{"text_format":"2","workbook":"xlsx","n_sheets":9,"sheets":["Revision","DI-DO","AO","AI","IP COMM","HW interlock","Software interlock","PM HW interlock draft","PM PLC interlock draft"],"not_rendered":{"charts":0,"images":2,"macros":0,"external_links":0,"defined_names":1,"comments":0,"pivot_tables":0},"unopened":[],"bounds":{"document_bytes":16777216,"sheet_cells":100000,"run_cost":"one","rows_first":2000,"rows_last":500,"rows_between":2000,"halvings":0,"cell_chars":16384,"cell_head_chars":4096},"cells_cut":0,"cells_raw":0,"read":"whole","date_system":"1900"}

{"sheet":"Revision","index":0,"n_rows":12,"n_cols":8,"rows_kept":12,"cut":false,"hidden":false,"merged":[[0,0,0,7],[1,1,1,5],[2,1,2,7],[4,0,4,7]]}
["上海稷以科技有限公司\nSHANGHAI JETPLASMA CO.,LTD"]
["Part Number","017-0061-210",{"$nulls":4},"Revision","E02"]
["Description","IO LIST, PM, VNS_DE"]
["Designed","WHB","Checked","ZWX","Approved","XGQ","Date","2024-07-18"]
["一、与VNS_SE的IO 相比，主要有如下变化：\n1、取消BIAS RF及Match，增加四个磁场控制。\n2、PM也配置了slit door，由PM控制；TM的slit door由TM控制。\n3、取消Gasline 加热和Chamber wall 加热,Foreline温度反馈增加Monitor回路。\n4、外部He的控压增加到两组。\n   ---2023/10/09 by GZC\n二、配置更新\n1、SOURCE RF更新为BIAS RF。\n2、取消Soft Pumping Valve。\n3、AI页调整部分温控信息。\n   ---2023/10/12 by GZC & ZWX\n三、Interlock中将Source Match 改为Bias Match。 ---2023/10/17 by GZC & ZWX\n四、COOLANT TC 回路两路变为四路，DI和AI作相应调整。---2023/11/29 by GZC 五、PVHe6 2.16为错误表述，改为3.08\n五、增加模拟量PV高低量程，UI界面设定量程。"]
[]
[]
[]
[]
[null,"新增"]
[null,"修改"]
[null,"删除"]

{"sheet":"DI-DO","index":1,"n_rows":113,"n_cols":15,"rows_kept":113,"cut":false,"hidden":false,"merged":[[82,12,85,12]]}
[null,"#.DI","Name","Note","Logic Note","Location","Remark",null,null,"#.DO","Name","Note","Logic Note","Location","Remark"]
[4,"DI-00","Lid Closed",null,"Interlock-HW","w20.00",null,null,3.05,"DO-00","PVN21","GPVN21",null,"w0.00","Gas Box"]
[4.01,"DI-01","ATM Switch","ATM SW","Interlock-PLC","w20.01",null,null,3.06,"DO-01","PVN22","GPVN22",null,"w0.01","Gas Box"]
[4.02,"DI-02","PM VAC Switch",null,"1=on, 0=off","w20.02",null,null,"0.00","DO-02","PV11","GPV11",null,"w0.02","Gas Box"]
[4.03,"DI-03","ESC Coolant Flow SW",null,"0=normal, 1=warning","w20.03",null,null,"0.01","DO-03","PV12","GPV12",null,"w0.03","Gas Box"]
[4.05,"DI-04","Water Leak Sensor",null,"1=normal, 0=alarm","w20.04",null,null,"0.02","DO-04","PV21","GPV21",null,"w0.04","Gas Box"]
[4.08,"DI-05","Lift Pin Up Position",null,"1=on, 0=off","w20.05",null,null,"0.03","DO-05","PV22","GPV22",null,"w0.05","Gas Box"]
[4.09,"DI-06","Lift Pin Down Position",null,"1=on, 0=off","w20.06",null,null,"0.04","DO-06","PV31","GPV31",null,"w0.06","Gas Box"]
[6.05,"DI-07","RF/HV  Interlock OK","Lid,VAC,Slit Door,MATCH INTLK OK.","1= interlock normal, 0=interlock off","w20.07",null,null,"0.05","DO-07","PV32","GPV32",null,"w0.07","Gas Box"]
[null,"DI-08","spare",null,null,"w20.08",null,null,"0.06","DO-08","PV41","GPV41",null,"w0.08","Gas Box"]
[null,"DI-09","Turbo Pump Interlock","Q3.12同步","1= interlock normal, 0= interlock off","w20.09",null,null,"0.07","DO-09","PV42","GPV42",null,"w0.09","Gas Box"]
[4.06,"DI-10","Liner Door Open Position",null,"Interlock-HW","w20.10","Slit Door Open Position",null,"3.07","DO-10","N2 Valve(VENT)","GPVN2",null,"w0.10","Gas Box"]
[4.07,"DI-11","Liner Door Close Position",null,"Interlock-HW","w20.11","Slit Door Close Position",null,"1.08","DO-11","MFC1 Valve","GPV1",null,"w0.11","Gas Box"]
[5.06,"DI-12","CDA Pressure Switch",null,"1=normal, 0=alarm","w20.12",null,null,"1.09","DO-12","MFC2 Valve","GPV2",null,"w0.12","Gas Box"]
[null,"DI-13","ESC Coolant Inlet TC Broken Alarm","TC模块信号","0=normal, 1=alarm","w20.13",null,null,"1.10","DO-13","MFC3 Valve","GPV3",null,"w0.13","Gas Box"]
[null,"DI-14","ESC Coolant Outlet TC Broken Alarm","TC模块信号","0=normal, 1=alarm","w20.14",null,null,"1.11","DO-14","MFC4 Valve","GPV4",null,"w0.14","Gas Box"]
[null,"DI-15","Chamber Pressure 10t Gauge Alarm","VG PPH,真空值比较","0=normal, 1=alarm","w20.15",null,null,"1.12","DO-15","MFC5 Valve","GPV5",null,"w0.15","Gas Box"]
[null,"DI-16","Process Pressure 1t Gauge  Alarm","VG PPL","0=normal, 1=alarm","w21.00",null,null,"1.13","DO-16","MFC6 Valve","GPV6",null,"w1.00","Gas Box"]
[null,"DI-17","spare",null,"0=normal, 1=alarm","w21.01",null,null,"1.14","DO-17","MFC7 Valve","GPV7",null,"w1.01","Gas Box"]
[null,"DI-18","Foreline Pressure 10t Gauge Alarm","VG FL","0=normal, 1=alarm","w21.02",null,null,"1.15","DO-18","MFC8 Valve","GPV8",null,"w1.02","Gas Box"]
[null,"DI-19","spare",null,"0=normal, 1=alarm","w21.03",null,null,"2.11","DO-19","PVHe1","PVHe1",null,"w1.03"]
[null,"DI-20","spare",null,"0=normal, 1=alarm","w21.04",null,null,"2.12","DO-20","PVHe2","PVHe2",null,"w1.04"]
[null,"DI-21","Valve Control TC Broken Alarm","TC模块信号","0=normal, 1=alarm","w21.05",null,null,"2.00","DO-21","Gas Final Valve","PV1",null,"w1.05"]
[null,"DI-22","ValveMonitor TC Broken Alarm",null,"0=normal, 1=alarm","w21.06",null,null,"2.01","DO-22","CHB Wall Purge Valve","PV2",null,"w1.06","原Soft Pumping Valve"]
