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@@ -68,7 +68,8 @@
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<config default="127.0.0.1:1102" name="IPAddress" nameView="IP Address" description="EFEM IP、端口设置;default 10.0.0.100:1102" max="" min="" paramter="" tag="" unit="" type="String" />
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<config default="127.0.0.1:1102" name="IPAddress" nameView="IP Address" description="EFEM IP、端口设置;default 10.0.0.100:1102" max="" min="" paramter="" tag="" unit="" type="String" />
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<config default="true" name="CheckSideDoorOnEAPMap" nameView="CheckSideDoorOnEAPMap" description="在自动跑货的时候检查侧门是否关闭" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
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<config default="true" name="CheckSideDoorOnEAPMap" nameView="CheckSideDoorOnEAPMap" description="在自动跑货的时候检查侧门是否关闭" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
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<config default="true" name="CheckCassetteDoorOnEAPMap" nameView="CheckCassetteDoorOnEAPMap" description="在自动跑货的时候检查EFEM正门是否关闭" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
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<config default="true" name="CheckCassetteDoorOnEAPMap" nameView="CheckCassetteDoorOnEAPMap" description="在自动跑货的时候检查EFEM正门是否关闭" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
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-
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+ <config default="200" name="Dummy1WaferSize" nameView="Dummy1WaferSize" description="Dummy1WaferSize" max="300" min="0" paramter="" tag="" unit="" type="Integer" visible="true"/>
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+ <config default="200" name="Dummy2WaferSize" nameView="Dummy2WaferSize" description="Dummy2WaferSize" max="300" min="0" paramter="" tag="" unit="" type="Integer" visible="true"/>
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<config default="15" name="DefaultMoveSpeedInPercent" nameView="DefaultMoveSpeed InPercent" description="机械臂初始速度" max="100" min="1" paramter="" tag="" unit="" type="Integer" />
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<config default="15" name="DefaultMoveSpeedInPercent" nameView="DefaultMoveSpeed InPercent" description="机械臂初始速度" max="100" min="1" paramter="" tag="" unit="" type="Integer" />
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<config default="5" name="DefaultHomeSpeedInPercent" nameView="DefaultHomeSpeed InPercent" description="机械臂Home速度" max="100" min="1" paramter="" tag="" unit="" type="Integer" />
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<config default="5" name="DefaultHomeSpeedInPercent" nameView="DefaultHomeSpeed InPercent" description="机械臂Home速度" max="100" min="1" paramter="" tag="" unit="" type="Integer" />
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@@ -92,74 +93,87 @@
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</configs>
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</configs>
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<configs name="LP1" nameView="LP1" visible="false">
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<configs name="LP1" nameView="LP1" visible="false">
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- <config default="50" name="Cassete200Station" nameView="Cassete200Station" description="Wafer 200 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
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- <config default="51" name="Cassete150Station" nameView="Cassete150Station" description="Wafer 150 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
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- <config default="52" name="Cassete100Station" nameView="Cassete100Station" description="Wafer 100 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
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+ <config default="50" name="Cassete200Station_Blade1_Upper" nameView="Cassete200Station_Blade1_Upper" description="Wafer 200 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
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+ <config default="51" name="Cassete150Station_Blade1_Upper" nameView="Cassete150Station_Blade1_Upper" description="Wafer 150 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
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+ <config default="52" name="Cassete100Station_Blade1_Upper" nameView="Cassete100Station_Blade1_Upper" description="Wafer 100 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
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</configs>
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</configs>
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<configs name="LP2" nameView="LP2" visible="false">
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<configs name="LP2" nameView="LP2" visible="false">
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- <config default="53" name="Cassete200Station" nameView="Cassete200Station" description="Wafer 200 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
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- <config default="54" name="Cassete150Station" nameView="Cassete150Station" description="Wafer 150 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
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- <config default="55" name="Cassete100Station" nameView="Cassete100Station" description="Wafer 100 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
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+ <config default="53" name="Cassete200Station_Blade1_Upper" nameView="Cassete200Station_Blade1_Upper" description="Wafer 200 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
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+ <config default="54" name="Cassete150Station_Blade1_Upper" nameView="Cassete150Station_Blade1_Upper" description="Wafer 150 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
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+ <config default="55" name="Cassete100Station_Blade1_Upper" nameView="Cassete100Station_Blade1_Upper" description="Wafer 100 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
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</configs>
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</configs>
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<configs name="LP3" nameView="LP3" visible="false">
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<configs name="LP3" nameView="LP3" visible="false">
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- <config default="56" name="Cassete200Station" nameView="Cassete200Station" description="Wafer 200 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
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- <config default="57" name="Cassete150Station" nameView="Cassete150Station" description="Wafer 150 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
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- <config default="58" name="Cassete100Station" nameView="Cassete100Station" description="Wafer 100 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
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+ <config default="56" name="Cassete200Station_Blade1_Upper" nameView="Cassete200Station_Blade1_Upper" description="Wafer 200 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
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+ <config default="57" name="Cassete150Station_Blade1_Upper" nameView="Cassete150Station_Blade1_Upper" description="Wafer 150 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
