 chenzk
|
53f8d577aa
revise auto open vpw drip valve bug when recipe done
|
hai 4 días |
|
chenzk
|
63c62852c4
revise vpw auto open drip valve bug
|
hai 5 días |
|
chenzk
|
0ae3f020eb
add facility all
|
hai 5 días |
|
chenzk
|
d8ddc42656
add safety module all
|
hai 6 días |
 chenkui
|
87a9223e04
update vpw recipe recipe
|
hai 1 semana |
|
chenzk
|
d2a498218c
1revise facility device
|
hai 1 semana |
|
chenkui
|
4de27837d1
update safetyData
|
hai 1 semana |
|
chenzk
|
df95347b40
add facility I/O releated
|
hai 1 semana |
|
chenzk
|
e6876f2e97
revise vpw home routine auto close small/large valve bug
|
hai 1 semana |
|
chenzk
|
579a398b22
1 revise vpw vacuum prewet routine retry bug
|
hai 1 semana |
|
chenzk
|
a6ae9d73ae
revise vpw run recipe bug
|
hai 1 semana |
|
chenzk
|
f30ae293e8
revise vpw cell auto drain valve on
|
hai 1 semana |
|
chenzk
|
9139d8f851
1. revise vpw total flow Monitor
|
hai 1 semana |
|
chenzk
|
5dfc09d488
add safety view and twincat releated
|
hai 1 semana |
|
chenzk
|
b038339c11
revise vpw log error
|
hai 1 semana |
|
chenzk
|
ebc0f3b633
1 add vpw n2 animation
|
hai 2 semanas |
|
chenzk
|
ba75504e84
revise safety bug
|
hai 2 semanas |
|
chenzk
|
b9c2323854
add vpw run recipe wafer check
|
hai 2 semanas |
|
chenzk
|
43d7e3448e
delete vpw chuckplaceOffset station
|
hai 2 semanas |
|
chenzk
|
7a687fc207
add safety view
|
hai 2 semanas |
|
chenkui
|
443fa4a0dd
update safety routine
|
hai 2 semanas |
|
chenkui
|
1193dac6f8
update safety data
|
hai 2 semanas |
|
chenzk
|
0ed2fa049e
1 add vpw auto drip valve on
|
hai 2 semanas |
|
chenzk
|
30b86c960b
add vpw rotation interlock
|
hai 2 semanas |
|
chenkui
|
250aa4aede
update cell device rotation
|
hai 2 semanas |
|
chenzk
|
04c2ef879c
1revise vpw recipe step view
|
hai 2 semanas |
|
chenkui
|
23d36eb63c
update Galil/GalilAxis StopPositionOperation
|
hai 2 semanas |
|
chenkui
|
2fff18b027
update axis stop routine
|
hai 2 semanas |
|
chenzk
|
18d5d1933c
revise vpw home routine
|
hai 2 semanas |
|
chenkui
|
a6ca057bac
add reservoir
|
hai 2 semanas |