[null,"DI-23","Valve Heater On FB","Q3.13同步","0=off, 1=on","w21.07",null,null,"2.02","DO-23","Fast Pumping Valve","PV3",null,"w1.07"]
[null,"DI-24","Foreline TC Deviation out of range","值比较","0=normal, 1=alarm","w21.08",null,null,"2.03","DO-24","Linner Door Open","PV4",null,"w1.08","PM Slit Door Open"]
[null,"DI-25","Foreline Control TC Broken Alarm","TC模块信号","0=normal, 1=alarm","w21.09",null,null,"2.04","DO-25","Linner Door Close","PV4",null,"w1.09","PM Slit Door Close"]
[null,"DI-26","Foreline Monitor TC Broken Alarm","TC模块信号","0=normal, 1=alarm","w21.10",null,null,"2.05","DO-26","Lift Pin Up","PV5",null,"w1.10"]
[null,"DI-27","Foreline Heater On FB","Q3.14同步","0=off, 1=on","w21.11",null,null,"2.06","DO-27","Lift Pin Down","PV5",null,"w1.11"]
[null,"DI-28","CHB Wall TC Deviation out of range","值比较","0=normal, 1=alarm","w21.12",null,null,null,"DO-28","SPARE",null,null,"w1.12"]
[null,"DI-29","CHB Wall Control TC Broken Alarm","TC模块信号","0=normal, 1=alarm","w21.13",null,null,"2.07","DO-29","Turbo Pump Pumping Valve","PV6",null,"w1.13"]
[null,"DI-30","CHB Wall Monitor TC Broken Alarm","TC模块信号","0=normal, 1=alarm","w21.14",null,null,"2.08","DO-30","Turbo Pump Purge Valve","PV7",null,"w1.14"]
[null,"DI-31","CHB Wall Heater On FB","Q7.15同步","0=off, 1=on","w21.15",null,null,"2.09","DO-31","Gauge Valve","PV8",null,"w1.15"]
[0.04,"DI-32","CHB Wall OT Switch Alarm",null,"0=normal, 1=alarm","w22.00",null,null,"SPARE","DO-32","Reset Signal",null,"PC to PLC","w2.00"]
[null,"DI-33","spare","spare","1= interlock normal, 0= interlock off","w22.01",null,null,"3.13","DO-33","Valve Heater On",null,"Heater On==1, Heater Off ==0","w2.01"]
[4.1,"DI-34","N2 Pressure Switch","PGN2","1=normal, 0=alarm, Interlock-PLC","w22.02","Gas Box",null,"3.14","DO-34","Foreline Heater On",null,"Heater On==1, Heater Off ==0","w2.02"]
[5.1,"DI-35","MFC1 Pressure Switch","PG1","1=normal, 0=alarm, Interlock-PLC","w22.03","Gas Box",null,7.15,"DO-35","CHB Wall Heater On",null,"Heater On==1, Heater Off ==0","w2.03"]
[5.11,"DI-36","MFC2 Pressure Switch","PG2","1=normal, 0=alarm, Interlock-PLC","w22.04","Gas Box",null,null,"DO-36","SPARE",null,null,"w2.04"]
[5.12,"DI-37","MFC3 Pressure Switch","PG3","1=normal, 0=alarm, Interlock-PLC","w22.05","Gas Box",null,null,"DO-37","SPARE",null,null,"w2.05"]
[5.13,"DI-38","MFC4 Pressure Switch","PG4","1=normal, 0=alarm, Interlock-PLC","w22.06","Gas Box",null,null,"DO-38","SPARE",null,null,"w2.06"]
[5.14,"DI-39","MFC5 Pressure Switch","PG5","1=normal, 0=alarm, Interlock-PLC","w22.07","Gas Box",null,null,"DO-39","SPARE",null,null,"w2.07"]
[5.15,"DI-40","MFC6 Pressure Switch","PG6","1=normal, 0=alarm, Interlock-PLC","w22.08","Gas Box",null,null,"DO-40","SPARE",null,null,"w2.08"]
[4.11,"DI-41","MFC7 Pressure Switch","PG7","1=normal, 0=alarm, Interlock-PLC","w22.09","Gas Box",null,null,"DO-41","SPARE",null,null,"w2.09"]
[4.12,"DI-42","MFC8 Pressure Switch","PG8","1=normal, 0=alarm, Interlock-PLC","w22.10","Gas Box",null,null,"DO-42","SPARE",null,null,"w2.10"]
[6,"DI-43","He Pressure Switch","PGHe","1=normal, 0=alarm, Interlock-PLC","w22.11",null,null,null,"DO-43","SPARE",null,null,"w2.11"]
[null,"DI-44","ESC He Pressure 100t Gauge Alarm","VG He,真空值比较","0=normal, 1=alarm","w22.12",null,null,null,"DO-44","SPARE",null,null,"w2.12"]
[null,"DI-45","spare",null,null,"w22.13",null,null,null,"DO-45","SPARE",null,null,"w2.13"]
[null,"DI-46","spare",null,null,"w22.14",null,null,7.1,"DO-46","Gasline Heater On",null,null,"w2.14"]
[null,"DI-47","spare",null,null,"w22.15",null,null,"3.11","DO-47","Slit Door Open Enable",null,"Lid Door 信号 w20.00 ON，\nPM腔压力与TM腔压力差满足且工艺处理完成时，软件可置w2.15 ON.","w2.15"]
[null,"DI-48","spare",null,null,"w23.00",null," ","2.13","DO-48","PVHe3","PVHe3",null,"w3.00"]
[null,"DI-49","spare",null,null,"w23.01",null,null,"2.10","DO-49","He1_ISO_IN","PV9",null,"w3.01","He ISO改为He1_ISO_IN"]
[null,"DI-50","spare",null,null,"w23.02",null,null,null,"DO-50",null,null,null,"w3.02"]
[5.03,"DI-51","Gas Box Door Switch",null,"1=normal, 0=alarm, Interlock-PLC","w23.03",null,null,null,"DO-51",null,null,null,"w3.03"]
[5.09,"DI-52","Gas Box Pressure Switch",null,"1=normal, 0=alarm, Interlock-PLC","w23.04",null,null,"3.00","DO-52","MFC9 Valve","GPV9",null,"w3.04","Gas Box"]
[6.03,"DI-53","Turbo Pump Water Flow Switch",null,"0=normal, 1=warning","w23.05",null,null,"3.01","DO-53","MFC10 Valve","GPV10",null,"w3.05","Gas Box"]
[null,"DI-54",null,null,"0=off, 1=on","w23.06",null,null,"3.02","DO-54","MFC11 Valve","GPV11",null,"w3.06","Gas Box"]
[6.04,"DI-55","BIAS RF Water Flow Switch",null,"0=normal, 1=warning","w23.07",null,null,"3.03","DO-55","MFC12 Valve","GPV12",null,"w3.07","Gas Box"]
[6.02,"DI-56","CHB Coolant Flow SW",null,"0=normal, 1=warning","w23.08",null,null,"3.04","DO-56","Main  Purge Valve","GPVM",null,"w3.08","Gas Box"]
[null,"DI-57",null,null,null,"w23.09",null,null,"0.08","DO-57","PV51","GPV51",null,"w3.09","Gas Box"]
[5.04,"DI-58","TM ROB NOT EXTEND TO PM",null,"0=off, 1=on","w23.10",null,null,"0.09","DO-58","PV52","GPV52",null,"w3.10","Gas Box"]
