{"text_format":"2","workbook":"xlsx","n_sheets":8,"sheets":["log","Scenarios (SMIF)","SVID","DVID","CEID","ECID","ALID","RCMD"],"not_rendered":{"charts":0,"images":0,"macros":0,"external_links":0,"defined_names":0,"comments":0,"pivot_tables":0},"unopened":[],"bounds":{"document_bytes":16777216,"sheet_cells":100000,"run_cost":"one","rows_first":2000,"rows_last":500,"rows_between":2000,"halvings":0,"cell_chars":16384,"cell_head_chars":4096},"cells_cut":0,"cells_raw":0,"read":"whole","date_system":"1900"}

{"sheet":"log","index":0,"n_rows":7,"n_cols":3,"rows_kept":7,"cut":false,"hidden":false,"merged":[]}
[]
["2024.4.11","1.0.1","update Mars200VTM SVID"]
["2024.6.25","1.0.2","updata Mars200 VTM CEID and DVID，SlotMap修改Description"]
["2024.6.28","1.0.3","updata Mars200 VTM CEID and DVID 503 504 link 3110，PortJobWaferStart and End增加link 3110 link Lot ID。"]
["2024.10.22","1.0.4","updata Scenarios"]
["2025.02.26","1.0.5","PMA1.PMA2PMB1,PMB2改为PMA,PMB,PMC,PMD"]
["2025.04.11","1.0.6","CEID修改为by Chamber，SVID区分ABCDEF"]

{"sheet":"Scenarios (SMIF)","index":1,"n_rows":162,"n_cols":6,"rows_kept":162,"cut":false,"hidden":false,"merged":[[79,4,85,4],[140,4,146,4]]}
[]
[]
[]
[null,null,null,"1. Initialize"]
[]
[null,null,null,"HOST","DESCRIPTION","EQP"]
[{"$nulls":4},"S1F13 ----->"]
[{"$nulls":4},"S1F14 <----"]
[null,null,null,"Query status","S1F3  ----->"]
[{"$nulls":4}," S1F4  <----"]
[null,null,null,"Disable event","S2F37 ----->"]
[{"$nulls":4},"S2F38 <----"]
[null,null,null,"Unlink event report","S2F35 ----->"]
[{"$nulls":4},"S2F36 <----"]
[null,null,null,"Undefine event report","S2F33 ----->"]
[{"$nulls":4},"S2F34 <----"]
[null,null,null,"Define event report","S2F33 ----->"]
[{"$nulls":4},"S2F34 <----"]
[null,null,null,"Link event report","S2F35 ----->"]
[{"$nulls":4},"S2F36 <----"]
[null,null,null,"Enable event","S2F37 ----->"]
[{"$nulls":4},"S2F38 <----"]
[null,null,null,"Enable all alarm","S5F3 ----->"]
[{"$nulls":4},"S5F4 <----"]
[null,null,null,"Sync datetime","S2F31 ----->"]
[{"$nulls":4},"S2F32 <----"]
[]
[]
[]
[]
[]
[null,null,null,"2. Event Report"]
[]
[null,null,null,"HOST","DESCRIPTION","EQP"]
[{"$nulls":4},"S6F11<----","Report event with defined vids"]
[{"$nulls":4},"S6F12 ----->"]
[]
[]
[]
[]
[]
[null,null,null,"3. Alarm Report"]
[]
[null,null,null,"HOST","DESCRIPTION","EQP"]
[{"$nulls":4},"S5F1<----","Report alarm message"]
[{"$nulls":4},"S5F2 ----->"]
[]
[]
[]
[]
[]
[]
[null,null,null,"4.1. Production Run（ONE VCE ONE Cassette）"]
[]
[null,null,null,"HOST","DESCRIPTION","EQP"]
[{"$nulls":4},"equipment: is ready，at condition like：\nstatus is auto \nFA is online remote\n"]
[{"$nulls":4},"S6F11 <----","EV:1000 = VCEAL.CassettePresent"]
[{"$nulls":4},"S6F12 ----->"]
[null,null,null,"read carrier ID","S2F49 ----->\n                ReadID"]
[{"$nulls":4},"S2F50 <----"]
[{"$nulls":4},"S6F11 <----","EV:1002 = PortIDRead"]
[{"$nulls":4},"S6F12 ----->"]
[null,null,null,"load smif","S2F49 ----->\n                Load","CassetteCount=1"]
[{"$nulls":4},"S2F50 <----"]
[{"$nulls":4},"S6F11 <----","EV:1008= SLOT_MAP"]
[{"$nulls":4},"S6F12 ----->"]
[{"$nulls":4},"S6F11 <----","EV:1006 = LoadComplete"]
[{"$nulls":4},"S6F12 ----->"]
[]
[null,null,null,"pp select","S2F49 ----->\n                PP-SELECT"]
[{"$nulls":4},"S2F50 <----"]
[]
[{"$nulls":4},"S6F11 <----"]
[{"$nulls":4},"S6F12 ----->"]
[null,null,null,"start","           S2F49 ----->\n                StartJob"]
[{"$nulls":4},"S2F50 <----"]
[{"$nulls":4},"equipment: auto start run recipe"]
[{"$nulls":4},"S6F11 <----"]
[{"$nulls":4},"S6F12 ----->"]
[{"$nulls":4},"…Running"]
[]
[]
[]
[]
[]
[]
[{"$nulls":4},"equipment: Process done."]
