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- using Aitex.Core.RT.Device;
- using Aitex.Core.RT.Log;
- using Aitex.Core.RT.Routine;
- using MECF.Framework.Common.Equipment;
- using MECF.Framework.Common.RecipeCenter;
- using MECF.Framework.Common.Routine;
- using MECF.Framework.Common.Utilities;
- using PunkHPX8_Core;
- using PunkHPX8_RT.Devices.VpwCell;
- using PunkHPX8_RT.Devices.VpwMain;
- using System;
- using System.Collections.Generic;
- using System.Linq;
- using System.Text;
- using System.Threading.Tasks;
- namespace PunkHPX8_RT.Modules.VpwCell
- {
- public class VpwRecipeRoutine : RoutineBase, IRoutine
- {
- private enum RecipeStep
- {
- ChamberUp,
- CloseDrain,
- CheckLoopDO,
- VacuumPrewet,
- WaitVacuumPrewet,
- VentPrewet,
- WaitVentPrewet,
- ExtendClean,
- WaitExtendClean,
- SpinOff,
- WaitSpinOff,
- End
- }
- #region 内部变量
- /// <summary>
- /// recipe
- /// </summary>
- private VpwRecipe _recipe;
- /// <summary>
- /// 设备
- /// </summary>
- private VpwCellDevice _vpwCellDevice;
- /// <summary>
- /// Main设备
- /// </summary>
- private VpwMainDevice _mainDevice;
- /// <summary>
- /// Vacuum prewet routine
- /// </summary>
- private VpwVacuumPrewetRoutine _vacuumPrewetRoutine;
- /// <summary>
- /// Vent Prewet
- /// </summary>
- private VpwVentPrewetRoutine _ventPrewetRoutine;
- /// <summary>
- /// Extend clean
- /// </summary>
- private VpwExtendCleanRoutine _extendCleanRoutine;
- /// <summary>
- /// Spin Off Routine
- /// </summary>
- private VpwSpinOffRoutine _spinOffRoutine;
- #endregion
- /// <summary>
- /// 构造函数
- /// </summary>
- /// <param name="module"></param>
- public VpwRecipeRoutine(string module) : base(module)
- {
- _vacuumPrewetRoutine = new VpwVacuumPrewetRoutine(Module);
- _ventPrewetRoutine = new VpwVentPrewetRoutine(module);
- _extendCleanRoutine = new VpwExtendCleanRoutine(module);
- _spinOffRoutine = new VpwSpinOffRoutine(module);
- }
- /// <summary>
- /// 中止
- /// </summary>
- public void Abort()
- {
- Runner.Stop("Manual stop");
- }
- /// <summary>
- /// 监控
- /// </summary>
- /// <returns></returns>
- public RState Monitor()
- {
- Runner.Run(RecipeStep.ChamberUp, ChamberUp, CheckChamberClosed)
- .Run(RecipeStep.CloseDrain, _vpwCellDevice.DrainValveOff, _delay_1ms)
- .Run(RecipeStep.CheckLoopDO, CheckLoopDO, _delay_1ms)
- .Run(RecipeStep.VacuumPrewet,VacuumPrewet,_delay_1ms)
- .WaitWithStopCondition(RecipeStep.WaitVacuumPrewet, () => CommonFunction.CheckRoutineEndState(_vacuumPrewetRoutine),
- () => { return CheckSubRoutineError(_vacuumPrewetRoutine, _vacuumPrewetRoutine, 1); })
- .Run(RecipeStep.VentPrewet, VentPrewet)
- .WaitWithStopCondition(RecipeStep.WaitVentPrewet, () => CommonFunction.CheckRoutineEndState(_ventPrewetRoutine),
- () => { return CheckSubRoutineError(_ventPrewetRoutine, _ventPrewetRoutine, 2); })
- .Run(RecipeStep.ExtendClean, ExtendClean)
- .WaitWithStopCondition(RecipeStep.WaitExtendClean, () => CommonFunction.CheckRoutineEndState(_extendCleanRoutine),
- () => { return CheckSubRoutineError(_extendCleanRoutine, _extendCleanRoutine, 3); })
- .Run(RecipeStep.SpinOff, SpinOff)
- .WaitWithStopCondition(RecipeStep.WaitSpinOff, () => CommonFunction.CheckRoutineEndState(_spinOffRoutine),
- () => { return CheckSubRoutineError(_spinOffRoutine, _spinOffRoutine, 4); })
- .End(RecipeStep.End, NullFun, _delay_1ms);
- return Runner.Status;
- }
