| 123456789101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960616263646566676869707172737475767778798081828384858687888990919293949596979899100101102103104105106107108109110111112113114115116117118119120121122123124125126127128129130131132133134135136137138139140141142143144145146147148149150151152153154155156157158159160161162163164165166167168169170171 | using Aitex.Core.Common;using Aitex.Core.RT.Log;using Aitex.Core.RT.Routine;using MECF.Framework.Common.Equipment;using MECF.Framework.Common.SubstrateTrackings;using System;using System.Collections.Generic;using PunkHPX8_Core;using PunkHPX8_RT.Devices.EFEM;using Aitex.Core.Util;using MECF.Framework.Common.Routine;using Aitex.Core.RT.SCCore;namespace PunkHPX8_RT.Modules.EFEM{    public class EFEMAlignRoutine : RoutineBase, IRoutine    {        private enum AlignStep        {            WaitIdle,            SetAlignFlatType,            WaitAlignFlatTypeIdle,            SetAngle,            ReWaitIdle,            Rotate,            LastWaitIdle,            VacuumOff,            End        }        private int _moveTimeout = 20 * 1000;        EfemBase _efem;        private double angle = 25;        private WaferSize ws = WaferSize.WS12;        private int _angleOffset = 0;        private int _platType = 0;        public EFEMAlignRoutine(EfemBase efem) : base(ModuleName.Aligner1.ToString())        {            _efem = efem;        }        public RState Start(params object[] objs)        {            if (SC.ContainsItem($"EFEM.AlignerOffsetAngle"))            {                _angleOffset = SC.GetValue<int>($"EFEM.AlignerOffsetAngle");            }            if (objs.Length >= 3)            {                try                {                    angle = Convert.ToDouble(objs[2]) + _angleOffset;                                    }                catch                {                    LOG.Write(eEvent.ERR_EFEM_COMMON_FAILED, Module, $"ALIAN PARAMETER IS ILLEGAL ");                }                           }            if (objs.Length >= 4)            {                _platType=(int)objs[3];            }            if (!CheckPreCondition())            {                return RState.Failed;            }            return Runner.Start(Module,$"PreAligner Start align");        }        /// <summary>        /// 检验前置条件        /// </summary>        /// <returns></returns>        private bool CheckPreCondition()        {            if (!WaferManager.Instance.CheckHasWafer(ModuleName.Aligner1, 0))            {                NotifyError(eEvent.ERR_EFEM_ROBOT, $"Efem PreAligner not have wafer, cannot do the align action",0);                return false;            }            return true;        }        public RState Monitor()        {            Runner.Wait(AlignStep.WaitIdle, WaitEFEMIdle)                .Run(AlignStep.SetAlignFlatType, SetAlignerFlatType, CheckAlignDone, _delay_5s)                .Wait(AlignStep.WaitAlignFlatTypeIdle, WaitEFEMIdle)                .Run(AlignStep.SetAngle, SetAlignAngle, CheckAlignDone, _delay_5s)                .Wait(AlignStep.ReWaitIdle, WaitEFEMIdle)                .Run(AlignStep.Rotate, Align, CheckAlignDone, _moveTimeout)                .Wait(AlignStep.LastWaitIdle, WaitEFEMIdle)                //.Run(AlignStep.VacuumOff,VacuumOff,CheckAlignDone,_delay_5s)                .End( AlignStep.End,            ActionDone,                  0);            return Runner.Status;        }        private bool SetAlignerFlatType()        {            return _efem.SetAlignFlatType(_platType);        }        private bool VacuumOff()         {            return _efem.Vacuum(ModuleName.Aligner1, false);        }        private bool SetAlignAngle()        {            return _efem.SetAlignAngle(ModuleName.Aligner1, angle);        }        private bool Align()        {            return _efem.Align(ModuleName.Aligner1,angle,0,ws);        }        private bool CheckAlignDone()        {            if (_efem.Status == RState.End)            {                return true;            }            else if (_efem.Status == RState.Failed)            {                LOG.Write(eEvent.ERR_EFEM_COMMON_FAILED, Module, $"Efem PreAligner align failed: {_efem.Status}");                return true;            }            return false;        }        private bool ActionDone()        {            return true;        }        private bool WaitEFEMIdle()        {            return Singleton<RouteManager>.Instance.EFEM.RobotStatus == RState.End;        }        public void Abort()        {        }        /// <summary>        /// 重试        /// </summary>        /// <param name="step"></param>        public RState Retry(int step)        {            if (!CheckPreCondition())            {                return RState.Failed;            }            _efem.Reset();            List<Enum> preStepIds = new List<Enum>();            return Runner.Retry(AlignStep.WaitIdle, preStepIds, Module, "Align Retry");        }        /// <summary>        /// 检验前面完成状态        /// </summary>        /// <returns></returns>        public bool CheckCompleteCondition(int index)        {            return true;        }    }}
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