusy", () => IsBusy, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  255. DATA.Subscribe($"{Module}.IsError", () => IsError, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  256. DATA.Subscribe($"{Module}.AchievedCycle", () => _achievedCycle, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  257. }
  258. /// <summary>
  259. /// 初始化SVID
  260. /// </summary>
  261. private void InitializeSVID()
  262. {
  263. DATA.Subscribe($"{Module}.OperatingMode", () => _persistentValue != null ? _persistentValue.OperatingMode : "None", SubscriptionAttribute.FLAG.IgnoreSaveDB);
  264. }
  265. /// <summary>
  266. /// 初始化Routine
  267. /// </summary>
  268. private void InitializeRoutine()
  269. {
  270. _homeRoutine = new VPWHomeRoutine(Module.ToString());
  271. _prepareRoutine=new VpwPrepareRoutine(Module.ToString());
  272. _recipeRoutine=new VpwRecipeRoutine(Module.ToString());
  273. _cycleManualProcessRoutine = new VpwCycleManualProcessRecipeRoutine(Module.ToString());
  274. }
  275. /// <summary>
  276. /// 初始化操作
  277. /// </summary>
  278. private void InitializeOperation()
  279. {
  280. OP.Subscribe($"{Module}.InitializeAll", (cmd, args) => { return CheckToPostMessage<VPWCellState, VpwCellMsg>(eEvent.ERR_VPW, Module.ToString(), (int)VpwCellMsg.Initialize); });
  281. OP.Subscribe($"{Module}.Prepare", (cmd, args) => { return CheckToPostMessage<VPWCellState, VpwCellMsg>(eEvent.ERR_VPW, Module.ToString(), (int)VpwCellMsg.Prepare); });
  282. OP.Subscribe($"{Module}.CycleManualProcessRecipe", (cmd, args) =>
  283. {
  284. VpwRecipe recipe = RecipeFileManager.Instance.LoadGenericityRecipe<VpwRecipe>(args[0].ToString());
  285. if (recipe == null)
  286. {
  287. LOG.WriteLog(eEvent.ERR_VPW, Module.ToString(), $"{args[0]} recipe is null");
  288. return false;
  289. }
  290. object[] objects = new object[args.Length];
  291. objects[0] = recipe;
  292. for (int i = 1; i < args.Length; i++)
  293. {
  294. objects[i] = args[i];
  295. }
  296. return CheckToPostMessage<VPWCellState, VpwCellMsg>(eEvent.ERR_PREWET, Module.ToString(), (int)VpwCellMsg.CycleProcessRecipe, objects);
  297. });
  298. }
  299. #region InitializeAll
  300. /// <summary>
  301. /// Initialize
  302. /// </summary>
  303. /// <param name="param"></param>
  304. /// <returns></returns>
  305. private bool InitializeAll(object[] param)
  306. {
  307. if (_vpwCellDevices == null || _vpwCellDevices.Count == 0)
  308. {
  309. LOG.WriteLog(eEvent.ERR_VPW, Module.ToString(), "cell device is empty");
  310. return false;
  311. }
  312. foreach (var device in _vpwCellDevices)
  313. {
  314. VpwCellEntity vpwCellEntity = Singleton<RouteManager>.Instance.GetModule<VpwCellEntity>(device.Module);
  315. if (vpwCellEntity.IsBusy)
  316. {
  317. LOG.WriteLog(eEvent.ERR_VPW, Module.ToString(), $"cell device {device.Module} is busy,cannot initialize");
  318. return false;
  319. }
  320. }
  321. VpwMainEntity vpwMainEntity = Singleton<RouteManager>.Instance.GetModule<VpwMainEntity>(ModuleName.VPWMain1.ToString());
  322. if (vpwMainEntity.IsBusy)
  323. {
  324. LOG.WriteLog(eEvent.ERR_VPW, Module.ToString(), $"VPWMain is busy,cannot initialize");
  325. return false;
  326. }
  327. return _homeRoutine.Start(_vpwCellDevices) == RState.Running;
  328. }
  329. /// <summary>
  330. /// Initialize 监控
