|  chenzk | 6f0b9879cc
							
							add reservoir1 io and twincat releated | 2 miesięcy temu | 
				
					
						|  chenzk | 301233e909
							
							1 revise lp wafersize io,add wafersize releated | 2 miesięcy temu | 
				
					
						|  chenkui | c48d398268
							
							update cassete place io | 2 miesięcy temu | 
				
					
						|  chenkui | 3811a9b925
							
							update EFEM View | 2 miesięcy temu | 
				
					
						|  chenzk | 0ae3f020eb
							
							add facility all | 3 miesięcy temu | 
				
					
						|  chenzk | d8ddc42656
							
							add safety module all | 3 miesięcy temu | 
				
					
						|  chenzk | d2a498218c
							
							1revise facility device | 3 miesięcy temu | 
				
					
						|  chenkui | 4de27837d1
							
							update safetyData | 3 miesięcy temu | 
				
					
						|  chenzk | df95347b40
							
							add facility I/O releated | 3 miesięcy temu | 
				
					
						|  chenzk | 5dfc09d488
							
							add safety view and twincat releated | 3 miesięcy temu | 
				
					
						|  chenkui | 960a907e5d
							
							update Beckhoffcfg.xml | 4 miesięcy temu | 
				
					
						|  chenkui | 802ecf62cb
							
							add VPWMain Persistent value speed variable; | 4 miesięcy temu | 
				
					
						|  chenkui | 587667fd0f
							
							update VPW MainIO content | 4 miesięcy temu | 
				
					
						|  chenkui | 32f216fca2
							
							add VPWMain/VPW1/VPW2 into Beckhoffcfg.xml; | 4 miesięcy temu | 
				
					
						|  chenkui | 7957a5c8af
							
							Update VPWCell1/VPWCell2 to VPW1/VPW2; | 4 miesięcy temu | 
				
					
						|  chenkui | c2d9da3983
							
							Initialize | 4 miesięcy temu |