{"text_format":"2","workbook":"xlsx","n_sheets":6,"sheets":["DI-DO","AI","AO","IP Address","PM HW interlock draft","PM PLC interlock draft"],"not_rendered":{"charts":0,"images":0,"macros":0,"external_links":0,"defined_names":1,"comments":0,"pivot_tables":0},"unopened":[],"bounds":{"document_bytes":16777216,"sheet_cells":100000,"run_cost":"one","rows_first":2000,"rows_last":500,"rows_between":2000,"halvings":0,"cell_chars":16384,"cell_head_chars":4096},"cells_cut":0,"cells_raw":0,"read":"whole","date_system":"1900"}

{"sheet":"DI-DO","index":0,"n_rows":120,"n_cols":15,"rows_kept":120,"cut":false,"hidden":false,"merged":[]}
[null,"#.DI","Name","Note","Logic Note","Location","Remark",null,null,"#.DO","Name","Note","Logic Note","Location","Remark"]
[null,"DI-00","LLA1 AWC Sensor",null,"1:At LLA1 AWC Sensor Pos\n0:Not At LLA1 AWC Sensor Pos","w20.00",null,null,null,"DO-00","EFEM Robot Arm Extend to LLA Enable",null,"1:EFEM Robot Arm Extend to LLA Enable","w0.00"]
[null,"DI-01","LLA2 AWC Sensor",null,"1:At LLA2 AWC Sensor Pos\n0:Not At LLA2 AWC Sensor Pos","w20.01",null,null,null,"DO-01","EFEM Robot Arm Extend to LLB Enable",null,"1:EFEM Robot Arm Extend to LLB Enable","w0.01"]
[null,"DI-02","LLB1 AWC Sensor",null,"1:At LLB1 AWC Sensor Pos\n0:Not At LLB1 AWC Sensor Pos","w20.02",null,null,null,"DO-02","Water Flow1 OK",null,"1:Water Flow1 OK","w0.02"]
[null,"DI-03","LLB2 AWC Sensor",null,"1:At LLB2 AWC Sensor Pos\n0:Not At LLB2 AWC Sensor Pos","w20.03",null,null,null,"DO-03","Water Flow2 OK",null,"1:Water Flow2 OK","w0.03"]
[null,"DI-04","PMA1 AWC  Sensor L",null,"1:At PMA1 AWC  Sensor L Pos\n0:Not PMA1 AWC  Sensor L Pos","w20.04",null,null,null,"DO-04","System No Leak",null,"1:System No Leak","w0.04"]
[null,"DI-05","PMA1 AWC  Sensor R",null,"1:At PMA1 AWC  Sensor R Pos\n0:Not At PMA1 AWC  Sensor R Pos","w20.05",null,null,null,"DO-05","System CDA Pressure ok",null,"1:System CDA Pressure ok","w0.05"]
[null,"DI-06","PMA2 AWC  Sensor L",null,"1:At PMA2 AWC  Sensor L Pos\n0:Not At PMA2 AWC  Sensor L Pos","w20.06",null,null,null,"DO-06","Spare",null,"spare","w0.06"]
[null,"DI-07","PMA2 AWC  Sensor R",null,"1:At PMA2 AWC  Sensor R Pos\n0:Not At PMA2 AWC  Sensor R Pos","w20.07",null,null,null,"DO-07","TM Robot EXTEND LLA Enable",null,"1:TM Robot EXTEND LLA Enable","w0.07"]
[null,"DI-08","PMB1 AWC  Sensor L",null,"1:At PMB1 AWC  Sensor L Pos\n0:Not PMB1 AWC  Sensor L Pos","w20.08",null,null,null,"DO-08","TM Robot EXTEND LLB Enable",null,"1:TM Robot EXTEND LLB Enable","w0.08"]
[null,"DI-09","PMB1 AWC  Sensor R",null,"1:At PMB1 AWC  Sensor R Pos\n0:Not At PMB1 AWC  Sensor R Pos","w20.09",null,null,null,"DO-09","TM Robot EXTEND PMA Enable",null,"1:TM Robot EXTEND PMA Enable","w0.09"]
[null,"DI-10","PMB2 AWC  Sensor L",null,"1:At PMB2 AWC  Sensor L Pos\n0:Not At PMB2 AWC  Sensor L Pos","w20.10",null,null,null,"DO-10","TM Robot EXTEND PMB Enable",null,"1:TM Robot EXTEND PMB Enable","w0.10"]
[null,"DI-11","PMB2 AWC  Sensor R",null,"1:At PMB2 AWC  Sensor R Pos\n0:Not At PMB2 AWC  Sensor R Pos","w20.11",null,null,null,"DO-11","TM Robot EXTEND PMC Enable",null,"1:TM Robot EXTEND PMC Enable","w0.11"]
[null,"DI-12","PMC1 AWC  Sensor L",null,"1:At PMC1 AWC  Sensor L Pos\n0:Not At PMC1 AWC  Sensor L Pos","w20.12",null,null,null,"DO-12","spare",null,"spare","w0.12"]