[{"$nulls":4},"S6F11 <----","EV:1033 = PortJobWaferEnd"]
[{"$nulls":4},"S6F12 ----->"]
[{"$nulls":4},"S6F11 <----","EV:1027 = PortJobFinished"]
[{"$nulls":4},"S6F12 ----->"]
[null,null,null,"unload smif","S2F49 ----->\n                Unload"]
[{"$nulls":4},"S2F50 <----"]
[{"$nulls":4},"S6F11 <----","EV:1007 = PortUnloadComplete"]
[{"$nulls":4},"S6F12 ----->"]
[]
[]
[{"$nulls":4},"S6F11 <----","EV:1001 = PortCassetteRemoved"]
[{"$nulls":4},"S6F12 ----->"]
{"$rows_empty":8}
[null,null,null,"4.2. Production Run（ONE VCE TWO Cassette）"]
[]
[null,null,null,"HOST","DESCRIPTION","EQP"]
[{"$nulls":4},"equipment: is ready，at condition like：\nstatus is auto \nFA is online remote\n"]
[{"$nulls":4},"S6F11 <----","EV:1000 = VCEAL.CassettePresent"]
[{"$nulls":4},"S6F12 ----->"]
[null,null,null,"read carrier ID","S2F49 ----->\n                ReadID"]
[{"$nulls":4},"S2F50 <----"]
[{"$nulls":4},"S6F11 <----","EV:1002 = PortIDRead"]
[{"$nulls":4},"S6F12 ----->"]
[null,null,null,"load CST","S2F49 ----->\n                Load","CassetteCount=2"]
[{"$nulls":4},"S2F50 <----"]
[{"$nulls":4},"S6F11 <----","EV:1000 = VCEAR.CassettePresent"]
[{"$nulls":4},"S6F12 ----->"]
[null,null,null,"read carrier ID","S2F49 ----->\n                ReadID"]
[{"$nulls":4},"S2F50 <----"]
[null,null,null,"load CST","S2F49 ----->\n                Load","CassetteCount=2"]
[{"$nulls":4},"S2F50 <----"]
[{"$nulls":4},"S6F11 <----","EV:1008= SLOT_MAP"]
[{"$nulls":4},"S6F12 ----->"]
[{"$nulls":4},"S6F11 <----","EV:1006 = LoadComplete"]
[{"$nulls":4},"S6F12 ----->"]
[]
[null,null,null,"pp select","S2F49 ----->\n                PP-SELECT"]
[{"$nulls":4},"S2F50 <----"]
[]
[{"$nulls":4},"S6F11 <----"]
[{"$nulls":4},"S6F12 ----->"]
[null,null,null,"start","           S2F49 ----->\n                StartJob"]
[{"$nulls":4},"S2F50 <----"]
[{"$nulls":4},"equipment: auto start run recipe"]
[{"$nulls":4},"S6F11 <----"]
[{"$nulls":4},"S6F12 ----->"]
[{"$nulls":4},"…Running"]
[]
[]
[]
[]
[]
[]
[{"$nulls":4},"equipment: Process done."]
[{"$nulls":4},"S6F11 <----","EV:1033 = PortJobWaferEnd"]
[{"$nulls":4},"S6F12 ----->"]
[{"$nulls":4},"S6F11 <----","EV:1027 = PortJobFinished"]
[{"$nulls":4},"S6F12 ----->"]
[null,null,null,"unload smif","S2F49 ----->\n                Unload"]
[{"$nulls":4},"S2F50 <----"]
[{"$nulls":4},"S6F11 <----","EV:1007 = PortUnloadComplete"]
[{"$nulls":4},"S6F12 ----->"]
[]
[]
[{"$nulls":4},"S6F11 <----","EV:1001 = PortCassetteRemoved"]
[{"$nulls":4},"S6F12 ----->"]
[{"$nulls":4},"S6F11 <----","EV:1001 = PortCassetteRemoved"]
[{"$nulls":4},"S6F12 ----->"]

{"sheet":"SVID","index":2,"n_rows":274,"n_cols":10,"rows_kept":274,"cut":false,"hidden":false,"merged":[]}
[null,"ID ","Name","Format","Description"]
[null,1,"AlarmsEnabled","List"]
[null,2,"AlarmsSet","List"]
[null,3,"Clock","Ascii"]
[null,4,"ControlState","U4"," 0 = Unknown\n 1 = EquipmentOffline \n 2 = AttemptOnline\n 3 = HostOffline \n 4 = OnlineLocal  \n 5 = OnlineRemote\n"]
[null,5,"EventsEnabled","List"]
[null,6,"PPExecName","Ascii","N/A"]
[null,7,"PreviousProcessState","U1","N/A"]
[null,8,"ProcessState","U1","N/A"]
[null,9,"SpoolCountActual","U4","N/A"]
[null,10,"SpoolCountTotal","U4","N/A"]
[null,11,"SpoolFullTime","Ascii","N/A"]
[null,12,"SpoolStartTime","Ascii","N/A"]
[null,13,"SpoolState","Ascii","N/A"]
[null,14,"SpoolSubstate","Ascii","N/A"]
[null,1101,"EquipmentMode","U4","\n0 = Auto\n1 = Manual\n"]
[null,1102,"EquipmentStatus","U4","0 = Uninit\n1 = Idle\n2 = Running\n3 = Error\n4 = Pause\n"]
[null,1103,"LidOpenState","U4","Close = 0,\nOpen = 1,\nUnknown = 2,\nError = 3,"]
[]
[null,10001,"VCEAL.SlotLoad","Ascii","Slot map of carrier  \n\"0\"= no wafer, \n\"X\"= wafer exist, \n\"C\"= cross wafer \n\"?\"= Not a valid slot\nfrom Slot 1 to 25(leftside Slot 1) \nC.g.))\"X??X?XXXXX,XXXXXXXXXX,XXXXX\""]
[null,10002,"VCEAL.CassettePresent","U4","\n0 = Absent\n1 = Present\n"]
[null,10003,"VCEAL.IsWaferProtrude","U4","\n0 = OK, Not Protrude\n1 = Protrude\n"]
[null,10011,"VCEAR.SlotLoad","Ascii","Slot map of carrier  \n\"0\"= no wafer, \n\"X\"= wafer exist, \n\"C\"= cross wafer \n\"?\"= Not a valid slot\nfrom Slot 1 to 25(leftside Slot 1) \nC.g.))\"X??X?XXXXX,XXXXXXXXXX,XXXXX\""]
[null,10012,"VCEAR.CassettePresent","U4","\n0 = Absent\n1 = Present\n"]
[null,10013,"VCEAR.IsWaferProtrude","U4","\n0 = OK, Not Protrude\n1 = Protrude\n"]
[]
[null,20001,"VCEBL.SlotLoad","Ascii","Slot map of carrier  \n\"0\"= no wafer, \n\"X\"= wafer exist, \n\"C\"= cross wafer \n\"?\"= Not a valid slot\nfrom Slot 1 to 25(leftside Slot 1) \nC.g.))\"X??X?XXXXX,XXXXXXXXXX,XXXXX\""]