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+ <config default="58" name="Cassete100Station_Blade1_Upper" nameView="Cassete100Station_Blade1_Upper" description="Wafer 100 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
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</configs>
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</configs>
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<configs name="Dummy1" nameView="Dummy1" visible="false">
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<configs name="Dummy1" nameView="Dummy1" visible="false">
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- <config default="64" name="Cassete200Station" nameView="Cassete200Station" description="Wafer 200 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
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- <config default="65" name="Cassete150Station" nameView="Cassete150Station" description="Wafer 150 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
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- <config default="66" name="Cassete100Station" nameView="Cassete100Station" description="Wafer 100 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
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+ <config default="1" name="Cassete200Station_Blade1_Upper" nameView="Cassete200Station_Blade1_Upper" description="Wafer 200 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
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+ <config default="65" name="Cassete150Station_Blade1_Upper" nameView="Cassete150Station_Blade1_Upper" description="Wafer 150 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
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+ <config default="66" name="Cassete100Station_Blade1_Upper" nameView="Cassete100Station_Blade1_Upper" description="Wafer 100 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
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</configs>
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</configs>
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<configs name="Dummy2" nameView="Dummy2" visible="false">
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<configs name="Dummy2" nameView="Dummy2" visible="false">
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- <config default="62" name="Cassete200Station" nameView="Cassete200Station" description="Wafer 200 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
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- <config default="63" name="Cassete150Station" nameView="Cassete150Station" description="Wafer 150 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
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- <config default="64" name="Cassete100Station" nameView="Cassete100Station" description="Wafer 100 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
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+ <config default="62" name="Cassete200Station_Blade1_Upper" nameView="Cassete200Station_Blade1_Upper" description="Wafer 200 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
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+ <config default="63" name="Cassete150Station_Blade1_Upper" nameView="Cassete150Station_Blade1_Upper" description="Wafer 150 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
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+ <config default="64" name="Cassete100Station_Blade1_Upper" nameView="Cassete100Station_Blade1_Upper" description="Wafer 100 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
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+ <config default="200" name="WaferSize" nameView="WaferSize" description="DummyWaferSize" max="300" min="0" paramter="" tag="" unit="" type="Integer" visible="true"/>
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</configs>
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</configs>
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<configs name="SRD1" nameView="SRD1" visible="false">
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<configs name="SRD1" nameView="SRD1" visible="false">
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- <config default="6" name="Cassete200Station" nameView="Cassete200Station" description="Wafer 200 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
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- <config default="6" name="Cassete150Station" nameView="Cassete150Station" description="Wafer 150 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
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- <config default="6" name="Cassete100Station" nameView="Cassete100Station" description="Wafer 100 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
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+ <config default="6" name="Cassete200Station_Blade1_Upper" nameView="Cassete200Station_Blade1_Upper" description="Wafer 200 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
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+ <config default="6" name="Cassete150Station_Blade1_Upper" nameView="Cassete150Station_Blade1_Upper" description="Wafer 150 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
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+ <config default="6" name="Cassete100Station_Blade1_Upper" nameView="Cassete100Station_Blade1_Upper" description="Wafer 100 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
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</configs>
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</configs>
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<configs name="SRD2" nameView="SRD2" visible="false">
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<configs name="SRD2" nameView="SRD2" visible="false">
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- <config default="7" name="Cassete200Station" nameView="Cassete200Station" description="Wafer 200 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
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- <config default="7" name="Cassete150Station" nameView="Cassete150Station" description="Wafer 150 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
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- <config default="7" name="Cassete100Station" nameView="Cassete100Station" description="Wafer 100 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
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+ <config default="7" name="Cassete200Station_Blade1_Upper" nameView="Cassete200Station_Blade1_Upper" description="Wafer 200 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
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+ <config default="7" name="Cassete150Station_Blade1_Upper" nameView="Cassete150Station_Blade1_Upper" description="Wafer 150 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
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+ <config default="7" name="Cassete100Station_Blade1_Upper" nameView="Cassete100Station_Blade1_Upper" description="Wafer 100 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
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</configs>
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</configs>
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<configs name="VPW1" nameView="VPW1">
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<configs name="VPW1" nameView="VPW1">
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- <config default="67" name="Cassete200Station" nameView="Cassete200Station" description="Wafer 200 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
