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["软件版本","类别","编号","升级内容","状态（ Released/Testing）","操作注意事项","release时间","备注"]
["1.0.0.6","新增功能",1,"TMRobot增加速度设置项，设置为百分比格式","Released","重启软件检查配置项","2022.9.23"]
[null,null,2,"TMRobot/EFEMRobot添加Grip/Ungripgn","Released",null,"2022.9.27"]
[null,null,3,"MarsOverview界面添加读取CST信息的显示","Released"]
[null,null,4,"PM界面chamber无开关Slitdoor动画显示，在chamber两侧加上门开关动画","Released",null,"2022.10.03"]
[null,null,5,"调度逻辑同腔的两个头（PMA1+PMA2;PMB1+PMB2）同时做Vent，Vent完成后slitdoor一起打开","Released",null,"2022.10.05"]
[null,"解决Bug",1,"界面动画与实际动作不符","Released",null,"2022.9.29"]
[null,null,2,"EFEM软件和Mars软件第一次联接时，mars软件做Init会出现放SMIF的LP报警(LP Home failed,can not execute Initialize LP while execute CSTID)","Released",null,"2022.10.7","lp动作过程中不要取放carrier，读cstid时不要点home"]
[null,null,3,"Mars软件UI里面Platform中Mainframe的TM Robot当前速度set为40，重新进入软件会变成2；","Released",null,"2022.10.04","优化为重新进入软件还是上一次退软件时设置的速度"]
[null,null,4,"Chamber上腔体打开后，Heater不下电，没有任何警告；","Released",null,"2022.10.05","优化为打开Chamber上腔体软件状态栏爆红提示+Heater下电"]
[null,null,5,"LP直接传BUF-LLA会出现LLA只能放两片Wafer的现象；","Released",null,null,"变更为与过Aligner/Cooling一样，从LP直接取片到Buffer可以存片"]
[null,null,6,"DataLog里面Process History中无工艺曲线显示","Released",null,"2022.10.03"]
[null,null,7,"软件界面的logo还是Matis的","Released",null,"2022.10.07"]
[null,null,8,"在cooling上wafer无法通过Return Wafer返回LP","Released",null,"2022.10.08"]
[null,null,9,"EFEM 软件 offline 后，需要重启Mars 软件后才能在Mars软件做初始化","Released",null,"2022.10.05","EFEM 软件切offline 模式后， 无任何动作，再切回online ,Virgo 软件不用做初始化就能正常操作"]
["1.0.0.7","新增功能",1,"开腔前先CheckATM信号，腔体在ATM状态时软件不在发vent请求，直接打开SlitDoor","Released",null,"2022.10.11","之前做法为每次开腔前都会做一次Vent,做完vent再CheckATM"]
[null,null,2,"Recipe Head Setting中，如果Pumping LiftPin Position设置为UP,LiftPin不降","Released",null,"2022.10.11","  "]
[null,null,3,"Process History导出列表中添加LotID+SlotID","Released",null,"2022.10.11"]
[null,null,4,"efem模块的Aligner和Cooling的Hometimeout/Lifttimeout配置放到SC后台","Released",null,"2022.10.11"]
[null,null,5,"Auto模式下不可以对选择sequence进行修改（只针对Auto下跑片选择的路径不可以修改）","Released",null,"2022.10.27"]
[null,null,6,"Auto模式下不可以对PMAOperation页面各种阀进行open valve/close","Released",null,"2022.10.27"]
[null,null,7,"调整Step 名称显示位置，竖线增加每一步的圆点或者方点 节点，精准区分每一步","Released",null,"2022.10.27"]
[null,"解决Bug",1,"在自动跑片过程，不可以在pm页面改为手动，状态栏给出提示","Released",null,"2022.10.19"]
[null,null,2,"LP取片逻辑，LP1,LP2都进同一个腔体（PMA），出现不衔接现象即：LP1Run完,Wafer都回到Cassette后，Robot才会取LP2Wafer（只在进单腔PMA或PMB时出现，跑双腔PMA+PMB时会衔接）","Released",null,"2022.10.19"]
[null,null,3,"Autorun时任然可以修改Recipe,修改完成后剩余没做工艺Wafer会依照新改Recipe做工艺","Released",null,"2022.10.19","改为在AutoMode下无法对Recipe做修改/保存"]
[null,null,4,"Vent逻辑修改后，出现信号不在ATM时，做vent,vent到大气压时Vent动作不停止一直持续Vent直到报警","Released",null,"2022.10.19"]
[null,null,5,"Config禁用LP后，Overview界面做Init,PlatformEFEM中LP依然会做Home","Released",null,"2022.11.02","改为LP禁用后，EFEM界面LP不做动作，默认Init状态"]
[null,null,6,null,"Released"]
[null,null,7,null,"Released"]
[null,null,8,null,"Released"]
[null,null,9,null,"Released"]
["1.0.2.1","新增功能",1,"在EFEMRobot和TMRobot的Grip/Ungrip转换时Grip Status要有提示，Grip状态时指示灯变绿，Ungrip状态时指示灯变灰（efem界面BladeA是下手指对应第二个指示灯，BladeB是上上手指对应第一个指示灯；TM界面Blade2对应第二个指示灯，Blade1对应第一个指示灯）","Released",null,"2022.11.13"]
[null,null,2,"EFEM软件可以实现ReadID功能，可以读取CST信息给到Mars软件。把接收到得信息显示在Mars-Overview界面","Released"]
[null,null,3,"现有机台上软件界面只标注configure里配置的gas并未做详细的说明，在实际使用中会给使用者造成困惑；添加详细标注gas的信息","Released",null,"2022.11.07"]
[null,null,4,"Recipe里的RF Setting-shource/Bais这些显示要和config里RF启用与否对应，启用那个recipe里显示那个","Released",null,"2022.11.14"]
[null,null,5,"Recipe中创建Clean recipe,有流气，射频步骤的在执行cleanjob时要做流气，射频","Released",null,"2022.11.14"]
[null,null,6,"目前软件离线才能手动操作，但Chamber 运行时，需要查看C1/C2/VPP/Reflect power 这些参数，需开放在线时查看权限","Released",null,"2022.11.19"]
[null,null,7," Job 结束后，拿走POD ,残留Sequence and job information ，结束后清除残留","Released",null,"2022.11.19"]
