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[null,"#.DI","PLC DI","Note","Logic Note","Location","Remark",null,null,"#.DO","PLC DO","Note","Logic Note","Location","TRIG(上位触发)"]
[null,"DI-00","0.00","A-smif-ready-to-load",null,"w0.00",null,null,null,"DO-00","100.00","VCEA-slit-door-open","1.15=1,3.01=1,100.01=0,1.03=0","w100.00","w200.00"]
[null,"DI-01","0.01","A-smif-ready-to-unload",null,"w0.01",null,null,null,"DO-01","100.01","VCEA-slit-door-close","1.15=1,3.01=1,100.00=0,1.04=0","w100.01","w200.01"]
[null,"DI-02","0.02","B-smif-ready-to-load",null,"w0.02",null,null,null,"DO-02","100.02","VCEB-slit-door-open","1.15=1,3.01=1,100.03=0,1.05=0","w100.02","w200.02"]
[null,"DI-03","0.03","B-smif-ready-to-unload",null,"w0.03",null,null,null,"DO-03","100.03","VCEB-slit-door-close","1.15=1,3.01=1,100.02=0,1.06=0","w100.03","w200.03"]
[null,"DI-04","0.04","PMA-slit-door-open/close-enable",null,"w0.04",null,null,null,"DO-04","100.04","PMA-slit-door-open","1.15=1,3.01=1,100.05=0,1.07=0","w100.04","w200.04"]
[null,"DI-05","0.05","PMB-slit-door-open/close-enable",null,"w0.05",null,null,null,"DO-05","100.05","PMA-slit-door-close","1.15=1,3.01=1,100.04=0,1.08=0","w100.05","w200.05"]
[null,"DI-06","0.06","PMC-slit-door-open/close-enable",null,"w0.06",null,null,null,"DO-06","100.06","PMB-slit-door-open","1.15=1,3.01=1,100.07=0,1.09=0","w100.06","w200.06"]
[null,"DI-07","0.07","ROBOT-to-VCEA-retract",null,"w0.07",null,null,null,"DO-07","100.07","PMB-slit-door-close","1.15=1,3.01=1,100.06=0,1.10=0","w100.07","w200.07"]
[null,"DI-08","0.08","ROBOT-to-VCEB-retract",null,"w0.08",null,null,null,"DO-08","100.08","PMC-slit-door-open","1.15=1,3.01=1,100.09=0,1.11=0","w100.08","w200.08"]
[null,"DI-09","0.09","ROBOT-to-PMA-retract",null,"w0.09",null,null,null,"DO-09","100.09","PMC-slit-door-close","1.15=1,3.01=1,100.08=0,1.12=0","w100.09","w200.09"]
[null,"DI-10","0.10","ROBOT-to-PMB-retract",null,"w0.10",null,null,null,"DO-10","100.10","TM-Fast-Pump","w202.14=1","w100.10","w200.10"]
[null,"DI-11","0.11","ROBOT-to-PMC-retract",null,"w0.11",null,null,null,"DO-11","100.11","TM-Soft-Pump",null,"w100.11","w200.11"]
[null,"DI-12","0.12","ROBOT-to-PMD-retract",null,"w0.12",null,null,null,"DO-12","100.12","TM-Fast-Vent","w202.14=1,1.13=1","w100.12","w200.12"]
[null,"DI-13","0.13","VCEA-wafer-senser",null,"w0.13",null,null,null,"DO-13","100.13","TM-Soft-Vent",null,"w100.13","w200.13"]
[null,"DI-14","0.14","VCEB-wafer-senser",null,"w0.14",null,null,null,"DO-14","100.14","VCE-A-Fast-Pump","w202.14=1","w100.14","w200.14"]
[null,"DI-15","0.15","PMA-wafer-senser",null,"w0.15",null,null,null,"DO-15","100.15","VCE-A-Soft-Pump","w202.14=1","w100.15","w200.15"]
[null,"DI-16","1.00","PMB-wafer-senser",null,"w1.00",null,null,null,"DO-16","101.00","VCE-B-Fast-Pump","w202.14=1","w101.00","w201.00"]
[null,"DI-17","1.01","PMC-wafer-senser",null,"w1.01",null,null,null,"DO-17","101.01","VCE-B-Soft-Pump","w202.14=1","w101.01","w201.01"]