[null,"DI-13","PMC1 AWC  Sensor R",null,"1:At PMC1 AWC  Sensor R Pos\n0:Not At PMC1 AWC  Sensor R Pos","w20.13",null,null,null,"DO-13","spare",null,"spare","w0.13"]
[null,"DI-14","PMC2 AWC  Sensor L",null,"1:At PMC2 AWC  Sensor L Pos\n0:Not At PMC2 AWC  Sensor L Pos","w20.14",null,null,null,"DO-14","spare",null,"spare","w0.14"]
[null,"DI-15","PMC2 AWC  Sensor R",null,"1:At PMC2 AWC  Sensor R Pos\n0:Not At PMC2 AWC  Sensor R Pos","w20.15",null,null,null,"DO-15","spare",null,"spare","w0.15"]
[null,"DI-16","LLA1-EFEM Slit Door Open Pos",null,"1: LLA1-EFEM Slit Valve Opened Pos \n0: LLA1-EFEM Slit Valve Not At Opened Pos","w21.00",null,null,null,"DO-16","spare",null,"spare","w1.00"]
[null,"DI-17","LLA1-EFEM Slit Door Colse Pos",null,"1: LLA1-EFEM Slit Valve Colsed Pos \n0: LLA1-EFEM Slit Valve Not At Opened Pos","w21.01",null,null,null,"DO-17","Spare",null,"Spare","w1.01"]
[null,"DI-18","LLA2-EFEM  Slit Door Open Pos",null,"1: LLA2-EFEM  Slit Valve Opened Pos \n0: LLA2-EFEM  Slit Valve Not At Opened Pos","w21.02",null,null,null,"DO-18","System Power Off",null,"1:System Power Off","w1.02"]
[null,"DI-19","LLA2-EFEM  Slit Door Colse Pos",null,"1: LLA2-EFEM  Slit Valve Closed Pos \n0: LLA2-EFEM  Slit Valve Not At Closed Pos","w21.03",null,null,null,"DO-19","RF RACK WATER VALVE",null,"1:RF RACK WATER VALVE Open  \n0: RF RACK WATER VALVE Close","w1.03"]
[null,"DI-20","LLB1-EFEM  Slit Door Open Pos",null,"1: LLB1-EFEM  Slit Valve Opened Pos \n0: LLB1-EFEM  Slit Valve Not At Opened Pos","w21.04",null,null,null,"DO-20","Spare",null,"spare","w1.04"]
[null,"DI-21","LLB1-EFEM  Slit Door Colse Pos",null,"1: LLB1-EFEM  Slit Valve Closed Pos \n0: LLB1-EFEM  Slit Valve Not At Closed Pos","w21.05",null,null,null,"DO-21","Spare",null,"spare","w1.05"]
[null,"DI-22","LLB2-EFEM  Slit Door Open Pos",null,"1: LLB2-EFEM  Slit Valve Opened Pos \n0: LLB2-EFEM  Slit Valve Not At Opened Pos","w21.06",null,null,null,"DO-22","Spare",null,"spare","w1.06"]
[null,"DI-23","LLB2-EFEM  Slit Door Colse Pos",null,"1: LLB2-EFEM  Slit Valve Closed Pos \n0: LLB2-EFEM  Slit Valve Not At Closed Pos","w21.07",null,null,null,"DO-23","Spare",null,"spare","w1.07"]
[null,"DI-24","LLA1-TM Slit Door Open Pos",null,"1: LLA1-TM Slit Valve Opened Pos\n0: LLA1-TM Slit Valve Not At Opened Pos","w21.08",null,null,null,"DO-24","Spare",null,"spare","w1.08"]
[null,"DI-25","LLA1-TM  Slit Door Colse Pos",null,"1: LLA1-TM Slit Valve Colsed Pos \n0: LLA1-TM Slit Valve Not At Opened Pos","w21.09",null,null,null,"DO-25","TM_Fast VENT ",null,"1:TM_Fast VENT Valve Open  \n0: TM_Fast VENT Valve Close","w1.09"]
[null,"DI-26","LLA2-TM Slit Door Open Pos",null,"1: LLA2-TM Slit Valve Opened Pos \n0: LLA2-TM Slit Valve Not At Opened Pos","w21.10",null,null,null,"DO-26","TM_Slow VENT ",null,"1:TM_Slow VENT Valve Open  \n0: TM_Slow VENT Valve Close","w1.10"]
[null,"DI-27","LLA2-TM  Slit Door Colse Pos",null,"1: LLA2-TM  Slit Valve Colsed Pos \n0: LLA2-TM  Slit Valve Not At Opened Pos","w21.11",null,null,null,"DO-27","LLB_Slow VENT ",null,"1:LLB_Slow VENT Valve Open  \n0: LLB_Slow VENT Valve Close","w1.11"]
[null,"DI-28","LLB1-TM Slit Door Open Pos",null,"1: LLB1-TM  Slit Valve Opened Pos \n0: LLB1-TM  Slit Valve Not At Opened Pos","w21.12",null,null,null,"DO-28","LLB_Fast VENT ",null,"1:LLB_Fast VENT Valve Open  \n0:LLB_Fast VENT Valve Close","w1.12"]