  331. /// </summary>
  332. /// <param name="param"></param>
  333. /// <returns></returns>
  334. private bool InitializeAllMonitor(object[] param)
  335. {
  336. RState ret = _homeRoutine.Monitor();
  337. if (ret == RState.Failed || ret == RState.Timeout)
  338. {
  339. PostMsg(VpwCellMsg.Error);
  340. return false;
  341. }
  342. return ret == RState.End;
  343. }
  344. #endregion
  345. #region Prepare
  346. /// <summary>
  347. /// Prepare
  348. /// </summary>
  349. /// <param name="param"></param>
  350. /// <returns></returns>
  351. private bool Prepare(object[] param)
  352. {
  353. VpwRecipe recipe = param[0] as VpwRecipe;
  354. return _prepareRoutine.Start(recipe) == RState.Running;
  355. }
  356. /// <summary>
  357. /// Prepare 监控
  358. /// </summary>
  359. /// <param name="param"></param>
  360. /// <returns></returns>
  361. private bool PrepareMonitor(object[] param)
  362. {
  363. RState ret = _prepareRoutine.Monitor();
  364. if (ret == RState.Failed || ret == RState.Timeout)
  365. {
  366. AlarmList alarmList = new AlarmList(Module.ToString(), ((VPWCellState)fsm.State).ToString(), (int)VpwCellMsg.Prepare,
  367. _prepareRoutine.ErrorMsg, _prepareRoutine.ErrorStep, (int)AlarmType.Error);
  368. AlarmListManager.Instance.AddAlarm(alarmList);
  369. PostMsg(VpwCellMsg.Error);
  370. return false;
  371. }
  372. return ret == RState.End;
  373. }
  374. /// <summary>
  375. /// Retry Prepare
  376. /// </summary>
  377. /// <param name="param"></param>
  378. /// <returns></returns>
  379. private bool RetryPrepare(object[] param)
  380. {
  381. int stepIndex = (int)param[0];
  382. bool result = _prepareRoutine.Retry(stepIndex) == RState.Running;
  383. return result;
  384. }
  385. #endregion
  386. #region Run Recipe
  387. /// <summary>
  388. /// run recipe
  389. /// </summary>
  390. /// <param name="param"></param>
  391. /// <returns></returns>
  392. private bool RunRecipe(object[] param)
  393. {
  394. VpwRecipe recipe = param[0] as VpwRecipe;
  395. return _recipeRoutine.Start(recipe) == RState.Running;
  396. }
  397. /// <summary>
  398. /// Prepare 监控
  399. /// </summary>
  400. /// <param name="param"></param>
  401. /// <returns></returns>
  402. private bool RunRecipeMonitor(object[] param)
  403. {
  404. RState ret = _recipeRoutine.Monitor();
  405. if (ret == RState.Failed || ret == RState.Timeout)
  406. {
  407. AlarmList alarmList = new AlarmList(Module.ToString(), ((VPWCellState)fsm.State).ToString(), (int)VpwCellMsg.RunRecipe,
  408. _recipeRoutine.ErrorMsg, _recipeRoutine.ErrorStep, (int)AlarmType.Error);
  409. AlarmListManager.Instance.AddAlarm(alarmList);
  410. PostMsg(VpwCellMsg.Error);
  411. return false;
  412. }
  413. return ret == RState.End;
  414. }
  415. /// <summary>
  416. /// Retry RunRecipe
  417. /// </summary>
  418. /// <param name="param"></param>
  419. /// <returns></returns>
  420. private bool RetryRunRecipe(object[] param)
  421. {
  422. int stepIndex = (int)param[0];
  423. bool result = _recipeRoutine.Retry(stepIndex) == RState.Running;
  424. return result;
  425. }
  426. #endregion
  427. #region cycle manual process
  428. private bool CycleManualProcess(object[] param)
  429. {
  430. VpwRecipe recipe = param[0] as VpwRecipe;
  431. _cycle = (int)param[1];