[null,null,8," Job 结束后，System 状态需切换Auto idle ，切黄灯","Released",null,"2022.11.19"]
[null,null,9,"wafer 进入chamber ，开始执行Recipe step 时，才Heater on ，需调整Job  start 时heater on","Released",null,"2022.11.19","模拟器测试通过，需现场机台配合测试"]
[null,null,10,"Wafer 进入 chamber 后才开始check 温度（recipe的设定温度），需调整，Job start/ Transfer /Slit door 前，三处check （recipe的设定温度）温度","Released",null,"2022.11.19","模拟器测试通过，需现场机台配合测试"]
[null,null,11,"手动拖拽wafer 返回 smif ，目前会直接返回smif，增加提示是否需要cooling","Released"]
[null,null,12,"有4个Heater，但软件只有两个温度补偿，为PMA1/PMA2;PMB1/PMB2共用一\n温度补偿，会使同PM两个Heater实际温度不一致","Released",null,"2022.10.02","新增PMA1/PMA2;PMB1/PMB2都有单独的温度补偿；模拟器测试通过，需机台测试"]
[null,"解决Bug",1,"Mars1.0.1.8版本Recipe在机台测试时不能显示，不能修改无法操作，还原旧版本可以正常使用","Released",null,"2022.11.09"]
[null,null,2,"在overview页面开auuto模式的前提下，切换到离线+手动下可以对pm页面所有选项进行手动操作","Released",null,"2022.11.11"]
[null,null,3,"设备在运行时，PMA pumping down 后，打开Gas final valve 后，不进行流气，无后续recipe step 执行，共出现4次，每次重启软件后ok ，但运行一段时间后，再次出现","Released",null,"2022.11.17"]
[null,null,4,"Statistics中BiasRfOnTime数据无变化","Released","重新安装软件后需重启两次软件","2022.11.16","  删除数据库EFEMDUALB→架构→数据表中-“Stats-data-rf-pump”项,重新安装最新版软件"]
[null,null,5,null,"Released"]
[null,null,6,null,"Released"]
["1.0.2.2","新增功能",1,"EFEM软件可以实现ReadID功能，可以读取CST信息给到Mars软件。把接收到得信息显示在Mars-Overview界面","Released",null,"2022.12.01."]
[null,null,2,"手动拖拽wafer 返回 smif 和ReturnWafer增加提示是否需要过cooling","Released",null,"2022.11.25"]
[null,null,3,"load时，Abort 可点击，进行终止；把（IS Clamped,IS Docked,IS Mapped)做成配置项，再有12寸foup时启用，没有时不启用","Released",null,"2022.11.28"]
[null,null,4,"支持可以根据idle的时间长短来定义是否需要启用Pre-job(类似于可以根据idle时间来定义是否启用idle-clean","Released",null,"2022.12.01"]
[null,null,5,"SC中加一个屏蔽冷却水报警的配置，离子发生器报警，FFU报警参考virgo-B做法（对应IO,TM-DI-14WaterFlowSW，TM-DI-16TM FFU Normal;TM-DI-27ION Normal）","Released",null,"2022.11.28"]
[null,null,6,"在触发side door closed信号（开门OFF）之后，软件给出Alarm报警提示。同时亮红灯，蜂鸣器响（对应TM-DI-01）","Released",null,"2022.11.28"]
[null,null,7,"在DataLog里Wafer History/Process History添加区分 A1/A2/1/B2 ,By head ，方便PE 查看数据","Released",null,"2022.12.01"]
[null,null,8,"目前软件无法实现wafer在Aligner/Cooling上的liftpin UP状态停留几秒后再做Liftpin Down","Released",null,"2022.12.01","加个配置项，实现让我们可以控制Wafer在Aligner/Cooling时什么时候降到承台"]
[null,null,9,"recipe里的chamber1/2Temp温度设置为0℃时实际机台heater不在动作，保持原样（本来是开的就是开的，本来是关的就是关的，不再做升降温）","Released",null,"2022.12.01"]
[null,null,10,null,"Released"]
[null,null,11,null,"Released"]
[null,null,12,null,"Released"]
[null,"解决Bug",1,"禁用单头后，PreHeater依然可以预加热","Released",null,"2022.11.29","已改成，禁用后chamber功能丧失，RUN Recipe时Heater保持原来状态，本来是开的就是开的，本来是关的就是关的，不再做升降温。"]
[null,null,2,"禁用一个手臂TM/EFEM，上手/下手 手动拖片到禁用的手指，该手指还是会启用(自动跑片不会发生这样的问题）","Released",null,"2022.11.29"]
[null,null,3,"ATM Mode ON的时候不跳过温度检查，Start之后HeaterON开始升温降温","Released",null,"2022.12.01","ATM Mode ON的时候要跳过温度检查，就是在打开ATMmode跑片的时候让腔体的Heater状态保持原样就行，本来是开的就是开的，本来是关的就是关的，不再做升降温。"]
["1.0.2.3~1.0.2.9","新增功能",1,"手动取放时腔体门只开一个对应的门，避免另外一个腔门一直开着的状态","Released",null,".2022.12.07"]
[null,null,2,"新建wafer 或者删除wafer 信息，会出现8/12寸wafer提示；增加配置项明确区分8、12寸","Released",null,"2022.12.06"]
[null,null,3,"LotName搜索关键的Lot ID，只显示搜索单个关键的Lot ID的信息","Released",null,"2022.12.06"]
[null,null,4,"使Mars软件兼容广川EFEM和JET自制EFEM","Released",null,"2022.12.10"]
[null,null,5,"TM-DO-01Water Inlet Valve信号每次打开软件需要我们手动强制打开；改为每次打开软件时,强制给TM-DO-01Water Inlet Valve一个ON的信号","Released",null,"2022.12.06"]
[null,null,6,"目前Metis/Mars软件中没有by Chamber的Pressure alarm range的设定；新增PMA/PMB,chiller1/2,Rf1/2,Bias Rf1/2,MfcGas1-6偏差warning和alarm range ","Released",null,"2022.12.26"]
[null,null,7,"一些超温信号和漏水信号触发之后，对应DO信号点位无相应的变化；触发DI信号后，DO信号点位要相应的做出变化，DI信号再次为1时对应DO信号还要为0，需要人为手动再次打开才能变为1否则DO信号保持为0状态","Released",null,"2022.12.028"]
[null,null,8,"目前JET设备均只有Recipe设定，无针对某一Recipe中的参数进行Spec卡控功能，只能通过chamber统一的spec进行卡控，如果客户需要不同recipe相同参数卡控不同spec时，JET设备无法实现 ；增加By Recipe单独卡控Tolerance页面","Released",null,"2022.12.26"]