[5.05,"DI-59","TM Slit Door Closed",null,"0=off, 1=on","w23.11",null,null,"0.10","DO-59","PV61","GPV61",null,"w3.11","Gas Box"]
[null,"DI-60",null,null,null,"w23.12",null,null,"0.11","DO-60","PV62","GPV62",null,"w3.12","Gas Box"]
[null,"DI-61",null,null,null,"w23.13",null,null,"0.12","DO-61","PV71","GPV71",null,"w3.13","Gas Box"]
[null,"DI-62","Source Match interlock ok",null,"1=normal,0=alarm","w23.14",null,null,"0.13","DO-62","PV72","GPV72",null,"w3.14","Gas Box"]
[6.07,"DI-63","Bias Match interlock ok",null,"1=normal,0=alarm","w23.15",null,null,"0.14","DO-63","PV81","GPV81",null,"w3.15","Gas Box"]
[null,"DI-64",null,null,null,"w24.00",null,null,"0.15","DO-64","PV82","GPV82",null,"w4.00","Gas Box"]
[null,"DI-65",null,null,null,"w24.01",null,null,"1.00","DO-65","PV91","GPV91",null,"w4.01","Gas Box"]
[4.13,"DI-66","MFC9 Pressure Switch","PG9","1=normal, 0=alarm, Interlock-PLC","w24.02","Gas Box",null,"1.01","DO-66","PV92","GPV92",null,"w4.02","Gas Box"]
[4.14,"DI-67","MFC10 Pressure Switch","PG10","1=normal, 0=alarm, Interlock-PLC","w24.03","Gas Box",null,"1.02","DO-67","PVA1","GPVA1",null,"w4.03","Gas Box"]
[4.15,"DI-68","MFC11 Pressure Switch","PG11(SPARE)","1=normal, 0=alarm, Interlock-PLC","w24.04","Gas Box",null,"1.03","DO-68","PVA2","GPVA2",null,"w4.04","Gas Box"]
[6.14,"DI-69","MFC12 Pressure Switch","PG12(SPARE)","1=normal, 0=alarm, Interlock-PLC","w24.05","Gas Box",null,"1.04","DO-69","PVB1","GPVB1",null,"w4.05","Gas Box"]
[6.15,"DI-70","SPARE","SPARE","1=normal, 0=alarm, Interlock-PLC","w24.06","Gas Box",null,"1.05","DO-70","PVB2","GPVB2",null,"w4.06","Gas Box"]
[null,"DI-71",null,null,null,"w24.07",null,null,"1.06","DO-71","PVC1","GPVC1",null,"w4.07","Gas Box"]
[null,"DI-72",null,null,null,"w24.08",null,null,"1.07","DO-72","PVC2","GPVC2",null,"w4.08","Gas Box"]
[null,"DI-73",null,null,null,"w24.09",null,null,null,"DO-73",null,null,null,"w4.09"]
[null,"DI-74","GASLINE TC Deviation out of range","值比较","0=normal, 1=alarm","w24.10",null,null,"2.14","DO-74","PVHe4",null,null,"w4.10"]
[null,"DI-75","GASLINE Control TC Broken Alarm","TC模块信号","0=normal, 1=alarm","w24.11",null,null,"2.15","DO-75","He2_ISO_OUT",null,null,"w4.11","PVHe5改为He2_ISO_OUT"]
[null,"DI-76","GASLINE Monitor TC Broken Alarm","TC模块信号","0=normal, 1=alarm","w24.12",null,null,"3.08","DO-76","PVHe6",null,null,"w4.12"]
[null,"DI-77","GASLINE Heater On FB","Q7.10同步","0=off, 1=on","w24.13",null,null,null,"DO-77",null,null,null,"w4.13"]
[null,"DI-78",null,null,null,"w24.14",null,null,null,"DO-78",null,null,null,"w4.14"]
[null,"DI-79",null,null,null,"w24.15",null,null,null,"DO-79",null,null,null,"w4.15"]
[6.08,"DI-80","CTRL BOX 1#FAN OK",null,"1=RUN,0=warning","w25.00",null,null,"3.15","DO-80","Magnets ON",null,"MAG On==1, MAG Off ==0","w5.00"]
[6.09,"DI-81","CTRL BOX 2#FAN OK",null,"1=RUN,0=warning","w25.01",null,null,"软元件","DO-81","Magnets 1A coil OFF",null,"软件启动时默认关闭信号全OFF；\n线圈单独测试时，按需其他线圈关闭信号置ON。","w5.01"]
[6.1,"DI-82","POWER BOX FAN OK",null,"1=RUN,0=warning","w25.02",null,null,"软元件","DO-82","Magnets 1B coil OFF",null,null,"w5.02"]
[6.11,"DI-83","MAGNET BOX FAN OK",null,"1=RUN,0=warning","w25.03",null,null,"软元件","DO-83","Magnets 2A coil OFF",null,null,"w5.03"]
[null,"DI-84",null,null,null,"w25.04",null,null,"软元件","DO-84","Magnets 2B coil OFF",null,null,"w5.04"]
[null,"DI-85",null,null,null,"w25.05",null,null,null,"DO-85",null,null,null,"w5.05"]
[null,"DI-86",null,null,null,"w25.06",null,null,null,"DO-86",null,null,null,"w5.06"]
[null,"DI-87",null,null,null,"w25.07",null,null,null,"DO-87",null,null,null,"w5.07"]
[null,"DI-88","Valve Control TC Broken Alarm","TC模块信号","0=normal, 1=alarm","w25.08",null,null,null,"DO-88",null,null,null,"w5.08"]
[null,"DI-89","Magnets Coils  ON FB","Q3.15同步","0=off, 1=on","w25.09",null,null,null,"DO-89",null,null,null,"w5.09"]
[4.04,"DI-90","Magnets Coils OT Switch Alarm",null,"0=normal, 1=alarm","w25.10",null,null,null,"DO-90",null,null,null,"w5.10"]
[null,"DI-91","Magnets Driver1 Current overload alarm",null,"0=normal, 1=alarm","w25.11",null,null,null,"DO-91",null,null,null,"w5.11"]
[null,"DI-92","Magnets Driver2 Current overload alarm",null,"0=normal, 1=alarm","w25.12",null,null,null,"DO-92",null,null,null,"w5.12"]
[null,"DI-93",null,null,null,"w25.13",null,null,null,"DO-93",null,null,null,"w5.13"]
[null,"DI-94",null,null,null,"w25.14",null,null,null,"DO-94",null,null,null,"w5.14"]
[null,"DI-95",null,null,null,"w25.15",null,null,null,"DO-95",null,null,null,"w5.15"]
[null,"DI-96","CHB Coolant Inlet TC Broken Alarm","TC模块信号","0=normal, 1=alarm","w26.00",null,null,null,"DO-96",null,null,null,"w6.00"]
[null,"DI-97","CHB Coolant Outlet TC Broken Alarm","TC模块信号","0=normal, 1=alarm","w26.01",null,null,null,"DO-97",null,null,null,"w6.01"]
[null,"DI-98",null,null,null,"w26.02",null,null,null,"DO-98",null,null,null,"w6.02"]
[null,"DI-99",null,null,null,"w26.03",null,null,null,"DO-99",null,null,null,"w6.03"]
[null,"DI-100",null,null,null,"w26.04",null,null,null,"DO-100",null,null,null,"w6.04"]