[null,"DI-29","LLB1-TM  Slit Door Colse Pos",null,"1: LLB1-TM  Slit Valve Colsed Pos \n0: LLB1-TM  Slit Valve Not At Opened Pos","w21.13",null,null,null,"DO-29","LLA_Slow VENT ",null,"1:LLA_Slow VENT Valve Open  \n0:LLA_Slow VENT Valve Close","w1.13"]
[null,"DI-30","LLB2-TM Slit Door Open Pos",null,"1: LLB2-TM  Slit Valve Opened Pos \n0: LLB2-TM  Slit Valve Not At Opened Pos","w21.14",null,null,null,"DO-30","LLA_Fast VENT ",null,"1:LLA_Fast VENT Valve Open  \n0: LLA_Fast VENT Valve Close","w1.14"]
[null,"DI-31","LLB2-TM  Slit Door Colse Pos",null,"1: LLB2-TM  Slit Valve Closed Pos \n0: LLB2-TM  Slit Valve Not At Closed Pos","w21.15",null,null,null,"DO-31","TM_Slow Pumping ",null,"1:TM_Slow Pumping Valve Open  \n0: TM_Slow Pumping Valve Close","w1.15"]
[null,"DI-32","PMA1 Slit Door Open Pos",null,"1: PMA1 Slit Valve Opened Pos \n0: PMA1  Slit Valve Not At Opened Pos","w22.00",null,null,null,"DO-32","TM_Fast Pumping ",null,"1:TM_Fast Pumping Valve Open  \n0: TM_Fast Pumping Valve Close","w2.00"]
[null,"DI-33","PMA1 Slit Door Colse Pos",null,"1: PMA1 Slit Valve Closed Pos \n0: PMA1 Slit Valve Not At Opened Pos","w22.01",null,null,null,"DO-33","LLA_Slow Pumping ",null,"1:LLA_Slow Pumping Valve Open  \n0: LLA_Slow Pumping Valve Close","w2.01"]
[null,"DI-34","PMA2 Slit Door Open Pos",null,"1: PMA2 Slit Valve Opened Pos \n0: PMA2 Slit Valve Not At Opened Pos","w22.02",null,null,null,"DO-34","LLA_Fast Pumping ",null,"1:LLA_Fast Pumping Valve Open  \n0: LLA_Fast Pumping Valve Close","w2.02"]
[null,"DI-35","PMA2 Slit Door Colse Pos",null,"1: PMA2 Slit Valve Closed Pos \n0: PMA2 Slit Valve Not At Opened Pos","w22.03",null,null,null,"DO-35","LLB_Slow Pumping ",null,"1:LLB_Slow Pumping Valve Open  \n0: LLB_Slow Pumping Valve Close","w2.03"]
[null,"DI-36","PMB1 Slit Door Open Pos",null,"1: PMB1 Slit Valve Opened Pos \n0: PMB1 Slit Valve Not At Opened Pos","w22.04",null,null,null,"DO-36","LLB_Fast Pumping ",null,"1:LLB_Fast Pumping Valve Open  \n0: LLB_Fast Pumping Valve Close","w2.04"]
[null,"DI-37","PMB1 Slit Door Colse Pos",null,"1: PMB1 Slit Valve Closed Pos \n0: PMB1 Slit Valve Not At Closed Pos","w22.05",null,null,null,"DO-37","Spare",null,"Spare","w2.05"]
[null,"DI-38","PMB2 Slit Door Open Pos",null,"1: PMB2 Slit Valve Opened Pos \n0: PMB2 Slit Valve Not At Opened Pos","w22.06",null,null,null,"DO-38","Spare",null,"Spare","w2.06"]
[null,"DI-39","PMB2 Slit Door Colse Pos",null,"1: PMB2 Slit Valve Closed Pos \n0: PMB2 Slit Valve Not At Closed Pos","w22.07",null,null,null,"DO-39","Spare",null,"Spare","w2.07"]
[null,"DI-40","PMC1 Slit Door Open Pos",null,"1: PMC1 Slit Valve Opened Pos \n0: PMC1 Slit Valve Not At Opened Pos","w22.08",null,null,null,"DO-40","Spare",null,"Spare","w2.08"]
[null,"DI-41","PMC1 Slit Door Colse Pos",null,"1: PMC1 Slit Valve Closed Pos \n0: PMC1 Slit Valve Not At Closed Pos","w22.09",null,null,null,"DO-41","PMA1 Slit Door Open",null,"1:PMA1 Slit Door Open Open","w2.09"]
[null,"DI-42","PMC2 Slit Door Open Pos",null,"1: PMB2 Slit Valve Opened Pos \n0: PMB2 Slit Valve Not At Opened Pos","w22.10",null,null,null,"DO-42","PMA1 Slit Door Close",null,"1:PMA1 Slit Door Close","w2.10"]
