{"text_format":"2","workbook":"xlsx","n_sheets":6,"sheets":["DI-DO","AO","AI","Software interlock","PM HW interlock draft","PM PLC interlock draft"],"not_rendered":{"charts":0,"images":0,"macros":0,"external_links":0,"defined_names":2,"comments":0,"pivot_tables":0},"unopened":[],"bounds":{"document_bytes":16777216,"sheet_cells":100000,"run_cost":"one","rows_first":2000,"rows_last":500,"rows_between":2000,"halvings":0,"cell_chars":16384,"cell_head_chars":4096},"cells_cut":0,"cells_raw":0,"read":"whole","date_system":"1900"}

{"sheet":"DI-DO","index":0,"n_rows":101,"n_cols":18,"rows_kept":101,"cut":false,"hidden":false,"merged":[]}
[null,"#.DI","PLC DI","Name","Note","Logic Note","Location","Remark",null,null,"#.DO","PLC DO","Name","Note","Logic Note","Location","TRIG(上位触发)"]
[null,"DI-00","0.00","TM-DI1","PMA-Left DOOR OPEN  ENABLE",null,"w0.00",null,null,null,"DO-00","100.00","VCE-L-TM-OP-L","VCE-A-LeftDoor-Open ","100.01=0,2.12=1,3.13=1,1.05=0","w100.00","w200.00"]
[null,"DI-01","0.01","TM-DI2","PMA-R SLIT DOOR OPEN  ENABLE",null,"w0.01",null,null,null,"DO-01","100.01","VCE-L-TM-CL-L","VCE-A-LeftDoor-Close ","100.00=0,2.12=1,3.13=1,0.06=1,1.06=0","w100.01","w200.01"]
[null,"DI-02","0.02","TM-DI4","PMB-L SLIT DOOR OPEN  ENABLE",null,"w0.02",null,null,null,"DO-02","100.02","VCE-L-TM-OP-R","VCE-A-RightDoor-Open ","100.03=0,2.12=1,3.13=1,1.07=0","w100.02","w200.02"]
[null,"DI-03","0.03","TM-DI5","PMB-R SLIT DOOR OPEN  ENABLE",null,"w0.03",null,null,null,"DO-03","100.03","VCE-L-TM-CL-R","VCE-A-RightDoor-Close ","100.02=0,2.12=1,3.13=1,0.06=1,1.08=0","w100.03","w200.03"]
[null,"DI-04","0.04","TM-DI7","PMC-L SLIT DOOR OPEN  ENABLE",null,"w0.04",null,null,null,"DO-04","100.04","VCE-R-TM-OP-L","VCE-B-LeftDoor-Open ","100.05=0,2.12=1,3.13=1,1.09=0","w100.04","w200.04"]
[null,"DI-05","0.05","TM-DI8","PMC-R SLIT DOOR OPEN  ENABLE",null,"w0.05",null,null,null,"DO-05","100.05","VCE-R-TM-CL-L","VCE-B-LeftDoor-Close ","100.04=0,2.12=1,3.13=1,0.07=1,1.10=0","w100.05","w200.05"]
[null,"DI-06","0.06","VCE-L-RB-RET","ROBOT TO VCE-A RETRACT",null,"w0.06",null,null,null,"DO-06","100.06","VCE-R-TM-OP-R","VCE-B-RightDoor-Open ","100.07=0,2.12=1,3.13=1,1.11=0","w100.06","w200.06"]
[null,"DI-07","0.07","VCE-R-RB-RET","ROBOT TO VCE-B RETRACT",null,"w0.07",null,null,null,"DO-07","100.07","VCE-R-TM-CL-R","VCE-B-RightDoor-Close ","100.06=0,2.12=1,3.13=1,0.07=1,1.12=0","w100.07","w200.07"]