[null,"DI-101",null,null,null,"w26.05",null,null,null,"DO-101",null,null,null,"w6.05"]
[null,"DI-102",null,null,null,"w26.06",null,null,null,"DO-102",null,null,null,"w6.06"]
[null,"DI-103",null,null,null,"w26.07",null,null,null,"DO-103",null,null,null,"w6.07"]
[null,"DI-104",null,null,null,"w26.08",null,null,null,"DO-104",null,null,null,"w6.08"]
[null,"DI-105",null,null,null,"w26.09",null,null,null,"DO-105",null,null,null,"w6.09"]
[null,"DI-106",null,null,null,"w26.10",null,null,null,"DO-106",null,null,null,"w6.10"]
[null,"DI-107",null,null,null,"w26.11",null,null,null,"DO-107",null,null,null,"w6.11"]
[null,"DI-108",null,null,null,"w26.12",null,null,null,"DO-108",null,null,null,"w6.12"]
[null,"DI-109",null,null,null,"w26.13",null,null,null,"DO-109",null,null,null,"w6.13"]
[null,"DI-110",null,null,null,"w26.14",null,null,null,"DO-110",null,null,null,"w6.14"]
[null,"DI-111",null,null,null,"w26.15",null,null,null,"DO-111",null,null,null,"w6.15"]

{"sheet":"AO","index":2,"n_rows":101,"n_cols":7,"rows_kept":101,"cut":false,"hidden":false,"merged":[[1,4,10,4],[26,4,29,4]]}
["Node No.","ID","Range","Device Name","Logic note","date type","Remark"]
["AO-00","d1000","0-8000","MFC1 Flow Setpoint","0-8000对应\nMFC\n0-100%量程","float","MFC"]
["AO-01","d1002","0-8000","MFC2 Flow Setpoint",null,"float","MFC"]
["AO-02","d1004","0-8000","MFC3 Flow Setpoint",null,"float","MFC"]
["AO-03","d1006","0-8000","MFC4 Flow Setpoint",null,"float","MFC"]
["AO-04","d1008","0-8000","MFC5 Flow Setpoint",null,"float","MFC"]
["AO-05","d1010","0-8000","MFC6 Flow Setpoint",null,"float","MFC"]
["AO-06","d1012","0-8000","MFC7 Flow Setpoint",null,"float","MFC"]
["AO-07","d1014","0-8000","MFC8 Flow Setpoint",null,"float","MFC"]
["AO-08","d1016","0-8000","He Flow Setpoint",null,"float","He MFC"]
["AO-09","d1018","0-8000","Turbo Pump  N2 Flow Setpoint",null,"float","MFC"]
["AO-10","d1020","10-100°","Valve Temperature Setpoint",null,"float","阀门加热设定温度"]
["AO-11","d1022","50-110°","Valve Temp Limit Setpoint","Valve OT SW 115℃","float","Temp Limit"]
["AO-12","d1024","10-250°","Foreline Temperature Setpoint",null,"float","前级管道设定温度"]
["AO-13","d1026","50-500°","Foreline Temp Limit Setpoint",null,"float","Temp Limit"]
["AO-14","d1028","10-250°","CHB Wall Temperature Setpoint",null,"float","腔体壁设定温度"]
["AO-15","d1030","50-500°","CHB Wall Temp Limit Setpoint",null,"float","Temp Limit"]
["AO-16","d1032",null,"Heartbeat",null,"float","PC to PLC"]
["AO-17","d1034","0.5-50","ESC He Pressure Setpoint1","Torr,(1~50可控，0~50全量程)","float","He气体压力设定"]
["AO-18","d1036","0或1","ESC He Control Mode","0=flow ctrl;1=pre ctrl","float","He气体控制模式"]
["AO-19","d1038",null,null,null,"float"]
["AO-20","d1040","0.5-50","ESC He Pressure Setpoint2","Torr,(1~50可控，0~50全量程)","float","He气体压力设定"]
["AO-21","d1042",null,null,null,"float"]
["AO-22","d1044",null,null,null,"float"]
["AO-23","d1046",null,null,null,"float"]
["AO-24","d1048",null,null,null,"float"]
["AO-25","d1050","0-8000","MFC9 Flow Setpoint","0-8000对应\nMFC\n0-100%量程","float","MFC"]
["AO-26","d1052","0-8000","MFC10 Flow Setpoint",null,"float","MFC"]
["AO-27","d1054","0-8000","MFC11 Flow Setpoint (SPARE)",null,"float","MFC"]
["AO-28","d1056","0-8000","MFC12 Flow Setpoint (SPARE)",null,"float","MFC"]
["AO-29","d1058",null,null,null,"float"]
["AO-30","d1060","10-60°","GASLINE Temperature Setpoint",null,"float","GASLINE 加热设定温度"]
["AO-31","d1062","50-100°","GASLINE Temp Limit Setpoint",null,"float","Temp Limit"]
["AO-32","d1064",null,null,null,"float"]
["AO-33","d1066",null,null,null,"float"]
["AO-34","d1068",null,null,null,"float"]
["AO-35","d1070","0.1~9.999","MAGNET 周期时间","0.1S~9.999S","float","正弦波 360°周期时间。"]
["AO-36","d1072","0-10000","MAGNET 电压幅值","正弦波电压幅值输出0v~10v","float"]
["AO-37","d1074","0，1","MAGNET正弦波与方波切换","正弦波==0，方波==1","float","方波：1，0.3，-0.3，-1周期循环。"]
["AO-38","d1076",null,null,null,"float"]
["AO-39","d1078",null,"MAGNET 方波比例系数",null,"float","0-1.0"]
["AO-40","d1080","8~16","Magnet Driver Current Limit Setpoint","运行电流在8A以下，线路保护16A","float","设定值为两个驱动器三相电各相的电流和的极限值，每个驱动器的U相V相W相中任一相电流超出设定值的1/2均报警停止磁场输出。"]
["AO-41","d1082",null,"MAGNET A1 磁场电压修正系数",null,"float"]
["AO-42","d1084",null,"MAGNET B1 磁场电压修正系数",null,"float"]
["AO-43","d1086",null,"MAGNET A2 磁场电压修正系数",null,"float"]
["AO-44","d1088",null,"MAGNET B2 磁场电压修正系数",null,"float"]
["AO-45","d1090",null,null,null,"float"]
["AO-46","d1092",null,null,null,"float"]
["AO-47","d1094",null,null,null,"float"]
["AO-48","d1096",null,null,null,"float"]
["AO-49","d1098",null,null,null,"float"]
["AO-50","d1100",200,"MFC1 FLOW HIGH RANGE",null,"float"]
["AO-51","d1102",0,"MFC1 FLOW LOW RANGE",null,"float"]
["AO-52","d1104",100,"MFC2 FLOW HIGH RANGE",null,"float"]
["AO-53","d1106",0,"MFC2 FLOW LOW RANGE",null,"float"]
["AO-54","d1108",200,"MFC3 FLOW HIGH RANGE",null,"float"]
["AO-55","d1110",0,"MFC3 FLOW LOW RANGE",null,"float"]
["AO-56","d1112",800,"MFC4 FLOW HIGH RANGE",null,"float"]
["AO-57","d1114",0,"MFC4 FLOW LOW RANGE",null,"float"]
["AO-58","d1116",100,"MFC5 FLOW HIGH RANGE",null,"float"]