[null,"DI-43","PMC2 Slit Door Colse Pos",null,"1: PMB2 Slit Valve Closed Pos \n0: PMB2 Slit Valve Not At Closed Pos","w22.11",null,null,null,"DO-43","PMA2 Slit Door Open",null,"1:PMA2 Slit Door Open","w2.11"]
[null,"DI-44","PMA2 SLIT DOOR OPEN ENABLE",null,"1: PMA2-TM SLIT DOOR OPEN/CLOSE Allow\n0: PMA2-TM SLIT DOOR OPEN/CLOSE Not Allow","w22.12",null,null,null,"DO-44","PMA2 Slit Door Close",null,"1:PMA2 Slit Door Close","w2.12"]
[null,"DI-45","PMB2 SLIT DOOR OPEN ENABLE",null,"1: PMB2-TM SLIT DOOR OPEN/CLOSE Allow\n0: PMB2-TM SLIT DOOR OPEN/CLOSE Not Allow","w22.13",null,null,null,"DO-45","PMC1 Slit Door Open",null,"1:PMC1 Slit Door Open","w2.13"]
[null,"DI-46","PMC2 SLIT DOOR OPEN ENABLE",null,"1: PMC2-TM SLIT DOOR OPEN/CLOSE Allow\n0: PMC2-TM SLIT DOOR OPEN/CLOSE Not Allow","w22.14",null,null,null,"DO-46","PMC1 Slit Door Close",null,"1:PMC1 Slit Door Close","w2.14"]
[null,"DI-47","PMA2 TO TM RB INTERLOCK IN SPARE",null,"Spare","w22.15",null,null,null,"DO-47","PMC2 Slit Door Open",null,"1:PMC2 Slit Door Open","w2.15"]
[null,"DI-48","PMB2 TO TM RB INTERLOCK IN SPARE",null,"Spare","w23.00",null,null,null,"DO-48","PMC2 Slit Door Close",null,"1:PMC2 Slit Door Close","w3.00"]
[null,"DI-49","PMC2 TO TM RB INTERLOCK IN SPARE",null,"Spare","w23.01",null,null,null,"DO-49","PMB1 Slit Door Open",null,"1:PMB1 Slit Door Open","w3.01"]
[null,"DI-50","EFEM Robot Arm Not Extend to LLA",null,"1: EFEM Robot Arm Not Extend to LLA\n0: EFEM Robot Arm Extend to LLA","w23.02",null,null,null,"DO-50","PMB1 Slit Door Close",null,"1:PMB1 Slit Door Close","w3.02"]
[null,"DI-51","EFEM Side Door Closed L",null,"1: EFEM Side Door Closed L\n0: EFEM Side Door Opened L","w23.03",null,null,null,"DO-51","PMB2 Slit Door Open",null,"1:PMB2 Slit Door Open","w3.03"]
[null,"DI-52","EFEM Robot Arm Not Extend to LLB",null,"1: EFEM Robot Arm Not Extend to LLB\n0: EFEM Robot Arm Extend to LLB","w23.04",null,null,null,"DO-52","PMB2 Slit Door Close",null,"1:PMB2 Slit Door Close","w3.04"]
[null,"DI-53","EFEM Side Door Closed R",null,"1: EFEM Side Door Closed R\n0: EFEM Side Door Opened R","w23.05",null,null,null,"DO-53","Spare",null,"Spare","w3.05"]
[null,"DI-54","PMA1 SLIT DOOR OPEN ENABLE",null,"1: PMA1-TM SLIT DOOR OPEN/CLOSE Allow\n0: PMA1-TM SLIT DOOR OPEN/CLOSE Not Allow","w23.06",null,null,null,"DO-54","Spare",null,"Spare","w3.06"]
[null,"DI-55","TM RB EXTEND PMA ENABLE",null,"1: PMA-TM RB EXTEND PMA Allow\n0: PMA-TM RB EXTEND PMA Not Allow","w23.07",null,null,null,"DO-55","Spare",null,"Spare","w3.07"]
[null,"DI-56","PMB1 SLIT DOOR OPEN ENABLE",null,"1: PMB1-TM SLIT DOOR OPEN/CLOSE Allow\n0: PMB1-TM SLIT DOOR OPEN/CLOSE Not Allow","w23.08",null,null,null,"DO-56","Spare",null,"Spare","w3.08"]
[null,"DI-57","TM RB EXTEND PMB ENABLE",null,"1: PMB-TM RB EXTEND PMA Allow\n0: PMB-TM RB EXTEND PMA Not Allow","w23.09",null,null,null,"DO-57","LLA1-TM Slit Door Open",null,"1: LLA1-TM Slit Door Open","w3.09"]
[null,"DI-58","PMC1 SLIT DOOR OPEN ENABLE",null,"1: PMC1-TM SLIT DOOR OPEN/CLOSE Allow\n0: PMC1-TM SLIT DOOR OPEN/CLOSE Not Allow","w23.10",null,null,null,"DO-58","LLA1-TM Slit Door Close",null,"1: LLA1-TM Slit Door Close","w3.10"]
[null,"DI-59","TM RB EXTEND PMC ENABLE",null,"1: PMC-TM RB EXTEND PMA Allow\n0: PMC-TM RB EXTEND PMA Not Allow","w23.11",null,null,null,"DO-59","LLA2-TM Slit Door Open",null,"1: LLA2-TM Slit Door Open","w3.11"]