  432. bool result = _cycleManualProcessRoutine.Start(param) == RState.Running;
  433. if (result)
  434. {
  435. _isRetry = false;
  436. if (CellItemRecipeTimeManager.Instance.ContainRecipe(recipe.Ppid))
  437. {
  438. _recipeTime = _cycle * CellItemRecipeTimeManager.Instance.GetRecipeTotalTime(recipe.Ppid);
  439. }
  440. else
  441. {
  442. _recipeTime = 0;
  443. }
  444. _currentRecipe = recipe;
  445. _runRecipeStartTime = DateTime.Now;
  446. }
  447. return result;
  448. }
  449. private bool CycleManualMonitor(object[] param)
  450. {
  451. RState state = _cycleManualProcessRoutine.Monitor();
  452. _currentStatus = _cycleManualProcessRoutine.CurrentStatus;
  453. _currentStateMachine = _cycleManualProcessRoutine.CurrentStateMachine;
  454. if (state == RState.Failed || state == RState.Timeout)
  455. {
  456. PostMsg(VpwCellMsg.Error);
  457. _currentStateMachine = "Error";
  458. _currentStatus = "Error";
  459. _runRecipeCompleteTime = DateTime.Now;
  460. _cycleManualProcessRoutine.VpwLotTrackHeaderDatas.ProcessTime = (_runRecipeCompleteTime - _runRecipeStartTime).TotalSeconds.ToString("F2");
  461. //导出lotTrack数据
  462. VpwLotTrackUtil.ExportVpwLotTrack(Module.ToString(), _cycleManualProcessRoutine.VpwLotTrackDatas,
  463. _cycleManualProcessRoutine.VpwLotTrackHeaderDatas, IsAuto, _isRetry);
  464. return false;
  465. }
  466. _achievedCycle = _cycleManualProcessRoutine.GetAchievedCycle();
  467. bool result = state == RState.End;
  468. if (result)
  469. {
  470. double elapsedMilliseconds = _cycleManualProcessRoutine.ElapsedMilliseconds;
  471. int recipeTime = (int)Math.Floor(elapsedMilliseconds / _cycle / 1000);
  472. CellItemRecipeTimeManager.Instance.UpdateRecipeTime(_currentRecipe.Ppid, recipeTime);
  473. _runRecipeCompleteTime = DateTime.Now;
  474. _cycleManualProcessRoutine.VpwLotTrackHeaderDatas.ProcessTime = (_runRecipeCompleteTime - _runRecipeStartTime).TotalSeconds.ToString("F2");
  475. //导出lotTrack数据
  476. VpwLotTrackUtil.ExportVpwLotTrack(Module.ToString(), _cycleManualProcessRoutine.VpwLotTrackDatas,
  477. _cycleManualProcessRoutine.VpwLotTrackHeaderDatas, IsAuto, _isRetry);
  478. }
  479. return result;
  480. }
  481. #endregion
  482. #region VpwCell Retry
  483. /// <summary>
  484. /// VpwCell
  485. /// </summary>
  486. /// <param name="param"></param>
  487. /// <returns></returns>
  488. private bool VpwCellRetry(object[] param)
  489. {
  490. AlarmList alarmList = AlarmListManager.Instance.GetAlarmListByModule(Module.ToString());
  491. if (alarmList != null)
  492. {
  493. CheckToPostMessage<VPWCellState, VpwCellMsg>(eEvent.WARN_VPW, Module.ToString(), alarmList.ModuleCmd,
  494. alarmList.ModuleStep);
  495. }
  496. return false;
  497. }
  498. #endregion
  499. public bool Check(int msg, out string reason, params object[] args)
  500. {
  501. reason = "";
  502. return false;
  503. }
  504. public bool CheckAcked(int msg)
  505. {
  506. return false;
  507. }
  508. /// <summary>
  509. /// EnterInit
  510. /// </summary>
  511. public void EnterInit()
  512. {
  513. }
  514. public int Invoke(string function, params object[] args)
  515. {
  516. switch (function)
  517. {
  518. case "HomeAll":
  519. return (int)MSG.Home;
  520. }
  521. return (int)FSM_MSG.NONE;
  522. }
  523. }
  524. }