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- <config default="68" name="Cassete150Station" nameView="Cassete150Station" description="Wafer 150 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
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- <config default="69" name="Cassete100Station" nameView="Cassete100Station" description="Wafer 100 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
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+ <config default="12" name="Cassete200Station_Blade1_Upper" nameView="Cassete200Station_Blade1_Upper" description="Wafer 200 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
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+ <config default="112" name="Cassete200Station_Blade2_Upper" nameView="Cassete200Station_Blade2_Upper" description="Wafer 200 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
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+ <config default="113" name="Cassete200Station_Blade2_Down" nameView="Cassete200Station_Blade2_Down" description="Wafer 200 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
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+ <config default="168" name="Cassete150Station_Blade1_Upper" nameView="Cassete150Station_Blade1_Upper" description="Wafer 150 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
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+ <config default="169" name="Cassete150Station_Blade2_Upper" nameView="Cassete150Station_Blade2_Upper" description="Wafer 150 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
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+ <config default="170" name="Cassete150Station_Blade2_Down" nameView="Cassete150Station_Blade2_Down" description="Wafer 150 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
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+ <config default="69" name="Cassete100Station_Blade1_Upper" nameView="Cassete100Station_Blade1_Upper" description="Wafer 100 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
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+ <config default="69" name="Cassete100Station_Blade2_Upper" nameView="Cassete100Station_Blade2_Upper" description="Wafer 100 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
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+ <config default="69" name="Cassete100Station_Blade2_Down" nameView="Cassete100Station_Blade2_Down" description="Wafer 100 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
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</configs>
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</configs>
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<configs name="VPW2" nameView="VPW2">
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<configs name="VPW2" nameView="VPW2">
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- <config default="70" name="Cassete200Station" nameView="Cassete200Station" description="Wafer 200 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
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- <config default="71" name="Cassete150Station" nameView="Cassete150Station" description="Wafer 150 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
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- <config default="72" name="Cassete100Station" nameView="Cassete100Station" description="Wafer 100 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
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+ <config default="12" name="Cassete200Station_Blade1_Upper" nameView="Cassete200Station_Blade1_Upper" description="Wafer 200 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
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+ <config default="112" name="Cassete200Station_Blade2_Upper" nameView="Cassete200Station_Blade2_Upper" description="Wafer 200 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
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+ <config default="113" name="Cassete200Station_Blade2_Down" nameView="Cassete200Station_Blade2_Down" description="Wafer 200 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
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+ <config default="168" name="Cassete150Station_Blade1_Upper" nameView="Cassete150Station_Blade1_Upper" description="Wafer 150 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
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+ <config default="169" name="Cassete150Station_Blade2_Upper" nameView="Cassete150Station_Blade2_Upper" description="Wafer 150 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
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+ <config default="170" name="Cassete150Station_Blade2_Down" nameView="Cassete150Station_Blade2_Down" description="Wafer 150 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
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+ <config default="69" name="Cassete100Station_Blade1_Upper" nameView="Cassete100Station_Blade1_Upper" description="Wafer 100 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
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+ <config default="69" name="Cassete100Station_Blade2_Upper" nameView="Cassete100Station_Blade2_Upper" description="Wafer 100 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
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+ <config default="69" name="Cassete100Station_Blade2_Down" nameView="Cassete100Station_Blade2_Down" description="Wafer 100 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
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</configs>
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</configs>
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<configs name="PlatingCell1" nameView="PlatingCell1" >
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<configs name="PlatingCell1" nameView="PlatingCell1" >
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- <config default="73" name="Cassete200Station" nameView="Cassete200Station" description="Wafer 200 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
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- <config default="74" name="Cassete150Station" nameView="Cassete150Station" description="Wafer 150 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
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- <config default="75" name="Cassete100Station" nameView="Cassete100Station" description="Wafer 100 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
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+ <config default="73" name="Cassete200Station_Blade2_Down" nameView="Cassete200Station_Blade2_Down" description="Wafer 200 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
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+ <config default="74" name="Cassete150Station_Blade2_Down" nameView="Cassete150Station_Blade2_Down" description="Wafer 150 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
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+ <config default="75" name="Cassete100Station_Blade2_Down" nameView="Cassete100Station_Blade2_Down" description="Wafer 100 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
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</configs>
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</configs>
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<configs name="PlatingCell2" nameView="PlatingCell2">
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<configs name="PlatingCell2" nameView="PlatingCell2">
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- <config default="76" name="Cassete200Station" nameView="Cassete200Station" description="Wafer 200 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