[null,"DI-08","0.08","PMA-RB-RET","ROBOT TO PMA RETRACT",null,"w0.08",null,null,null,"DO-08","100.08","TM-PMA-L-OP","PMA-LeftDoor-Open ","100.09=0,2.12=1,3.13=1,0.00=1,1.13=0","w100.08","w200.08"]
[null,"DI-09","0.09","PMB-RB-RET","ROBOT TO PMB RETRACT",null,"w0.09",null,null,null,"DO-09","100.09","TM-PMA-L-CL","PMA-LeftDoor-Close ","100.08=0,2.12=1,3.13=1,0.00=1,0.08=1,1.14=0,0.15=1","w100.09","w200.09"]
[null,"DI-10","0.10","PMC-RB-RET","ROBOT TO PMC RETRACT",null,"w0.10",null,null,null,"DO-10","100.10","TM-PMA-R-OP","PMA-RightDoor-Open ","100.11=0,2.12=1,3.13=1,0.01=1,1.15=0","w100.10","w200.10"]
[null,"DI-11","0.11","VCE-L SS-L","VCE-A-wafer senser-Left",null,"w0.11",null,null,null,"DO-11","100.11","TM-PMA-R-CL","PMA-RightDoor-Close ","100.10=0,2.12=1,3.13=1,0.01=1,0.08=1,2.00=0,1.00=1","w100.11","w200.11"]
[null,"DI-12","0.12","VCE-L SS-R","VCE-A-wafer senser-Right",null,"w0.12",null,null,null,"DO-12","100.12","TM-PMB-L-OP","PMB-LeftDoor-Open ","100.13=0,2.12=1,3.13=1,0.02=1,2.01=0","w100.12","w200.12"]
[null,"DI-13","0.13","VCE-R SS-L","VCE-B-wafer senser-Left",null,"w0.13",null,null,null,"DO-13","100.13","TM-PMB-L-CL","PMB-LeftDoor-Close ","100.12=0,2.12=1,3.13=1,0.02=1,0.09=1,2.02=0,1.01=1","w100.13","w200.13"]
[null,"DI-14","0.14","VCE-R SS-R","VCE-B-wafer senser-Right",null,"w0.14",null,null,null,"DO-14","100.14","TM-PMB-R-OP","PMB-RightDoor-Open ","100.15=0,2.12=1,3.13=1,0.03=1,2.03=0","w100.14","w200.14"]
[null,"DI-15","0.15","PMA SS-L","PMA-wafer senser-Left",null,"w0.15",null,null,null,"DO-15","100.15","TM-PMB-R-CL","PMB-RightDoor-Close ","100.14=0,2.12=1,3.13=1,0.03=1,0.09=1,2.04=0,1.02=1","w100.15","w200.15"]
[null,"DI-16","1.00","PMA SS-R","PMA-wafer senser-Right",null,"w1.00",null,null,null,"DO-16","101.00","TM-PMC-L-OP","PMC-LeftDoor-Open ","101.01=0,2.12=1,3.13=1,0.04=1,2.05=0","w101.00","w201.00"]
[null,"DI-17","1.01","PMB SS-L","PMB-wafer-senseRight-Left",null,"w1.01",null,null,null,"DO-17","101.01","TM-PMC-L-CL","PMC-LeftDoor-Close ","101.00=0,212=1,3.13=1,0.04=1,0.10=1,2.06=1,1.03=1","w101.01","w201.01"]
[null,"DI-18","1.02","PMB SS-R","PMB-wafer-senseRight-Right",null,"w1.02",null,null,null,"DO-18","101.02","TM-PMC-R-OP","PMC-RightDoor-Open ","101.03=0,2.12=1,3.13=1,0.05=1,2.07=0","w101.02","w201.02"]
[null,"DI-19","1.03","PMC SS-L","PMC-wafer-senseRight-Left",null,"w1.03",null,null,null,"DO-19","101.03","TM-PMC-R-CL","PMC-RightDoor-Close ","101.02=0,2.12=1,3.13=1,0.05=1,0.10=1,2.08=0,1.04=1","w101.03","w201.03"]
[null,"DI-20","1.04","PMC SS-R","PMC-wafer-senseRight-Right",null,"w1.04",null,null,null,"DO-20","101.04","TM-V-HS","TM-Fast-Pump","w202.14=1","w101.04","w201.04"]
