 chenkui
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4feb3d9e24
update plating cell run recipe
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2 hete%!(EXTRA string=óta) |
 chenzk
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d49038500b
1 add platingcell run recipe pre check
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2 hete%!(EXTRA string=óta) |
|
chenzk
|
0f907ac87e
1revise platingcell init routine
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2 hete%!(EXTRA string=óta) |
|
chenkui
|
de63db15fc
update vertical position
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2 hete%!(EXTRA string=óta) |
|
chenkui
|
314d538524
add vertical routine into plating cell recipe
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2 hete%!(EXTRA string=óta) |
|
chenkui
|
b11c469645
add Plating cell vertical Module
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2 hete%!(EXTRA string=óta) |
|
chenzk
|
19158728c5
add reservoir/platingcell persistent releated
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2 hete%!(EXTRA string=óta) |
|
chenkui
|
3eca239970
update scheduler
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2 hete%!(EXTRA string=óta) |
|
chenzk
|
0599ba5489
revise vpw releated bug
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2 hete%!(EXTRA string=óta) |
|
chenzk
|
160bb916f7
1revise axis run timeout
|
3 hete%!(EXTRA string=óta) |
|
chenkui
|
d2df24ff44
update VPW Home
|
3 hete%!(EXTRA string=óta) |
|
chenzk
|
b1596be753
add efem/operation view aligner wafer module
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3 hete%!(EXTRA string=óta) |
|
chenkui
|
e0e29761ad
robot scheduler add vpw prepare
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3 hete%!(EXTRA string=óta) |
|
chenzk
|
4917ae0176
add beckhoff
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3 hete%!(EXTRA string=óta) |
|
chenzk
|
39d520ecab
add srd2 beckhoff and safety power status
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4 hete%!(EXTRA string=óta) |
|
chenzk
|
716a44e7ff
revise efem robot view
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4 hete%!(EXTRA string=óta) |
|
chenzk
|
5c2acda55f
add platingcell/vpw wafersize
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4 hete%!(EXTRA string=óta) |
|
chenkui
|
494e4efb12
update scheduler sequence
|
1 hónapja%!(EXTRA string=óta) |
|
chenzk
|
4dd2120614
revise sequence recipe and srd facility check not
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1 hónapja%!(EXTRA string=óta) |
|
chenzk
|
b46edee329
revise efem simulation
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1 hónapja%!(EXTRA string=óta) |
|
chenzk
|
8c714316dc
releated power supply and simulator
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1 hónapja%!(EXTRA string=óta) |
|
chenkui
|
d8a916beb6
start develop scheduler
|
1 hónapja%!(EXTRA string=óta) |
|
chenkui
|
8a6a157a2b
update top view;
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1 hónapja%!(EXTRA string=óta) |
|
chenzk
|
08107a729c
add power manual adjust power grade
|
1 hónapja%!(EXTRA string=óta) |
|
chenzk
|
ed769dc4ec
revise ui menu
|
1 hónapja%!(EXTRA string=óta) |
|
chenzk
|
2106d9df67
add ccr timeremain and step
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1 hónapja%!(EXTRA string=óta) |
|
chenzk
|
cf2e7df7e5
add platingcell ccr
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1 hónapja%!(EXTRA string=óta) |
|
chenzk
|
3f42924935
add platingcell rotation axis reletaed
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1 hónapja%!(EXTRA string=óta) |
|
chenzk
|
90051f8533
add platingcell setup view
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1 hónapja%!(EXTRA string=óta) |
|
chenzk
|
7b4c861e65
revise platingcell vertical set，add platingcell3_4 vertical
|
1 hónapja%!(EXTRA string=óta) |
