 chenzk
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9ee6d50c0f
1revise robot cycle
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5 órája%!(EXTRA string=óta) |
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chenzk
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514c820d3b
revise vent prewet bug
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1 napja%!(EXTRA string=óta) |
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chenzk
|
9c14dcc4d6
Merge branch 'master' of http://git.jetplasma-oa.com/JetPlasma/PunkHPX8
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1 napja%!(EXTRA string=óta) |
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chenzk
|
f26ddacf34
add robot cycle
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1 napja%!(EXTRA string=óta) |
 chenkui
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a22406bc3a
update EFEM Signal tower
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1 napja%!(EXTRA string=óta) |
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chenkui
|
245d19bd28
add parameter into RobotCycleParameter
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1 napja%!(EXTRA string=óta) |
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chenkui
|
3576d8b86f
add robot cycle parameter
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1 napja%!(EXTRA string=óta) |
|
chenkui
|
1416edfcd3
MoveItem Add Flip;
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2 nap óta |
|
chenzk
|
cbbb2ca756
add dqdr recipe
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2 nap óta |
|
chenkui
|
b5dc4f8d48
add reservoir data
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2 nap óta |
|
chenzk
|
28abb1ea49
add res/dep recipe
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2 nap óta |
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chenkui
|
1a8b939006
add ReservoirData class
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5 nap óta |
|
chenzk
|
53f8d577aa
revise auto open vpw drip valve bug when recipe done
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5 nap óta |
|
chenzk
|
63c62852c4
revise vpw auto open drip valve bug
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6 nap óta |
|
chenzk
|
0ae3f020eb
add facility all
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6 nap óta |
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chenzk
|
d8ddc42656
add safety module all
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1 hete%!(EXTRA string=óta) |
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chenkui
|
87a9223e04
update vpw recipe recipe
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1 hete%!(EXTRA string=óta) |
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chenzk
|
d2a498218c
1revise facility device
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1 hete%!(EXTRA string=óta) |
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chenkui
|
4de27837d1
update safetyData
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1 hete%!(EXTRA string=óta) |
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chenzk
|
df95347b40
add facility I/O releated
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1 hete%!(EXTRA string=óta) |
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chenzk
|
e6876f2e97
revise vpw home routine auto close small/large valve bug
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1 hete%!(EXTRA string=óta) |
|
chenzk
|
579a398b22
1 revise vpw vacuum prewet routine retry bug
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1 hete%!(EXTRA string=óta) |
|
chenzk
|
a6ae9d73ae
revise vpw run recipe bug
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1 hete%!(EXTRA string=óta) |
|
chenzk
|
f30ae293e8
revise vpw cell auto drain valve on
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1 hete%!(EXTRA string=óta) |
|
chenzk
|
9139d8f851
1. revise vpw total flow Monitor
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1 hete%!(EXTRA string=óta) |
|
chenzk
|
5dfc09d488
add safety view and twincat releated
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2 hete%!(EXTRA string=óta) |
|
chenzk
|
b038339c11
revise vpw log error
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2 hete%!(EXTRA string=óta) |
|
chenzk
|
ebc0f3b633
1 add vpw n2 animation
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2 hete%!(EXTRA string=óta) |
|
chenzk
|
ba75504e84
revise safety bug
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2 hete%!(EXTRA string=óta) |
|
chenzk
|
b9c2323854
add vpw run recipe wafer check
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2 hete%!(EXTRA string=óta) |