[null,null,9,"目前设备RF power输入以实际功率需求输入，未考虑到RF输入路径功率损失因数，造成实际输入到Chamber的功率有损失，需要有补偿机制；通过RF Calibration算出补偿系数，改变Current RF Max Power的设定去补偿RF 实际setting值","Released",null,"2022.12.30"]
[null,null,10,"参考VIRGO- EFEM系列设备，软件修改Aligner & Cooling在wafer取片完成后Lift pin保持在UP状态（无需再次回归原点），节省在EFEM单元传送时EFEM-Robot等待Aligner & Cooling 的Lift Pin 回归原点或再次升起的的时间","Released",null,"2023.01.04"]
[null,null,11,"Data Log -Statistics增加RF Time 和wafer count的显示内容","Released",null,"2023.01.12"]
[null,null,12,"Sequence PM Selection路径名称变更为PMA/PMB/PMC/PMD，和客户MES系统Chamber名称匹配","Released",null,"2023.01.17"]
[null,null,13,"增加数据库数据和Log文件保留时间配置","Released"]
[null,"解决Bug",1,"Leak Check捡漏时间RT文件里面写的最大是3000，设置大于3000s时保存不成功，设置框给出提示","Released",null,"2022.12.07"]
[null,null,2,"PM Operation界面guidpin动画去掉","Released",null,"2022.12.07"]
[null,null,3,"ATM模式下跑奇数片，最后双腔都是关闭的状态，lift pin为down","Released"]
[null,null,4,"Tm Robot速度低于60以下，chamber要关门了，然后发现Not Extend信号不满足，软件报错","Released",null,"2022.12.27"]
[null,null,5,"修改TM-Cycle时wafer进腔lift pin不down","Released",null,"2022.12.27"]
[null,null,6,"完成wafer放LLB后EFEM Robot取片以从下至上取片，造成Slot3~slot8 Wafer无法及时放回到LP里，改为以WaferID取片","Released",null,"2022.12.27"]
[null,null,7]
["1.0.3.0~1.0.3.3","新增功能",1,"可以指定腔体如（PMA1或PMA2）;EFFMRobot和TMRobot上下手指可以指定；下面为Mars指定路径：LP1—EFEMRobort 1—Aligner                    1—EFEMRobot1—LLA—TMRobot1—PMA1—TMRobot1—LLB—EFEMRobto1—Cooling 1—EFEMRobto1—LP1以上传片逻辑与现有逻辑同时支持（sequence可指定路径）","Released",null,".2023.02.01"]
[null,null,2,"手动创建wafer，显示出新建wafer的尺寸","Released",null,"2023.02.08"]
[null,null,3,"Mars软件place Delay Time和pick Delay Time配置分开","Released",null,"2023.02.03"]
[null,null,4,"Heater chamber功能改为关联底座温度，另外加一个Heater chamber wall功能卡控腔壁温度范围","Released",null,"2023.02.08"]
[null,null,5,"添加配置项Max Temperature Tolerance Transfer wafer","Released",null,"2023.03.01"]
[null,null,6,"UI界面增加guidepin显示，加两个（4寸，6寸）的guidepin,4寸guidepin要可升降对应IO(DI-4,5,20,21)，6寸的为固定pin不做升降，可在config中选择使能（Yes为有Guidepin配置，No为没有Guidepin配置）","Released",null,"2023.03.02"]
[null,null,7,"升级软体兼容4，6，8寸wafer跑片","Released",null,"2023.03.14"]
[null,null,8,"新增机台写入Smart tag功能","Released",null,"2023.03.23"]
[null,null,9]
[null,null,10]
[null,null,11]
[null,null,12]
[null,"解决Bug",1,"优化取消作业，做晶圆返回的时候，选择提示框Cancel(取消)实际不再做晶圆返回","Released",null,"2023.02.03"]
[null,null,2,"晶圆返回选择need Cooling，时间设置为0秒，cooling Pin也会Down下去1s然后立马升起，再取走Wafer","Released",null,"2023.02.03"]
[null,null,3,"软件在Automode,sequence&recipe不能做修改，添加，复制等操作；修改为除当前在RUN Recipe&Sequence外的其他Recipe&Sequence可以操作save","Released",null,"2023.02.08"]
[null,null,4,"不启用第六路Gas时气路上头会多出一节，易引起误解；根据气路的启用情况来增减竖管的显示长度","Released",null,"2023.02.18"]
[null,null,5,"config中job配置项蜂鸣器设置指定时间（例如10s），但实际机台是一直会响；修改完成，为蜂鸣器配置项设置多长时间，实际机台就响多长时间","Released",null,"2023.03.03"]
[null,null,6]
[null,null,7]
[null,null,8]
[null,null,9]
[null,null,10]
["1.0.3.4","新增功能",1,"在sequence只选择PMA腔工艺时，机台做clean还是会两个腔体（PMA+PMB）一起做，改为以sequence路径选择要做clean的腔","Release",null,"2023.03.18"]
[null,null,2,"机台里有wafer，软件处于auto模式下，createjob前判断buffer、aligner、cooling、chamber是否有wafer。有的话给出相应的提示，不可以成功创建作业","Release",null,"2023.03.18"]
[null,null,3,"软件处于AutoMode时delete wafer为灰色，不可以Create wafer/delete wafer","Release",null,"2023.03.18"]
[null,null,4,"当实际温度不满足recipe设定温度时，job start增加 warning 提示","Release",null,"2023.04.07"]
[null,null,5,"config中scheduler模块新增配置项（Loadlock used for return path(0,both,1,LLA,2,LLB)）","Release",null,"2023.4.24"]
[null,null,6,"Leakcheck -check mode结果显示mfc gas名称","Release",null,"2023.04.17"]
[null,null,7,"因设备安全需求，PM PCB需做升级，故更新部分IO表内容","Release",null,"2023.04.19","1，修改了DI-51信号名称，此信号不再做软件互锁，请将原来的信号DI-51的软件互锁逻辑删除，也不要显示在提示栏，只显示在IO界面；\n           2，新增DI-54信号，此信号不做软件互锁，不要显示在提示栏，只显示在IO界面；\n           3，新增DI-86，DI-87，DI-96，DI-97报警信号，为1后设备报警，并显示相应报警信息；\n           4，删除DI-35信号；\n           5，删除DI-09到DI-14的 soft interlock功能。"]