["AO-59","d1118",0,"MFC5 FLOW LOW RANGE",null,"float"]
["AO-60","d1120",100,"MFC6 FLOW HIGH RANGE",null,"float"]
["AO-61","d1122",0,"MFC6 FLOW LOW RANGE",null,"float"]
["AO-62","d1124",2000,"MFC7 FLOW HIGH RANGE",null,"float"]
["AO-63","d1126",0,"MFC7 FLOW LOW RANGE",null,"float"]
["AO-64","d1128",200,"MFC8 FLOW HIGH RANGE",null,"float"]
["AO-65","d1130",0,"MFC8 FLOW LOW RANGE",null,"float"]
["AO-66","d1132",50,"MFC9 FLOW HIGH RANGE",null,"float"]
["AO-67","d1134",0,"MFC9 FLOW LOW RANGE",null,"float"]
["AO-68","d1136",300,"MFC10 FLOW HIGH RANGE",null,"float"]
["AO-69","d1138",0,"MFC10 FLOW LOW RANGE",null,"float"]
["AO-70","d1140",100,"MFC11 FLOW HIGH RANGE",null,"float"]
["AO-71","d1142",0,"MFC11 FLOW LOW RANGE",null,"float"]
["AO-72","d1144",100,"MFC12 FLOW HIGH RANGE",null,"float"]
["AO-73","d1146",0,"MFC12 FLOW LOW RANGE",null,"float"]
["AO-74","d1148",10000,"PROCESS HIGH PRESS HIGH RANGE",null,"float"]
["AO-75","d1150",0,"PROCESS HIGH PRESS LOW RANGE",null,"float"]
["AO-76","d1152",1000,"PROCESS LOW PRESS HIGH RANGE",null,"float"]
["AO-77","d1154",0,"PROCESS LOW PRESS LOW RANGE",null,"float"]
["AO-78","d1156",10000,"FORELINE PRESS HIGH RANGE",null,"float"]
["AO-79","d1158",0,"FORELINE PRESS LOW RANGE",null,"float"]
["AO-80","d1160",50,"UPC1 HE PRESS HIGH RANGE",null,"float"]
["AO-81","d1162",0,"UPC1 HE PRESS LOW RANGE",null,"float"]
["AO-82","d1164",50,"UPC2 HE PRESS HIGH RANGE",null,"float"]
["AO-83","d1166",0,"UPC2 HE PRESS LOW RANGE",null,"float"]
["AO-84","d1168",20,"UPC2 HE FLOW HIGH RANGE",null,"float"]
["AO-85","d1170",0,"UPC2 HE FLOW LOW RANGE",null,"float"]
["AO-86","d1172",20,"UPC1 HE FLOW HIGH RANGE",null,"float"]
["AO-87","d1174",0,"UPC1 HE FLOW LOW RANGE",null,"float"]
["AO-88","d1176",5,"MAGNET DRIVER1 U CURRENT HIGH RANGE",null,"float"]
["AO-89","d1178",0,"MAGNET DRIVER1 U CURRENT LOW RANGE",null,"float"]
["AO-90","d1180",5,"MAGNET DRIVER1 V CURRENT HIGH RANGE",null,"float"]
["AO-91","d1182",0,"MAGNET DRIVER1 V CURRENT LOW RANGE",null,"float"]
["AO-92","d1184",5,"MAGNET DRIVER1 W CURRENT HIGH RANGE",null,"float"]
["AO-93","d1186",0,"MAGNET DRIVER1 W CURRENT LOW RANGE",null,"float"]
["AO-94","d1188",5,"MAGNET DRIVER2 U CURRENT HIGH RANGE",null,"float"]
["AO-95","d1190",0,"MAGNET DRIVER2 U CURRENT LOW RANGE",null,"float"]
["AO-96","d1192",5,"MAGNET DRIVER2 V CURRENT HIGH RANGE",null,"float"]
["AO-97","d1194",0,"MAGNET DRIVER2 V CURRENT LOW RANGE",null,"float"]
["AO-98","d1196",5,"MAGNET DRIVER2 W CURRENT HIGH RANGE",null,"float"]
["AO-99","d1198",0,"MAGNET DRIVER2 W CURRENT LOW RANGE",null,"float"]

{"sheet":"AI","index":3,"n_rows":51,"n_cols":13,"rows_kept":51,"cut":false,"hidden":false,"merged":[[5,10,14,10],[15,10,22,10],[36,10,40,10],[44,10,49,10],[44,12,46,12],[47,12,49,12]]}
["Node No.",{"$nulls":5},"ID","Range","Device Name","Note","Logic note","date type","Remark"]
["AI-00","AD1 CH01",2033,"D3554","D3860","D3862","d2000","0-10000","Chamber Pressure 10t","VG PP","0-10 Torr","float"]
["AI-01","AD1 CH02",2034,"D3556","D3864","D3866","d2002","0-1000","Process Pressure 1t","VG PPL","0-1Torr","float"]
["AI-02","AD1 CH03",2035,"D3558","D3868","D3870","d2004","0-10000","Foreline Pressure 10t","VG FL","0-10 Torr","float"]
["AI-03","AD1 CH04",2028,"D3544","D3876","D3878","d2006","0-100000","He Pressure 100t","VG He","0-100 Torr","float"]
["AI-04","RS485 CH01",2021,"D3530",null,"D3800","d2008","0-8000","MFC1 Flow","MFC 1","0-8000对应\nMFC\n0-100%量程","float","500sccm"]
["AI-05","RS485 CH02",2022,"D3532",null,"D3804","d2010","0-8000","MFC2 Flow","MFC 2",null,"float","100sccm"]
["AI-06","RS485 CH03",2023,"D3534",null,"D3808","d2012","0-8000","MFC3 Flow","MFC 3",null,"float","300sccm"]
["AI-07","RS485 CH04",2024,"D3536",null,"D3812","d2014","0-8000","MFC4 Flow","MFC 4",null,"float","1000sccm"]
["AI-08","RS485 CH05",2025,"D3538",null,"D3816","d2016","0-8000","MFC5 Flow","MFC 5",null,"float","50sccm"]
["AI-09","RS485 CH06",2026,"D3540",null,"D3820","d2018","0-8000","MFC6 Flow","MFC 6",null,"float","500sccm"]
["AI-10","RS485 CH07",2031,"D3550",null,"D3824","d2020","0-8000","MFC7 Flow","MFC 7",null,"float","500sccm"]
["AI-11","RS485 CH08",2032,"D3552",null,"D3828","d2022","0-8000","MFC8 Flow","MFC 8",null,"float","300sccm"]
["AI-12","AD1 CH08",2027,"D3542",null,"D3832","d2024","0-8000","MFC He1 Flow","MFC He1",null,"float","50sccm"]
["AI-13","AD2 CH08",2038,"D3564",null,"D3836","d2026","0-8000","Turbo Pump N2 Flow","MFC N2",null,"float","MFC"]
["AI-14","TC1 CH01",2053,null,null,"D3640","d2028","-200-1300°","Valve Control TC Temp",null,"TC","float","TC temp"]
["AI-15","TC1 CH02",2054,null,null,"D3642","d2030","-200-1300°","Gasline  Control  TC Temp",null,null,"float","TC temp"]
["AI-16","TC1 CH03",2063,null,null,"D3640","d2032","-200-1300°","Foreline Control TC Temp",null,null,"float","TC temp"]
["AI-17","TC1 CH04",2064,null,null,"D3640","d2034","-200-1300°","Foreline Monitor TC Temp",null,null,"float","TC temp"]
["AI-18","TC2 CH01",2103,null,null,"D5640","d2036","-200-1300°","CHBCoolant Inlet Temp",null,null,"float","TC temp"]
