 chenzk
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4807c5bf6d
revise filp/noflip to down/upper
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4 weeks ago |
 chenkui
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b16bfd18db
update robot cycle add placeRobotFlip parameter
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4 weeks ago |
|
chenkui
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47ff767d1a
update EFEM Place Routine with flip;
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4 weeks ago |
|
chenzk
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0a500c4757
add EFEM platingcell pick/place
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4 weeks ago |
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chenzk
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9ee6d50c0f
1revise robot cycle
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1 month ago |
|
chenzk
|
514c820d3b
revise vent prewet bug
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1 month ago |
|
chenzk
|
9c14dcc4d6
Merge branch 'master' of http://git.jetplasma-oa.com/JetPlasma/PunkHPX8
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1 month ago |
|
chenzk
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f26ddacf34
add robot cycle
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1 month ago |
|
chenkui
|
a22406bc3a
update EFEM Signal tower
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1 month ago |
|
chenkui
|
245d19bd28
add parameter into RobotCycleParameter
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1 month ago |
|
chenkui
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3576d8b86f
add robot cycle parameter
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1 month ago |
|
chenkui
|
1416edfcd3
MoveItem Add Flip;
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1 month ago |
|
chenzk
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cbbb2ca756
add dqdr recipe
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1 month ago |
|
chenkui
|
b5dc4f8d48
add reservoir data
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1 month ago |
|
chenzk
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28abb1ea49
add res/dep recipe
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1 month ago |
|
chenkui
|
1a8b939006
add ReservoirData class
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1 month ago |
|
chenzk
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53f8d577aa
revise auto open vpw drip valve bug when recipe done
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1 month ago |
|
chenzk
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63c62852c4
revise vpw auto open drip valve bug
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1 month ago |
|
chenzk
|
0ae3f020eb
add facility all
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1 month ago |
|
chenzk
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d8ddc42656
add safety module all
|
1 month ago |
|
chenkui
|
87a9223e04
update vpw recipe recipe
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1 month ago |
|
chenzk
|
d2a498218c
1revise facility device
|
1 month ago |
|
chenkui
|
4de27837d1
update safetyData
|
1 month ago |
|
chenzk
|
df95347b40
add facility I/O releated
|
1 month ago |
|
chenzk
|
e6876f2e97
revise vpw home routine auto close small/large valve bug
|
1 month ago |
|
chenzk
|
579a398b22
1 revise vpw vacuum prewet routine retry bug
|
1 month ago |
|
chenzk
|
a6ae9d73ae
revise vpw run recipe bug
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1 month ago |
|
chenzk
|
f30ae293e8
revise vpw cell auto drain valve on
|
1 month ago |
|
chenzk
|
9139d8f851
1. revise vpw total flow Monitor
|
1 month ago |
|
chenzk
|
5dfc09d488
add safety view and twincat releated
|
1 month ago |
