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							- using System;
 
- using System.Diagnostics;
 
- using System.Collections.Generic;
 
- using System.Linq;
 
- using System.Threading.Tasks;
 
- using System.Collections;
 
- using MECF.Framework.Common.CommonData;
 
- using MECF.Framework.Common.Equipment;
 
- using MECF.Framework.Common.SubstrateTrackings;
 
- using Aitex.Sorter.Common;
 
- using Aitex.Core.Common;
 
- using Aitex.Core.RT.SCCore;
 
- using Aitex.Core.RT.Log;
 
- using Aitex.Core.Util;
 
- using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robot;
 
- using System.Collections.Concurrent;
 
- using PunkHPX8_Core;
 
- using PunkHPX8_RT.Devices.YASKAWA;
 
- using PunkHPX8_RT.Devices;
 
- using PunkHPX8_RT.Modules;
 
- using PunkHPX8_RT;
 
- namespace PunkHPX8_RT.Devices.EFEM
 
- {
 
-     public class JetEfem : EfemBase
 
-     {
 
-         private RState _status;
 
-         private bool _IsHomed;
 
-         private string _waferPresence;
 
-         private bool _bIsUnloadClamp;
 
-         private RobotMoveInfo _robotMoveInfo = new RobotMoveInfo();
 
-         private readonly Loadport[] _LPMs = new Loadport[3];
 
-         private readonly SignalTower _signalT = new SignalTower();
 
-         private readonly AsyncSocket _socket;
 
-         private EfemMessage _currentMsg;
 
-         private EfemMessage _backroundMsg;
 
-         private EfemMessage _revMsg;
 
-         private bool _LiftIsUp = false;
 
-         private bool _LiftIsDown = false;
 
-         private R_TRIG _busyTrig = new R_TRIG();
 
-         private Stopwatch _busyWatch = new Stopwatch();
 
-         public override RState Status
 
-         {
 
-             get
 
-             {
 
-                 _busyTrig.CLK = _status == RState.Running;
 
-                 if (_busyTrig.Q)
 
-                 {
 
-                     _busyWatch.Restart();
 
-                 }
 
-                 else if (_busyTrig.M)
 
-                 {
 
-                     if (_busyWatch.ElapsedMilliseconds > 30000)
 
-                     {
 
-                         _busyWatch.Stop();
 
-                         _status = RState.Timeout;
 
-                     }
 
-                 }
 
-                 return _status;
 
-             }
 
-         }
 
-         public override bool IsHomed { get { return _IsHomed; } }
 
-         public override RobotMoveInfo TMRobotMoveInfo { get { return _robotMoveInfo; } }
 
-         public override ILoadport this[ModuleName mod]
 
-         {
 
-             get
 
-             {
 
-                 if (!ModuleHelper.IsLoadPort(mod))
 
-                     throw new ApplicationException($"{mod} is NOT Loadport");
 
-                 return _LPMs[mod - ModuleName.LP1];
 
-             }
 
-         }
 
-         public override bool LiftIsUp { get { return _LiftIsUp; } }
 
-         public override bool LiftIsDown { get { return _LiftIsDown; } }
 
-         private BlockingCollection<RobotAnimationData> blockingCollection = new BlockingCollection<RobotAnimationData>();
 
-         public JetEfem()
 
-         {
 
-             _socket = new AsyncSocket("");
 
-             _socket.Connect(SC.GetStringValue($"EFEM.IPAddress"));
 
-             _socket.OnDataChanged += OnReceiveMessage;
 
-             _socket.OnErrorHappened += OnErrorHappen;
 
-             _status = RState.Init;
 
-             _IsHomed = false;
 
-             _busyTrig.RST = true;
 
-             _LPMs[0] = new Loadport(ModuleName.LP1, this);
 
-             _LPMs[1] = new Loadport(ModuleName.LP2, this);
 
-             _LPMs[2] = new Loadport(ModuleName.LP3, this);
 
-             CarrierManager.Instance.SubscribeLocation(ModuleName.LP1.ToString(), 1);
 
-             CarrierManager.Instance.SubscribeLocation(ModuleName.LP2.ToString(), 1);
 
-             CarrierManager.Instance.SubscribeLocation(ModuleName.LP3.ToString(), 1);
 
-             WaferManager.Instance.SubscribeLocation(ModuleName.EfemRobot, 2);
 
-             WaferManager.Instance.SubscribeLocation(ModuleName.Aligner1, 1);
 
-             // _subscribeLoc(ModuleName.EfemRobot, 2);
 
-             SubscribeLocation(ModuleName.Aligner1, 1);
 
-             SubscribeLocation(ModuleName.LP1, SC.GetValue<int>("EFEM.LoadPort.SlotNumber"));
 
-             SubscribeLocation(ModuleName.LP2, SC.GetValue<int>("EFEM.LoadPort.SlotNumber"));
 
-             SubscribeLocation(ModuleName.LP3, SC.GetValue<int>("EFEM.LoadPort.SlotNumber"));
 
-             Task.Run(() =>
 
-             {
 
-                 foreach (var data in blockingCollection.GetConsumingEnumerable())
 
-                 {
 
-                     _robotMoveInfo.Action = data.Action;
 
-                     _robotMoveInfo.ArmTarget = data.Hand == Hand.Blade1 ? RobotArm.ArmA : (data.Hand == Hand.Both ? RobotArm.Both : RobotArm.ArmB);
 
-                     _robotMoveInfo.BladeTarget = $"{_robotMoveInfo.ArmTarget}.{data.Target}";
 
-                     System.Threading.Thread.Sleep(600);
 
-                 }
 
-             });
 
-         }
 
-         private void SubscribeLocation(ModuleName module,int waferCount)
 
-         {
 
-             if (ModuleHelper.IsInstalled(module))
 
