| 123456789101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960616263646566676869707172737475767778798081828384858687888990919293949596979899100101102103104105106107108109110111112113114115116117118119120121122123124125126127128129130131132133134135136137138139140141142143144145146147148149150151152153154155156157158159160161162163164165166167168169170171172173174175176177178179180181182183184185186187188189190191192193194195196197198199200201202203204205206207208209210211212213214215216217218219220221222223224225226227228229230231232233234235236237238239240241242243244245246247248249250251252253254255256257258259260261262263264265266267268269270271272273274275276277278279280281282283284285286287288289290291292293294295296297298299300301302303304305306307308309310311312313314315316317318319320321322323324325326327328329330331332333334335336337338339340341342343344345346347348349350351352353354355356357358359360361362363364365366367368369370371372373374375376377378379380381382383384385386387388389390391392393394395396397398399400401402403404405406407408409410411412413414415416417418419420421422423424425426427428429430431432433434435436437438439440441442443444445446447448449450451452453454455456457458459460461462463464465466467468469470471472473474475476477478479480481482483484485486487488489490491492493494495496497498499500501502503504505506507508509510511512513514515516517518519520521522523524525526527528529530531532533534535536537538539540541542543544545546547548549550551552553554555556557558559560561562563564565566567568569570571572573574575576577578579580581582583584585586587588589590591592593594595596597598599600601602603604605 | using MECF.Framework.Common.RecipeCenter;using System;using System.Collections.Generic;using System.Linq;using System.Text;using System.Threading.Tasks;using MECF.Framework.Common.Equipment;using MECF.Framework.Common.Schedulers;using Aitex.Core.Common;using MECF.Framework.Common.CommonData;using System.Windows;using Aitex.Core.RT.IOCore;using Aitex.Core.RT.Log;using Aitex.Core.Util;using MECF.Framework.Common.Routine;using PunkHPX8_RT.Modules;using Aitex.Core.RT.Fsm;using MECF.Framework.Common.SubstrateTrackings;using MECF.Framework.Common.ToolLayout;using MECF.Framework.RT.Core.Equipments;using MECF.Framework.Common.ProcessCell;using SecsGem.Core.ItemModel;using PunkHPX8_RT.Modules.Transporter;using PunkHPX8_Core;using Aitex.Core.RT.SCCore;using PunkHPX8_RT.Modules.SRD;using PunkHPX8_RT.Devices.EFEM;using Aitex.Sorter.Common;using PunkHPX8_RT.Modules.Reservoir;using PunkHPX8_RT.Modules.PlatingCell;using PunkHPX8_RT.Modules.VpwMain;using PunkHPX8_RT.Modules.VpwCell;namespace PunkHPX8_RT.Schedulers{    public class SchedulerSequenceManager : Singleton<SchedulerSequenceManager>       {        #region 常量         private const string ENGINEERING = "Engineering";        private const string PRODUCTION = "Production";        private const string TRNPA = "TRNPA";        private const string TRNPB = "TRNPB";        #endregion        /// <summary>        /// 解析Wafer所有调度工序        /// </summary>        /// <param name="sequenceRecipe"></param>        /// <returns></returns>        public List<SchedulerSequence> AnalyWaferAllSchedulerSequence(WaferInfo waferInfo,ModuleName vpw, SequenceRecipe sequenceRecipe)        {            List<SchedulerSequence> schedulerSequences = new List<SchedulerSequence>();            int index = 0;            MoveItem moveItem = new MoveItem((ModuleName)waferInfo.OriginStation, waferInfo.OriginSlot, ModuleName.Aligner1, 0,                 Hand.Blade1,Flip.Upper,Flip.Upper);            SchedulerSequence efemRobotSequence = CreateEfemRobotSequence(moveItem, null, sequenceRecipe.SubstrateSize, ref index);            schedulerSequences.Add(efemRobotSequence);            SchedulerSequence alignerSequence = CreateAlignerSequence(sequenceRecipe,sequenceRecipe.SubstrateSize, ref index);            schedulerSequences.Add(alignerSequence);            MoveItem alignerToMoveItem = new MoveItem(ModuleName.Aligner1, 0, vpw, 0,Hand.Blade1, Flip.Upper, Flip.Upper);            SchedulerSequence alignerRobotSequence = CreateEfemRobotSequence(alignerToMoveItem, null, sequenceRecipe.SubstrateSize, ref index);            schedulerSequences.Add(alignerRobotSequence);            //解析sequence recipe后续的工序            var sequences = AnalyseSequenceRecipeScheduler(sequenceRecipe,false);            if (sequences.Count == 0)            {                return schedulerSequences;            }            SchedulerSequence firstSequence = sequences[0];            if (firstSequence.ModuleType != ModuleType.VPW)            {                return schedulerSequences;            }            firstSequence.SchedulerModule = SchedulerManager.Instance.GetScheduler(vpw);            firstSequence.ModuleName = vpw;            //调整工序后面的索引            foreach (SchedulerSequence item in sequences)            {                item.SequenceIndex = index;                index++;            }            schedulerSequences.AddRange(sequences);            //若经过srd            if (SequenceRecipeManager.Instance.IsContainedSrd(sequenceRecipe))            {                SrdRecipe srdRecipe = SequenceRecipeManager.Instance.GetSrdRecipeBySequenceRecipe(sequenceRecipe);                if (srdRecipe != null)                {                    //从VPW取至SRD                    MoveItem lastToSrdItem = new MoveItem();                    lastToSrdItem.SourceModule = ModuleName.Unknown;                    //A面                    lastToSrdItem.SourceSlot = 0;                    lastToSrdItem.SourceType = ModuleType.VPW;                    lastToSrdItem.DestinationType = ModuleType.SRD;                    lastToSrdItem.SourceSlot = 0;                    lastToSrdItem.DestinationModule = ModuleName.Unknown;                    lastToSrdItem.RobotHand = Hand.Blade1;                    lastToSrdItem.PickRobotFlip = Flip.Upper;                    lastToSrdItem.PlaceRobotFlip = Flip.Upper;                    SchedulerSequence lastToSrdSequence = CreateEfemRobotSequence(lastToSrdItem, null,sequenceRecipe.SubstrateSize, ref index);                    schedulerSequences.Add(lastToSrdSequence);                    SchedulerSequence srdSequence = CreateSRDSequence(srdRecipe,sequenceRecipe.SubstrateSize, ref index);                    schedulerSequences.Add(srdSequence);                    //SRD完成后回至LoadPort                    MoveItem srdToLoadPortItem = new MoveItem();                    srdToLoadPortItem.SourceModule = ModuleName.Unknown;                    srdToLoadPortItem.SourceType = ModuleType.SRD;                    srdToLoadPortItem.SourceSlot = 0;                    srdToLoadPortItem.DestinationType = ModuleType.LoadPort;                    srdToLoadPortItem.DestinationModule = (ModuleName)waferInfo.OriginStation;                    srdToLoadPortItem.DestinationSlot = waferInfo.OriginSlot;                    srdToLoadPortItem.RobotHand = Hand.Blade1;                    lastToSrdItem.PickRobotFlip = Flip.Upper;                    lastToSrdItem.PlaceRobotFlip = Flip.Upper;                    SchedulerSequence srdToLoadPortSequence = CreateEfemRobotSequence(srdToLoadPortItem, null,sequenceRecipe.SubstrateSize, ref index);                    schedulerSequences.Add(srdToLoadPortSequence);                }                else                {                    LOG.WriteBackgroundLog(eEvent.ERR_SEQUENCE, "System", $"{sequenceRecipe.Ppid} srd recipe is invalid");                    return new List<SchedulerSequence>();                }            }            else            {                //若无SRD,直接从VPW转LoadPort                MoveItem srdToLoadPortItem = new MoveItem();                srdToLoadPortItem.SourceModule = ModuleName.Unknown;                srdToLoadPortItem.SourceType = ModuleType.VPW;                srdToLoadPortItem.SourceSlot = 0;                srdToLoadPortItem.DestinationType = ModuleType.LoadPort;                srdToLoadPortItem.DestinationModule = (ModuleName)waferInfo.OriginStation;                srdToLoadPortItem.DestinationSlot = waferInfo.OriginSlot;                srdToLoadPortItem.RobotHand = Hand.Blade1;                srdToLoadPortItem.PickRobotFlip = Flip.Upper;                srdToLoadPortItem.PlaceRobotFlip = Flip.Upper;                SchedulerSequence pufToLoaderSequence = CreateEfemRobotSequence(srdToLoadPortItem, null,sequenceRecipe.SubstrateSize, ref index);                schedulerSequences.Add(pufToLoaderSequence);            }            return schedulerSequences;        }        /// <summary>        /// 解析Dummy Wafer所有调度工序        /// </summary>        /// <param name="sequenceRecipe"></param>        /// <returns></returns>        public List<SchedulerSequence> AnalyDummyWaferAllSchedulerSequence(SequenceRecipe sequenceRecipe, ModuleName vpw, WaferInfo waferInfo)        {            List<SchedulerSequence> schedulerSequences = new List<SchedulerSequence>();            int index = 0;            MoveItem moveItem = new MoveItem((ModuleName)waferInfo.OriginStation, waferInfo.OriginSlot, ModuleName.Aligner1, 0,                Hand.Blade1, Flip.Upper, Flip.Upper);            SchedulerSequence efemRobotSequence = CreateEfemRobotSequence(moveItem, null, sequenceRecipe.SubstrateSize, ref index);            schedulerSequences.Add(efemRobotSequence);            SchedulerSequence alignerSequence = CreateAlignerSequence(sequenceRecipe,sequenceRecipe.SubstrateSize, ref index);            schedulerSequences.Add(alignerSequence);            MoveItem alignerToMoveItem = new MoveItem(ModuleName.Aligner1, 0, vpw, 0, Hand.Blade1, Flip.Upper, Flip.Upper);            SchedulerSequence alignerRobotSequence = CreateEfemRobotSequence(alignerToMoveItem, null, sequenceRecipe.SubstrateSize, ref index);            schedulerSequences.Add(alignerRobotSequence);            //解析sequence recipe后续的工序            var sequences = AnalyseSequenceRecipeScheduler(sequenceRecipe, false);            if (sequences.Count == 0)            {                return schedulerSequences;            }            SchedulerSequence firstSequence = sequences[0];            if (firstSequence.ModuleType != ModuleType.VPW)            {                return schedulerSequences;            }            firstSequence.SchedulerModule = SchedulerManager.Instance.GetScheduler(vpw);            firstSequence.ModuleName = vpw;            //调整工序后面的索引            foreach (SchedulerSequence item in sequences)            {                item.SequenceIndex = index;                index++;            }            schedulerSequences.AddRange(sequences);            SchedulerSequence lastSequence=sequences[sequences.Count - 1];            //若无SRD,直接从VPW转LoadPort            MoveItem srdToLoadPortItem = new MoveItem();            srdToLoadPortItem.SourceModule = ModuleName.Unknown;            srdToLoadPortItem.SourceType = lastSequence.ModuleType;            srdToLoadPortItem.SourceSlot = 0;            srdToLoadPortItem.DestinationType = ModuleType.Dummy;            srdToLoadPortItem.DestinationModule = (ModuleName)waferInfo.OriginStation;            srdToLoadPortItem.DestinationSlot = waferInfo.OriginSlot;            srdToLoadPortItem.RobotHand = Hand.Blade1;            srdToLoadPortItem.PickRobotFlip = Flip.Upper;            srdToLoadPortItem.PlaceRobotFlip = Flip.Upper;            SchedulerSequence toDummySequence = CreateEfemRobotSequence(srdToLoadPortItem, null, sequenceRecipe.SubstrateSize, ref index);            schedulerSequences.Add(toDummySequence);            return schedulerSequences;        }        /// <summary>        /// 分析Sequence recipe对应的调度步骤        /// </summary>        /// <param name="sequenceRecipe"></param>        /// <returns></returns>        private List<SchedulerSequence> AnalyseSequenceRecipeScheduler(SequenceRecipe sequenceRecipe,bool isDummy)        {            List<SchedulerSequence> schedulerSequences= new List<SchedulerSequence>();            List<SchedulerSequence> tmpLst = new List<SchedulerSequence>();            var  processResult = AnalyseLastProcessRecipeIndex(sequenceRecipe.Recipes);            bool isExistSrd = sequenceRecipe.Recipes.FindIndex(O=>O.ToLower().EndsWith("srd.rcp"))!=-1;            int lastIndex = isExistSrd ? sequenceRecipe.Recipes.Count - 2 : sequenceRecipe.Recipes.Count - 1;            for(int i=0;i<sequenceRecipe.Recipes.Count;i++)            {                                string item = sequenceRecipe.Recipes[i];                if(item.ToLower().EndsWith("srd.rcp"))//跳过SRD                {                    continue;                }                SchedulerSequence schedulerSequence = new SchedulerSequence();                schedulerSequence.ModuleName = ModuleName.Unknown;                schedulerSequence.ModuleType=SequenceRecipeManager.Instance.GetModuleType(item);                schedulerSequence.SequenceIndex=i;                schedulerSequence.WaferSize = sequenceRecipe.SubstrateSize;                MECF.Framework.Common.RecipeCenter.RecipeType recipeType =SequenceRecipeManager.Instance.GetRecipeType(item);                schedulerSequence.Recipe = SequenceRecipeManager.Instance.LoadSequenceTypeRecipe(sequenceRecipe.SequenceType,item, recipeType);                schedulerSequence.SequenceType = sequenceRecipe.SequenceType;                schedulerSequence.State = RState.Init;                schedulerSequence.MaterialType = MaterialType.Wafer;                tmpLst.Add(schedulerSequence);                 if (i != lastIndex)                {                    string nextModule = sequenceRecipe.Recipes[i + 1];                    schedulerSequence.NextModuleType = SequenceRecipeManager.Instance.GetModuleType(nextModule);                    MECF.Framework.Common.RecipeCenter.RecipeType nextRecipeType = SequenceRecipeManager.Instance.GetRecipeType(nextModule);                    schedulerSequence.NextRecipe = SequenceRecipeManager.Instance.LoadSequenceTypeRecipe(sequenceRecipe.SequenceType, nextModule, nextRecipeType);                }                schedulerSequence.IsProcessSequece = true;                if(i==processResult.lastIndex)                {                    schedulerSequence.IsLastProcessSequence = true;                }                            }            int index = 0;            for(int i=0;i<tmpLst.Count;i++)            {                tmpLst[i].SequenceIndex = 0;                schedulerSequences.Add(tmpLst[i]);                index++;                if (i < tmpLst.Count - 1)                {                    MoveItem moveItem = new MoveItem();                    moveItem.SourceModule = tmpLst[i].ModuleName;                    moveItem.SourceType = tmpLst[i].ModuleType;                    moveItem.SourceSlot = 0;                    moveItem.DestinationModule = tmpLst[i + 1].ModuleName;                    moveItem.DestinationSlot = 0;                    moveItem.DestinationType = tmpLst[i+1].ModuleType;                    moveItem.RobotHand = Hand.Blade2;                    //源来自于Plating cell,向下取                    if (tmpLst[i].ModuleType == ModuleType.PlatingCell)                    {                        moveItem.PickRobotFlip = Flip.Down;                    }                    else                    {                        moveItem.PickRobotFlip = Flip.Upper;                    }                    //目标来自于Plating cell,向下放                    if (tmpLst[i + 1].ModuleType == ModuleType.PlatingCell)                    {                        moveItem.PlaceRobotFlip = Flip.Down;                    }                    else                    {                        moveItem.PlaceRobotFlip = Flip.Upper;                    }                    SchedulerSequence robotSequence = CreateEfemRobotSequence(moveItem,null,sequenceRecipe.SubstrateSize, ref index);                    schedulerSequences.Add(robotSequence);                }                else                {                    //生产片最后退至VPW中转                    if (!isDummy)                    {                        MoveItem moveItem = new MoveItem();                        moveItem.SourceModule = tmpLst[i].ModuleName;                        moveItem.SourceType = tmpLst[i].ModuleType;                        moveItem.SourceSlot = 0;                        moveItem.DestinationModule = ModuleName.Unknown;                        moveItem.DestinationSlot = 0;                        moveItem.DestinationType = ModuleType.VPW;                        moveItem.RobotHand = Hand.Blade2;                        //源来自于Plating cell,向下取                        if (tmpLst[i].ModuleType == ModuleType.PlatingCell)                        {                            moveItem.PickRobotFlip = Flip.Down;                        }                        else                        {                            moveItem.PickRobotFlip = Flip.Upper;                        }                        moveItem.PlaceRobotFlip = Flip.Upper;                        SchedulerSequence robotSequence = CreateEfemRobotSequence(moveItem, null, sequenceRecipe.SubstrateSize, ref index);                        schedulerSequences.Add(robotSequence);                    }                }            }            return schedulerSequences;        }        /// <summary>        /// 分析最后加工recipe索引        /// </summary>        /// <param name="recipes"></param>        /// <returns></returns>        private (int lastIndex,List<int> processIndexList) AnalyseLastProcessRecipeIndex(List<string> recipes)        {            int index = 0;            List<int> lst = new List<int>();            for(int i=0;i<recipes.Count; i++)            {                string item=recipes[i];                if(item.ToLower().EndsWith("dep.rcp"))                {                    index = i;                    if(lst.Contains(i))                    {                        lst.Add(i);                    }                }            }            if(lst.Count==0)            {                lst.Add(0);            }            return (index,lst);        }        /// <summary>        /// 创建EFEM Robot步骤        /// </summary>        /// <param name="index"></param>        /// <returns></returns>        private SchedulerSequence CreateEfemRobotSequence(MoveItem moveItem,List<SchedulerSyncModuleMessage> synModules,int waferSize,ref int index)        {            SchedulerSequence sequence = new SchedulerSequence();            sequence.SchedulerModule = SchedulerManager.Instance.GetScheduler(ModuleName.EfemRobot);            sequence.SequenceIndex= index;            sequence.ModuleName=ModuleName.EfemRobot;            sequence.State = RState.Init;            sequence.Recipe = null;            sequence.ModuleType=ModuleType.EfemRobot;            sequence.Parameters =moveItem;            