[null,"DI-60","TM RB Arm Not In LLA",null,"1: TM RB Arm Not In LLA\n0: TM RB Arm In LLA","w23.12",null,null,null,"DO-60","LLA2-TM Slit Door Close",null,"1: LLA2-TM Slit Door Close","w3.12"]
[null,"DI-61","TM RB Arm Not In LLB",null,"1: TM RB Arm Not In LLB\n0: TM RB Arm In LLB","w23.13",null,null,null,"DO-61","LLB1-TM Slit Door Open",null,"1: LLB1-TM Slit Door Open","w3.13"]
[null,"DI-62","TM RB Arm Not In PMA",null,"1: TM RB Arm Not In PMA\n0: TM RB Arm In PMA","w23.14",null,null,null,"DO-62","LLB1-TM Slit Door Close",null,"1: LLB1-TM Slit Door Close","w3.14"]
[null,"DI-63","TM RB Arm Not In PMB",null,"1: TM RB Arm Not In PMB\n0: TM RB Arm In PMB","w23.15",null,null,null,"DO-63","LLB2-TM Slit Door Open",null,"1: LLB2-TM Slit Door Open","w3.15"]
[null,"DI-64","TM RB Arm Not In PMC",null,"1: TM RB Arm Not In PMC\n0: TM RB Arm In PMC","w24.00",null,null,null,"DO-64","LLB2-TM Slit Door Close",null,"1: LLB2-TM Slit Door Close","w4.00"]
[null,"DI-65","LLA1 Lid Closed",null,"1: LLA1 Lid Closed\n0: LLA1 Lid Not Closed","w24.01",null,null,null,"DO-65","EFEM-LLA1 Slit Door Open",null,"1: EFEM-LLA1 Slit Door Open","w4.01"]
[null,"DI-66","LLA2 Lid Closed",null,"1: LLA2 Lid Closed\n0: LLA2 Lid Not Closed","w24.02",null,null,null,"DO-66","EFEM-LLA1 Slit Door Close",null,"1: EFEM-LLA1 Slit Door Close","w4.02"]
[null,"DI-67","LLA1 protrude L",null,"1: LLA1 protrude L\n0: LLA1 Not protrude L.","w24.03",null,null,null,"DO-67","EFEM-LLA2 Slit Door Open",null,"1: EFEM-LLA2 Slit Door Open","w4.03"]
[null,"DI-68","LLA1 protrude R",null,"1: LLA1 protrude R\n0: LLA1 Not protrude R","w24.04",null,null,null,"DO-68","EFEM-LLA2 Slit Door Close",null,"1: EFEM-LLA2 Slit Door Close","w4.04"]
[null,"DI-69","LLA2 protrude L",null,"1: LLA2 protrude L\n0: LLA2 Not protrude L","w24.05",null,null,null,"DO-69","EFEM-LLB1 Slit Door Open",null,"1: EFEM-LLB1 Slit Door Open","w4.05"]
[null,"DI-70","LLA2 protrude R",null,"1: LLA2 protrude R\n0: LLA2 Not protrude R","w24.06",null,null,null,"DO-70","TM LID Lamp",null,"1:TM LID Lamp ON","w4.06"]
[null,"DI-71","spare",null,null,"w24.07",null,null,null,"DO-71","LLA LID Lamp",null,"1:LLA LID Lamp ON","w4.07"]
[null,"DI-72","LLA Angle Valve Closed",null,"1: LLA Angle Valve Closed Pos\n0: LLA Angle Valve Not Closed Pos","w24.08",null,null,null,"DO-72","LLB LID Lamp",null,"1:LLB LID Lamp ON","w4.08"]
[null,"DI-73","LLB1 Lid Closed",null,"1: LLB1 Lid Closed\n0: LLB1 Lid Not Closed","w24.09",null,null,null,"DO-73","Robot Arm Not In LLA Lamp",null,"1:Robot Arm Not In LLA Lamp ON","w4.09"]
[null,"DI-74","LLB2 Lid Closed",null,"1: LLB2 Lid Closed\n0: LLB2 Lid Not Closed","w24.10",null,null,null,"DO-74","Robot Arm Not In LLB Lamp",null,"1:Robot Arm Not In LLB Lamp ON","w4.10"]
[null,"DI-75","LLB1 protrude L",null,"1: LLB1 protrude L\n0: LLB1 Not protrude L","w24.11",null,null,null,"DO-75","Robot Arm Not In PMA Lamp",null,"1:Robot Arm Not In PMA Lamp ON","w4.11"]
[null,"DI-76","LLB1 protrude R",null,"1: LLB1 protrude R\n0: LLB1 Not protrude R","w24.12",null,null,null,"DO-76","Robot Arm Not In PMB Lamp",null,"1:Robot Arm Not In PMB Lamp ON","w4.12"]
[null,"DI-77","LLB2 protrude L",null,"1: LLB2 protrude L\n0: LLB2 Not protrude L","w24.13",null,null,null,"DO-77","Robot Arm Not In PMC Lamp",null,"1:Robot Arm Not In PMC Lamp ON","w4.13"]