-             {
 
-                 WaferManager.Instance.SubscribeLocation(module, waferCount);
 
-             }
 
-         }
 
-         public override void Monitor()
 
-         {
 
-         }
 
-         public override void Terminate()
 
-         {
 
-         }
 
-         public override bool SetRobotSpeed(ModuleName mod, int speed)
 
-         {
 
-             return false;
 
-         }
 
-         public override bool SetWaferSize(ModuleName mod, int size)
 
-         {
 
-             return false;
 
-         }
 
-         public override bool RobotPowerOn(ModuleName mod, bool status)
 
-         { return false; }
 
-         public override bool Vacuum(ModuleName mod, bool state)
 
-         {
 
-             return false;
 
-         }
 
-         public override void Reset()
 
-         {
 
-             _status = RState.End;
 
-         }
 
-         public override void SetOnline(bool online)
 
-         {
 
-         }
 
-         public override void SetOnline(ModuleName mod, bool online)
 
-         {
 
-         }
 
-         public override void SetBusy(ModuleName mod, bool online)
 
-         {
 
-             _status = RState.Running;
 
-         }
 
-         public override bool HomeAll()
 
-         {
 
-             if (_status == RState.Running)
 
-                 _backroundMsg = _currentMsg;
 
-             _currentMsg = new EfemMessage
 
-             {
 
-                 Module = ModuleName.EFEM,
 
-                 Operation = EfemOperation.Home,
 
-                 Head = EfemMessage.MsgHead.MOV,
 
-                 Parameters = new List<string> { Constant.ModuleString[ModuleName.EFEM] }
 
-             };
 
-             _status = RState.Running;
 
-             string data = _currentMsg.ToString();
 
-             SetRobotMovingInfo(RobotAction.Homing, Hand.Both, ModuleName.EFEM, Flip.Upper);
 
-             return _socket.Write(data);
 
-         }
 
-         public override bool Home(ModuleName mod)
 
-         {
 
-             if (_status == RState.Running)
 
-                 _backroundMsg = _currentMsg;
 
-             if (ModuleHelper.IsLoadPort(mod))
 
-             {
 
-                 _currentMsg = new EfemMessage
 
-                 {
 
-                     Module = mod,
 
-                     Operation = EfemOperation.Home,
 
-                     Head = EfemMessage.MsgHead.MOV,
 
-                     Parameters = new List<string> { Constant.ModuleString[mod] }
 
-                 };
 
-                 _status = RState.Running;
 
-                 return _socket.Write(_currentMsg.ToString());
 
-             }
 
-             else
 
-             {
 
-                 _currentMsg = new EfemMessage
 
-                 {
 
-                     Module = mod,
 
-                     Operation = EfemOperation.Home,
 
-                     Head = EfemMessage.MsgHead.MOV,
 
-                     Parameters = new List<string> { Constant.ModuleString[mod] }
 
-                 };
 
-                 _status = RState.Running;
 
-                 return _socket.Write(_currentMsg.ToString());
 
-             }
 
-         }
 
-         public override bool OriginalSearch(ModuleName mod)
 
-         {
 
-             if (!CheckEfemStatus())
 
-                 return false;
 
-             _currentMsg = new EfemMessage
 
-             {
 
-                 Module = ModuleName.EFEM,
 
-                 Operation = EfemOperation.Orgsh,
 
-                 Head = EfemMessage.MsgHead.MOV,
 
-                 Parameters = new List<string>
 
-                 {
 
-                     Constant.ModuleString[mod]
 
-                 }
 
-             };
 
-             _status = RState.Running;
 
-             return _socket.Write(_currentMsg.ToString());
 
-         }
 
-         public override bool CheckWaferPresence()
 
-         {
 
-             if (!CheckEfemStatus())
 
-                 return false;
 
-             _currentMsg = new EfemMessage
 
-             {
 
-                 Module = ModuleName.EFEM,
 
-                 Operation = EfemOperation.StateTrack,
 
-                 Head = EfemMessage.MsgHead.GET,
 
-                 Parameters = new List<string> { "TRACK" }
 
-             };
 
-             _waferPresence = string.Empty;
 
-             _status = RState.Running;
 
-             return _socket.Write(_currentMsg.ToString());
 
-         }
 
-         public override string GetWaferPresence()
 
-         {
 
-             return _waferPresence;
 
-         }
 
-         public override bool Halt()
 
-         {
 
-             if (_status == RState.Running)
 
-                 _backroundMsg = _currentMsg;
 
-             _currentMsg = new EfemMessage
 
-             {
 
-                 Module = ModuleName.EFEM,
 
-                 Operation = EfemOperation.EmsStop,
 
-                 Head = EfemMessage.MsgHead.MOV,
 
-             };
 
-             _status = RState.Running;
 
-             return _socket.Write(_currentMsg.ToString());
 
-         }
 
-         public override bool ClearError()
 
-         {
 
-             _currentMsg = new EfemMessage
 
-             {
 
-                 Module = ModuleName.EFEM,
 
-                 Operation = EfemOperation.ClearError,
 
-                 Head = EfemMessage.MsgHead.SET,
 
-                 Parameters = new List<string> { "CLEAR" }
 
-             };
 
-             _status = RState.Running;
 
-             return _socket.Write(_currentMsg.ToString());
 
-         }
 
-         public override bool CloseBuzzer()
 
-         {
 
-             return false;
 
-         }
 
-         public override bool PickExtend(ModuleName chamber, int slot, Hand hand)
 
-         {
 
-             if (!CheckEfemStatus())
 
-                 return false;
 
-             _currentMsg = new EfemMessage
 
-             {
 
-                 Operation = EfemOperation.Extend,
 
-                 Head = EfemMessage.MsgHead.MOV,
 
-                 Parameters = new List<string>
 
-                 {
 
-                     chamber.ToHWString(),
 
-                     ExtendPos.GB.ToString(),
 
-                     Constant.ArmString[hand],
 
-                 }
 
-             };
 