[null,null,8,"新增：兼容广川3PLPEFEM类型","Release",null,"2023.04.18"]
[null,null,9,"新增：ChillerType-AIRSYS,通讯type-RS232","Release",null,"2023.04..19"]
[null,null,null,"新增：vent gas line leak check"]
[null,"解决Bug",1,"修复：单腔进wafer两个头都打source rf问题","Release",null,"2023.04.18"]
[null,null,2,"修改：FDC上报EAP的底座温度由MonitorTC改为ControlTC","Release",null,"2023.03.25"]
[null,null,3,"优化 Leak check 时 ，软件自动屏蔽SMC 表头报警","Release",null,"2023.4.24"]
[null,null,4,"优化 Leak check 时 ，Gasline 、Gas line and FAC leak无gas记录区分的问题","Release",null,"2023.4.24"]
[null,null,5,"当前run的sepuence/recipe是不可修改的，但是名称当前使用1-b，却不能对没有使用的11-b名称的sequence和recipe进行编辑现已优化正在run的sequence/recipe名字不对照就可以进行编辑","Release",null,"2023.5.25"]
[null,null,6,"机台Mars传片siltdoor两个腔门会同时开启，但实际sequence选择只跑single head，slitdoor会同时开两个chamber door不合理。现已优化sequence跑single head，chamber只开单独的slitdoor，sequence选择跑双腔chamber同时开slit door","Release",null,"2023.5.26"]
[null,null,7,"sequence里chamber名称为ABCD与overview页面pma1/pma2/pmb1/pmb2不符，容易引起客户误解，现以优化代码，可配置文件设置腔体名为pma1/2，b1/2或者abcd满足客户需求","Release",null,"2023.5.5"]
[null,null,8,"ATM模式下，腔体在真空状态下，下job跑片准备进腔前，因ATM模式不会自动vent，导致一直开不了腔门，prepare超时的alarm，没有明确的提示。优化后ATM模式下，腔体处于真空状态，tmrobot从loadlock取到wafer就报详细chamber状态不在atm状态下","Release",null,"2023.5.28"]
[null,null,9,"在TMRobot进chamber放片时liftpinUp信号没给到之前，Robot就回缩。现以优化关联pin的IO信号，信号给到后再判断是否完成放片动作；加取放片DelayTime配置项在config pma里","Release",null,"2023.5.15"]
[null,null,10,"进腔放片前，看log检查腔体情况的时序不对。现已优化在腔体liftpin,guidepin,slidedoor都ready后再发Check place condition","Release",null,"2023.5.17"]
[null,null,11,"leaccheck新增chamber to gas box manual valve，需要手动关闭gasbox阀配合此功能进行使用","Release",null,"2023.5.25"]
[null,null,12,"优化了积塔现场报LP is canceled since Can not Set Signal Tower.IPARAM NG和LP CloseDoor failed, Can not execute CLOSE while execute CSTID指令与efem有误的问题","Release",null,"2023.6.1"]
[null,null,13,"优化使用广川版本Mars软件overview页面为中文扫片，现以改为英文map","Release",null,"2023.5.30"]
[null,null,14,"recipe里，setting设置勾选Not To Purge Or Vent，跑process会导致不做vent不开腔门宕机的问题发生，log里没有明确的提示。现已优化create job时判断所选sequence里recipe勾选Not To Purge Or Vent就给出warning提示，不可成功创建job","Release",null,"2023.6.9"]
[null,null,15,"efem/tmrobot下手或者上手没有启用，sequence路径还是选择指定上下手臂，createjob没有任何提示，现已优化禁用efem/tmrobot,sequence选择禁用的手臂，create job给出warning提示","Release",null,"2023.6.9"]
[null,null,16,"自制efem与Mars第一次连接做initialize软件会报efem door open带有smif没有关联door的io信号，误报door的错误，原因是自制efem改opencst的时候改的指令传给我们Mars有误，现已优化","Release",null,"2023.6.12"]
[]
["1.0.3.5","解决Bug",1,"禁用pm模块，log还会报有关pm的信息。现以整理代码禁用后有关pm信息不在显示","Testing",null,"2023.6.9"]
[null,null,2,"job finish完成增加一个wafer回到LP判断（解决wafer回到LP之后没给eap上传Portjobwaferend问题）","Release",null,"2023.6.19"]
[null,null,3,"自制EFEM Door Open state协议修改（解决刚开软件包EfemDoorOpen的报警）","Release",null,"2023.6.20"]
[null,null,4,"腔体放片时修改Slit door单开和双开-增加TM手臂wafer数量判断（减少开关门时的动作，之前放最后一片时会开两个门，关只关放片那扇门，另一扇只能在做工艺前的检查时才关上；改完之后手臂有两片wafer开两扇门，手臂有一片就开一扇门）","Release",null,"2023.6.20"]
[null,null,5,"修改检查sequence的逻辑，跑单腔时只检查选择的腔体","Release",null,"2023.7.18"]
[null,null,6,"Mars软件sequence可以选择指定手臂，会导致和config禁用手臂在指定手臂冲突，容易引起宕机问题，以及以后使用交叉手臂也会宕机的问题发生","Release",null,"2023.7.7"]
[null,null,7,"因为代码判断禁用的chamber不进行底座加热，但recipe还设置了禁用底座的温度，导致传片判断pma1一直没有达到recipe温度所以也不给pma2进行传片。两者逻辑冲突\n建议优化：禁用的chamber，recipe还设置温度，传片时就不要判断禁用chamber的温度","Release",null,"2023.7.7"]
[]
[]
[]
[]
[]
[null,"新增功能",1,"config中fa模快新增Need S6F12 Reply And Retry配置，默认为true开启","Release",null,"2023.6.21"]
[null,null,2,"增加了检查Cylinder的日志（明确检测slitdoor,liftpin的状态信息）","Release",null,"2023.6.21"]
[null,null,3,"料盒做完Load后把ReadID按钮变灰不可选，只有在load前unload后ReadID才可选择","Release",null,"2023.7.18"]
[null,null,4,"在run的状态下对confi-ATMMode进行配置，需要重启才能生效","Release",null,"2023.7.7"]
[null,null,5]
[null,null,6]