sequence.MaterialType = MaterialType.Wafer;            sequence.SynchronousModuleMessages = synModules;            sequence.WaferSize = waferSize;            index++;            return sequence;        }        /// <summary>        /// 创建Aligner步骤         /// </summary>        /// <param name="index"></param>        /// <returns></returns>        private SchedulerSequence CreateAlignerSequence(SequenceRecipe recipe,int waferSize,ref int index)         {            SchedulerSequence sequence = new SchedulerSequence();            sequence.SchedulerModule = SchedulerManager.Instance.GetScheduler(ModuleName.Aligner1);            sequence.SequenceIndex = index;            sequence.ModuleName = ModuleName.Aligner1;            sequence.State = RState.Init;            sequence.Recipe = recipe;            sequence.ModuleType = ModuleType.Aligner;            sequence.Parameters = null;            sequence.MaterialType = MaterialType.Wafer;            sequence.WaferSize = waferSize;            index++;            return sequence;        }        /// <summary>        /// 创建Loader步骤        /// </summary>        /// <param name="index"></param>        /// <returns></returns>        private SchedulerSequence CreateSRDSequence(SrdRecipe recipe,int waferSize,ref int index)        {            SchedulerSequence sequence = new SchedulerSequence();            sequence.SequenceIndex = index;            sequence.State = RState.Init;            sequence.Recipe = recipe;            sequence.ModuleType = ModuleType.SRD;            sequence.MaterialType = MaterialType.Wafer;            sequence.WaferSize= waferSize;            index++;            return sequence;        }        /// <summary>        /// 根据模块类型获取可用模块        /// </summary>        /// <param name="moduleType"></param>        /// <returns></returns>        public ModuleName GetAvaibleModuleCell(string sequenceType,ModuleType moduleType)        {            List<IModuleEntity> entities = Singleton<RouteManager>.Instance.GetModulesByModuleType(moduleType);            List<IModuleEntity> avaibles = new List<IModuleEntity>();            foreach (var item in entities)            {                bool result = CheckAvaibleModule(item,moduleType,sequenceType);                if (result)                {                    avaibles.Add(item);                }            }            return GetMinTimeToReadyModule(avaibles,moduleType);        }        /// <summary>        /// 根据化学液计算时间获取可用PlatingCellCell(参考其他PlatingCell剩余时间)        /// </summary>        /// <param name="chemistry"></param>        /// <returns></returns>        public (ModuleName platingCellModule, ModuleName rinseModule) CalculateAvaiblePlatingCellCellByChemistry(string chemistry, string startRinse, string sequenceType, string waferHolderId,            int waferSize,DateTime startTime, int depRecipeTimeLength, int qdrRecipeTimeLength, bool checkConflict,            SchedulerModulePartTime platingCellPartTime, SchedulerModulePartTime qdrParTime, ref bool isExistEnablePlatingCell)        {            bool isShowLog = SC.GetValue<bool>("Scheduler.IsShowLog");            if (!Enum.TryParse(startRinse, out ModuleName startRinseModule) )            {                startRinse = "";            }            isExistEnablePlatingCell = false;            return (ModuleName.Unknown, ModuleName.Unknown);        }        /// <summary>        /// 检验模块是否可用        /// </summary>        /// <param name="item"></param>        /// <returns></returns>        public bool CheckAvaibleModule(IModuleEntity item,ModuleType moduleType,string sequenceType)        {            if (item.IsDisable)            {                return false;            }            if (!item.IsAuto)            {                return false;            }            if (item.IsError)            {                return false;            }            if (item.IsInit)            {                return false;            }            if (moduleType==ModuleType.PlatingCell)            {                if(item.IsProduction && sequenceType == ENGINEERING)                    return false;                if (item.IsEngineering && sequenceType == PRODUCTION)                    return false;            }            return true;        }        /// <summary>        /// 获取剩余时间最小的模块        /// </summary>        /// <param name="avaibles"></param>        /// <returns></returns>        private ModuleName GetMinTimeToReadyModule(List<IModuleEntity> avaibles,ModuleType moduleType)        {            if (avaibles.Count == 1)            {                return avaibles[0].Module;            }            int timeToReady = int.MaxValue;            IModuleEntity selectedModule = null;            List<IModuleEntity> idleModuleEtities = new List<IModuleEntity>();             foreach (var item in avaibles)            {                if (item.IsIdle)                {                    if(moduleType!