- /// <summary>
- /// chamber up
- /// </summary>
- /// <returns></returns>
- private bool ChamberUp()
- {
- bool result = _mainDevice.ChamberUp();
- if (!result)
- {
- NotifyError(eEvent.ERR_VPW, "chamber up failed", 0);
- }
- return result;
- }
- /// <summary>
- /// 检验Chamber是否关闭
- /// </summary>
- /// <returns></returns>
- private bool CheckChamberClosed()
- {
- bool result= _mainDevice.CommonData.ChamberClosed && !_mainDevice.CommonData.ChamberOpened;
- if (!result)
- {
- NotifyError(eEvent.ERR_VPW, $"Chamber Closed is {_mainDevice.CommonData.ChamberClosed} and opened is {_mainDevice.CommonData.ChamberOpened}",0);
- }
- return result;
- }
- /// <summary>
- /// Check LoopDO数值
- /// </summary>
- /// <returns></returns>
- private bool CheckLoopDO()
- {
- if(_recipe.DiwLoopDoSet == 0)
- {
- return true;
- }
- double loopDoValue = _vpwCellDevice.LoopDOValue;
- bool result = loopDoValue < _recipe.DiwLoopDoSet;
- if (!result)
- {
- NotifyError(eEvent.ERR_VPW, $"LoopDO value {loopDoValue} is less than {_recipe.DiwLoopDoSet}", 0);
- }
- return result;
- }
- /// <summary>
- /// Vacuum Prewet
- /// </summary>
- /// <returns></returns>
- private bool VacuumPrewet()
- {
- bool result = _vacuumPrewetRoutine.Start(_recipe) == RState.Running;
- if (!result)
- {
- NotifyError(eEvent.ERR_VPW, _vacuumPrewetRoutine.ErrorMsg, 1);
- }
- return result;
- }
- /// <summary>
- /// 检验Vacuum Prewet结束状态
- /// </summary>
- /// <returns></returns>
- private bool CheckVacuumPrewetEndStatus()
- {
- bool result = CommonFunction.CheckRoutineEndState(_vacuumPrewetRoutine);
- return result;
- }
- /// <summary>
- /// Vent Prewet
- /// </summary>
- /// <returns></returns>
- private bool VentPrewet()
- {
- return _ventPrewetRoutine.Start(_recipe) == RState.Running;
- }
- /// <summary>
- /// Extend Clean
- /// </summary>
- /// <returns></returns>
- private bool ExtendClean()
- {
- return _extendCleanRoutine.Start(_recipe) == RState.Running;
- }
- /// <summary>
- /// Vacuum Prewet
- /// </summary>
- /// <returns></returns>
- private bool SpinOff()
- {
- return _spinOffRoutine.Start(_recipe) == RState.Running;
- }
- /// <summary>
- /// 检验子routine异常
- /// </summary>
- /// <param name="routine"></param>
- /// <param name="routineBase"></param>
- /// <param name="index"></param>
- /// <returns></returns>
- private bool CheckSubRoutineError(IRoutine routine, RoutineBase routineBase, int index)
- {
- bool result = CommonFunction.CheckRoutineStopState(routine);
- if (result)
- {
- NotifyError(eEvent.ERR_VPW, routineBase.ErrorMsg, index);
- }
- return result;
- }
- /// <summary>
- /// 启动
- /// </summary>
- /// <param name="objs"></param>
- /// <returns></returns>
- public RState Start(params object[] objs)
- {
- _recipe = objs[0] as VpwRecipe;
- _vpwCellDevice = DEVICE.GetDevice<VpwCellDevice>(Module);
- _mainDevice = DEVICE.GetDevice<VpwMainDevice>(ModuleName.VPWMain1.ToString());
- return Runner.Start(Module, "start run recipe");
- }
- /// <summary>
- /// 重试
- /// </summary>
- /// <param name="step"></param>
- public RState Retry(int step)
- {
- if (_recipe == null)
- {
- NotifyError(eEvent.ERR_VPW, "recipe is null", -1);
- return RState.Failed;
- }
- List<Enum> preStepIds = new List<Enum>();
- return Runner.Retry(RecipeStep.ChamberUp, preStepIds, Module, "Run recipe Retry");
- }
- }
- }
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