[null,"DI-78","LLB2 protrude R",null,"1: LLB2 protrude R\n0: LLB2 Not protrude R","w24.14",null,null,null,"DO-78","Spare",null,"Spare","w4.14"]
[null,"DI-79","TM ATM",null,"1: TM ATM OK","w24.15",null,null,null,"DO-79","Spare",null,"Spare","w4.15"]
[null,"DI-80","LLB Angle Valve Closed",null,"1: LLB Angle Valve Closed Pos\n0: LLB Angle Valve Not Closed Pos","w25.00",null,null,null,"DO-80","EFEM-LLB1 Slit Door Close",null,"1:EFEM-LLB1 Slit Door Close","w5.00"]
[null,"DI-81","TM Lid Closed",null,"1: TM Lid Closed\n0: TM Lid Not Closed","w25.01",null,null,null,"DO-81","EFEM-LLB2 Slit Door Open",null,"1:EFEM-LLB2 Slit Door Open","w5.01"]
[null,"DI-82","CDA Pressure OK",null,"1: CDA Pressure OK\n0: CDA Pressure  Alarm","w25.02",null,null,null,"DO-82","EFEM-LLB2 Slit Door Close",null,"1:EFEM-LLB2 Slit Door Close","w5.02"]
[null,"DI-83","N2 Pressure OK",null,"1: N2 Pressure OK\n0: N2 Pressure  Alarm","w25.03",null,null,null,"DO-83","Main Water Valve ",null,"1:MainWaterValve Open","w5.03"]
[null,"DI-84","spare",null,"spare","w25.04",null,null,null,"DO-84",null,null,null,"w5.04"]
[null,"DI-85","Robot Arm Interlock Out TO PMA SPARE",null,"spare","w25.05",null,null,null,"DO-85",null,null,null,"w5.05"]
[null,"DI-86","Robot Arm Interlock Out TO PMB SPARE",null,"spare","w25.06",null,null,null,"DO-86",null,null,null,"w5.06"]
[null,"DI-87","Robot Arm Interlock Out TO PMC SPARE",null,"spare","w25.07",null,null,null,"DO-87",null,null,null,"w5.07"]
[null,"DI-88","EMO Ready",null,"1:EMO Ready\n0:EMO  Alarm","w25.08",null,null,null,"DO-88",null,null,null,"w5.08"]
[null,"DI-89","spare",null,"spare","w25.09",null,null,null,"DO-89",null,null,null,"w5.09"]
[null,"DI-90","TM Angle Valve Closed",null,"1: TM Angle Valve Closed Pos\n0: TM Angle Valve Not Closed Pos","w25.10",null,null,null,"DO-90",null,null,null,"w5.10"]
[null,"DI-91","System Water Leak SW",null,"1: System  No Leak\n0: System Leak Alarm","w25.11",null,null,null,"DO-91",null,null,null,"w5.11"]
[null,"DI-92","Leak Tape No Broken",null,"1: Leak Tape No Broken\n0: Leak Tape Broken Alarm","w25.12",null,null,null,"DO-92",null,null,null,"w5.12"]
[null,"DI-93","RF RACK FANS OK",null,"1: RF RACK FANS OK\n0: RF RACK FANS WARNING","w25.13",null,null,null,"DO-93",null,null,null,"w5.13"]
[null,"DI-94","RF RACK SMOKE OK",null,"1: RF RACK SMOKE OK\n0: RF RACK SMOKE WARNING","w25.14",null,null,null,"DO-94",null,null,null,"w5.14"]
[null,"DI-95","RF RACK WATER LEAK OK",null,"1: RF RACK FANS OK\n0: RF RACK FANS ALARM","w25.15",null,null,null,"DO-95",null,null,null,"w5.15"]
[null,"DI-96","AC RACK FANS OK",null,"1: RF RACK WATER LEAK OK\n0: RF RACK WATER LEAK  WARNING","w26.00",null,null,null,"DO-96",null,null,null,"w6.00"]
[null,"DI-97","AC RACK SMOKE OK",null,"1: AC RACK SMOKE OK\n0: AC RACK SMOKE WARNING","w26.01",null,null,null,"DO-97",null,null,null,"w6.01"]
[null,"DI-98","FA SMOKE OK",null,"1: FA SMOKE OK\n0: FA SMOKE WARNING","w26.02",null,null,null,"DO-98",null,null,null,"w6.02"]
[null,"DI-99",null,null,null,"w26.03",null,null,null,"DO-99",null,null,null,"w6.03"]
[null,"DI-100",null,null,null,"w26.04",null,null,null,"DO-100",null,null,null,"w6.04"]