[null,"DI-18","1.02","PMD-wafer-senser",null,"w1.02",null,null,null,"DO-18","101.02","VCE-A-Fast-Vent","w202.14=1,1.13=1","w101.02","w201.02"]
[null,"DI-19","1.03","VCEA-slit-door-open-pos",null,"w1.03",null,null,null,"DO-19","101.03","VCE-A-Soft-Vent","w202.14=1,1.13=1","w101.03","w201.03"]
[null,"DI-20","1.04","VCEA-slit-door-close-pos",null,"w1.04",null,null,null,"DO-20","101.04","VCE-B-Fast-Vent","w202.14=1,1.13=1","w101.04","w201.04"]
[null,"DI-21","1.05","VCEB-slit-door-open-pos",null,"w1.05",null,null,null,"DO-21","101.05","VCE-B-Soft-Vent","w202.14=1,1.13=1","w101.05","w201.05"]
[null,"DI-22","1.06","VCEB-slit-door-close-pos",null,"w1.06",null,null,null,"DO-22","101.06","Water-Valve-IN","2.01=1","w101.06","w201.06"]
[null,"DI-23","1.07","PMA-slit-door-open-pos",null,"w1.07",null,null,null,"DO-23","101.07","BUZZER1",null,"w101.07","w201.07"]
[null,"DI-24","1.08","PMA-slit-door-close-pos",null,"w1.08",null,null,null,"DO-24","101.08","BUZZER2",null,"w101.08","w201.08"]
[null,"DI-25","1.09","PMB-slit-door-open-pos",null,"w1.09",null,null,null,"DO-25","101.09","RED",null,"w101.09","w201.09"]
[null,"DI-26","1.10","PMB-slit-door-close-pos",null,"w1.10",null,null,null,"DO-26","101.10","ORANGE",null,"w101.10","w201.10"]
[null,"DI-27","1.11","PMC-slit-door-open-pos",null,"w1.11",null,null,null,"DO-27","101.11","GREEN",null,"w101.11","w201.11"]
[null,"DI-28","1.12","PMC-slit-door-close-pos",null,"w1.12",null,null,null,"DO-28","101.12","BLUE",null,"w101.12","w201.12"]
[null,"DI-29","1.13","TM-N2-1-SW",null,"w1.13",null,null,null,"DO-29","101.13","系统允许断电","2.09=1或2.10=1，AC RACK 烟感触发，则延时1s后w201.13置1断电；\n2.11=1或2.12=1，厂房烟感触发或尾气处理异常，则不再装载新wafer且处理完当前wafer后w201.13置1断电或整体设定延时时间后w201.13置1断电。","w101.13","w201.13"]
[null,"DI-30","1.14","TM-N2-2-SW",null,"w1.14",null,null,null,"DO-30",null,"恒流模式",null,"w202.14"]
[null,"DI-31","1.15","TM-CDA-SW",null,"w1.15",null,null,null,"DO-31",null,"控压模式",null,"w202.15"]
[null,"DI-32","2.00","TM-He-SW",null,"w2.00",null,null,null,"DO-32","101.14","A-smif load/unload","2.13=1,0.01=1/2.13=0,0.00=1","w101.15","w201.15"]
[null,"DI-33","2.01","LEAK",null,"w2.01",null,null,null,"DO-33","101.15","B-smif load/unload","2.14=1,0.03=1/2.14=0,0.02=1","w102.00","w203.00"]
[null,"DI-34","2.02","VCEA-ATM-SW",null,"w2.02"]
[null,"DI-35","2.03","VCEB-ATM-SW",null,"w2.03"]
[null,"DI-36","2.04","TM-ATM-SW",null,"w2.04"]
[null,"DI-37","2.05","VCEA-VACCUM-SW",null,"w2.05"]
[null,"DI-38","2.06","VCEB-VACCUM-SW",null,"w2.06"]
[null,"DI-39","2.07","TM-VACCUM-SW",null,"w2.07"]
[null,"DI-40","2.08","AC RACK FAN OK",null,"w2.08"]
[null,"DI-41","2.09","AC RACK 烟感out1",null,"w2.09"]
[null,"DI-42","2.10","AC RACK 烟感out2",null,"w2.10"]
[null,"DI-43","2.11","厂房烟感 out",null,"w2.11"]
[null,"DI-44","2.12","尾气处理异常",null,"w2.12"]
[null,"DI-45","2.13","VCEA-cassette -present",null,"w2.13"]