-             SetRobotMovingInfo(RobotAction.Extending, hand, chamber,Flip.Upper);
 
-             _status = RState.Running;
 
-             return _socket.Write(_currentMsg.ToString());
 
-         }
 
-         public override bool PickRetract(ModuleName chamber, int slot, Hand hand)
 
-         {
 
-             if (!CheckEfemStatus())
 
-                 return false;
 
-             _currentMsg = new EfemMessage
 
-             {
 
-                 Operation = EfemOperation.Extend,
 
-                 Head = EfemMessage.MsgHead.MOV,
 
-                 Parameters = new List<string>
 
-                 {
 
-                     chamber.ToHWString(),
 
-                     ExtendPos.G4.ToString(),
 
-                     Constant.ArmString[hand],
 
-                 }
 
-             };
 
-             _status = RState.Running;
 
-             SetRobotMovingInfo(RobotAction.Retracting, hand, chamber, Flip.Upper);
 
-             return _socket.Write(_currentMsg.ToString());
 
-         }
 
-         public override bool PlaceExtend(ModuleName chamber, int slot, Hand hand)
 
-         {
 
-             if (!CheckEfemStatus())
 
-                 return false;
 
-             _currentMsg = new EfemMessage
 
-             {
 
-                 Operation = EfemOperation.Extend,
 
-                 Head = EfemMessage.MsgHead.MOV,
 
-                 Parameters = new List<string>
 
-                 {
 
-                     chamber.ToHWString(),
 
-                     ExtendPos.PB.ToString(),
 
-                     Constant.ArmString[hand],
 
-                 }
 
-             };
 
-             _status = RState.Running;
 
-             SetRobotMovingInfo(RobotAction.Extending, hand, chamber, Flip.Upper);
 
-             return _socket.Write(_currentMsg.ToString());
 
-         }
 
-         public override bool PlaceRetract(ModuleName chamber, int slot, Hand hand)
 
-         {
 
-             if (!CheckEfemStatus())
 
-                 return false;
 
-             _currentMsg = new EfemMessage
 
-             {
 
-                 Operation = EfemOperation.Extend,
 
-                 Head = EfemMessage.MsgHead.MOV,
 
-                 Parameters = new List<string>
 
-                 {
 
-                     chamber.ToHWString(),
 
-                     ExtendPos.P4.ToString(),
 
-                     Constant.ArmString[hand],
 
-                 }
 
-             };
 
-             _status = RState.Running;
 
-             SetRobotMovingInfo(RobotAction.Retracting, hand, chamber, Flip.Upper);
 
-             return _socket.Write(_currentMsg.ToString());
 
-         }
 
-         public override bool Pick(ModuleName station, int slot, Hand hand,Flip flip= Flip.Upper)
 
-         {
 
-             if (!CheckEfemStatus())
 
-                 return false;
 
-             Position SrcPos = new Position { Module = station, Slot = (byte)slot };
 
-             _currentMsg = new EfemMessage
 
-             {
 
-                 Operation = EfemOperation.Pick,
 
-                 Head = EfemMessage.MsgHead.MOV,
 
-                 Parameters = new List<string>
 
-                 {
 
-                     SrcPos.ToHWString(),
 
-                     Constant.ArmString[hand],
 
-                     //WaferSize.WS12.ToString()
 
-                 }
 
-             };
 
-             _status = RState.Running;
 
-             SetRobotMovingInfo(RobotAction.Picking, hand, station, Flip.Upper);
 
-             return _socket.Write(_currentMsg.ToString());
 
-         }
 
-         public override bool Place(ModuleName station, int slot, Hand hand, Flip flip = Flip.Upper)
 
-         {
 
-             if (!CheckEfemStatus())
 
-                 return false;
 
-             Position DestPos = new Position { Module = station, Slot = (byte)slot };
 
-             _currentMsg = new EfemMessage
 
-             {
 
-                 Operation = EfemOperation.Place,
 
-                 Head = EfemMessage.MsgHead.MOV,
 
-                 Parameters = new List<string>
 
-                 {
 
-                     DestPos.ToHWString(),
 
-                     Constant.ArmString[hand],
 
-                     //WaferSize.WS12.ToString()
 
-                 }
 
-             };
 
-             _status = RState.Running;
 
-             SetRobotMovingInfo(RobotAction.Placing, hand, station, Flip.Upper);
 
-             return _socket.Write(_currentMsg.ToString());
 
-         }
 
-         public override bool Goto(ModuleName station, Hand hand, string updown = "UP")
 
-         {
 
-             if (!CheckEfemStatus())
 
-                 return false;
 
-             Position DestPos = new Position { Module = station, Slot = (byte)0 };
 
-             _currentMsg = new EfemMessage
 
-             {
 
-                 Operation = EfemOperation.Goto,
 
-                 Head = EfemMessage.MsgHead.MOV,
 
-                 Parameters = new List<string>
 
-                 {
 
-                     DestPos.ToHWString(),
 
-                     Constant.ArmString[hand],
 
-                     WaferSize.WS12.ToString()
 
-                 }
 
-             };
 
-             _status = RState.Running;
 
-             return _socket.Write(_currentMsg.ToString());
 
-         }
 
-         public override bool Grip(Hand blade, bool isGrip)
 
-         {
 
-             if (!CheckEfemStatus())
 
-                 return false;
 
-             _currentMsg = new EfemMessage
 
-             {
 
-                 Operation = EfemOperation.Grip,
 
-                 Head = EfemMessage.MsgHead.SET,
 
-                 Parameters = new List<string>
 
-                 {
 
-                     isGrip ? "ON":"OFF",
 
-                     Constant.ArmString[blade]
 
