true 1 1 Lumina1ChannelCurrent true 2 1 Lumina1ChannelCurrent true 3 1 Lumina1ChannelCurrent true 4 1 Lumina1ChannelCurrent true 5 1 Lumina1ChannelCurrent true 6 1 Lumina1ChannelCurrent true 7 1 Lumina1ChannelCurrent true 8 1 Lumina1ChannelCurrent true 9 1 Lumina1ChannelCurrent true 10 1 Lumina1ChannelCurrent true 11 1 Lumina1ChannelCurrent true 12 1 Lumina1ChannelCurrent true 13 1 Lumina1ChannelCurrent true 14 1 Lumina2ChannelCurrent true 1 1 Lumina1ChannelCurrent false Eaton5PX true 4 1 SMC true 2 1 STDThornton true 1 FFUType2 true 20 1135 1 Scanning true 14 2219 1 RP1-1 Stratus true 15 2219 2 RP1-2 Stratus true 1 2 TC1-1 Stratus 1 Ni true 300 10 2219 7 Power13-1 Power14-1 LNM3-2 Stratus true 300 11 2029 8 Power15-1 Power16-1 LNM3-3 Stratus 13 2000 340 true Level Level Standard None Peristaltic 2 false None Standard CMMPower1-1 true 300 SRD1 SRD 1 VacuumChuckWithFan true 300 SRD2 SRD 2 VacuumChuckWithFan true SystemFacilities false true false true false true SystemSafety true true 200 Dummy1 Dummy 25 1 true 200 Dummy1 Dummy 25 2