Commit History

Author SHA1 Message Date
  chenzk a6ae9d73ae revise vpw run recipe bug 1 day ago
  chenzk f30ae293e8 revise vpw cell auto drain valve on 2 days ago
  chenzk 9139d8f851 1. revise vpw total flow Monitor 5 days ago
  chenzk 5dfc09d488 add safety view and twincat releated 6 days ago
  chenzk b038339c11 revise vpw log error 6 days ago
  chenzk ebc0f3b633 1 add vpw n2 animation 1 week ago
  chenzk ba75504e84 revise safety bug 1 week ago
  chenzk b9c2323854 add vpw run recipe wafer check 1 week ago
  chenzk 43d7e3448e delete vpw chuckplaceOffset station 1 week ago
  chenzk 7a687fc207 add safety view 1 week ago
  chenkui 443fa4a0dd update safety routine 1 week ago
  chenkui 1193dac6f8 update safety data 1 week ago
  chenzk 0ed2fa049e 1 add vpw auto drip valve on 1 week ago
  chenzk 30b86c960b add vpw rotation interlock 1 week ago
  chenkui 250aa4aede update cell device rotation 1 week ago
  chenzk 04c2ef879c 1revise vpw recipe step view 1 week ago
  chenkui 23d36eb63c update Galil/GalilAxis StopPositionOperation 1 week ago
  chenkui 2fff18b027 update axis stop routine 1 week ago
  chenzk 18d5d1933c revise vpw home routine 1 week ago
  chenkui a6ca057bac add reservoir 1 week ago
  chenzk 34be630592 add chamber up/down check config 1 week ago
  chenkui 58c1d4bc0c upload missing files 1 week ago
  chenkui eea1c94dc9 update vpw motion view 1 week ago
  chenzk 285e938803 1add vpw cell strat/stop rotation 1 week ago
  chenkui 1e3a0c9c46 Merge branch 'master' of http://git.jetplasma-oa.com/JetPlasma/PunkHPX8 2 weeks ago
  chenkui 09f5be5798 update BeckhoffIOManager write aoValue 2 weeks ago
  chenzk 469149c326 1add vpw main create wafer 2 weeks ago
  chenzk 7cf1fd838c add vpw cell waferinfo 2 weeks ago
  chenzk 1919481acd add vpw abort 2 weeks ago
  chenkui 3a7be5771d update VPW recipe issue 2 weeks ago