["AI-19","TC2 CH02",2104,null,null,"D5640","d2038","-200-1300°","CHB Coolant Outlet Temp",null,null,"float","TC temp"]
["AI-20","TC2 CH03",2113,null,null,"D5640","d2040","-200-1300°","ESC Coolant Inlet Temp",null,null,"float","TC temp"]
["AI-21","TC2 CH04",2114,null,null,"D5640","d2042","-200-1300°","ESC Coolant Outlet Temp",null,null,"float","TC temp"]
["AI-22",{"$nulls":5},"d2044",null,"Heartbeat FB","D1032 Feedback",null,"float","PLC to PC"]
["AI-23",{"$nulls":5},"d2046","00~59","Second",null,"秒","float"]
["AI-24",{"$nulls":5},"d2048","00~59","Minute",null,"分","float"]
["AI-25",{"$nulls":5},"d2050","00~23","Time",null,"时","float"]
["AI-26",{"$nulls":5},"d2052","00~31","Day",null,"日","float"]
["AI-27",{"$nulls":5},"d2054","01~12","Month",null,"月","float"]
["AI-28",{"$nulls":5},"d2056","00~99","Year",null,"年","float"]
["AI-29",{"$nulls":5},"d2058","0-760000","Chamber Pressure 760t","VG CHB","unit: mtorr","float"]
["AI-30",{"$nulls":5},"d2060","0-760000","LL Pressure 760t","LL VG CHB","unit: mtorr","float","Loadlock"]
["AI-31",{"$nulls":5},"d2062","0-10000","Chamber Pressure Virtual","VG PP","unit: mtorr","float"]
["AI-32",{"$nulls":5},"d2064",{"$nulls":4},"float"]
["AI-33",{"$nulls":5},"d2066",{"$nulls":4},"float"]
["AI-34",{"$nulls":5},"d2068",{"$nulls":4},"float"]
["AI-35","RS485 CH09",{"$nulls":4},"d2070","0-8000","MFC9Flow","MFC 9","0-8000对应\nMFC\n0-100%量程","float","spare"]
["AI-36","RS485 CH10",{"$nulls":4},"d2072","0-8000","MFC10Flow","MFC 10",null,"float","spare"]
["AI-37","RS485 CH11",{"$nulls":4},"d2074","0-8000","MFC11Flow","MFC 11(SPARE)",null,"float","spare"]
["AI-38","RS485 CH12",{"$nulls":4},"d2076","0-8000","MFC12Flow","MFC 12",null,"float","spare"]
["AI-39",{"$nulls":5},"d2078","0-8000","MFC He2 Flow","MFC He2",null,"float","50sccm"]
["AI-40","AD1 CH05",{"$nulls":4},"d2080","0~50000","He Pressure 1","MFC He1","0-50 Torr","float","MFC控压"]
["AI-41",{"$nulls":5},"d2082","0~50000","He Pressure 2","MFC He2","0-50 Torr","float","MFC控压"]
["AI-42",{"$nulls":5},"d2084",{"$nulls":4},"float"]
["AI-43",{"$nulls":5},"d2086","0~50000","Magnet Driver 1 Phase U Current","Current Sensor","0-50000对应\nCurrent Sensor\n0-50A量程","float","Current \nSensor 1"]
["AI-44",{"$nulls":5},"d2088","0~50000","Magnet Driver 1 Phase V Current","Current Sensor",null,"float"]
["AI-45",{"$nulls":5},"d2090","0~50000","Magnet Driver 1 Phase W Current","Current Sensor",null,"float"]
["AI-46",{"$nulls":5},"d2092","0~50000","Magnet Driver 2 Phase U Current","Current Sensor",null,"float","Current \nSensor 2"]
["AI-47",{"$nulls":5},"d2094","0~50000","Magnet Driver 2 Phase V Current","Current Sensor",null,"float"]
["AI-48",{"$nulls":5},"d2096","0~50000","Magnet Driver 2 Phase W Current","Current Sensor",null,"float"]
["AI-49",{"$nulls":5},"d2098",{"$nulls":4},"float"]

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[]
[null,"VNS IP设置",{"$nulls":5},"PMA GATEWAY (VNS_DE)"]
[null,"SYS PC",null,"192.168.10.100",null,9600,null,"IP:192.168.10.112"]
[null,"EFEM PC",null,"192.168.10.20",null,13000,null,"端口","使用",null,null,"对应COM"]
[null,"PMA PLC",null,"192.168.10.110",null,9600,null,"P1","SRF",null,null,"COM11"]
[null,"PMA OES",null,"192.168.10.111",null,9600,null,"P2","SRF MATCH",null,null,"COM12"]
[null,"PMA GATEWAY",null,"192.168.10.112",null,9600,null,"P3","HV POWER",null,null,"COM13"]
[null,"PMA SMATCH",null,"192.168.10.113",null,5025,null,"P4","P Valve",null,null,"COM14"]
[null,"PMA BMATCH",null,"192.168.10.114",null,5025,null,"P5","Turbo Pump",null,null,"COM15"]
[null,"PMB PLC",null,"192.168.10.120",null,9600,null,"P6","BRF",null,null,"COM16"]
[null,"PMB OES",null,"192.168.10.121",null,9600,null,"P7","BRF MATCH",null,null,"COM17"]
[null,"PMB GATEWAY",null,"192.168.10.122",null,9600,null,"P8","SPARE",null,null,"COM18"]
[null,"PMB SMATCH",null,"192.168.10.123",null,5025]
[null,"PMB BMATCH",null,"192.168.10.124",null,5025,null,"PMB GATEWAY (VNS_SE)"]
[null,"PMC PLC",null,"192.168.10.130",null,9600,null,"IP:192.168.10.122"]
[null,"PMC OES",null,"192.168.10.131",null,9600,null,"端口","使用",null,null,"对应COM"]
[null,"PMC GATEWAY",null,"192.168.10.132",null,9600,null,"P1","SRF",null,null,"COM21"]
[null,"PMC SMATCH",null,"192.168.10.133",null,5025,null,"P2","SRF MATCH",null,null,"COM22"]
[null,"PMC BMATCH",null,"192.168.10.134",null,5025,null,"P3","HV POWER",null,null,"COM23"]
[null,"PMD PLC",null,"192.168.10.140",null,9600,null,"P4","P Valve",null,null,"COM24"]
[null,"PMD OES",null,"192.168.10.141",null,9600,null,"P5","Turbo Pump",null,null,"COM25"]
[null,"PMD GATEWAY",null,"192.168.10.142",null,9600,null,"P6","BRF",null,null,"COM26"]
[null,"PMD SMATCH",null,"192.168.10.143",null,5025,null,"P7","BRF MATCH",null,null,"COM27"]
[null,"PMD BMATCH",null,"192.168.10.144",null,5025,null,"P8","SPARE",null,null,"COM28"]
[]
[null,"TM PLC",null,"192.168.10.210",null,9600]
[null,"TM ROBOT",null,"192.168.10.211",null,"待定12100",null,"PMC GATEWAY"]
[null,"AC RACK GATEWAY 1",null,"192.168.10.150",null,9600,null,"IP:192.168.10.132"]