[null,20002,"VCEBLCassettePresent","U4","\n0 = Absent\n1 = Present\n"]
[null,20003,"VCEBL.IsWaferProtrude","U4","\n0 = OK, Not Protrude\n1 = Protrude\n"]
[null,20011,"VCEBR.SlotLoad","Ascii","Slot map of carrier  \n\"0\"= no wafer, \n\"X\"= wafer exist, \n\"C\"= cross wafer \n\"?\"= Not a valid slot\nfrom Slot 1 to 25(leftside Slot 1) \nC.g.))\"X??X?XXXXX,XXXXXXXXXX,XXXXX\""]
[null,20012,"VCEBR.CassettePresent","U4","\n0 = Absent\n1 = Present\n"]
[null,20013,"VCEBR.IsWaferProtrude","U4","\n0 = OK, Not Protrude\n1 = Protrude\n"]
[null,null,"PMAB",{"$nulls":4},"PMCD"]
[null,430001,"PMA.SensorATMSwitch.Value","F8",null,null,440001,"PMB.SensorATMSwitch.Value","F8"]
[null,null,"Valve",{"$nulls":4},"Valve"]
[null,430002,"PMA.IoThrottleValvC.ThrottleValvC.TVPosition ","F8",null,null,440002,"PMB.IoThrottleValvC.ThrottleValvC.TVPosition ","F8"]
[null,430003,"PMA.IoThrottleValvC.ThrottleValvC.TVPositionSetPoint ","F8",null,null,440003,"PMB.IoThrottleValvC.ThrottleValvC.TVPositionSetPoint ","F8"]
[null,430004,"PMA.IoThrottleValvC.ThrottleValvC.TVPressure ","F8",null,null,440004,"PMB.IoThrottleValvC.ThrottleValvC.TVPressure ","F8"]
[null,430005,"PMA.IoThrottleValvC.ThrottleValvC.TVPressureSetPoint ","F8",null,null,440005,"PMB.IoThrottleValvC.ThrottleValvC.TVPressureSetPoint ","F8"]
[null,430006,"PMA.IoValvC.ValveN2.SetPoint ","F8",null,null,440006,"PMB.IoValvC.ValveN2.SetPoint ","F8"]
[null,430007,"PMA.IoValvC.ValveFastPumping.SetPoint","F8",null,null,440007,"PMB.IoValvC.ValveFastPumping.SetPoint","F8"]
[null,430008,"PMA.IoValvC.ValveFastPumping.Status","F8",null,null,440008,"PMB.IoValvC.ValveFastPumping.Status","F8"]
[null,430009,"PMA.IoValvC.ValveFastVent.SetPoint","F8",null,null,440009,"PMB.IoValvC.ValveFastVent.SetPoint","F8"]
[null,430010,"PMA.IoValvC.ValveFastVent.Status","F8",null,null,440010,"PMB.IoValvC.ValveFastVent.Status","F8"]
[null,430011,"PMA.IoValvC.ValveProcess.SetPoint","F8",null,null,440011,"PMB.IoValvC.ValveProcess.SetPoint","F8"]
[null,430012,"PMA.IoValvC.ValveProcess.Status","F8",null,null,440012,"PMB.IoValvC.ValveProcess.Status","F8"]
[null,430013,"PMA.IoValvC.ValveProcessGasFinal.SetPoint","F8",null,null,440013,"PMB.IoValvC.ValveProcessGasFinal.SetPoint","F8"]
[null,430014,"PMA.IoValvC.ValveProcessGasFinal.Status","F8",null,null,440014,"PMB.IoValvC.ValveProcessGasFinal.Status","F8"]
[null,430015,"PMA.IoValvC.ValveSoftPumping.SetPoint","F8",null,null,440015,"PMB.IoValvC.ValveSoftPumping.SetPoint","F8"]
[null,430016,"PMA.IoValvC.ValveSoftPumping.Status","F8",null,null,440016,"PMB.IoValvC.ValveSoftPumping.Status","F8"]
[null,430017,"PMA.ChamberPressure","F8",null,null,440017,"PMB.ChamberPressure","F8"]
[null,null,"RF",{"$nulls":4},"RF"]
[null,430018,"PMA.Rf1.PowerSetPoint ","F8",null,null,440018,"PMB.Rf1.PowerSetPoint ","F8"]
[null,430019,"PMA.Rf1.ForwardPower ","F8",null,null,440019,"PMB.Rf1.ForwardPower ","F8"]
[null,430020,"PMA.Rf1.ReflectPower ","F8",null,null,440020,"PMB.Rf1.ReflectPower ","F8"]
[null,430021,"PMA.Rf1OnTimC.Value","F8","Hours",null,440021,"PMB.Rf1OnTimC.Value","F8","Hours"]
[null,430022,"PMA.Rf2.PowerSetPoint ","F8",null,null,440022,"PMB.Rf2.PowerSetPoint ","F8"]
[null,430023,"PMA.Rf2.ForwardPower ","F8",null,null,440023,"PMB.Rf2.ForwardPower ","F8"]
[null,430024,"PMA.Rf2.ReflectPower ","F8",null,null,440024,"PMB.Rf2.ReflectPower ","F8"]
[null,430025,"PMA.Rf2OnTimC.Value","F8","Hours",null,440025,"PMB.Rf2OnTimC.Value","F8","Hours"]
[null,null,"Match",{"$nulls":4},"Match"]
[null,430026,"PMA.match1.C1","F8",null,null,440026,"PMB.match1.C1","F8"]
[null,430027,"PMA.match1.C2","F8",null,null,440027,"PMB.match1.C2","F8"]
[null,430028,"PMA.match1.LoadPosition1","F8",null,null,440028,"PMB.match1.LoadPosition1","F8"]
[null,430029,"PMA.match1.LoadPosition2","F8",null,null,440029,"PMB.match1.LoadPosition2","F8"]
[null,430030,"PMA.match1.TunePosition1","F8",null,null,440030,"PMB.match1.TunePosition1","F8"]
[null,430031,"PMA.match1.TunePosition2","F8",null,null,440031,"PMB.match1.TunePosition2","F8"]
[null,430032,"PMA.match1.VPP","F8",null,null,440032,"PMB.match1.VPP","F8"]
[null,430033,"PMA.match2.C1","F8",null,null,440033,"PMB.match2.C1","F8"]
[null,430034,"PMA.match2.C2","F8",null,null,440034,"PMB.match2.C2","F8"]
[null,430035,"PMA.match2.LoadPosition1","F8",null,null,440035,"PMB.match2.LoadPosition1","F8"]
[null,430036,"PMA.match2.LoadPosition2","F8",null,null,440036,"PMB.match2.LoadPosition2","F8"]
[null,430037,"PMA.match2.TunePosition1","F8",null,null,440037,"PMB.match2.TunePosition1","F8"]
[null,430038,"PMA.match2.TunePosition2","F8",null,null,440038,"PMB.match2.TunePosition2","F8"]