[null,"DI-21","1.05","VCE-L-TM-OPS-L","VCE-A-LeftDoor-Open-Pos",null,"w1.05",null,null,null,"DO-21","101.05","TM-V-LS","TM-Soft-Pump",null,"w101.05","w201.05"]
[null,"DI-22","1.06","VCE-L-TM-CLS-L","VCE-A-LeftDoor-Close-Pos",null,"w1.06",null,null,null,"DO-22","101.06","TM-B-HS","TM-Fast-Vent","w202.14=1,2.09=1","w101.06","w201.06"]
[null,"DI-23","1.07","VCE-L-TM-OPS-R","VCE-A-RightDoor-Open-Pos",null,"w1.07",null,null,null,"DO-23","101.07","TM-B-LS","TM-Soft-Vent",null,"w101.07","w201.07"]
[null,"DI-24","1.08","VCE-L-TM-CLS-R","VCE-A-RightDoor-Close-Pos",null,"w1.08",null,null,null,"DO-24","101.08","VCE-L-V-HS","VCE-A-Fast-Pump","w202.14=1","w101.08","w201.08"]
[null,"DI-25","1.09","VCE-R-TM-OPS-L","VCE-B-LeftDoor-Open-Pos",null,"w1.09",null,null,null,"DO-25","101.09","VCE-L-V-LS","VCE-A-Soft-Pump","w202.14=1","w101.09","w201.09"]
[null,"DI-26","1.10","VCE-R-TM-CLS-L","VCE-B-LeftDoor-Close-Pos",null,"w1.10",null,null,null,"DO-26","101.10","VCE-R-V-HS","VCE-B-Fast-Pump","w202.14=1","w101.10","w201.10"]
[null,"DI-27","1.11","VCE-R-TM-OPS-R","VCE-B-RightDoor-Open-Pos",null,"w1.11",null,null,null,"DO-27","101.11","VCE-R-V-LS","VCE-B-Soft-Pump","w202.14=1","w101.11","w201.11"]
[null,"DI-28","1.12","VCE-R-TM-CLS-R","VCE-B-RightDoor-Close-Pos",null,"w1.12",null,null,null,"DO-28","101.12","VCE-L-B-HS","VCE-A-Fast-Vent","w202.14=1,2.09=1","w101.12","w201.12"]
[null,"DI-29","1.13","TM-PMA-L-OPS","PMA-LeftDoor-Open-Pos",null,"w1.13",null,null,null,"DO-29","101.13","VCE-L-B-LS","VCE-A-Soft-Vent","w202.14=1,2.09=1","w101.13","w201.13"]
[null,"DI-30","1.14","TM-PMA-L-CLS","PMA-LeftDoor-Close-Pos",null,"w1.14",null,null,null,"DO-30","101.14","VCE-R-B-HS","VCE-B-Fast-Vent","w202.14=1,2.09=1","w101.14","w201.14"]
[null,"DI-31","1.15","TM-PMA-R-OPS","PMA-RightDoor-Open-Pos",null,"w1.15",null,null,null,"DO-31","101.15","VCE-R-B-LS","VCE-B-Soft-Vent","w202.14=1,2.09=1","w101.15","w201.15"]
[null,"DI-32","2.00","TM-PMA-R-CLS","PMA-RightDoor-Close-Pos",null,"w2.00",null,null,null,"DO-32","102.00","水阀1","Water-Valve-IN","2.13=1","w102.00","w202.00"]
[null,"DI-33","2.01","TM-PMB-L-OPS","PMB-LeftDoor-Open-Pos",null,"w2.01",null,null,null,"DO-33","102.01","水阀2","Water-Valve-PMA","2.13=1","w102.01","w202.01"]
[null,"DI-34","2.02","TM-PMB-L-CLS","PMB-LeftDoor-Close-Pos",null,"w2.02",null,null,null,"DO-34","102.02","水阀3","Water-Valve-PMB","2.13=1","w102.02","w202.02"]