[null,null,7]
["1.0.3.6","解决Bug",1]
[null,null,2]
[null,null,3]
[null,null,4]
[null,null,5]
[null,null,6]
[null,null,7]
[null,"新增功能",1,"增加JEL手臂","Release",null,"2024.7.25"]
[null,null,2,"增加job过程中，如果腔中没有wafer则不进行射频","Release",null,"2024.7.25"]
[null,null,3,"增加sequence中可以选择不同单头腔体，config中可以禁用单腔的功能","Release",null,"2024.7.25"]
[null,null,4]
[null,null,5]
["1.0.3.7","解决Bug",1]
[null,null,2]
[null,null,3]
[null,null,4]
[null,null,5]
[null,null,6]
[null,null,7]
[null,"新增功能",1,"增加扫码枪的扫描sequence的功能","Release",null,"2024.9.13"]
[null,null,2]
[null,null,3]
[null,null,4]
[null,null,5]

{"sheet":"Mars","index":1,"n_rows":72,"n_cols":8,"rows_kept":72,"cut":false,"hidden":false,"merged":[[1,0,12,0],[13,0,27,0],[28,0,37,0],[38,0,53,0],[54,0,57,0],[58,0,61,0],[62,0,65,0],[66,0,71,0],[1,1,7,1],[8,1,12,1],[13,1,17,1],[18,1,27,1],[28,1,31,1],[32,1,37,1],[38,1,47,1],[48,1,53,1],[54,1,55,1],[56,1,57,1],[58,1,59,1],[60,1,61,1],[62,1,63,1],[64,1,65,1],[66,1,68,1],[69,1,71,1]]}
["软件版本","类别","编号","升级内容","状态（ Released/Testing）","操作注意事项","release时间","备注"]
["1.0.0.5","新增功能\n",1,"EAP代码整体更改，增加spooling的功能","Released",null,"2024.5.29"]
[null,null,2,"增加PLC send,receivr监控功能，如果通信时长超过设定值，log中显示通信的时间。配置为0的时候为不启用","Released",null,"2024.5.29"]
[null,null,3,"新增加系统资源功能，可根据设定时间将系统资源的大小显示到log中。配置为0则为不启用，目前该配置会将RT的系统资源放大，默认为不启用","Released",null,"2024.5.29"]
[null,null,4,"新增加可选择TM手臂类型","Released",null,"2024.5.29"]
[null,null,5,"新增加RT射频厂商，微波","Released",null,"2024.5.29"]
[null,null,6,"新增流气、水冷不满足条件的时候，互锁将射频关闭","Released",null,"2024.5.29"]
[null,null,7]
[null,"解决Bug\n",1,"修改heater降温后软件不在重新设定温度的bug","Released",null,"2024.5.29"]
[null,null,2,"取消reset功能，防止客户rest掉错误后继续传片的问题","Released",null,"2024.5.29"]
[null,null,3,null,"Released"]
[null,null,4,null,"Released"]
[null,null,5,null,"Released"]
["1.0.0.8","新增功能\n",1]
[null,null,2]
[null,null,3]
[null,null,4]
[null,null,5]
[null,"解决Bug\n",1,"修改LP出现“LP1 unclamp fail”的问题","Released",null,"2024.6.2"]
[null,null,2,"修改EAP出现断联问题","Released",null,"2024.6.2"]
[null,null,3,"增加了关于触发“lp not ready”增加日志，显示报not ready的原因","Released",null,"2024.6.5"]
[null,null,4,"增加监控占用cpu过高的软件，并以log的形式监控","Released",null,"2024.6.8"]
[null,null,5,"修改了数据库在recipe结束的时候，依旧出现有set point值的问题。该数据为假数据，显示在数据库中","Released",null,"2024.6.8"]
[null,null,6,"修改了不查询data log数据的时候，data log页面依旧将所有log显示，导致页面卡死的问题。优化为只有主动查询才会显示数据","Released",null,"2024.6.7"]
[null,null,7,"优化data log页面查询数据过多，会影响与PLC通信问题。优化为目前data log页面数据只能查询7天，页面做分页处理","Released",null,"2024.6.7"]
[null,null,8,"RF off的互锁alarm降为log，只会刷新log不会上报warning和alarm，“PMA PMA Source RF cannot power on, gas or water or gas valve is off ","Released",null,"2024.6.9"]
[null,null,9,"将流气、水冷不满足条件的时候，互锁取消，该信息只显示在log中","Released",null,"2024.6.9"]
[null,null,10]
["1.0.0.9","新增功能",1,"新增加出现turn on fail的时候log中显示与射频厂商的通信日志","Released",null,"2024.8.1"]
[null,null,2]
[null,null,3]
[null,null,4]
[null,"解决Bug\n",1,"解决广川3P 机台read id报错的问题","Released",null,"2024.7.19"]
[null,null,2,"解决EFEM在load之后先回复INF，不回复EVT事件，无法创建作业的问题。\n在EFEM回INF信息时上位机软件直接查询EVT事件，一定时间内无法查询到状态变更报警，在Delay时间内查询到EVT事件后继续流程！","Released",null,"2024.8.1"]
[null,null,3,"解决EAP的log自动覆盖上一个log，不会新建新log的问题","Released",null,"2024.7.20"]
[null,null,4,"解决蜂鸣器buzzer off后重启软件才能将蜂鸣器重置的问题（积塔mars版本不包含此内容）","Released",null,"2024.7.20"]
[null,null,5]
[null,null,6]
["1.0.0.10","新增功能",1,"data Log页面的日志的倒序改成正序","Released",null,"2024.9.23"]
[null,null,2,"recipe报错后，recipe页面工艺步数会停留在报错的步数，主页面的elapsed时间也不再增加","Released",null,"2024.9.23"]
[null,null,3,"增加EAP断联后，RT页面显示Alarm 提示  ","Released",null,"2024.9.23"]
[null,null,4,"LP error的时候，在不影响正常工艺的条件下，红灯变亮，蜂鸣器变响","Released",null,"2024.9.23"]
[null,null,5,"增加由offline切到online的时候判断气体和射频的状态，如果为on，则置位off的功能","Released",null,"2024.9.23"]
[null,null,6,"修改117错误给到开关门信号的问题，vent会直接结束，直接下发开门指令的逻辑。修改为等待ATM信号灯变亮才会终止vent，下发开门指令","Released",null,"2024.9.23"]
