 chenzk
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f75d57cc9d
1 revise run dummy recipe bug
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1 day ago |
 chenkui
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46a2bcdea3
update plating cell vertical post message
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4 days ago |
|
chenkui
|
f4354b9344
update plating cell vertical
|
1 week ago |
|
chenzk
|
14a6f1f2cb
revise platingcell run recipe bug
|
1 week ago |
|
chenzk
|
5ab36c422a
revise platingcell run recipe bug
|
1 week ago |
|
chenzk
|
8988c15c72
revise platingcell run recipe start bug
|
1 week ago |
|
chenzk
|
698880cb75
add platingcell run recipe releated
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1 week ago |
|
chenzk
|
673ea4850b
add platingcell reclaim/rinse/dry routine
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1 week ago |
|
chenzk
|
28830d558c
add platingcell interval rinse/entry/ deposition routine
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1 week ago |
|
chenzk
|
f9327c9289
revise releated view bug
|
1 week ago |
|
chenzk
|
cbdb1fbeef
1 revise vpw recipe
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1 week ago |
|
chenzk
|
c79a314283
add rotation bi-rotaiton
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1 week ago |
|
chenzk
|
c23ae5e67f
1 add platingcell run recipe entry part
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2 weeks ago |
|
chenzk
|
fd895d2038
add interval rinse routine
|
2 weeks ago |
|
chenkui
|
4feb3d9e24
update plating cell run recipe
|
2 weeks ago |
|
chenzk
|
d49038500b
1 add platingcell run recipe pre check
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2 weeks ago |
|
chenzk
|
0f907ac87e
1revise platingcell init routine
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2 weeks ago |
|
chenkui
|
314d538524
add vertical routine into plating cell recipe
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2 weeks ago |
|
chenkui
|
3eca239970
update scheduler
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3 weeks ago |
|
chenkui
|
494e4efb12
update scheduler sequence
|
1 month ago |