[null,430039,"PMA.match2.VPP","F8",null,null,440039,"PMB.match2.VPP","F8"]
[null,null,"MFC",{"$nulls":4},"MFC"]
[null,430040,"PMA.IoMfB.MfcGas1.FeedBack","F8",null,null,440040,"PMB.IoMfB.MfcGas1.FeedBack","F8"]
[null,430041,"PMA.IoMfB.MfcGas1.SetPoint","F8",null,null,440041,"PMB.IoMfB.MfcGas1.SetPoint","F8"]
[null,430042,"PMA.IoMfB.MfcGas2.FeedBack","F8",null,null,440042,"PMB.IoMfB.MfcGas2.FeedBack","F8"]
[null,430043,"PMA.IoMfB.MfcGas2.SetPoint","F8",null,null,440043,"PMB.IoMfB.MfcGas2.SetPoint","F8"]
[null,430044,"PMA.IoMfB.MfcGas3.FeedBack","F8",null,null,440044,"PMB.IoMfB.MfcGas3.FeedBack","F8"]
[null,430045,"PMA.IoMfB.MfcGas3.SetPoint","F8",null,null,440045,"PMB.IoMfB.MfcGas3.SetPoint","F8"]
[null,430046,"PMA.IoMfB.MfcGas4.FeedBack","F8",null,null,440046,"PMB.IoMfB.MfcGas4.FeedBack","F8"]
[null,430047,"PMA.IoMfB.MfcGas4.SetPoint","F8",null,null,440047,"PMB.IoMfB.MfcGas4.SetPoint","F8"]
[null,430048,"PMA.IoMfB.MfcGas5.FeedBack","F8",null,null,440048,"PMB.IoMfB.MfcGas5.FeedBack","F8"]
[null,430049,"PMA.IoMfB.MfcGas5.SetPoint","F8",null,null,440049,"PMB.IoMfB.MfcGas5.SetPoint","F8"]
[null,430050,"PMA.IoMfB.MfcGas6.FeedBack",null,null,null,440050,"PMB.IoMfB.MfcGas6.FeedBack"]
[null,430051,"PMA.IoMfB.MfcGas6.SetPoint","F8",null,null,440051,"PMB.IoMfB.MfcGas6.SetPoint","F8"]
[null,null,"BiasRF",{"$nulls":4},"BiasRF"]
[null,430052,"PMA.BiasRf1.PowerSetPoint ","F8",null,null,440052,"PMB.BiasRf1.PowerSetPoint ","F8"]
[null,430053,"PMA.BiasRf1.ForwardPower ","F8",null,null,440053,"PMB.BiasRf1.ForwardPower ","F8"]
[null,430054,"PMA.BiasRf1.ReflectPower ","F8",null,null,440054,"PMB.BiasRf1.ReflectPower ","F8"]
[null,430055,"PMA.BiasRf1OnTimC.Value","F8","Hours",null,440055,"PMB.BiasRf1OnTimC.Value","F8","Hours"]
[null,430056,"PMA.BiasRf2.PowerSetPoint ","F8",null,null,440056,"PMB.BiasRf2.PowerSetPoint ","F8"]
[null,430057,"PMA.BiasRf2.ForwardPower ","F8",null,null,440057,"PMB.BiasRf2.ForwardPower ","F8"]
[null,430058,"PMA.BiasRf2.ReflectPower ","F8",null,null,440058,"PMB.BiasRf2.ReflectPower ","F8"]
[null,430059,"PMA.BiasRf2OnTimC.Value","F8","Hours",null,440059,"PMB.BiasRf2OnTimC.Value","F8","Hours"]
[null,null,"BiasMatch",{"$nulls":4},"BiasMatch"]
[null,430060,"PMA.BiasRfMatch1.C1","F8",null,null,440060,"PMB.BiasRfMatch1.C1","F8"]
[null,430061,"PMA.BiasRfMatch1.C2","F8",null,null,440061,"PMB.BiasRfMatch1.C2","F8"]
[null,430062,"PMA.BiasRfMatch1.LoadPosition1","F8",null,null,440062,"PMB.BiasRfMatch1.LoadPosition1","F8"]
[null,430063,"PMA.BiasRfMatch1.LoadPosition2","F8",null,null,440063,"PMB.BiasRfMatch1.LoadPosition2","F8"]
[null,430064,"PMA.BiasRfMatch1.TunePosition1","F8",null,null,440064,"PMB.BiasRfMatch1.TunePosition1","F8"]
[null,430065,"PMA.BiasRfMatch1.TunePosition2","F8",null,null,440065,"PMB.BiasRfMatch1.TunePosition2","F8"]
[null,430066,"PMA.BiasRfMatch1.VPP","F8",null,null,440066,"PMB.BiasRfMatch1.VPP","F8"]
[null,430067,"PMA.BiasRfMatch2.C1","F8",null,null,440067,"PMB.BiasRfMatch2.C1","F8"]
[null,430068,"PMA.BiasRfMatch2.C2","F8",null,null,440068,"PMB.BiasRfMatch2.C2","F8"]
[null,430069,"PMA.BiasRfMatch2.LoadPosition1","F8",null,null,440069,"PMB.BiasRfMatch2.LoadPosition1","F8"]
[null,430070,"PMA.BiasRfMatch2.LoadPosition2","F8",null,null,440070,"PMB.BiasRfMatch2.LoadPosition2","F8"]
[null,430071,"PMA.BiasRfMatch2.TunePosition1","F8",null,null,440071,"PMB.BiasRfMatch2.TunePosition1","F8"]
[null,430072,"PMA.BiasRfMatch2.TunePosition2","F8",null,null,440072,"PMB.BiasRfMatch2.TunePosition2","F8"]
[null,430073,"PMA.BiasRfMatch2.VPP","F8",null,null,440073,"PMB.BiasRfMatch2.VPP","F8"]
[null,null,"chiller",{"$nulls":4},"chiller"]
[null,430074,"PMA.Chiller1.ControlTcFeedback","F8",null,null,440074,"PMB.Chiller1.ControlTcFeedback","F8"]
[null,430075,"PMA.Chiller1.ControlTcSetPoint","F8",null,null,440075,"PMB.Chiller1.ControlTcSetPoint","F8"]
[null,430076,"PMA.Chiller1.CoolantInletTempFeedback","F8",null,null,440076,"PMB.Chiller1.CoolantInletTempFeedback","F8"]
[null,430077,"PMA.Chiller1.CoolantOutletTempFeedback","F8",null,null,440077,"PMB.Chiller1.CoolantOutletTempFeedback","F8"]
[null,430078,"PMA.Chiller1.Temperature","F8",null,null,440078,"PMB.Chiller1.Temperature","F8"]
[null,430079,"PMA.Chiller2.ControlTcFeedback","F8",null,null,440079,"PMB.Chiller2.ControlTcFeedback","F8"]
[null,430080,"PMA.Chiller2.ControlTcSetPoint","F8",null,null,440080,"PMB.Chiller2.ControlTcSetPoint","F8"]
[null,430081,"PMA.Chiller2.CoolantInletTempFeedback","F8",null,null,440081,"PMB.Chiller2.CoolantInletTempFeedback","F8"]
[null,430082,"PMA.Chiller2.CoolantOutletTempFeedback","F8",null,null,440082,"PMB.Chiller2.CoolantOutletTempFeedback","F8"]
