add vpw run recipe wafer check

PunkHPX8_RT/Modules/VpwCell/VpwManualPrepareRoutine.cs

@@ -147,8 +147,8 @@ namespace PunkHPX8_RT.Modules.VpwCell
         private bool CheckWaferExsit()
         {
             // todo 临时注释，后面需要改回来
-            //return WaferManager.Instance.CheckHasWafer(Module, 0);
-            return true;
+            return WaferManager.Instance.CheckHasWafer(Module, 0);
+            //return true;
         }
         /// <summary>
         /// chamber up