[null,null,7,"更改原来打开CPU配置的时候，RT资源太大问题，使用另一种监控来监控CPU的占用率","Released",null,"2024.9.23"]
[null,null,8]
[null,null,9]
[null,null,10]
[null,"解决Bug\n",1,"修复afer history页面无法按照lot id检索的bug","Released",null,"2024.9.23"]
[null,null,2,"修复role配置read的时候，operation/overview页面仍可操作的问题。配置read时，将operation/overview页面按钮置灰","Released",null,"2024.9.23"]
[null,null,3,"将1.0.0.9版本117机台解决的buzzer off按钮只生效一下的同步到积塔版本","Released",null,"2024.9.23"]
[null,null,4,"修改sequence 只勾PMA2出现wafer不进腔的bug","Released"]
[null,null,5]
[null,null,6]
["1.0.0.12","新增功能",1,"增加creat job之后，不abort job违规对LP进行Home操作，job不终止会继续存在的防呆模式","Released",null,"2024.12.13"]
[null,null,2]
[null,"bug",1]
[null,null,2]
["1.0.0.13","新增功能",1,"增加TM手臂home前后有无wafer对比的warning提示",null,null,"2025.03.25"]
[null,null,2]
[null,"bug",1,"完全rorze  TM手臂S2位报错的信息",null,"非0000时上报错误","2025.03.25"]
[null,null,2]
["1.0.0.14","新增功能",1,"优化在EFEM Robot是busy时，使用EAP下发MAP指令后等待Robot not busy时继续执行map，不需要再次下发指令",null,null,"2025.03.28"]
[null,null,2]
[null,"bug",1]
[null,null,2]
["1.0.0.15","新增功能",1,"当read id为空的时候，LP报错",null,null,"2025.05.20"]
[null,null,2]
[null,null,3]
[null,"bug",1]
[null,null,2]
[null,null,3]

{"sheet":"Mars200","index":2,"n_rows":162,"n_cols":8,"rows_kept":162,"cut":false,"hidden":false,"merged":[[1,0,12,0],[13,0,27,0],[28,0,37,0],[38,0,53,0],[54,0,61,0],[62,0,69,0],[70,0,77,0],[78,0,85,0],[86,0,94,0],[95,0,103,0],[104,0,115,0],[116,0,123,0],[124,0,133,0],[134,0,143,0],[144,0,152,0],[153,0,161,0],[1,1,7,1],[8,1,12,1],[13,1,17,1],[18,1,27,1],[28,1,31,1],[32,1,37,1],[38,1,47,1],[48,1,53,1],[54,1,58,1],[59,1,61,1],[62,1,66,1],[67,1,69,1],[70,1,72,1],[73,1,77,1],[78,1,80,1],[81,1,85,1],[86,1,91,1],[92,1,94,1],[95,1,100,1],[101,1,103,1],[104,1,109,1],[110,1,115,1],[116,1,119,1],[120,1,123,1],[124,1,129,1],[130,1,133,1],[134,1,139,1],[140,1,143,1],[144,1,148,1],[149,1,152,1],[153,1,157,1],[158,1,161,1]]}
["软件版本","类别","编号","升级内容","状态（ Released/Testing）","操作注意事项","release时间","备注"]
["1.0.0.5","新增功能\n",1,"EAP代码整体更改，增加spooling的功能","Released",null,"2024.5.29"]
[null,null,2,"增加PLC send,receivr监控功能，如果通信时长超过设定值，log中显示通信的时间。配置为0的时候为不启用","Released",null,"2024.5.29"]
[null,null,3,"新增加系统资源功能，可根据设定时间将系统资源的大小显示到log中。配置为0则为不启用，目前该配置会将RT的系统资源放大，默认为不启用","Released",null,"2024.5.29"]
[null,null,4,"新增加可选择TM手臂类型","Released",null,"2024.5.29"]
[null,null,5,"新增加RT射频厂商，微波","Released",null,"2024.5.29"]
[null,null,6,"新增流气、水冷不满足条件的时候，互锁将射频关闭","Released",null,"2024.5.29"]
[null,null,7]
[null,"解决Bug\n",1,"修改heater降温后软件不在重新设定温度的bug","Released",null,"2024.5.29"]
[null,null,2,"取消reset功能，防止客户rest掉错误后继续传片的问题","Released",null,"2024.5.29"]
[null,null,3,null,"Released"]
[null,null,4,null,"Released"]
[null,null,5,null,"Released"]
["1.0.0.8","新增功能\n",1]
[null,null,2]
[null,null,3]
[null,null,4]
[null,null,5]
[null,"解决Bug\n",1,"修改LP出现“LP1 unclamp fail”的问题","Released",null,"2024.6.2"]
[null,null,2,"修改EAP出现断联问题","Released",null,"2024.6.2"]
[null,null,3,"增加了关于触发“lp not ready”增加日志，显示报not ready的原因","Released",null,"2024.6.5"]
[null,null,4,"增加监控占用cpu过高的软件，并以log的形式监控","Released",null,"2024.6.8"]
[null,null,5,"修改了数据库在recipe结束的时候，依旧出现有set point值的问题。该数据为假数据，显示在数据库中","Released",null,"2024.6.8"]
[null,null,6,"修改了不查询data log数据的时候，data log页面依旧将所有log显示，导致页面卡死的问题。优化为只有主动查询才会显示数据","Released",null,"2024.6.7"]
[null,null,7,"优化data log页面查询数据过多，会影响与PLC通信问题。优化为目前data log页面数据只能查询7天，页面做分页处理","Released",null,"2024.6.7"]
[null,null,8,"RF off的互锁alarm降为log，只会刷新log不会上报warning和alarm，“PMA PMA Source RF cannot power on, gas or water or gas valve is off ","Released",null,"2024.6.9"]
[null,null,9,"将流气、水冷不满足条件的时候，互锁取消，该信息只显示在log中","Released",null,"2024.6.9"]
[null,null,10]
["1.0.0.9","新增功能",1,"新增加出现turn on fail的时候log中显示与射频厂商的通信日志","Released",null,"2024.8.1"]
[null,null,2]