[null,430083,"PMA.Chiller2.Temperature","F8",null,null,440083,"PMB.Chiller2.Temperature","F8"]
[null,null,"HeaterChember",{"$nulls":4},"HeaterChember"]
[null,430084,"PMA.HeaterChamber1.Temperature","F8",null,null,440084,"PMB.HeaterChamber1.Temperature","F8"]
[null,430085,"PMA.HeaterChamber2.Temperature","F8",null,null,440085,"PMB.HeaterChamber2.Temperature","F8"]
[null,430086,"PMA.IoHeater.HeaterChamber1.ControlTcFeedback","F8",null,null,440086,"PMB.IoHeater.HeaterChamber1.ControlTcFeedback","F8"]
[null,430087,"PMA.IoHeater.HeaterChamber1.ControlTcSetPoint","F8",null,null,440087,"PMB.IoHeater.HeaterChamber1.ControlTcSetPoint","F8"]
[null,430088,"PMA.IoHeater.HeaterChamber2.MonitorTcFeedback","F8",null,null,440088,"PMB.IoHeater.HeaterChamber2.MonitorTcFeedback","F8"]
[null,430089,"PMA.IoHeater.HeaterChamber2.ControlTcSetPoint","F8",null,null,440089,"PMB.IoHeater.HeaterChamber2.ControlTcSetPoint","F8"]
[null,430090,"PMA.IoTemperatureCtrl.TemperatureControl.Chamber1Temperature","F8",null,null,440090,"PMB.IoTemperatureCtrl.TemperatureControl.Chamber1Temperature","F8"]
[null,430091,"PMA.IoTemperatureCtrl.TemperatureControl.Chamber2Temperature","F8",null,null,440091,"PMB.IoTemperatureCtrl.TemperatureControl.Chamber2Temperature","F8"]
[null,430092,"PMA.IoHeater.ForelineHeater.ControlTcFeedback","F8",null,null,440092,"PMB.IoHeater.ForelineHeater.ControlTcFeedback","F8"]
[null,430093,"PMA.IoHeater.ForelineHeater.ControlTcSetPoint","F8",null,null,440093,"PMB.IoHeater.ForelineHeater.ControlTcSetPoint","F8"]
[null,430094,"PMA.IoHeater.ForelineHeater.MonitorTcFeedback","F8",null,null,440094,"PMB.IoHeater.ForelineHeater.MonitorTcFeedback","F8"]
[]
[null,430095,"PMA.Rf1.PulsingDutyCycle","F8",null,null,440095,"PMB.Rf1.PulsingDutyCycle","F8"]
[null,430096,"PMA.Rf1.PulsingFrequency","F8",null,null,440096,"PMB.Rf1.PulsingFrequency","F8"]
[null,430097,"PMA.BiasRf1.PulsingDutyCycle","F8",null,null,440097,"PMB.BiasRf1.PulsingDutyCycle","F8"]
[null,430098,"PMA.BiasRf1.PulsingFrequency","F8",null,null,440098,"PMB.BiasRf1.PulsingFrequency","F8"]
[null,430099,"PMA.StepNo","U4",null,null,440099,"PMB.StepNo","U4"]
[null,430100,"PMA.ProcessTime1.Value","F8",null,null,440100,"PMB.ProcessTime1.Value","F8"]
[null,430101,"PMA.ProcessTime2.Value","F8",null,null,440101,"PMB.ProcessTime2.Value","F8"]
[null,430102,"PMA.RecipeSteps","F8",null,null,440102,"PMB.RecipeSteps","F8"]
[null,430103,"PMA.ProcessedWaferCount1.Value","U4",null,null,440103,"PMB.ProcessedWaferCount1.Value","U4"]
[null,430104,"PMA.ProcessedWaferCount2.Value","U4",null,null,440104,"PMB.ProcessedWaferCount2.Value","U4"]
[null,430105,"PMA.PumpOnTime","F8","Hours",null,440105,"PMB.PumpOnTime","F8","Hours"]
[null,430106,"PMA.ForelineGaugC.Value","F8",null,null,440106,"PMB.ForelineGaugC.Value","F8"]
[null,430107,"PMA.Rf2.PulsingDutyCycle","F8",null,null,440107,"PMB.Rf2.PulsingDutyCycle","F8"]
[null,430108,"PMA.Rf2.PulsingFrequency","F8",null,null,440108,"PMB.Rf2.PulsingFrequency","F8"]
[null,430109,"PMA.BiasRf2.PulsingDutyCycle","F8",null,null,440109,"PMB.BiasRf2.PulsingDutyCycle","F8"]
[null,430110,"PMA.BiasRf2.PulsingFrequency","F8",null,null,440110,"PMB.BiasRf2.PulsingFrequency","F8"]
[]
[]
[null,null,"PMEF"]
[null,450001,"PMC.SensorATMSwitch.Value","F8"]
[null,null,"Valve"]
[null,450002,"PMC.IoThrottleValvC.ThrottleValvC.TVPosition ","F8"]
[null,450003,"PMC.IoThrottleValvC.ThrottleValvC.TVPositionSetPoint ","F8"]
[null,450004,"PMC.IoThrottleValvC.ThrottleValvC.TVPressure ","F8"]
[null,450005,"PMC.IoThrottleValvC.ThrottleValvC.TVPressureSetPoint ","F8"]
[null,450006,"PMC.IoValvC.ValveN2.SetPoint ","F8"]
[null,450007,"PMC.IoValvC.ValveFastPumping.SetPoint","F8"]
[null,450008,"PMC.IoValvC.ValveFastPumping.Status","F8"]
[null,450009,"PMC.IoValvC.ValveFastVent.SetPoint","F8"]
[null,450010,"PMC.IoValvC.ValveFastVent.Status","F8"]
[null,450011,"PMC.IoValvC.ValveProcess.SetPoint","F8"]
[null,450012,"PMC.IoValvC.ValveProcess.Status","F8"]
[null,450013,"PMC.IoValvC.ValveProcessGasFinal.SetPoint","F8"]
[null,450014,"PMC.IoValvC.ValveProcessGasFinal.Status","F8"]
[null,450015,"PMC.IoValvC.ValveSoftPumping.SetPoint","F8"]
[null,450016,"PMC.IoValvC.ValveSoftPumping.Status","F8"]
[null,450017,"PMC.ChamberPressure","F8"]
[null,null,"RF"]
[null,450018,"PMC.Rf1.PowerSetPoint ","F8"]
[null,450019,"PMC.Rf1.ForwardPower ","F8"]
[null,450020,"PMC.Rf1.ReflectPower ","F8"]
[null,450021,"PMC.Rf1OnTimC.Value","F8","Hours"]
[null,450022,"PMC.Rf2.PowerSetPoint ","F8"]
[null,450023,"PMC.Rf2.ForwardPower ","F8"]
[null,450024,"PMC.Rf2.ReflectPower ","F8"]
