 chenzk
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698880cb75
add platingcell run recipe releated
|
il y a 2 semaines |
|
chenzk
|
673ea4850b
add platingcell reclaim/rinse/dry routine
|
il y a 2 semaines |
|
chenzk
|
28830d558c
add platingcell interval rinse/entry/ deposition routine
|
il y a 2 semaines |
|
chenzk
|
f9327c9289
revise releated view bug
|
il y a 2 semaines |
|
chenzk
|
cbdb1fbeef
1 revise vpw recipe
|
il y a 2 semaines |
|
chenzk
|
c79a314283
add rotation bi-rotaiton
|
il y a 2 semaines |
|
chenzk
|
c23ae5e67f
1 add platingcell run recipe entry part
|
il y a 3 semaines |
|
chenzk
|
fd895d2038
add interval rinse routine
|
il y a 3 semaines |
 chenkui
|
4feb3d9e24
update plating cell run recipe
|
il y a 3 semaines |
|
chenzk
|
d49038500b
1 add platingcell run recipe pre check
|
il y a 3 semaines |
|
chenzk
|
0f907ac87e
1revise platingcell init routine
|
il y a 3 semaines |
|
chenkui
|
314d538524
add vertical routine into plating cell recipe
|
il y a 3 semaines |
|
chenkui
|
3eca239970
update scheduler
|
il y a 4 semaines |
|
chenkui
|
494e4efb12
update scheduler sequence
|
il y a 1 mois |