-                 }
 
-             };
 
-             _status = RState.Running;
 
-             return _socket.Write(_currentMsg.ToString());
 
-         }
 
-         public override bool SetAlignWaferSize()
 
-         {
 
-             LOG.WriteLog(eEvent.ERR_EFEM_COMMON_FAILED, Module.ToString(), $"System cannot support aligner wafer size");
 
-             return false;
 
-         }
 
-         public override bool SetAlignFlatType(int flatType)
 
-         {
 
-             LOG.WriteLog(eEvent.ERR_EFEM_COMMON_FAILED, Module.ToString(), $"System cannot support aligner flat type");
 
-             return false;
 
-         }
 
-         public override bool SetAlignDistance()
 
-         {
 
-             LOG.WriteLog(eEvent.ERR_EFEM_COMMON_FAILED, Module.ToString(), $"System cannot support aligner distance");
 
-             return false;
 
-         }
 
-         public override bool GotoMap(ModuleName mod, Hand hand, string extend = "EX")
 
-         {
 
-             LOG.WriteLog(eEvent.ERR_EFEM_COMMON_FAILED, Module.ToString(), $"System cannot support GotoMap");
 
-             return false;
 
-         }
 
-         public override bool Pause()
 
-         {
 
-             LOG.WriteLog(eEvent.ERR_EFEM_COMMON_FAILED, Module.ToString(), $"System cannot support Pause");
 
-             return false;
 
-         }
 
-         public override bool Resume()
 
-         {
 
-             LOG.WriteLog(eEvent.ERR_EFEM_COMMON_FAILED, Module.ToString(), $"System cannot support Resume");
 
-             return false;
 
-         }
 
-         public override bool RequestMapResult(ModuleName mod)
 
-         {
 
-             LOG.WriteLog(eEvent.ERR_EFEM_COMMON_FAILED, Module.ToString(), $"System cannot support RequestMapResult");
 
-             return false;
 
-         }
 
-         public override bool Map(ModuleName mod)
 
-         {
 
-             if (!CheckEfemStatus())
 
-                 return false;
 
-             _currentMsg = new EfemMessage
 
-             {
 
-                 Operation = EfemOperation.Map,
 
-                 Head = EfemMessage.MsgHead.MOV,
 
-                 Parameters = new List<string> { Constant.ModuleString[mod] }
 
-             };
 
-             _status = RState.Running;
 
-             return _socket.Write(_currentMsg.ToString());
 
-         }
 
-         public override bool GetWaferSize(ModuleName mod)
 
-         {
 
-             return true;
 
-         }
 
-         public override bool SetPinUp(ModuleName mod)
 
-         {
 
-             if (!CheckEfemStatus())
 
-                 return false;
 
-             _currentMsg = new EfemMessage
 
-             {
 
-                 Operation = EfemOperation.Lift,
 
-                 Head = EfemMessage.MsgHead.MOV,
 
-                 Parameters = new List<string> { Constant.ModuleString[mod], "UP" }
 
-             };
 
-             _status = RState.Running;
 
-             return _socket.Write(_currentMsg.ToString());
 
-         }
 
-         public override bool SetPinDown(ModuleName mod)
 
-         {
 
-             if (!CheckEfemStatus())
 
-                 return false;
 
-             _currentMsg = new EfemMessage
 
-             {
 
-                 Operation = EfemOperation.Lift,
 
-                 Head = EfemMessage.MsgHead.MOV,
 
-                 Parameters = new List<string> { Constant.ModuleString[mod], "DOWN" }
 
-             };
 
-             _status = RState.Running;
 
-             return _socket.Write(_currentMsg.ToString());
 
-         }
 
-         public override bool SetAlignAngle(ModuleName mod, double angle)
 
-         {
 
-             _status = RState.End;
 
-             return true;
 
-         }
 
-         public override bool Align(ModuleName mod, double angle, float delayTime, WaferSize size)
 
-         {
 
-             if (!CheckEfemStatus())
 
-                 return false;
 
-             _currentMsg = new EfemMessage
 
-             {
 
-                 Operation = EfemOperation.Align,
 
-                 Head = EfemMessage.MsgHead.MOV,
 
-                 Parameters = new List<string> { $"A{angle.ToString("000.00")}" }
 
-             };
 
-             _status = RState.Running;
 
-             return _socket.Write(_currentMsg.ToString());
 
-         }
 
-         public override bool SetLamp(LightType light, LightStatus status)
 
-         {
 
-             if (Status == RState.Running)
 
-             {
 
-                 LOG.Write(eEvent.ERR_EFEM_ROBOT, ModuleName.EFEM, "EFEM is busy, please wait a minute");
 
-                 return false;
 
-             }
 
-             _currentMsg = new EfemMessage
 
-             {
 
-                 Module = ModuleName.EFEM,
 
-                 Operation = EfemOperation.Light,
 
-                 Head = EfemMessage.MsgHead.SET,
 
-                 Parameters = new List<string> { Constant.STOWER, light.ToString(), status.ToString() }
 
-             };
 
-             _status = RState.Running;
 
-             return _socket.Write(_currentMsg.ToString());
 
-         }
 
-         public override bool Load(ModuleName mod)
 
-         {
 
-             if (!CheckEfemStatus())
 
-                 return false;
 
-             _currentMsg = new EfemMessage
 
-             {
 
-                 Module = mod,
 
-                 Operation = EfemOperation.Load,
 
-                 Head = EfemMessage.MsgHead.MOV,
 
-                 Parameters = new List<string> { Constant.ModuleString[mod] }
 
-             };
 
-             _status = RState.Running;
 
-             return _socket.Write(_currentMsg.ToString());
 
-         }
 
-         public override bool Unload(ModuleName mod)
 
-         {
 
-             if (!CheckEfemStatus())
 
-                 return false;
 