[null,450025,"PMC.Rf2OnTimC.Value","F8","Hours"]
[null,null,"Match"]
[null,450026,"PMC.match1.C1","F8"]
[null,450027,"PMC.match1.C2","F8"]
[null,450028,"PMC.match1.LoadPosition1","F8"]
[null,450029,"PMC.match1.LoadPosition2","F8"]
[null,450030,"PMC.match1.TunePosition1","F8"]
[null,450031,"PMC.match1.TunePosition2","F8"]
[null,450032,"PMC.match1.VPP","F8"]
[null,450033,"PMC.match2.C1","F8"]
[null,450034,"PMC.match2.C2","F8"]
[null,450035,"PMC.match2.LoadPosition1","F8"]
[null,450036,"PMC.match2.LoadPosition2","F8"]
[null,450037,"PMC.match2.TunePosition1","F8"]
[null,450038,"PMC.match2.TunePosition2","F8"]
[null,450039,"PMC.match2.VPP","F8"]
[null,null,"MFC"]
[null,450040,"PMC.IoMfB.MfcGas1.FeedBack","F8"]
[null,450041,"PMC.IoMfB.MfcGas1.SetPoint","F8"]
[null,450042,"PMC.IoMfB.MfcGas2.FeedBack","F8"]
[null,450043,"PMC.IoMfB.MfcGas2.SetPoint","F8"]
[null,450044,"PMC.IoMfB.MfcGas3.FeedBack","F8"]
[null,450045,"PMC.IoMfB.MfcGas3.SetPoint","F8"]
[null,450046,"PMC.IoMfB.MfcGas4.FeedBack","F8"]
[null,450047,"PMC.IoMfB.MfcGas4.SetPoint","F8"]
[null,450048,"PMC.IoMfB.MfcGas5.FeedBack","F8"]
[null,450049,"PMC.IoMfB.MfcGas5.SetPoint","F8"]
[null,450050,"PMC.IoMfB.MfcGas6.FeedBack"]
[null,450051,"PMC.IoMfB.MfcGas6.SetPoint","F8"]
[null,null,"BiasRF"]
[null,450052,"PMC.BiasRf1.PowerSetPoint ","F8"]
[null,450053,"PMC.BiasRf1.ForwardPower ","F8"]
[null,450054,"PMC.BiasRf1.ReflectPower ","F8"]
[null,450055,"PMC.BiasRf1OnTimC.Value","F8","Hours"]
[null,450056,"PMC.BiasRf2.PowerSetPoint ","F8"]
[null,450057,"PMC.BiasRf2.ForwardPower ","F8"]
[null,450058,"PMC.BiasRf2.ReflectPower ","F8"]
[null,450059,"PMC.BiasRf2OnTimC.Value","F8","Hours"]
[null,null,"BiasMatch"]
[null,450060,"PMC.BiasRfMatch1.C1","F8"]
[null,450061,"PMC.BiasRfMatch1.C2","F8"]
[null,450062,"PMC.BiasRfMatch1.LoadPosition1","F8"]
[null,450063,"PMC.BiasRfMatch1.LoadPosition2","F8"]
[null,450064,"PMC.BiasRfMatch1.TunePosition1","F8"]
[null,450065,"PMC.BiasRfMatch1.TunePosition2","F8"]
[null,450066,"PMC.BiasRfMatch1.VPP","F8"]
[null,450067,"PMC.BiasRfMatch2.C1","F8"]
[null,450068,"PMC.BiasRfMatch2.C2","F8"]
[null,450069,"PMC.BiasRfMatch2.LoadPosition1","F8"]
[null,450070,"PMC.BiasRfMatch2.LoadPosition2","F8"]
[null,450071,"PMC.BiasRfMatch2.TunePosition1","F8"]
[null,450072,"PMC.BiasRfMatch2.TunePosition2","F8"]
[null,450073,"PMC.BiasRfMatch2.VPP","F8"]
[null,null,"chiller"]
[null,450074,"PMC.Chiller1.ControlTcFeedback","F8"]
[null,450075,"PMC.Chiller1.ControlTcSetPoint","F8"]
[null,450076,"PMC.Chiller1.CoolantInletTempFeedback","F8"]
[null,450077,"PMC.Chiller1.CoolantOutletTempFeedback","F8"]
[null,450078,"PMC.Chiller1.Temperature","F8"]
[null,450079,"PMC.Chiller2.ControlTcFeedback","F8"]
[null,450080,"PMC.Chiller2.ControlTcSetPoint","F8"]
[null,450081,"PMC.Chiller2.CoolantInletTempFeedback","F8"]
[null,450082,"PMC.Chiller2.CoolantOutletTempFeedback","F8"]
[null,450083,"PMC.Chiller2.Temperature","F8"]
[null,null,"HeaterChember"]
[null,450084,"PMC.HeaterChamber1.Temperature","F8"]
[null,450085,"PMC.HeaterChamber2.Temperature","F8"]
[null,450086,"PMC.IoHeater.HeaterChamber1.ControlTcFeedback","F8"]
[null,450087,"PMC.IoHeater.HeaterChamber1.ControlTcSetPoint","F8"]
[null,450088,"PMC.IoHeater.HeaterChamber2.MonitorTcFeedback","F8"]
[null,450089,"PMC.IoHeater.HeaterChamber2.ControlTcSetPoint","F8"]
[null,450090,"PMC.IoTemperatureCtrl.TemperatureControl.Chamber1Temperature","F8"]
[null,450091,"PMC.IoTemperatureCtrl.TemperatureControl.Chamber2Temperature","F8"]
[null,450092,"PMC.IoHeater.ForelineHeater.ControlTcFeedback","F8"]
[null,450093,"PMC.IoHeater.ForelineHeater.ControlTcSetPoint","F8"]
[null,450094,"PMC.IoHeater.ForelineHeater.MonitorTcFeedback","F8"]
[]
[null,450095,"PMC.Rf1.PulsingDutyCycle","F8"]
[null,450096,"PMC.Rf1.PulsingFrequency","F8"]
[null,450097,"PMC.BiasRf1.PulsingDutyCycle","F8"]
[null,450098,"PMC.BiasRf1.PulsingFrequency","F8"]
[null,450099,"PMC.StepNo","U4"]
[null,450100,"PMC.ProcessTime1.Value","F8"]
[null,450101,"PMC.ProcessTime2.Value","F8"]
[null,450102,"PMC.RecipeSteps","F8"]
[null,450103,"PMC.ProcessedWaferCount1.Value","U4"]
[null,450104,"PMC.ProcessedWaferCount2.Value","U4"]
[null,450105,"PMC.PumpOnTime","F8","Hours"]
[null,450106,"PMC.ForelineGaugC.Value","F8"]
[null,450107,"PMC.Rf2.PulsingDutyCycle","F8"]
[null,450108,"PMC.Rf2.PulsingFrequency","F8"]
[null,450109,"PMC.BiasRf2.PulsingDutyCycle","F8"]
[null,450110,"PMC.BiasRf2.PulsingFrequency","F8"]

{"sheet":"DVID","index":3,"n_rows":20,"n_cols":4,"rows_kept":20,"cut":false,"hidden":false,"merged":[]}
["DVID","Name","Format","Description"]
["3","Clock","Ascii"]