[null,null,3]
[null,null,4]
[null,"解决Bug\n",1,"解决广川3P 机台read id报错的问题","Released",null,"2024.7.19"]
[null,null,2,"解决EFEM在load之后先回复INF，不回复EVT事件，无法创建作业的问题。\n在EFEM回INF信息时上位机软件直接查询EVT事件，一定时间内无法查询到状态变更报警，在Delay时间内查询到EVT事件后继续流程！","Released",null,"2024.8.1"]
[null,null,3,"解决EAP的log自动覆盖上一个log，不会新建新log的问题","Released",null,"2024.7.20"]
[null,null,4,"解决蜂鸣器buzzer off后重启软件才能将蜂鸣器重置的问题（积塔mars版本不包含此内容）","Released",null,"2024.7.20"]
[null,null,5]
[null,null,6]
["1.0.0.10","新增功能",1,"data Log页面的日志的倒序改成正序","Released",null,"2024.9.23"]
[null,null,2,"recipe报错后，recipe页面工艺步数会停留在报错的步数，主页面的elapsed时间也不再增加","Released",null,"2024.9.23"]
[null,null,3,"增加EAP断联后，RT页面显示Alarm 提示  ","Released",null,"2024.9.23"]
[null,null,4,"LP error的时候，在不影响正常工艺的条件下，红灯变亮，蜂鸣器变响","Released",null,"2024.9.23"]
[null,null,5,"增加由offline切到online的时候判断气体和射频的状态，如果为on，则置位off的功能","Released",null,"2024.9.23"]
[null,null,6,"修改117错误给到开关门信号的问题，vent会直接结束，直接下发开门指令的逻辑。修改为等待ATM信号灯变亮才会终止vent，下发开门指令","Released",null,"2024.9.23"]
[null,null,7,"更改原来打开CPU配置的时候，RT资源太大问题，使用另一种监控来监控CPU的占用率","Released",null,"2024.9.23"]
[null,null,8]
[null,null,9]
[null,null,10]
[null,"解决Bug\n",1,"修复afer history页面无法按照lot id检索的bug","Released",null,"2024.9.23"]
[null,null,2,"修复role配置read的时候，operation/overview页面仍可操作的问题。配置read时，将operation/overview页面按钮置灰","Released",null,"2024.9.23"]
[null,null,3,"将1.0.0.9版本117机台解决的buzzer off按钮只生效一下的同步到积塔版本","Released",null,"2024.9.23"]
[null,null,4,"修改sequence 只勾PMA2出现wafer不进腔的bug","Released"]
[null,null,5]
[null,null,6]
["1.0.0.11","新增功能",1,"增加systeme页面关于small,big凸片信号的尺寸，可配置不同尺寸对应凸片信号","Released",null,"2024.10.28"]
[null,null,2,"增加关于泵的factory scrubber功能，当没有改硬件的时候config的相应配置配置为false，有该硬件的时候配置为ture。为ture的配置，当相应IO信号为1时，腔体报警，同事关闭fast pump和soft pump阀","Released",null,"2024.10.28"]
[null,null,3]
[]
[]
[null,"bug",1]
[null,null,2]
[null,null,3]
["2.0.0.12","新增功能",1]
[null,null,2]
[null,null,3]
[null,"新增功能",4]
[null,null,5]
[null,"bug",1,"解决metis机台13槽的LP在EAP下发JOB的时候只能下发25槽的数组，\n且EAP下发数组的时候断联的问题。将EAP下发job的数组与RT中lp slot相关联","Released",null,"2024.11.28"]
["2.0.0.13",null,2]
[null,null,3]
["2.0.0.13","新增功能",1,"增加使用工艺气体进行purge的vent的功能"]
[null,null,2]
[null,null,3]
[null,"bug",1,"解决广川3P机台启用自动unload功能后，在job结束只要foup没有拿走，\nlog多次下发close door的指令","Released",null,"2024.12.4"]
[null,null,2,"解决开启自动read id功能后，当job结束移走料盒后，会出现解析INF&&EVT事件的delay，导致会在remove foup,出现一次Carrier arrived ，在read id时发现没有foup广川上报错误","Released",null,"2024.12.4"]
[]
[]
[]
["2.0.0.14","新增功能",1,"增加深圳经纬开物客户提出的recipe的事件可以关联到3107sequence id","Released",null,"2025.1.2"]
[null,null,2]
[null,null,3]
[null,"bug",1,"更改广川2P的版本read id的会出现error的问题","Released",null,"2025.1.2"]
[null,null,2]
[null,null,3]
[null,null,4]
[null,null,5]
["2.0.0.16","新增功能",1,"增加可以配置的logo","Released","配种logo的文件不能放到EfemDualUI文件夹下","2025.2.11"]
[null,null,2,"增加EAP的alarm id","Released",null,"2025.2.11"]
[null,null,3]
[]
[]
[]
[null,"bug",1,"解决硬件没有安装PMB，软件同样没有安装PMB后，机台无法正常跑片的bug","Released",null,"2025.2.18"]
[null,null,2]
[null,null,3]
["2.0.0.17","新增功能",1,"增加配置项实现客户想要执行一次cycle后，cycle功能自动关闭的配置","Released","0为需要客户手动关闭cycle功能\n1为执行一次cycle后自动关闭","2025.3.10"]
[null,null,2,"增加recipe执行循环步骤的功能","Released",null,"2025.3.10"]
[null,null,3,"增加process history页面可以选择C1,C2,bias RF 1,bias RF2 ,biasC1,bias C2 的功能","Released",null,"2025.3.10"]
[null,null,4,"增加可以完全显示process history页面的data的","Released",null,"2025.3.10"]
[null,null,5,"增加可以在主页面选择创建wafer尺寸的二级菜单","Released",null,"2025.3.10"]
[null,null,6]
[null,"bug",1]
[null,null,2]
[null,null,3]
["2.0.0.18","新增功能",1,"增加TM手臂home前后有无wafer对比的warning提示","Released",null,"2025.4.8"]
[null,null,2,"优化在EFEM Robot是busy时，使用EAP下发MAP指令后等待Robot not busy时继续执行map，不需要再次下发指令","Released",null,"2025.4.8"]
[null,null,3,"优化根据config中是否配置Match C1,C2，Bias Match C1，C2显示数据在UI->Datalog->Process History页面中","Released",null,"2025.4.8"]