-             _currentMsg = new EfemMessage
 
-             {
 
-                 Module = mod,
 
-                 Operation = EfemOperation.Unload,
 
-                 Head = EfemMessage.MsgHead.MOV,
 
-                 Parameters = new List<string> { Constant.ModuleString[mod] }
 
-             };
 
-             _status = RState.Running;
 
-             return _socket.Write(_currentMsg.ToString());
 
-         }
 
-         public override bool ReadCarrierId(ModuleName mod)
 
-         {
 
-             if (!CheckEfemStatus())
 
-                 return false;
 
-             _currentMsg = new EfemMessage
 
-             {
 
-                 Module = mod,
 
-                 Operation = EfemOperation.CarrierId,
 
-                 Head = EfemMessage.MsgHead.GET,
 
-                 Parameters = new List<string> { Constant.ModuleString[mod] }
 
-             };
 
-             _status = RState.Running;
 
-             return _socket.Write(_currentMsg.ToString());
 
-         }
 
-         public override bool WriteCarrierId(ModuleName mod, string id)
 
-         {
 
-             if (!CheckEfemStatus())
 
-                 return false;
 
-             _currentMsg = new EfemMessage
 
-             {
 
-                 Module = mod,
 
-                 Operation = EfemOperation.CarrierId,
 
-                 Head = EfemMessage.MsgHead.SET,
 
-                 Parameters = new List<string> { Constant.ModuleString[mod], id }
 
-             };
 
-             _status = RState.Running;
 
-             return _socket.Write(_currentMsg.ToString());
 
-         }
 
-         public override bool ReadTagData(ModuleName mod)
 
-         {
 
-             if (!CheckEfemStatus())
 
-                 return false;
 
-             _currentMsg = new EfemMessage
 
-             {
 
-                 Module = mod,
 
-                 Operation = EfemOperation.CarrierId,
 
-                 Head = EfemMessage.MsgHead.GET,
 
-                 Parameters = new List<string> { Constant.ModuleString[mod] }
 
-             };
 
-             _status = RState.Running;
 
-             return _socket.Write(_currentMsg.ToString());
 
-         }
 
-         public override bool WriteTagData(ModuleName mod, string tagData)
 
-         {
 
-             if (!CheckEfemStatus())
 
-                 return false;
 
-             _currentMsg = new EfemMessage
 
-             {
 
-                 Module = mod,
 
-                 Operation = EfemOperation.CarrierId,
 
-                 Head = EfemMessage.MsgHead.SET,
 
-                 Parameters = new List<string> { Constant.ModuleString[mod], tagData }
 
-             };
 
-             _status = RState.Running;
 
-             return _socket.Write(_currentMsg.ToString());
 
-         }
 
-         public override bool Dock(ModuleName mod)
 
-         {
 
-             if (!CheckEfemStatus())
 
-                 return false;
 
-             _currentMsg = new EfemMessage
 
-             {
 
-                 Module = mod,
 
-                 Operation = EfemOperation.Dock,
 
-                 Head = EfemMessage.MsgHead.MOV,
 
-                 Parameters = new List<string> { Constant.ModuleString[mod] }
 
-             };
 
-             _status = RState.Running;
 
-             return _socket.Write(_currentMsg.ToString());
 
-         }
 
-         public override bool Undock(ModuleName mod)
 
-         {
 
-             if (!CheckEfemStatus())
 
-                 return false;
 
-             _currentMsg = new EfemMessage
 
-             {
 
-                 Module = mod,
 
-                 Operation = EfemOperation.Undock,
 
-                 Head = EfemMessage.MsgHead.MOV,
 
-                 Parameters = new List<string> { Constant.ModuleString[mod] }
 
-             };
 
-             _status = RState.Running;
 
-             return _socket.Write(_currentMsg.ToString());
 
-         }
 
-         public override bool Clamp(ModuleName mod, bool isUnloadClamp)
 
-         {
 
-             if (!CheckEfemStatus())
 
-                 return false;
 
-             _currentMsg = new EfemMessage
 
-             {
 
-                 Module = mod,
 
-                 Operation = EfemOperation.Clamp,
 
-                 Head = EfemMessage.MsgHead.MOV,
 
-                 Parameters = new List<string> { Constant.ModuleString[mod] }
 
-             };
 
-             _status = RState.Running;
 
-             _bIsUnloadClamp = isUnloadClamp;
 
-             return _socket.Write(_currentMsg.ToString());
 
-         }
 
-         public override bool Unclamp(ModuleName mod)
 
-         {
 
-             if (!CheckEfemStatus())
 
-                 return false;
 
-             _currentMsg = new EfemMessage
 
-             {
 
-                 Module = mod,
 
-                 Operation = EfemOperation.Unclamp,
 
-                 Head = EfemMessage.MsgHead.MOV,
 
-                 Parameters = new List<string> { Constant.ModuleString[mod] }
 
-             };
 
-             _status = RState.Running;
 
-             return _socket.Write(_currentMsg.ToString());
 
-         }
 
-         public override bool SetThickness(ModuleName mod, string thickness)
 
-         {
 
-             if (!CheckEfemStatus())
 
-                 return false;
 
-             _currentMsg = new EfemMessage
 
-             {
 
-                 Module = mod,
 
-                 Operation = EfemOperation.SetThickness,
 
-                 Head = EfemMessage.MsgHead.SET,
 
-                 Parameters = new List<string> { Constant.ModuleString[mod], thickness.ToUpper() }
 
-             };
 
-             _status = RState.Running;
 
-             return _socket.Write(_currentMsg.ToString());
 
-         }
 
-         public override void SetRobotMovingInfo(RobotAction action, Hand hand, ModuleName target,Flip flip)
 
-         {
 
-             blockingCollection.Add(new RobotAnimationData(action, hand, target, flip));
 
