Beckhoff deg 91 1000000 0.5 1 1 Beckhoff deg 91 1000000 0.5 1 1 Beckhoff deg 1 100000000 0.5 1 1 Beckhoff deg 1 5 0.5 1 1 Beckhoff mm 1000000 25 1.0 Beckhoff mm 1 25 1.0 Beckhoff deg 1 100000000 0.5 1 1 Beckhoff deg 1 100000000 0.5 1 1 Beckhoff deg 1 100000000 0.5 1 1 Beckhoff deg 1 100000000 0.5 1 1