[null,"DI-35","2.03","TM-PMB-R-OPS","PMB-RightDoor-Open-Pos",null,"w2.03",null,null,null,"DO-35","102.03","水阀4","Water-Valve-PMC","2.13=1","w102.03","w202.03"]
[null,"DI-36","2.04","TM-PMB-R-CLS","PMB-RightDoor-Close-Pos",null,"w2.04",null,null,null,"DO-36","102.04","BUZZER1","Buzzer1",null,"w102.04","w202.04(常亮)","w212.04(闪烁)"]
[null,"DI-37","2.05","TM-PMC-L-OPS","PMC-LeftDoor-Open-Pos",null,"w2.05",null,null,null,"DO-37","102.05","BUZZER2","Buzzer2",null,"w102.05","w202.05(常亮)","w212.05(闪烁)"]
[null,"DI-38","2.06","TM-PMC-L-CLS","PMC-LeftDoor-Close-Pos",null,"w2.06",null,null,null,"DO-38","102.06","RED ","Alarm-Lamp-Red",null,"w102.06","w202.06(常亮)","w212.06(闪烁)"]
[null,"DI-39","2.07","TM-PMC-R-OPS","PMC-RightDoor-Open-Pos",null,"w2.07",null,null,null,"DO-39","102.07","ORANGE","Alarm-Lamp-Orange",null,"w102.07","w202.07(常亮)","w212.07(闪烁)"]
[null,"DI-40","2.08","TM-PMC-R-CLS","PMC-RightDoor-Close-Pos",null,"w2.08",null,null,null,"DO-40","102.08","GREEN","Alarm-Lamp-Green",null,"w102.08","w202.08(常亮)","w212.08(闪烁)"]
[null,"DI-41","2.09","TM-N2-1","TM-N2-SW",null,"w2.09",null,null,null,"DO-41","102.09","BLUE","Alarm-Lamp-Blue",null,"w102.09","w202.09(常亮)","w212.09(闪烁)"]
[null,"DI-42","2.10","LETF-SMIF-READY-1","1#-SMIF-READY",null,"w2.10",null,null,null,"DO-42","102.10","TM-C1","系统允许断电",null,"w102.10","w202.10"]
[null,"DI-43","2.11","TM-CDA","TM-CDA-SW",null,"w2.11",null,null,null,"DO-43","102.11","TM-C2","RF RACK WATER VALVE","4.11=1","w102.11","w202.11"]
[null,"DI-44","2.12","RIGHT-SMIF-READY-1","3#-SMIF-READY",null,"w2.12",null,null,null,"DO-44","102.12","1#smif load/unload","1#smif load/unload",null,"w102.12","w202.12"]
[null,"DI-45","2.13","TM-LEAK","TM-Leak",null,"w2.13",null,null,null,"DO-45","102.13","2#smif load/unload","2#smif load/unload",null,"w102.13","w202.13"]
[null,"DI-46","2.14","VCE-L-A","VCE-A-ATM-SW",null,"w2.14",null,null,null,"DO-46","102.14","3#smif load/unload","3#smif load/unload",null,"w102.14","w202.14"]
[null,"DI-47","2.15","VCE-R-A","VCE-B-ATM-SW",null,"w2.15",null,null,null,"DO-47","102.15","4#smif load/unload","4#smif load/unload",null,"w102.15","w202.15"]
[null,"DI-48","3.00","TM-A","TM-ATM-SW",null,"w3.00"]
[null,"DI-49","3.01","VCE-L-V","VCE-A-VAC-SW",null,"w3.01"]
[null,"DI-50","3.02","VCE-R-V","VCE-B-VAC-SW",null,"w3.02"]
[null,"DI-51","3.03","TM-V","TM-VAC-SW",null,"w3.03"]
[null,"DI-52","3.04","AC RACK FANS SW","AC RACK FANS SW",null,"w3.04"]
[null,"DI-53","3.05","AC RACK SMOKE DETECTOR SW","AC RACK SMOKE DETECTOR SW",null,"w3.05"]
[null,"DI-54","3.06"]