[null,null,4]
[null,null,5]
[null,"bug",6]
[null,"bug",1,"解决EFEM前门打开&&关闭上报EFEM Door open的bug","Released",null,"2025.4.8"]
[null,null,2,"解决更改admin的密码后，重启RT密码更改失效的Bug","Released",null,"2025.4.8"]
[null,null,3,"完全rorze  TM手臂S2位报错的信息","Released",null,"2025.4.8"]
[null,null,4,"解决修改admin密码不成功的问题","Released",null,"2025.4.8"]
[null,null,5,"修改UI->Datalog->Process History 查询PMB 的C1，C2报错","Released",null,"2025.4.8"]
[]
["2.0.0.19","新增功能",1,"增加当腔体的GB_interlock灭的时候，腔体Home时初始化报错，不会变成idle的功能","Released",null,"2025.4.27"]
[null,null,2]
[null,null,3]
[null,null,4]
[null,"bug",1,"修改素珀2P机台，wafer突片后不上报alarm的bug","Released",null,"2025.4.27"]
[null,null,2,"修改广川3P机台load叠斜片wafer之后，wafer不实时状态显示到上位机中的bug","Released",null,"2025.4.27"]
[null,null,3]
[null,null,4]
["2.0.0.20","新增功能",1,"适配Metis124机台8寸Adapter改造-Overviews界面Load/Unload 界面按钮能不能点击不检查clamp信号\n","Testing",null,"2025.5.12"]
[null,null,2,"软件顶部界面Log，增加年月日显示","Testing",null,"2025.5.12"]
[null,null,3]
[null,null,4]
[null,null,5]
[null,null,6]
[null,"bug",1,"解决广川2P开关门放cst后的突片报错后，消除突片不能map的问题","Testing",null,"2025.5.14"]
[null,null,2]
[null,null,3]
[null,null,4]
["2.0.0.21","新增功能",1,"\n1.根据Config配置，是否启用LoadMap","Testing",null,"2025.5.19"]
[null,null,2,"2.增加Config配置机器人Mapping前检查手指上有无wafer","Testing",null,"2025.5.19"]
[null,null,3]
[null,null,4]
[null,null,5]
[null,null,6]
[null,"bug",1]
[null,null,2]
[null,null,3]
[null,null,4]
["2.0.0.22","新增功能",1,"  UI->WaferHistory UI->ProcessHistory  UI->DataHistory  查询数据时间范围限制2天内","Released",null,"2025.6.5"]
[null,null,2]
[null,null,3]
[null,null,4]
[null,null,5]
[null,"bug",1]
[null,null,2]
[null,null,3]
[null,null,4]
["2.0.0.23","新增功能",1,"应售后需求，TM下电后腔体TM is safety信号不满足时，腔体报警信息由alarm降级为warning","Released",null,"2025.6.20"]
[null,null,2,"增加当EFEM侧门打开时，EFEM状态变成error","Released",null,"2025.6.20"]
[null,null,3]
[null,null,4]
[null,null,5]
[null,"bug",1]
[null,null,2]
[null,null,3]
[null,null,4]

{"sheet":"Mars300","index":3,"n_rows":37,"n_cols":8,"rows_kept":37,"cut":false,"hidden":false,"merged":[[1,0,26,0],[27,0,36,0],[1,1,21,1],[22,1,26,1],[27,1,31,1],[32,1,36,1]]}
["软件版本","类别","编号","升级内容","状态（ Released/Testing）","操作注意事项","release时间","备注"]
["3.0.0.15","新增功能",1,"增加PLC send,receivr监控功能，如果通信时长超过设定值，log中显示通信的时间。配置为0的时候为不启用"," Released"]
[null,null,2,"新增加系统资源功能，可根据设定时间将系统资源的大小显示到log中。配置为0则为不启用，目前该配置会将RT的系统资源放大，默认为不启用"," Released"]
[null,null,3,"更改通信方式，使与PLC断联后温度可正常设定"," Released"]
[null,null,4,"修改EAP出现断联问题"," Released"]
[null,null,5,"增加监控占用cpu过高的软件，并以log的形式监控"," Released"]
[null,null,6,"修改了数据库在recipe结束的时候，依旧出现有set point值的问题。该数据为假数据，显示在数据库中"," Released"]
[null,null,7,"修改了不查询data log数据的时候，data log页面依旧将所有log显示，导致页面卡死的问题。优化为只有主动查询才会显示数据"," Released"]
[null,null,8,"优化data log页面查询数据过多，会影响与PLC通信问题。优化为目前data log页面数据只能查询7天，页面做分页处理"," Released"]
[null,null,9,"解决EAP的log自动覆盖上一个log，不会新建新log的问题","Testing"]
[null,null,10,"解决蜂鸣器buzzer off后重启软件才能将蜂鸣器重置的问题（积塔mars版本不包含此内容）"," Released"]
[null,null,11,"data Log页面的日志的倒序改成正序"," Released"]
[null,null,12,"recipe报错后，recipe页面工艺步数会停留在报错的步数，主页面的elapsed时间也不再增加"," Released"]
[null,null,13,"增加EAP断联后，RT页面显示Alarm 提示  "," Released"]
[null,null,14,"LP error的时候，在不影响正常工艺的条件下，红灯变亮，蜂鸣器变响"," Released"]
[null,null,15,"修复afer history页面无法按照lot id检索的bug","Testing"]
[null,null,16,"修复role配置read的时候，operation/overview页面仍可操作的问题。配置read时，将operation/overview页面按钮置灰","Testing"]
[null,null,17,"增加creat job之后，不abort job违规对LP进行Home操作，job不终止会继续存在的防呆模式"," Released"]
[null,null,18,"增加深圳经纬开物客户提出的recipe的事件可以关联到3107sequence id","Testing"]
[null,null,19]
[null,null,20]
[null,null,21]
[null,"解决Bug"]
[]
[]
[]
[]
["3.0.0.16","新增功能",1,"AWC和statistics和mfc calibration&&TM离线","Testing"]
[null,null,2]
[null,null,3]
[null,null,4]
[null,null,5]
[null,"解决Bug",1]
[null,"解决Bug",2]
[null,null,3]
[null,null,4]
[null,null,5]