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- <config default="77" name="Cassete150Station" nameView="Cassete150Station" description="Wafer 150 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
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- <config default="78" name="Cassete100Station" nameView="Cassete100Station" description="Wafer 100 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
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+ <config default="73" name="Cassete200Station_Blade2_Down" nameView="Cassete200Station_Blade2_Down" description="Wafer 200 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
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+ <config default="74" name="Cassete150Station_Blade2_Down" nameView="Cassete150Station_Blade2_Down" description="Wafer 150 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
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+ <config default="75" name="Cassete100Station_Blade2_Down" nameView="Cassete100Station_Blade2_Down" description="Wafer 100 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
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</configs>
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</configs>
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<configs name="PlatingCell3" nameView="PlatingCell3">
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<configs name="PlatingCell3" nameView="PlatingCell3">
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- <config default="79" name="Cassete200Station" nameView="Cassete200Station" description="Wafer 200 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
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- <config default="80" name="Cassete150Station" nameView="Cassete150Station" description="Wafer 150 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
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- <config default="81" name="Cassete100Station" nameView="Cassete100Station" description="Wafer 100 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
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+ <config default="73" name="Cassete200Station_Blade2_Down" nameView="Cassete200Station_Blade2_Down" description="Wafer 200 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
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+ <config default="74" name="Cassete150Station_Blade2_Down" nameView="Cassete150Station_Blade2_Down" description="Wafer 150 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
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+ <config default="75" name="Cassete100Station_Blade2_Down" nameView="Cassete100Station_Blade2_Down" description="Wafer 100 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
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</configs>
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</configs>
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<configs name="PlatingCell4" nameView="PlatingCell4">
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<configs name="PlatingCell4" nameView="PlatingCell4">
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- <config default="82" name="Cassete200Station" nameView="Cassete200Station" description="Wafer 200 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
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- <config default="83" name="Cassete150Station" nameView="Cassete150Station" description="Wafer 150 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
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- <config default="84" name="Cassete100Station" nameView="Cassete100Station" description="Wafer 100 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
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+ <config default="73" name="Cassete200Station_Blade2_Down" nameView="Cassete200Station_Blade2_Down" description="Wafer 200 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
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+ <config default="74" name="Cassete150Station_Blade2_Down" nameView="Cassete150Station_Blade2_Down" description="Wafer 150 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
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+ <config default="75" name="Cassete100Station_Blade2_Down" nameView="Cassete100Station_Blade2_Down" description="Wafer 100 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
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</configs>
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</configs>
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<configs name="Aligner1" nameView="Aligner1">
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<configs name="Aligner1" nameView="Aligner1">
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- <config default="9" name="Cassete200Station" nameView="Cassete200Station" description="Wafer 200 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
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- <config default="9" name="Cassete150Station" nameView="Cassete150Station" description="Wafer 150 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
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- <config default="9" name="Cassete100Station" nameView="Cassete100Station" description="Wafer 150 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
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+ <config default="9" name="Cassete200Station_Blade1_Upper" nameView="Cassete200Station_Blade1_Upper" description="Wafer 200 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
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+ <config default="9" name="Cassete150Station_Blade1_Upper" nameView="Cassete150Station_Blade1_Upper" description="Wafer 150 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
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+ <config default="9" name="Cassete100Station_Blade1_Upper" nameView="Cassete100Station_Blade1_Upper" description="Wafer 150 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
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<config default="86000" name="Aligner200Distance" nameView="Aligner200Distance" description="Wafer 200 aligner distance" max="9999999" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
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<config default="86000" name="Aligner200Distance" nameView="Aligner200Distance" description="Wafer 200 aligner distance" max="9999999" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
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<config default="61000" name="Aligner150Distance" nameView="Aligner150Distance" description="Wafer 150 aligner distance" max="9999999" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
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<config default="61000" name="Aligner150Distance" nameView="Aligner150Distance" description="Wafer 150 aligner distance" max="9999999" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
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<config default="31000" name="Aligner100Distance" nameView="Aligner100Distance" description="Wafer 100 aligner distance" max="9999999" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
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<config default="31000" name="Aligner100Distance" nameView="Aligner100Distance" description="Wafer 100 aligner distance" max="9999999" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
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