-         }
 
-         private void OnReceiveMessage(string RevMsg)
 
-         {
 
-             string[] msgs = RevMsg.Split('\r');
 
-             foreach (var msg in msgs)
 
-             {
 
-                 if (string.IsNullOrWhiteSpace(msg)) continue;
 
-                 EfemMessage rec_msg = JetMessageHandler.Instance.ToMessage(msg);
 
-                 switch (rec_msg.Head)
 
-                 {
 
-                     case EfemMessage.MsgHead.ACK:
 
-                         if (msg.Contains("ERROR"))
 
-                         {
 
-                             _revMsg = rec_msg;
 
-                         }
 
-                         break;
 
-                     case EfemMessage.MsgHead.INF:
 
-                         // 收到INF之后发送ACK确认
 
-                         string strACK = rec_msg.RawString.Replace("INF", "ACK");
 
-                         SendBack(strACK);
 
-                         EfemMessage ack_msg = strACK.ToMessage();
 
-                         ack_msg.Direct = MsgDirection.To;
 
-                         _revMsg = rec_msg;
 
-                         OnCommandUpdated(rec_msg);
 
-                         SetRobotMovingInfo(RobotAction.None, Hand.Both, ModuleName.EfemRobot, Flip.Upper);
 
-                         break;
 
-                     case EfemMessage.MsgHead.EVT:
 
-                         OnEventUpdated(new EfemEventArgs
 
-                         {
 
-                             EvtStr = rec_msg.ToParamString(),
 
-                             Module = rec_msg.Module,
 
-                             CommandType = rec_msg.Operation,
 
-                             DataList = rec_msg.Data
 
-                         });
 
-                         if (rec_msg.Operation == EfemOperation.Home)
 
-                         {
 
-                             SetRobotMovingInfo(RobotAction.Homing, Hand.Both, ModuleName.EFEM, Flip.Upper);
 
-                         }
 
-                         break;
 
-                     case EfemMessage.MsgHead.NAK:
 
-                     case EfemMessage.MsgHead.CAN:
 
-                     case EfemMessage.MsgHead.ABS:
 
-                         OnErrorOccurred(rec_msg);
 
-                         break;
 
-                 }
 
-             }
 
-         }
 
-         private void OnErrorHappen(ErrorEventArgs args)
 
-         {
 
-             _status = RState.Failed;
 
-             Singleton<RouteManager>.Instance.EFEM.PostMsg(EfemEntity.MSG.Error);
 
-         }
 
-         private void OnErrorOccurred(EfemMessage message)
 
-         {
 
-             string description = string.Empty;
 
-             switch (message.Head)
 
-             {
 
-                 case EfemMessage.MsgHead.NAK:
 
-                     description = Constant.FactorString[message.Factor];
 
-                     break;
 
-                 case EfemMessage.MsgHead.CAN:
 
-                     description = Constant.FactorString.ContainsKey(message.Factor) ? Constant.FactorString[message.Factor] : message.Factor;
 
-                     break;
 
-                 case EfemMessage.MsgHead.ABS:
 
-                     description = $"{message.Data[0]}, {message.Data[1]}";
 
-                     break;
 
-             }
 
-             _status = RState.Failed;
 
-             Singleton<RouteManager>.Instance.EFEM.PostMsg(EfemEntity.MSG.Error,description);
 
-             LOG.Write(eEvent.ERR_EFEM_COMMON_FAILED, ModuleName.EFEM, $"{description}, [{message.Data[0]}], [{message.Factor}]");
 
-         }
 
-         private void OnEventUpdated(EfemEventArgs eArg)
 
-         {
 
-             switch (eArg.CommandType)
 
-             {
 
-                 case EfemOperation.SigStatus:
 
-                     // EVT:SIGSTAT/Parameter/DATA1/DATA2;
 
-                     string sParam = eArg.DataList[0];           // "SYSTEM" or "Pn"
 
-                     // DATA1 & DATA2
 
-                     int nData1 = Convert.ToInt32(eArg.DataList[1], 16);
 
-                     int nData2 = Convert.ToInt32(eArg.DataList[2], 16);
 
-                     BitArray baData1 = new BitArray(new int[] { nData1 });
 
-                     BitArray baData2 = new BitArray(new int[] { nData2 });
 
-                     if (0 == string.Compare(sParam, Constant.SYS, true))
 
-                     {
 
-                         // EVT:SIGSTAT/System/00000000/00000004;
 
-                         // DATA1
 
-                         // Post warning and alarm
 
-                         if (!baData1[0])   // Bit[0] ON=Normal, OFF=Abnormal
 
-                         {
 
-                             //EV.Notify(EFEMVacuumPressureError);
 
-                             string error = "EFEM System vacuum source pressure low";
 
-                             LOG.Write(eEvent.ERR_EFEM_COMMON_FAILED, ModuleName.EFEM, error);
 
-                             Singleton<RouteManager>.Instance.EFEM.PostMsg(EfemEntity.MSG.Error,error);
 
-                         }
 
-                         if (!baData1[1])   // Bit[1] ON=Normal, OFF=Abnormal
 
-                         {
 
-                             //EV.Notify(EFEMIonizerAlarm);
 
-                             string error = "EFEM Ionizer compressed air error";
 
-                             LOG.Write(eEvent.ERR_EFEM_COMMON_FAILED, ModuleName.EFEM, error);
 
-                             Singleton<RouteManager>.Instance.EFEM.PostMsg(EfemEntity.MSG.Error,error);
 
-                         }
 
-                         if (!baData1[2])   // Bit[2] ON=Normal, OFF=Abnormal
 
-                         {
 
-                             //EV.Notify(EFEMCDAError);
 
-                             string error = "EFEM System compressed air pressure low";
 
-                             LOG.Write(eEvent.ERR_EFEM_COMMON_FAILED, ModuleName.EFEM, error);
 
