chenzk
|
98591f14eb
add dunmmyRinse run recipe
|
4 days ago |
chenzk
|
5ab36c422a
revise platingcell run recipe bug
|
1 week ago |
chenzk
|
28830d558c
add platingcell interval rinse/entry/ deposition routine
|
1 week ago |
chenkui
|
dd048ffe7c
update cell vertical position
|
1 week ago |
chenzk
|
7b4c861e65
revise platingcell vertical set,add platingcell3_4 vertical
|
1 month ago |
chenkui
|
bfd0b53b4a
update VPW Initialize
|
4 months ago |
chenkui
|
1cdd2160ec
update kollmorgen axis
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4 months ago |
chenkui
|
7957a5c8af
Update VPWCell1/VPWCell2 to VPW1/VPW2;
|
4 months ago |
chenkui
|
c2d9da3983
Initialize
|
4 months ago |