["4","ControlState","Ascii"]
["3007","ECChangedID","I4","process recipe name\n"]
["3102","LotID","Ascii"]
["3103","RecipeID","Ascii","process recipe name\n"]
["3104","JobID","Ascii"]
["3105","CarrierID","Ascii"]
["3106","SlotMap","Ascii","Slot map of carrier  \n\"0\"= No Substrate present in this slot, \n\"X\"=Substrate is Present in this slot, \n\"C\"=Cross Slotted Substrate,\n\"?\"= Double wafer                                  \nfrom Slot 1 to 25(leftside Slot 1) \ne.g.)\"X??X?XXXXX,XXXXXXXXXX,XXXXX\"\n"]
["3107","SequenceID","Ascii","route recipe name, sequence"]
["3108","StationName","Ascii","VCEAL,VCEAR,\nVCEBL,VCEBR\nCoolingBuffer1\nCoolingBuffer2\nPMA,PMB\nPMC,PMD\nPME,PMF,                                                      TMRobot"]
["3109","RecipeStepNumber","Ascii","1 based process recipe step number\n"]
["3110","SlotID","Ascii","1 based slot number, 1....25"]
["3113","PortID","I4","1 based LoadPort Number\nVCEAL=1, VCEAR=2,VCEBL=3,VCEBR=4,,,,"]
["3124","ProcessedWaferCount","I4","Port total processed wafer count， total wafer"]
["3125","WaferProcessResult","I4","Wafer Process Result. \n0=Failed\n1=Successful"]
["3404","SubstID","Ascii","Identifier of substrate associated with last event."]
["3405","SubstLocID","Ascii","Identifier for equipment substrate location associated with the last event."]
["3406","SubstLocState","I4","State of substrate location associated with the last event.\n0=UNOCCUPIED\n1=OCCUPIED"]
["3503","SmartTag","Ascii","TagData"]

{"sheet":"CEID","index":4,"n_rows":37,"n_cols":4,"rows_kept":37,"cut":false,"hidden":false,"merged":[]}
["CEID","Name","LinkableVID","Description"]
["1","EquipmentOFFLINE","Clock = 3 \nControlState = 4","EquipmentOFFLINE"]
["2","ControlStateLOCAL","Clock = 3 \nControlState = 4","ControlStateLOCAL"]
["3","ControlStateREMOTE","Clock = 3 \nControlState = 4","ControlStateREMOTE"]
["8","EquipmentConstantChanged","ECChangedID = 3007","EquipmentConstantChanged"]
["160","SpoolingActivated","","SpoolingActivated"]
["161","SpoolingDeactivated","","SpoolingDeactivated"]
["162","SpoolingFailed","","SpoolingFailed"]
["503","WaferLeftPosition","SubstID = 3404 \nSubstLocID = 3405 \nSubstLocState = 3406 SlotID=3110\nClock = 3","WaferLeftPosition"]
["504","WaferArrivePosition","SubstID = 3404 \nSubstLocID = 3405 \nSubstLocState = 3406 SlotID=3110\nClock = 3","WaferArrivePosition"]
["1000","PortCassetteArrive","PortID = 3113 \nClock = 3","PortCassetteArrive"]
["1001","PortCassetteRemoved","PortID = 3113 \nClock = 3","PortCassetteRemoved"]
["1002","PortIDRead","CarrierID = 3105 \nPortID = 3113 \nSmartTag = 3503 \nClock = 3","PortIDRead"]
["1003","PortReadIDFailed","PortID = 3113 \nClock = 3","PortReadIDFailed"]
["1004","PortIDWrite","CarrierID = 3105 \nPortID = 3113 \nClock = 3","PortIDWrite"]
["1005","PortWriteIDFailed","PortID = 3113 \nClock = 3","PortWriteIDFailed"]
["1006","PortLoad","CarrierID = 3105                           PortID = 3113 \nClock = 3","PortLoad"]
["1007","PortUnLoad","CarrierID = 3105                           PortID = 3113 \nClock = 3","PortUnLoad"]
["1008","SLOT_MAP","CarrierID = 3105 \nSlotMap = 3106 \nPortID = 3113 \nClock = 3","SLOT_MAP"]
["1012","PortClamped","PortID = 3113 \nClock = 3","PortClamped"]
["1013","PortUnClamped","PortID = 3113 \nClock = 3","PortUnClamped"]
["1022","PortJobStarted","LotID = 3102 \nJobID = 3104 \nPortID = 3113 \nSequenceID = 3107","PortJobStarted"]
["1023","PortJobStopped","LotID = 3102 \nJobID = 3104 \nPortID = 3113 \nSequenceID = 3107","PortJobStopped"]
["1024","PortJobPaused","LotID = 3102 \nJobID = 3104 \nPortID = 3113 \nSequenceID = 3107","PortJobPaused"]
["1025","PortJobResumed","LotID = 3102 \nJobID = 3104 \nPortID = 3113 \nSequenceID = 3107","PortJobResumed"]
["1026","PortJobAborted","LotID = 3102 \nJobID = 3104 \nPortID = 3113 \nSequenceID = 3107","PortJobAborted"]
["1027","PortJobFinished","LotID = 3102 \nJobID = 3104 \nPortID = 3113 \nSequenceID = 3107 \nProcessedWaferCount = 3124","PortJobFinished"]
["1028","PortJobFailed","LotID = 3102 \nJobID = 3104 \nPortID = 3113 \nSequenceID = 3107","PortJobFailed"]
["1030","PortPPSelected","LotID = 3102 \nJobID = 3104 \nPortID = 3113 \nSequenceID = 3107","PortPPSelected"]
["1031","PortPPSelectFailed","LotID = 3102 \nJobID = 3104 \nPortID = 3113 \nSequenceID =3107","PortPPSelectFailed"]
["1032","PortJobWaferStart","LotID = 3102 \nJobID = 3104 \nPortID = 3113 \nSequenceID = 3107 SlotID=3110","PortJobWaferStart"]
["1033","PortJobWaferEnd","LotID = 3102 \nJobID = 3104 \nPortID = 3113 \nSequenceID = 3107 SlotID=3110\nWaferProcessResult = 3125 ","PortJobWaferEnd"]