[null,"AC RACK GATEWAY 2",null,"192.168.10.151",null,9600,null,"端口","使用",null,null,"对应COM"]
[{"$nulls":7},"P1","SRF",null,null,"COM31"]
[{"$nulls":7},"P2","SRF MATCH",null,null,"COM32"]
[{"$nulls":7},"P3","HV POWER",null,null,"COM33"]
[{"$nulls":7},"P4","P Valve",null,null,"COM34"]
[{"$nulls":7},"P5","Turbo Pump",null,null,"COM35"]
[{"$nulls":7},"P6","BRF",null,null,"COM36"]
[{"$nulls":7},"P7","BRF MATCH",null,null,"COM37"]
[{"$nulls":7},"P8","SPARE",null,null,"COM38"]
[]
[{"$nulls":7},"PMD GATEWAY"]
[{"$nulls":7},"IP:192.168.10.142"]
[{"$nulls":7},"端口","使用",null,null,"对应COM"]
[{"$nulls":7},"P1","SRF",null,null,"COM41"]
[{"$nulls":7},"P2","SRF MATCH",null,null,"COM42"]
[{"$nulls":7},"P3","HV POWER",null,null,"COM43"]
[{"$nulls":7},"P4","P Valve",null,null,"COM44"]
[{"$nulls":7},"P5","Turbo Pump",null,null,"COM45"]
[{"$nulls":7},"P6","BRF",null,null,"COM46"]
[{"$nulls":7},"P7","BRF MATCH",null,null,"COM47"]
[{"$nulls":7},"P8","SPARE",null,null,"COM48"]
[]
[{"$nulls":7},"AC RACK GATEWAY1 (8PORT)"]
[{"$nulls":7},"IP:192.168.10.150"]
[{"$nulls":7},"端口","使用",null,null,"对应COM"]
[{"$nulls":7},"P1","PUMP PMA",null,null,"COM51"]
[{"$nulls":7},"P2","TM PUMP1",null,null,"COM52"]
[{"$nulls":7},"P3","PUMP PMB",null,null,"COM53"]
[{"$nulls":7},"P4","TM PUMP2",null,null,"COM54"]
[{"$nulls":7},"P5","PUMP PMC",null,null,"COM55"]
[{"$nulls":7},"P6","SPARE",null,null,"COM56"]
[{"$nulls":7},"P7","PUMP PMD",null,null,"COM57"]
[{"$nulls":7},"P8","SPARE",null,null,"COM58"]
[]
[{"$nulls":7},"AC RACK GATEWAY2 (4PORT)"]
[{"$nulls":7},"IP:192.168.10.151"]
[{"$nulls":7},"端口","使用",null,null,"对应COM"]
[{"$nulls":7},"P1","CHILLER 1 FOR PMA & PMB",null,null,"COM61"]
[{"$nulls":7},"P2","SPARE",null,null,"COM62"]
[{"$nulls":7},"P3","CHILLER 2 FOR PMC & PMD",null,null,"COM63"]
[{"$nulls":7},"P4","SPARE",null,null,"COM64"]

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["                 \n                                   FUNCTION\n\n    CONDITION",null,null,"KA15.0","KA15.1","KA20.8.1","KM55.3","TO TM","TO TM","EV/U","EV/D","DO0~DO18,\nDO52~DO72"]
[null,null,null,"BRF INTLK","HV INTLK","Turbo pump INTLK","Magnets POWER ON","TM SLit Door Open Enable","TM ROB EXTEND Enable","PM SLIT DOOR",null,"GAS BOX"]
[{"$nulls":9},"OPEN","CLOSE","VALVE OPEN"]
[1,"KA5.0","Lid Door Closed ","T1","T1",{"$nulls":4},"T1","T1"]
[2,"KA5.1","Lid Door Closed ",{"$nulls":4},"T1","T1"]
[3,"KA5.7","PM Slit Door Opened",{"$nulls":5},"T2"]
[4,"KA5.8","PM Slit Door Closed","T2","T2"]
[5,"KA7.7","MAGNET COILS  OT SW",null,null,null,"T1"]
[6,"KA9.8","GB DOOR",{"$nulls":8},"T1","T1"]
[7,"KA9.9","GB PRESSURE ok",{"$nulls":8},"T2","T2"]
[8,"KA11.2","VAC SW","T3","T3"]
[9,"KA15.2","B-Match interlock","T4"]
[10,"KA20.7.1\nDO-47","TM Slit Door Open Enable",{"$nulls":4},"T2","T3"]
[11,"KA20.8\nDO-80","Magnets ON",null,null,null,"T2"]
[12,"KA32.2","TM Slit Door Colsed"]
[13,"KA32.3","TM arm not extend PM"]
[14,"DO 7.12","Turbo pump INTLK",null,null,"T1"]
["Logic",null,null,"If T1*T2*T3*T4=1 it is enable","If T1*T2*T3=1 it is enable","If T1=1 it is enable","If T1*T2=1 it is enable","If T1*T2=1 it is enable","If T1*T2*T3=1 it is enable","If T1=1 it is enable","If T1=1 it is enable","If T1*T2=1 it is enable","If T1*T2=1 it is enable"]

{"sheet":"Software interlock","index":6,"n_rows":25,"n_cols":63,"rows_kept":25,"cut":false,"hidden":false,"merged":[[0,0,0,1],[24,0,24,1],[1,0,2,1]]}
["CONDITION"]
["                 \n                                   FUNCTION\n\n    CONDITION",null,"INTK","INTK","INTK","INTK","DO-80","DO-47","DO-00","DO-01","DO-02","DO-03","DO-04","DO-05","DO-06","DO-07","DO-08","DO-09","DO-57","DO-58","DO-59","DO-60","DO-61","DO-62","DO-63","DO-64","DO-65","DO-66","DO-67","DO-68","DO-69","DO-70","DO-71","DO-72","DO-10","DO-11","DO-12","DO-13","DO-14","DO-15","DO-16","DO-17","DO-18","DO-52","DO-53","DO-54","DO-55","DO-19","DO-20","DO-48","DO-74","DO-75","DO-76","DO-21","DO-22","DO-23","DO-24","DO-25","DO-26","DO-27","DO-29","DO-30","DO-31"]
[null,null,"Turbo Pump Run","HV Power On","Generator Power On","TO PM PICK or  PLACE","Magnets ON","Slit Door Open Enable","PVN21","PVN22","PV11","PV12","PV21","PV22","PV31","PV32","PV41","PV42","PV51","PV52","PV61","PV62","PV71","PV72","PV81","PV82","PV91","PV92","PVA1","PVA2","PVB1","PVB2","PVC1","PVC2","N2 Valve","MFC1 Valve","MFC2 Valve","MFC3 Valve","MFC4 Valve","MFC5 Valve","MFC6 Valve","MFC7 Valve","MFC8 Valve","MFC9 Valve","MFC10 Valve","MFC11 Valve(SPARE)","MFC12 Valve(SPARE)","PVHe1","PVHe2","PVHe3","PVHe4","PVHe5","PVHe6","Gas final valve","Soft Pumping Valve","Fast Pumping Valve","Slit Door Open","Slit Door Close","Lift Pin Up","Lift Pin Down","Turbo Pump Pumping Valve","Turbo Pump Purge Valve","Gauge Valve"]
["DI-00","Lid Closed",null,"T1","T1","T1","T1","T1","T1","T1","T1","T1","T1","T1","T1","T1","T1","T1","T1","T1","T1","T1","T1","T1","T1","T1","T1","T1","T1","T1","T1","T1","T1","T1","T1","T1","T1","T1","T1","T1","T1","T1","T1","T1","T1","T1","T1","T1","T1","T1","T1","T1","T1","T1","T1","T1","T1","T1"]
["DI-01","PM ATM SW"]