[null,"DI-46","2.14","VCEB-cassette -present",null,"w2.14"]
[null,"DI-47","2.15","VCEA-ADR-LOCKED",null,"w2.15"]
[null,"DI-48","3.00","VCEB-ADR-LOCKED",null,"w3.00"]
[null,"DI-49",3.01,"TM-LID-close",null,"w3.01"]
[null,"DI-50",3.02,"A-smif-ready",null,"w3.02"]
[null,"DI-51",3.03,"B-smif-ready",null,"w3.03"]
[null,"DI-52",3.04,"A-smif-pod-in-place",null,"w3.04"]
[null,"DI-53",3.05,"B-smif-pod-in-place",null,"w3.05"]
[null,"DI-54",3.06,"A-smif-error",null,"w3.06"]
[null,"DI-55",3.07,"B-smif-error",null,"w3.07"]
[null,"DI-56",3.08,"VCEA-extend-enable",null,"w3.08"]
[null,"DI-57",3.09,"VCEB-extend-enable",null,"w3.09"]
[null,"DI-58",3.1,"PMA-extend-enable",null,"w3.10"]
[null,"DI-59",3.11,"PMB-extend-enable",null,"w3.11"]
[null,"DI-60",3.12,"PMC-extend-enable",null,"w3.12"]
[null,"DI-61",3.13,"EMO",null,"w3.13"]
[null,"DI-62",3.14,"VCEA凸片",null,"w3.14"]
[null,"DI-63",3.15,"VCEB凸片",null,"w3.15"]
[null,"DI-64","5.00","TM-soft-pump",null,"w5.00"]
[null,"DI-65","5.01","TM-soft-vent",null,"w5.01"]
[null,"DI-66","5.02","TM-fast-pump",null,"w5.02"]
[]
[]
[]
[]
[]
[null,null,"新增"]
[null,null,"修改"]
[null,null,"删除"]

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["Node No.","ID","Range","Device Name","Logic note","date type","Remark"]
["AO-00","d1000",null,null,null,"float"]
["AO-01","d1002",null,null,null,"float"]
["AO-02","d1004",null,null,null,"float"]
["AO-03","d1006",null,null,null,"float"]
["AO-04","d1008",null,null,null,"float"]
["AO-05","d1010",null,null,null,"float"]
["AO-06","d1012",null,null,null,"float"]
["AO-07","d1014",null,null,null,"float"]
["AO-08","d1016","0-4000","MFC Flow  setpoint","0-4000对应 MFC 0-100%量程(0-5V)","float"]
["AO-09","d1018","1000mTorr","TM Pressure setpoint","1000mTorr","float"]
["AO-10","d1020",null,null,null,"float"]
["AO-11","d1022",null,null,null,"float"]
["AO-12","d1024",null,null,null,"float"]
["AO-13","d1026",null,null,null,"float"]
["AO-14","d1028",null,null,null,"float"]
["AO-15","d1030",null,null,null,"float"]
["AO-16","d1032",null,null,null,"float"]
["AO-17","d1034",null,null,null,"float"]
["AO-18","d1036",null,null,null,"float"]
["AO-19","d1038",null,null,null,"float"]
["AO-20","d1040",null,null,null,"float"]
["AO-21","d1042",null,null,null,"float"]
["AO-22","d1044",null,null,null,"float"]
["AO-23","d1046",null,null,null,"float"]
["AO-24","d1048",null,null,null,"float"]
["AO-25","d1050",null,null,null,"float"]
["AO-26","d1052",null,null,null,"float"]
["AO-27","d1054",null,null,null,"float"]
["AO-28","d1056",null,null,null,"float"]
["AO-29","d1058",null,null,null,"float"]
["AO-30","d1060",null,null,null,"float"]
["AO-31","d1062",null,null,null,"float"]
["AO-32","d1064",null,null,null,"float"]
["AO-33","d1066",null,null,null,"float"]
["AO-34","d1068",null,null,null,"float"]
["AO-35","d1070",null,null,null,"float"]
["AO-36","d1072",null,null,null,"float"]
["AO-37","d1074",null,null,null,"float"]
["AO-38","d1076",null,null,null,"float"]