["3001","PMRecipeStart","RecipeID = 3103 \nStationName = 3108 \nPortID = 3113 \nSlotID = 3110                 LotID = 3102 ","PMABRecipeStart"]
["3002","PMRecipeComplete","RecipeID = 3103 \nStationName = 3108 \nPortID = 3113 \nSlotID = 3110                 LotID = 3102 ","PMABRecipeComplete"]
["3003","PMRecipeStepStart","RecipeID = 3103 \nStationName = 3108 \nPortID = 3113 \nRecipeStepNumber = 3109 \nSlotID = 3110                           LotID = 3102 ","PMABRecipeStepStart"]
["3004","PMRecipeStepEnd","RecipeID = 3103 \nStationName = 3108 \nPortID = 3113 \nRecipeStepNumber = 3109 \nSlotID = 3110                  LotID = 3102 ","PMABRecipeStepEnd"]
["3005","PMRecipeFailed","RecipeID = 3103 \nStationName = 3108 \nPortID = 3113 \nSlotID = 3110                  LotID = 3102 ","PMABRecipeFailed"]

{"sheet":"ECID","index":5,"n_rows":217,"n_cols":1,"rows_kept":217,"cut":false,"hidden":false,"merged":[]}
{"$rows_empty":69}
[85]
[]
[201]
[202]
[203]
[204]
[205]
[206]
[207]
[208]
[209]
[210]
[211]
[212]
[213]
[214]
[215]
[216]
[217]
[218]
[219]
[220]
[221]
[222]
[223]
[224]
[225]
[226]
[227]
[228]
[229]
[230]
[231]
[232]
[233]
[234]
[235]
[236]
[237]
[238]
[239]
[240]
[241]
[242]
[243]
[244]
[245]
[246]
[247]
[248]
[249]
[250]
[251]
[252]
[253]
[254]
[255]
[256]
[257]
[258]
[259]
[260]
[261]
[262]
[263]
[264]
[265]
[266]
[267]
[268]
[269]
[270]
[271]
[272]
[273]
[274]
[275]
[276]
[277]
[278]
[279]
[280]
[281]
[282]
[283]
[284]
[285]
[286]
[287]
[288]
[289]
[290]
[291]
[292]
[293]
[294]
[295]
[296]
[297]
[298]
[299]
[300]
[301]
[302]
[303]
[304]
[305]
[306]
[307]
[308]
[309]
[310]
[311]
[312]
[313]
[314]
[315]
[316]
[317]
[318]
[319]
[320]
[321]
[322]
[323]
[324]
[325]
[326]
[327]
[328]
[329]
[330]
[331]
[332]
[333]
[334]
[335]
[336]
[337]
[338]
[339]
[340]
[341]
[342]
[343]
[344]
[345]
[346]

{"sheet":"ALID","index":6,"n_rows":23,"n_cols":4,"rows_kept":23,"cut":false,"hidden":false,"merged":[]}
["ALID","NAME","Description","Module"]
[1,"EMOPressed","Emergency Off button was pressed","PM*"]
[2,"LidError","Lid Error","PM*"]
[3,"MFCOffline","MFC is offline","PM*"]
[4,"VaccuumGaugeError","Vacuum gauge error","PM*"]
[5,"PressureOutOfTolerance","Pressure out of tolerance","PM*"]
[6,"PumpError","Dry Pump Error","PM*"]
[7,"RFGeneratorOffline","RF generator is offline","PM*"]
[8,"RFHighReflect","RF trig high reflect power","PM*"]
[9,"RFHardwareInterlock","RF hardware interlock not satisfied","PM*"]
[10,"GasFlowOutOfTolerance","MFC Flow out of tolerance","PM*"]
[11,"RFOutOfTolerance","RF Power is out of tolerance","PM*"]
[12,"WaferProtrude","Found wafer protrude","EFEM"]
[13,"EFEMSideDoorOpen","EFEM side is opened","EFEM"]
[14,"EFEMVacuumPressureError","EFEM Vaccuum error","EFEM"]
[15,"EFEMCDAError","EFEM CDA Error","EFEM"]
[16,"EFEMFlowGaugeSensorError","EFEM Flow Gauge Sensor error","EFEM"]
[17,"EFEMLeakageAlarm","EFEM Leak","EFEM"]
[18,"EFEMIonizerAlarm","EFEM Ionizer Alarm","EFEM"]
[19,"EFEMFFUAlarm","EFEM FFU Alarm","EFEM"]
[20,"EFEMOffline","EFEM is offline","EFEM"]
[21,"EFEMCommunicationError","EFEM failed connection","EFEM"]
[22,"WaferTransferFailed","EFEM robot transfer error","EFEM"]

{"sheet":"RCMD","index":7,"n_rows":21,"n_cols":6,"rows_kept":21,"cut":false,"hidden":false,"merged":[[0,2,0,3],[2,0,5,0],[16,0,17,0],[19,0,20,0],[2,1,5,1],[16,1,17,1],[19,1,20,1],[2,6,65,6]]}
["S.F.","Name","CPNAME",null,"CPVAL","Description"]
["S2F49","MapCassette",1,"PortID","Ascii","1 based port number"]
["S2F49","PP-SELECT",1,"PortID","Ascii","1 based port number"]
[null,null,2,"JobID","Ascii","job name"]
[null,null,3,"LotID","Ascii","lot name"]
[null,null,4,"SequenceID","List","L,25 \n    1.seq1\n    2.seq1\n    .\n    .\n    25\n\nassigned sequence name by slot number\n\n\n"]
["S2F49","StartJob",1,"JobID","Ascii","job name"]
["S2F49","AbortJob",1,"JobID","Ascii","job name"]
["S2F49","PauseJob",1,"JobID","Ascii","job name"]
["S2F49","ResumeJob",1,"JobID","Ascii","job name"]
["S2F49","StopJob",1,"JobID","Ascii","job name"]
["S2F49","Load",1,"PortID","Ascii","1 based port number"]
["S2F49","Unload",1,"PortID","Ascii","1 based port number"]
["S2F49","Lock",1,"PortID","Ascii","1 based port number"]
["S2F49","Unlock",1,"PortID","Ascii","1 based port number"]
["S2F49","ReadID",1,"PortID","Ascii","1 based port number"]
["S2F49","WriteID",1,"PortID","Ascii","1 based port number"]
[null,null,2,"CarrierID","Ascii","Content write to port:\nRFID"]
["S2F49","ReadTag",1,"PortID","Ascii","1 based port number"]
["S2F49","WriteTag",1,"PortID","Ascii","1 based port number"]
[null,null,2,"TagData","Ascii","Smart Tag"]