["DI-02","PM VAC SW",null,"T2","T2",{"$nulls":57},"T1"]
["DI-03","ESC Coolant Flow SW",null,"T3","T7"]
["DI-53","Turbo Pump Water Flow Switch","T1"]
["DI-55","Source RF Water Flow SW",null,null,"T3"]
["DI-90","Magnets Coils OT Switch Alarm",{"$nulls":4},"T2"]
["DI-07","RF/HV Hardware Interlock",null,"T4","T4"]
["DI-63","Bias Match interlock ok",null,"T5","T5"]
["DI-09","Turbo Pump Interlock","T2"]
["DI-10","Slit Door Open Pos",null,null,null,"T2"]
["DI-11","Slit Door Close Pos",null,"T6","T6",null,null,null,"T2",null,"T2","T2","T2","T2","T2","T2","T2","T2","T2","T2","T2","T2","T2","T2","T2","T2","T2","T2","T2","T2","T2","T2","T2","T2","T2","T2","T2","T2","T2","T2","T2","T2","T2","T2","T2","T2","T2",{"$nulls":6},"T2","T2","T2"]
["DI-12","CDA Pressure",{"$nulls":6},"T3","T3","T3","T3","T3","T3","T3","T3","T3","T3","T3","T3","T3","T3","T3","T3","T3","T3","T3","T3","T3","T3","T3","T3","T3","T3","T3","T3","T3","T3","T3","T3","T3","T3","T3","T3","T3","T3","T3","T2","T2","T2","T2","T2","T2","T3","T3","T3","T2","T2","T1","T1","T1","T1","T2"]
["DI-58","TM ARM NOT EXTEND TO PM",{"$nulls":54},"T3","T3"]
["DI-59","TM Slit Door Closed",{"$nulls":54},"T4","T4"]
["DI-51","Gas Box Door Switch",{"$nulls":6},"T4","T4","T4","T4","T4","T4","T4","T4","T4","T4","T4","T4","T4","T4","T4","T4","T4","T4","T4","T4","T4","T4","T4","T4","T4","T4","T4","T4","T4","T4","T4","T4","T4","T4","T4","T4","T4","T4","T4"]
["DI-52","Gas Box Pressure Switch",{"$nulls":6},"T5","T5","T5","T5","T5","T5","T5","T5","T5","T5","T5","T5","T5","T5","T5","T5","T5","T5","T5","T5","T5","T5","T5","T5","T5","T5","T5","T5","T5","T5","T5","T5","T5","T5","T5","T5","T5","T5","T5"]
["软件逻辑判断","满足开slit door条件，如压差、pin状态、工艺状态等。",{"$nulls":5},"T2"]
["DO-10","N2 Valve",{"$nulls":52},"T4=0","T4=0"]
["DO-22","Soft Pumping Valve",{"$nulls":32},"T6=0"]
["DO-23","Fast Pumping Valve",{"$nulls":32},"T7=0"]
["Logic",null,"If T1*T2=1 it is enable","If T1*T2*T3*T4*T5*T6=1 it is enable","If T1*T2*T3*T4*T5*T6*T7=1 it is enable","If T1*T2=1 it is enable","If T1*T2=1 it is enable","If T1*T2=1 it is enable","If T1*T2*T3*T4*T5=1 it is enable","If T1*T2*T3=1 it is enable","If T1*T2*T3*T4*T5=1 it is enable","If T1*T2*T3*T4*T5=1 it is enable","If T1*T2*T3*T4*T5=1 it is enable","If T1*T2*T3*T4*T5=1 it is enable","If T1*T2*T3*T4*T5=1 it is enable","If T1*T2*T3*T4*T5=1 it is enable","If T1*T2*T3*T4*T5=1 it is enable","If T1*T2*T3*T4*T5=1 it is enable","If T1*T2*T3*T4*T5=1 it is enable","If T1*T2*T3*T4*T5=1 it is enable","If T1*T2*T3*T4*T5=1 it is enable","If T1*T2*T3*T4*T5=1 it is enable","If T1*T2*T3*T4*T5=1 it is enable","If T1*T2*T3*T4*T5=1 it is enable","If T1*T2*T3*T4*T5=1 it is enable","If T1*T2*T3*T4*T5=1 it is enable","If T1*T2*T3*T4*T5=1 it is enable","If T1*T2*T3*T4*T5=1 it is enable","If T1*T2*T3*T4*T5=1 it is enable","If T1*T2*T3*T4*T5=1 it is enable","If T1*T2*T3*T4*T5=1 it is enable","If T1*T2*T3*T4*T5=1 it is enable","If T1*T2*T3*T4*T5=1 it is enable","If T1*T2*T3*T4*T5=1 it is enable","If T1*T2*T3*T4*T5*T6*T7=1 it is enable","If T1*T2*T3*T4*T5=1 it is enable","If T1*T2*T3*T4*T5=1 it is enable","If T1*T2*T3*T4*T5=1 it is enable","If T1*T2*T3*T4*T5=1 it is enable","If T1*T2*T3*T4*T5=1 it is enable","If T1*T2*T3*T4*T5=1 it is enable","If T1*T2*T3*T4*T5=1 it is enable","If T1*T2*T3*T4*T5=1 it is enable","If T1*T2*T3*T4*T5=1 it is enable","If T1*T2*T3*T4*T5=1 it is enable","If T1*T2*T3*T4*T5=1 it is enable","If T1*T2*T3*T4*T5=1 it is enable","If T1*T2=1 it is enable","If T1*T2=1 it is enable","If T1*T2=1 it is enable","If T1*T2=1 it is enable","If T1*T2=1 it is enable","If T1*T2=1 it is enable","If T1*T2*T3=1 it is enable","If T1*T2*T3*T4=1 it is enable","If T1*T2*T3*T4=1 it is enable","If T1*T2*T3*T4=1 it is enable","If T1*T2*T3*T4=1 it is enable","If T1=1 it is enable","If T1=1 it is enable","If T1=1 it is enable","If T1*T2=1 it is enable","If T1*T2=1 it is enable"]

{"sheet":"PM HW interlock draft","index":7,"n_rows":9,"n_cols":8,"rows_kept":9,"cut":false,"hidden":true,"merged":[[0,0,0,1],[0,2,0,7],[8,0,8,1],[1,0,2,1]]}
["Condition"]
[null,null,"DO-32","DO-33","DO-34","DO-48","DO-16","DO-15"]
[null,null,"MFC1 valve  ","MFC2 valve","MFC3 valve","Process gas final valve","RPS enable","Heater  Enable"]
["DI-44","UE on Chamber SW","T1","T1","T1","T1","T1","T1"]
["DI-38","PM VAC SW","T2","T2","T2","T2","T2"]
["DI-12","Slit Door Close Pos","T3","T3","T3","T3"]
["DI-41","PM Foreline VAC SW","T4","T4","T4","T4"]
["DI-46","Cooling water flow SW",{"$nulls":4},"T3"]
["Logic",null,"If T1*T2*T3*T4=1 it is enable.","If T1*T2*T3*T4=1 it is enable.","If T1*T2*T3*T4=1 it is enable.","If T1*T2*T3*T4=1 it is enable.","If T1*T2*T3=1 it is enable.","If T1=1 it is enable."]

{"sheet":"PM PLC interlock draft","index":8,"n_rows":6,"n_cols":3,"rows_kept":6,"cut":false,"hidden":true,"merged":[[0,0,0,1],[5,0,5,1],[1,0,2,1]]}
["Condition"]
[null,null,"DO-16"]
[null,null,"RPS enable"]
["DI-41","PM Foreline VAC SW","T1"]
["DI-46","Cooling water flow SW","T2"]
["Logic",null,"If T1*T2=1 it is enable."]