[null,"DI-101",null,null,null,"w26.05",null,null,null,"DO-101",null,null,null,"w6.05"]
[null,"DI-102",null,null,null,"w26.06",null,null,null,"DO-102",null,null,null,"w6.06"]
[null,"DI-103",null,null,null,"w26.07",null,null,null,"DO-103",null,null,null,"w6.07"]
[null,"DI-104",null,null,null,"w26.08",null,null,null,"DO-104",null,null,null,"w6.08"]
[null,"DI-105",null,null,null,"w26.09",null,null,null,"DO-105",null,null,null,"w6.09"]
[null,"DI-106",null,null,null,"w26.10",null,null,null,"DO-106",null,null,null,"w6.10"]
[null,"DI-107",null,null,null,"w26.11",null,null,null,"DO-107",null,null,null,"w6.11"]
[null,"DI-108",null,null,null,"w26.12",null,null,null,"DO-108",null,null,null,"w6.12"]
[null,"DI-109",null,null,null,"w26.13",null,null,null,"DO-109",null,null,null,"w6.13"]
[null,"DI-110",null,null,null,"w26.14",null,null,null,"DO-110",null,null,null,"w6.14"]
[null,"DI-111",null,null,null,"w26.15",null,null,null,"DO-111",null,null,null,"w6.15"]
[]
[]
[]
[]
[null,null,"新增"]
[null,null,"修改"]
[null,null,"删除"]

{"sheet":"AI","index":1,"n_rows":96,"n_cols":13,"rows_kept":96,"cut":false,"hidden":false,"merged":[]}
["Node No.",{"$nulls":5},"ID","Range","Device Name","Note","Logic note","date type","Remark"]
["AI-00",null,2033,"D3554","D3860","D3862","D2000","0-1000.000","LLA  Pressure","0-1000000 mTorr",null,"float"]
["AI-01",{"$nulls":5},"D2002","0-1000.000","LLB Pressure","0-1000000 mTorr",null,"float"]
["AI-02",{"$nulls":5},"D2004","0-1000.000","TM Pressure","0-1000000 mTorr",null,"float"]
["AI-03",{"$nulls":5},"D2006","0-1000.000","TM ForeLine Pressure","0-1000000 mTorr",null,"float"]
["AI-04",{"$nulls":5},"D2008","0-1000.000","LLA/B ForeLine  Pressure","0-1000000 mTorr",null,"float"]
["AI-05",{"$nulls":5},"D2010","0-100.00","MFC1 Flow","0-100%量程",null,"float","TM腔"]
["AI-06",{"$nulls":5},"D2012","0-100.00","MFC2 Flow","0-100%量程",null,"float","LLA腔 预留"]
["AI-07",{"$nulls":5},"D2014","0-100.00","MFC3 Flow","0-100%量程",null,"float","LLB腔 预留"]
["AI-08",{"$nulls":5},"D2016"]
["AI-09",{"$nulls":5},"D2018"]
["AI-10",{"$nulls":5},"D2020"]
["AI-11"]
["AI-12"]
["AI-13"]
["AI-14"]
["AI-15"]
["AI-16"]
["AI-17"]
["AI-18"]
["AI-19"]
["AI-20"]
["AI-21"]
["AI-22"]
["AI-23"]
["AI-24"]
["AI-25"]
["AI-26"]
["AI-27"]
["AI-28"]
["AI-29"]
["AI-30"]
["AI-31"]
["AI-32"]
["AI-33"]
["AI-34"]
["AI-35"]
["AI-36"]
["AI-37"]
["AI-38"]
["AI-39"]
["AI-40"]
["AI-41"]
["AI-42"]
["AI-43"]
["AI-44"]
["AI-45"]
["AI-46"]
["AI-47"]
["AI-48"]
["AI-49"]
[]
[]
[null,"新增"]
[null,"修改"]
[null,"删除"]
{"$rows_empty":37}
[{"$nulls":6},"新增"]
[{"$nulls":6},"修改"]
[{"$nulls":6},"删除"]

{"sheet":"AO","index":2,"n_rows":97,"n_cols":7,"rows_kept":97,"cut":false,"hidden":false,"merged":[[41,6,42,6]]}
["Node No.","ID","Range","Device Name","Logic note","date type","Remark"]
["AO-00","d1000","0-100.00","MFC1 Flow Setpoint","0-100.00对应 MFC 0~100%开度","float","TM 腔流量控制"]
["AO-01","d1002","0-100.00","MFC2 Flow Setpoint","0-100.00对应 MFC 0~100%开度","float","LLA 腔流量控制 预留"]
["AO-02","d1004","0-100.00","MFC3 Flow Setpoint","0-100.00对应 MFC 0~100%开度","float","LLB 腔流量控制 预留"]
["AO-03","d1006",null,null,null,"float"]
["AO-04","d1008",null,null,null,"float"]
["AO-05","d1010","0-4000","TM Pressure Setpoint","unit:mtorr","float"]
["AO-06","d1012",null,null,null,"float"]
["AO-07","d1014",null,null,null,"float"]