=ModuleType.PlatingCell)                    {                        return item.Module;                    }                    idleModuleEtities.Add(item);                }                if (item.TimeToReady < timeToReady&&idleModuleEtities.Count==0)                {                    timeToReady = item.TimeToReady;                    selectedModule = item;                }            }            if (selectedModule != null)            {                return selectedModule.Module;            }            return ModuleName.Unknown;        }        /// <summary>        /// 根据化学液获取可用的PlatingCell集合        /// </summary>        /// <param name="chemistry"></param>        /// <returns></returns>        public List<PlatingCellEntity> GetAvaiblePlatingCellList(string chemistry, string sequenceType, int waferSize, bool isEmpty)        {            List<IModuleEntity> reservoirEntities = Singleton<RouteManager>.Instance.GetModulesByModuleType(ModuleType.Reservoir);            List<string> avaibles = new List<string>();            foreach (IModuleEntity item in reservoirEntities)            {                ReservoirEntity entity = item as ReservoirEntity;                if (entity.Chemistry == chemistry && entity.IsAuto && entity.IsInitialized)                {                    avaibles.Add(entity.Module.ToString());                }            }            List<PlatingCellEntity> metals = new List<PlatingCellEntity>();            foreach (string item in avaibles)            {                ReservoirItem reservoirItem = ReservoirItemManager.Instance.GetReservoirItem(item);                if (reservoirItem == null)                {                    continue;                }                foreach (PlatingCellItem subItem in reservoirItem.PlatingCells)                {                    PlatingCellEntity entity = Singleton<RouteManager>.Instance.GetModule<PlatingCellEntity>(subItem.ModuleName);                    if (!CheckAvaibleModule(entity, ModuleType.PlatingCell, sequenceType))                    {                        continue;                    }                    if (entity.MetalWaferSize != waferSize)                    {                        continue;                    }                    if (!isEmpty || (isEmpty && entity.WaferInfo.IsEmpty))                    {                        metals.Add(entity);                    }                }            }            return metals;        }        /// <summary>        /// 获取可用的VPW集合        /// </summary>        /// <param name="chemistry"></param>        /// <returns></returns>        public List<VpwCellEntity> GetAvaibleVpwList(int waferSize, bool isEmpty)        {            List<IModuleEntity> vpwEtities = Singleton<RouteManager>.Instance.GetModulesByModuleType(ModuleType.VPW);            List<string> avaibles = new List<string>();            List<VpwCellEntity> vpws = new List<VpwCellEntity>();            foreach (IModuleEntity item in vpwEtities)            {                VpwCellEntity entity = (VpwCellEntity)item;                if (!CheckAvaibleModule(entity, ModuleType.VPW, ""))                {                    continue;                }                if (entity.VpwWaferSize != waferSize)                {                    continue;                }                if (!isEmpty || (isEmpty && entity.WaferInfo == null))                {                    vpws.Add(entity);                }            }            return vpws;        }        /// <summary>        /// 检验VPW是否相同尺寸        /// </summary>        /// <returns></returns>        public bool CheckSystemHasTheSameSizeVpw()        {            VpwCellEntity vpwCellEntity1 = Singleton<RouteManager>.Instance.GetModule<VpwCellEntity>(ModuleName.VPW1.ToString());            VpwCellEntity vpwCellEntity2 = Singleton<RouteManager>.Instance.GetModule<VpwCellEntity>(ModuleName.VPW2.ToString());            if (vpwCellEntity1 == null || vpwCellEntity2 == null)            {                return false;            }            if (!vpwCellEntity1.IsAuto || !vpwCellEntity2.IsAuto)            {                return false;            }            if(vpwCellEntity1.IsDisable || vpwCellEntity2.IsDisable)            {                return false;             }            if (vpwCellEntity1.VpwWaferSize != vpwCellEntity2.VpwWaferSize)            {                return false;            }            return true;        }    }}
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