true 1 1 Lumina1ChannelCurrent true 2 1 Lumina1ChannelCurrent true 3 1 Lumina1ChannelCurrent true 4 1 Lumina1ChannelCurrent true 5 1 Lumina1ChannelCurrent true 6 1 Lumina1ChannelCurrent true 7 1 Lumina1ChannelCurrent true 8 1 Lumina1ChannelCurrent true 9 1 Lumina1ChannelCurrent true 10 1 Lumina1ChannelCurrent true 11 1 Lumina1ChannelCurrent true 12 1 Lumina1ChannelCurrent true 13 1 Lumina1ChannelCurrent true 14 1 Lumina2ChannelCurrent true 1 1 Lumina1ChannelCurrent false Eaton5PX true 4 1 SMC true 4 1 STDThornton false 1 2 STDThornton true 1 FFUType2 true 20 1135 1 Scanning true 14 2219 1 Stratus true 15 2219 2 Stratus false 20 1135 1 Scanning LNM3-1 false 21 957 1 HVDHSIndependent false 22 873 2 HVDHSIndependent true 300 SRD1 SRD 1 VacuumChuckWithFan true 300 SRD2 SRD 2 VacuumChuckWithFan true SystemFacilities false true false true false true SystemSafety true true 200 Dummy1 Dummy 25 1 true 200 Dummy1 Dummy 25 2