["AO-08","d1016",null,null,null,"float"]
["AO-09","d1018",null,null,null,"float"]
["AO-10","d1020","0-4000","LLA Pressure Setpoint","unit:mtorr","float"," 预留"]
["AO-11","d1022",null,null,null,"float"]
["AO-12","d1024",null,null,null,"float"]
["AO-13","d1026",null,null,null,"float"]
["AO-14","d1028",null,null,null,"float"]
["AO-15","d1030","0-4000","LLB Pressure Setpoint","unit:mtorr","float"," 预留"]
["AO-16","d1032",null,null,null,"float"]
["AO-17","d1034",null,null,null,"float"]
["AO-18","d1036",null,null,null,"float"]
["AO-19","d1038",null,null,null,"float"]
["AO-20","d1040",null,null,null,"float"]
["AO-21","d1042",null,null,null,"float"]
["AO-22","d1044",null,null,null,"float"]
["AO-23","d1046",null,null,null,"float"]
["AO-24","d1048",null,null,null,"float"]
["AO-25","d1050",null,null,null,"float"]
["AO-26","d1052",null,null,null,"float"]
["AO-27","d1054",null,null,null,"float"]
["AO-28","d1056",null,null,null,"float"]
["AO-29","d1058",null,null,null,"float"]
["AO-30","d1060",null,null,null,"float"]
["AO-31","d1062",null,null,null,"float"]
["AO-32","d1064",null,null,null,"float"]
["AO-33","d1066",null,null,null,"float"]
["AO-34","d1068",null,null,null,"float"]
["AO-35","d1070",null,null,null,"float"]
["AO-36","d1072",null,null,null,"float"]
["AO-37","d1074",null,null,null,"float"]
["AO-38","d1076",null,null,null,"float"]
["AO-39","d1078",null,null,null,"float"]
["AO-40","d1080",null,null,null,"float"]
["AO-41","d1082",null,null,null,"float"]
["AO-42","d1084",null,null,null,"float"]
["AO-43","d1086",null,null,null,"float"]
["AO-44","d1088",null,null,null,"float"]
["AO-45","d1090",null,null,null,"float"]
["AO-46","d1092",null,null,null,"float"]
["AO-47","d1094",null,null,null,"float"]
["AO-48","d1096",null,null,null,"float"]
["AO-49","d1098",null,null,null,"float"]
[]
[]
[null,"新增"]
[null,"修改"]
[null,"删除"]
{"$rows_empty":38}
[null,"新增"]
[null,"修改"]
[null,"删除"]

{"sheet":"IP Address","index":3,"n_rows":2,"n_cols":6,"rows_kept":2,"cut":false,"hidden":false,"merged":[]}
["Equipment Name","Network board","Private\nEthernet","AMSNet ID","Private\nRT-Ethernet","Comment"]
["PLC Controller","Internet address","192.168.10.210"]

{"sheet":"PM HW interlock draft","index":4,"n_rows":9,"n_cols":8,"rows_kept":9,"cut":false,"hidden":true,"merged":[[0,0,0,1],[0,2,0,7],[8,0,8,1],[1,0,2,1]]}
["Condition"]
[null,null,"DO-32","DO-33","DO-34","DO-48","DO-16","DO-15"]
[null,null,"MFC1 valve  ","MFC2 valve","MFC3 valve","Process gas final valve","RPS enable","Heater  Enable"]
["DI-44","UE on Chamber SW","T1","T1","T1","T1","T1","T1"]
["DI-38","PM VAC SW","T2","T2","T2","T2","T2"]
["DI-12","Slit Door Close Pos","T3","T3","T3","T3"]
["DI-41","PM Foreline VAC SW","T4","T4","T4","T4"]
["DI-46","Cooling water flow SW",{"$nulls":4},"T3"]
["Logic",null,"If T1*T2*T3*T4=1 it is enable.","If T1*T2*T3*T4=1 it is enable.","If T1*T2*T3*T4=1 it is enable.","If T1*T2*T3*T4=1 it is enable.","If T1*T2*T3=1 it is enable.","If T1=1 it is enable."]

{"sheet":"PM PLC interlock draft","index":5,"n_rows":6,"n_cols":3,"rows_kept":6,"cut":false,"hidden":true,"merged":[[0,0,0,1],[5,0,5,1],[1,0,2,1]]}
["Condition"]
[null,null,"DO-16"]
[null,null,"RPS enable"]
["DI-41","PM Foreline VAC SW","T1"]
["DI-46","Cooling water flow SW","T2"]
["Logic",null,"If T1*T2=1 it is enable."]