-                             Singleton<RouteManager>.Instance.EFEM.PostMsg(EfemEntity.MSG.Error, error);
 
-                         }
 
-                         if (!baData1[4])   // Bit[4] ON=Normal, OFF=Abnormal
 
-                         {
 
-                             //EV.Notify(EFEMFlowGaugeSensorError);
 
-                             string error = "EFEM Flow gauge sensor error";
 
-                             LOG.Write(eEvent.ERR_EFEM_COMMON_FAILED, ModuleName.EFEM, error);
 
-                             Singleton<RouteManager>.Instance.EFEM.PostMsg(EfemEntity.MSG.Error,error);
 
-                         }
 
-                         if (!baData1[5])   // Bit[5] ON=Normal, OFF=Abnormal
 
-                         {
 
-                             //EV.Notify(EFEMLeakageAlarm);
 
-                             string error = "EFEM Leakage alarm";
 
-                             LOG.Write(eEvent.ERR_EFEM_COMMON_FAILED, ModuleName.EFEM, error);
 
-                             Singleton<RouteManager>.Instance.EFEM.PostMsg(EfemEntity.MSG.Error,error);
 
-                         }
 
-                         if (!baData1[10])   // Bit[10] ON=Normal, OFF=Abnormal
 
-                         {
 
-                             //EV.Notify(EFEMIonizerAlarm);
 
-                             string error = "EFEM Ionizer alarm";
 
-                             LOG.Write(eEvent.ERR_EFEM_COMMON_FAILED, ModuleName.EFEM, error);
 
-                             Singleton<RouteManager>.Instance.EFEM.PostMsg(EfemEntity.MSG.Error,error);
 
-                         }
 
-                         if (!baData1[11])   // Bit[11] ON=Normal, OFF=Abnormal
 
-                         {
 
-                             //EV.Notify(EFEMFFUAlarm);
 
-                             string error = "FFU alarm";
 
-                             LOG.Write(eEvent.ERR_EFEM_COMMON_FAILED, ModuleName.EFEM, error);
 
-                             Singleton<RouteManager>.Instance.EFEM.PostMsg(EfemEntity.MSG.Error,error);
 
-                         }
 
-                         if (!baData1[13])   // Bit[13] ON=RUN, OFF=Maintain
 
-                         {
 
-                             //EV.Notify(EFEMOffline);
 
-                             string error = "EFEM switch to Maintain mode, HomeAll to recover";
 
-                             LOG.Write(eEvent.ERR_EFEM_COMMON_FAILED, ModuleName.EFEM, error);
 
-                             Singleton<RouteManager>.Instance.EFEM.PostMsg(EfemEntity.MSG.Error, error);
 
-                         }
 
-                         // DATA2
 
-                         _signalT.ChangeLightStatus(LightType.RED, baData2[0] ? LightStatus.ON : baData2[5] ? LightStatus.BLINK : LightStatus.OFF);
 
-                         _signalT.ChangeLightStatus(LightType.GREEN, baData2[1] ? LightStatus.ON : baData2[6] ? LightStatus.BLINK : LightStatus.OFF);
 
-                         _signalT.ChangeLightStatus(LightType.YELLOW, baData2[2] ? LightStatus.ON : baData2[7] ? LightStatus.BLINK : LightStatus.OFF);
 
-                         _signalT.ChangeLightStatus(LightType.BLUE, baData2[3] ? LightStatus.ON : baData2[8] ? LightStatus.BLINK : LightStatus.OFF);
 
-                         _signalT.ChangeLightStatus(LightType.WHITE, baData2[4] ? LightStatus.ON : baData2[9] ? LightStatus.BLINK : LightStatus.OFF);
 
-                         _signalT.ChangeLightStatus(LightType.BUZZER1, baData2[10] ? LightStatus.ON : LightStatus.OFF);
 
-                         /* EFEM 程序中目前没有实现
 
-                         _RobotErr.CLK = baData2[27]; // bit 27
 
-                         bool bArmNotExtendLLA            = baData2[30]; // bit 30
 
-                         bool bArmNotExtendLLB            = baData2[31]; // bit 31
 
-                         */
 
-                     } // system event
 
-                     else
 
-                     {
 
-                         _LPMs[eArg.Module - ModuleName.LP1].HandleEvent(eArg);
 
-                     } // FOUP EVENT
 
-                     break;
 
-                 case EfemOperation.GetWaferInfo:
 
-                     _LPMs[eArg.Module - ModuleName.LP1].HandleEvent(eArg);
 
-                     break;
 
-                 default:
 
-                     break;
 
-             }
 
-         }
 
-         private void OnCommandUpdated(EfemMessage message)
 
-         {
 
-             if (message.Operation != EfemOperation.Ready)
 
-             {
 
-                 if (_currentMsg.Operation != message.Operation && (_backroundMsg == null || _backroundMsg.Operation != message.Operation))
 
-                 {
 
-                     LOG.Write(eEvent.ERR_EFEM_COMMON_FAILED, ModuleName.EfemRobot, $"OnCommandUpdated() unexpected return: {message.Operation}, expect: {_currentMsg.Operation}");
 
-                     return;
 
-                 }
 
-             }
 
-             switch (message.Operation)
 
-             {
 
-                 case EfemOperation.ClearError:
 
-                 case EfemOperation.Align:
 
-                 case EfemOperation.Map:
 
-                 case EfemOperation.Pick:
 
-                 case EfemOperation.Place:
 
-                 case EfemOperation.Extend:
 
-                 case EfemOperation.Goto:
 
-                 case EfemOperation.Orgsh:
 
-                 case EfemOperation.EmsStop:
 
-                 case EfemOperation.Light:
 
-                     _status = RState.End;
 
-                     break;
 
-                 case EfemOperation.StateTrack:
 
