 chenkui
|
e66519b753
add EFEM Arm/Flip interlock
|
3 months ago |
 chenzk
|
4807c5bf6d
revise filp/noflip to down/upper
|
3 months ago |
|
chenkui
|
b16bfd18db
update robot cycle add placeRobotFlip parameter
|
3 months ago |
|
chenkui
|
47ff767d1a
update EFEM Place Routine with flip;
|
3 months ago |
|
chenzk
|
0a500c4757
add EFEM platingcell pick/place
|
3 months ago |
|
chenzk
|
9ee6d50c0f
1revise robot cycle
|
3 months ago |
|
chenzk
|
514c820d3b
revise vent prewet bug
|
3 months ago |
|
chenzk
|
9c14dcc4d6
Merge branch 'master' of http://git.jetplasma-oa.com/JetPlasma/PunkHPX8
|
3 months ago |
|
chenzk
|
f26ddacf34
add robot cycle
|
3 months ago |
|
chenkui
|
a22406bc3a
update EFEM Signal tower
|
3 months ago |
|
chenkui
|
245d19bd28
add parameter into RobotCycleParameter
|
3 months ago |
|
chenkui
|
3576d8b86f
add robot cycle parameter
|
3 months ago |
|
chenkui
|
1416edfcd3
MoveItem Add Flip;
|
3 months ago |
|
chenzk
|
cbbb2ca756
add dqdr recipe
|
3 months ago |
|
chenkui
|
b5dc4f8d48
add reservoir data
|
3 months ago |
|
chenzk
|
28abb1ea49
add res/dep recipe
|
3 months ago |
|
chenkui
|
1a8b939006
add ReservoirData class
|
3 months ago |
|
chenzk
|
53f8d577aa
revise auto open vpw drip valve bug when recipe done
|
3 months ago |
|
chenzk
|
63c62852c4
revise vpw auto open drip valve bug
|
3 months ago |
|
chenzk
|
0ae3f020eb
add facility all
|
3 months ago |
|
chenzk
|
d8ddc42656
add safety module all
|
3 months ago |
|
chenkui
|
87a9223e04
update vpw recipe recipe
|
3 months ago |
|
chenzk
|
d2a498218c
1revise facility device
|
3 months ago |
|
chenkui
|
4de27837d1
update safetyData
|
3 months ago |
|
chenzk
|
df95347b40
add facility I/O releated
|
3 months ago |
|
chenzk
|
e6876f2e97
revise vpw home routine auto close small/large valve bug
|
3 months ago |
|
chenzk
|
579a398b22
1 revise vpw vacuum prewet routine retry bug
|
3 months ago |
|
chenzk
|
a6ae9d73ae
revise vpw run recipe bug
|
3 months ago |
|
chenzk
|
f30ae293e8
revise vpw cell auto drain valve on
|
3 months ago |
|
chenzk
|
9139d8f851
1. revise vpw total flow Monitor
|
3 months ago |