["AO-39","d1078",null,null,null,"float"]
["AO-40","d1080",null,null,null,"float"]
["AO-41","d1082",null,null,null,"float"]
["AO-42","d1084",null,null,null,"float"]
["AO-43","d1086",null,null,null,"float"]
["AO-44","d1088",null,null,null,"float"]
["AO-45","d1090",null,null,null,"float"]
["AO-46","d1092",null,null,null,"float"]
["AO-47","d1094",null,null,null,"float"]
["AO-48","d1096",null,null,null,"float"]
["AO-49","d1098",null,null,null,"float"]
[]
[]
[null,"新增"]
[null,"修改"]
[null,"删除"]
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[null,"新增"]
[null,"修改"]
[null,"删除"]

{"sheet":"AI","index":2,"n_rows":96,"n_cols":13,"rows_kept":96,"cut":false,"hidden":false,"merged":[[5,10,14,10],[15,10,22,10],[36,10,41,10]]}
["Node No.",{"$nulls":5},"ID","Range","Device Name","Note","Logic note","date type","Remark"]
["AI-00",null,2033,"D3554","D3860","D3862","d2000","0.00-780.00Torr","左VCE真空计"]
["AI-01",{"$nulls":5},"d2002","0.00-780.00Torr","右VCE真空计"]
["AI-02",{"$nulls":5},"d2004","0.00-780.00Torr","TM真空计"]
["AI-03",{"$nulls":5},"d2006","0-100%","MFC Flow"]
["AI-04",{"$nulls":5},"d2008","0.00-780.00Torr","VCE管路真空计"]
["AI-05"]
["AI-06",{"$nulls":5},"d2012","0.00-780.00Torr","TM管路真空计"]
["AI-07"]
["AI-08"]
["AI-09"]
["AI-10"]
["AI-11"]
["AI-12"]
["AI-13"]
["AI-14"]
["AI-15"]
["AI-16"]
["AI-17"]
["AI-18"]
["AI-19"]
["AI-20"]
["AI-21"]
["AI-22"]
["AI-23"]
["AI-24"]
["AI-25"]
["AI-26"]
["AI-27"]
["AI-28"]
["AI-29"]
["AI-30"]
["AI-31"]
["AI-32"]
["AI-33"]
["AI-34"]
["AI-35"]
["AI-36"]
["AI-37"]
["AI-38"]
["AI-39"]
["AI-40"]
["AI-41"]
["AI-42"]
["AI-43"]
["AI-44"]
["AI-45"]
["AI-46"]
["AI-47"]
["AI-48"]
["AI-49"]
[]
[]
[null,"新增"]
[null,"修改"]
[null,"删除"]
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[{"$nulls":6},"新增"]
[{"$nulls":6},"修改"]
[{"$nulls":6},"删除"]

{"sheet":"PM HW interlock draft","index":3,"n_rows":9,"n_cols":8,"rows_kept":9,"cut":false,"hidden":true,"merged":[[0,0,0,1],[0,2,0,7],[8,0,8,1],[1,0,2,1]]}
["Condition"]
[null,null,"DO-32","DO-33","DO-34","DO-48","DO-16","DO-15"]
[null,null,"MFC1 valve  ","MFC2 valve","MFC3 valve","Process gas final valve","RPS enable","Heater  Enable"]
["DI-44","UE on Chamber SW","T1","T1","T1","T1","T1","T1"]
["DI-38","PM VAC SW","T2","T2","T2","T2","T2"]
["DI-12","Slit Door Close Pos","T3","T3","T3","T3"]
["DI-41","PM Foreline VAC SW","T4","T4","T4","T4"]
["DI-46","Cooling water flow SW",{"$nulls":4},"T3"]
["Logic",null,"If T1*T2*T3*T4=1 it is enable.","If T1*T2*T3*T4=1 it is enable.","If T1*T2*T3*T4=1 it is enable.","If T1*T2*T3*T4=1 it is enable.","If T1*T2*T3=1 it is enable.","If T1=1 it is enable."]

{"sheet":"PM PLC interlock draft","index":4,"n_rows":6,"n_cols":3,"rows_kept":6,"cut":false,"hidden":true,"merged":[[0,0,0,1],[5,0,5,1],[1,0,2,1]]}
["Condition"]
[null,null,"DO-16"]
[null,null,"RPS enable"]
["DI-41","PM Foreline VAC SW","T1"]
["DI-46","Cooling water flow SW","T2"]
["Logic",null,"If T1*T2=1 it is enable."]