-                     {
 
-                         _waferPresence = message.Data.Count >= 1 ? message.Data.First() : string.Empty;
 
-                         //upper arm
 
-                         if (_waferPresence[0] == '1')
 
-                         {
 
-                             if (WaferManager.Instance.CheckNoWafer(ModuleName.EfemRobot, 1))
 
-                             {
 
-                                 WaferManager.Instance.CreateWafer(ModuleName.EfemRobot, 1, WaferStatus.Normal);
 
-                             }
 
-                         }
 
-                         else
 
-                         {
 
-                             if (WaferManager.Instance.CheckHasWafer(ModuleName.EfemRobot, 1))
 
-                             {
 
-                                 LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $" {ModuleName.EfemRobot} upper arm has wafer information, while EFEM return empty, manually delete if really no wafer");
 
-                             }
 
-                         }
 
-                         //lower arm
 
-                         if (_waferPresence[1] == '1')
 
-                         {
 
-                             if (WaferManager.Instance.CheckNoWafer(ModuleName.EfemRobot, 0))
 
-                             {
 
-                                 WaferManager.Instance.CreateWafer(ModuleName.EfemRobot, 0, WaferStatus.Normal);
 
-                             }
 
-                         }
 
-                         else
 
-                         {
 
-                             if (WaferManager.Instance.CheckHasWafer(ModuleName.EfemRobot, 0))
 
-                             {
 
-                                 LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $" {ModuleName.EfemRobot} lower arm has wafer information, while EFEM return empty, manually delete if really no wafer");
 
-                             }
 
-                         }
 
-                         //aligner1
 
-                         if (_waferPresence[2] == '1')
 
-                         {
 
-                             if (WaferManager.Instance.CheckNoWafer(ModuleName.Aligner1, 0))
 
-                             {
 
-                                 WaferManager.Instance.CreateWafer(ModuleName.Aligner1, 0, WaferStatus.Normal);
 
-                             }
 
-                         }
 
-                         else
 
-                         {
 
-                             if (WaferManager.Instance.CheckHasWafer(ModuleName.Aligner1, 0))
 
-                             {
 
-                                 LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $" {ModuleName.Aligner1} has wafer information, while EFEM return empty, manually delete if really no wafer");
 
-                             }
 
-                         }
 
-                         _IsHomed = true;
 
-                         _status = RState.End;
 
-                     }
 
-                     break;
 
-                 case EfemOperation.Home:
 
-                     {
 
-                         if (_currentMsg.Module == ModuleName.EFEM)
 
-                         {
 
-                             _LPMs[0].OnHomed();
 
-                             _LPMs[1].OnHomed();
 
-                             _LPMs[2].OnHomed();
 
-                         }
 
-                         else if (ModuleHelper.IsLoadPort(_currentMsg.Module))
 
-                         {
 
-                             _LPMs[_currentMsg.Module - ModuleName.LP1].OnHomed();
 
-                         }
 
-                         _status = RState.End;
 
-                     }
 
-                     break;
 
-                 case EfemOperation.Load:
 
-                     {
 
-                         _LPMs[message.Module - ModuleName.LP1].OnLoaded();
 
-                         _status = RState.End;
 
-                     }
 
-                     break;
 
-                 case EfemOperation.Unload:
 
-                     {
 
-                         _LPMs[message.Module - ModuleName.LP1].OnUnloaded();
 
-                         _status = RState.End;
 
-                     }
 
-                     break;
 
-                 case EfemOperation.CarrierId:
 
-                     {
 
-                         if (message.Head == EfemMessage.MsgHead.GET)
 
-                         {
 
-                             _LPMs[message.Module - ModuleName.LP1].OnCarrierIDRead(message.Data.First());
 
-                         }
 
-                         else
 
-                         {
 
-                             _LPMs[message.Module - ModuleName.LP1].OnCarrierIDWrite(message.Data.First());
 
-                         }
 
-                         _status = RState.End;
 
-                     }
 
-                     break;
 
-                 case EfemOperation.Clamp:
 
-                     {
 
-                         _LPMs[message.Module - ModuleName.LP1].OnClamped(_bIsUnloadClamp);
 
-                         _status = RState.End;
 
-                     }
 
-                     break;
 
-                 case EfemOperation.Unclamp:
 
-                     {
 
-                         _LPMs[message.Module - ModuleName.LP1].OnUnclamped();
 
-                         _status = RState.End;
 
-                     }
 
-                     break;
 
-                 case EfemOperation.Grip:
 
-                     {
 
-                         if (_currentMsg.Parameters[1] == "ARM2")
 
-                         {
 
-                             GripStateBlade1 = _currentMsg.Parameters[0];
 
-                         }
 
-                         else
 
-                         {
 
-                             GripStateBlade2 = _currentMsg.Parameters[0];
 
-                         }
 
-                         _status = RState.End;
 
-                     }
 
-                     break;
 
-                 case EfemOperation.Ready:
 
-                     {
 
-                         Singleton<RouteManager>.Instance.EFEM.PostMsg(EfemEntity.MSG.CommReady);
 
-                     }
 
-                     break;
 
-                 case EfemOperation.Lift:
 
-                     {
 
-                         if (_currentMsg.Parameters[1] == "UP")
 
-                         {
 
-                             _LiftIsUp = true;
 
-                             _LiftIsDown = false;
 
-                         }
 
-                         else if (_currentMsg.Parameters[1] == "DOWN")
 
-                         {
 
-                             _LiftIsUp = false;
 
-                             _LiftIsDown = true;
 
-                         }
 
-                         _status = RState.End;
 
-                     }
 
-                     break;
 
-             }
 
-         }
 
-         void SendBack(string data)
 
-         {
 
-             _socket.Write(data + '\r');
 
-         }
 
-     }
 
- }
 
 
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