 chenzk
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160bb916f7
1revise axis run timeout
|
2 days ago |
 chenkui
|
d2df24ff44
update VPW Home
|
2 days ago |
|
chenzk
|
b1596be753
add efem/operation view aligner wafer module
|
3 days ago |
|
chenkui
|
e0e29761ad
robot scheduler add vpw prepare
|
6 days ago |
|
chenzk
|
4917ae0176
add beckhoff
|
6 days ago |
|
chenzk
|
39d520ecab
add srd2 beckhoff and safety power status
|
1 week ago |
|
chenzk
|
716a44e7ff
revise efem robot view
|
1 week ago |
|
chenzk
|
5c2acda55f
add platingcell/vpw wafersize
|
1 week ago |
|
chenkui
|
494e4efb12
update scheduler sequence
|
1 week ago |
|
chenzk
|
4dd2120614
revise sequence recipe and srd facility check not
|
1 week ago |
|
chenzk
|
b46edee329
revise efem simulation
|
1 week ago |
|
chenzk
|
8c714316dc
releated power supply and simulator
|
1 week ago |
|
chenkui
|
d8a916beb6
start develop scheduler
|
1 week ago |
|
chenkui
|
8a6a157a2b
update top view;
|
1 week ago |
|
chenzk
|
08107a729c
add power manual adjust power grade
|
1 week ago |
|
chenzk
|
ed769dc4ec
revise ui menu
|
1 week ago |
|
chenzk
|
2106d9df67
add ccr timeremain and step
|
2 weeks ago |
|
chenzk
|
cf2e7df7e5
add platingcell ccr
|
3 weeks ago |
|
chenzk
|
3f42924935
add platingcell rotation axis reletaed
|
3 weeks ago |
|
chenzk
|
90051f8533
add platingcell setup view
|
3 weeks ago |
|
chenzk
|
7b4c861e65
revise platingcell vertical set，add platingcell3_4 vertical
|
4 weeks ago |
|
chenzk
|
75c78e1d46
revise platingcell ui
|
4 weeks ago |
|
chenzk
|
04c679e231
add platingcell vertical and power releated
|
4 weeks ago |
|
chenzk
|
d47bd2870a
add platingcell initialize releated
|
1 month ago |
|
chenzk
|
c8569fc20e
add platingcell run recipe module
|
1 month ago |
|
chenzk
|
eedd3a61ba
add platingcell ui
|
1 month ago |
|
chenzk
|
b28706ca79
revise res recipe bug
|
1 month ago |
|
chenzk
|
035003f201
add dm reservoir direplen ui releated
|
1 month ago |
|
chenzk
|
ef96c40c46
1 revise reservoir check other module is in direplen logic
|
1 month ago |
|
chenzk
|
ccbdaf69fd
add dm reservoir andireplen
|
1 month ago |