[null,"DI-55","3.07","FACTORY SMOKE DETECTOR SW","FACTORY SMOKE DETECTOR SW",null,"w3.07"]
[null,"DI-56","3.08"]
[null,"DI-57","3.09","LETF-SMIF-POD IN PLACE-1","1#-SMIF-POD IN PLACE",null,"w3.09"]
[null,"DI-58","3.10","RIGHT-SMIF-POD IN PLACE-1","3#-SMIF-POD IN PLACE",null,"w3.10"]
[null,"DI-59","3.11","VCE-LOCKED-L","VCE-A-ADoor-Locked",null,"w3.11"]
[null,"DI-60","3.12","VCE-LOCKED-R","VCE-B-ADoor-Locked",null,"w3.12"]
[null,"DI-61","3.13","TM-LID-CLS","TM-LID-Close-Pos",null,"w3.13"]
[null,"DI-62","3.14","LETF-SMIF-ERROR-1","1#-SMIF-ERROR",null,"w3.14"]
[null,"DI-63","3.15","RIGHT-SMIF-ERROR-1","3#-SMIF-ERROR",null,"w3.15"]
[null,"DI-64","4.00","LETF-SMIF-READY-2","2#-SMIF-READY",null,"w4.00"]
[null,"DI-65","4.01","LETF-SMIF-POD IN PLACE-2","2#-SMIF-POD IN PLACE",null,"w4.01"]
[null,"DI-66","4.02","LETF-SMIF-ERROR-2","2#-SMIF-ERROR",null,"w4.02"]
[null,"DI-67","4.03","RIGHT-SMIF-READY-2","4#-SMIF-READY",null,"w4.03"]
[null,"DI-68","4.04","RIGHT-SMIF-POD IN PLACE-2","4#-SMIF-POD IN PLACE",null,"w4.04"]
[null,"DI-69","4.05","RIGHT-SMIF-ERROR-2","4#-SMIF-ERROR",null,"w4.05"]
[null,"DI-70","4.06","LEFT-VCE-EXTEND-ENABLE","VCE-A-EXTEND-ENABLE",null,"w4.06"]
[null,"DI-71","4.07","RIGHT-VCE-EXTEND-ENABLE","VCE-B-EXTEND-ENABLE",null,"w4.07"]
[null,"DI-72","4.08","PMA-EXTEND-ENABLE","PMA-EXTEND-ENABLE",null,"w4.08"]
[null,"DI-73","4.09","PMB-EXTEND-ENABLE","PMB-EXTEND-ENABLE",null,"w4.09"]
[null,"DI-74","4.10","PMC-EXTEND-ENABLE","PMC-EXTEND-ENABLE",null,"w4.10"]
[null,"DI-75","4.11","RF RACK WATER LEAK SW","RF RACK WATER LEAK SW",null,"w4.11"]
[null,"DI-76","4.12","Cooling-L wafer sensor-L","Cooling-A-wafer sensor-Left",null,"w4.12"]
[null,"DI-77","4.13","Cooling-L wafer sensor-R","Cooling-A-wafer sensor-Right",null,"w4.13"]
[null,"DI-78","4.14","Cooling-R wafer sensor-L","Cooling-B-wafer sensor-Left",null,"w4.14"]
[null,"DI-79","4.15","Cooling-R wafer sensor-R","Cooling-B-wafer sensor-Right",null,"w4.15"]
[null,"DI-80","5.00","safty-alarm","safty-alarm",null,"w5.00"]
[null,"DI-81","5.01","VCEA-L-cassette  present","VCEA-L-cassette  present",null,"w5.01"]
[null,"DI-82","5.02","VCEA-R-cassette  present","VCEA-R-cassette  present",null,"w5.02"]
[null,"DI-83","5.03","VCEB-L-cassette  present","VCEB-L-cassette  present",null,"w5.03"]
[null,"DI-84","5.04","VCEB-R-cassette  present","VCEB-R-cassette  present",null,"w5.04"]
[null,"DI-85","5.05"]
[null,"DI-86","5.06"]
[null,"DI-87","5.07"]
[null,"DI-88","5.08"]
[null,"DI-89","5.09"]
[null,"DI-90","5.10"]
[null,"DI-91","5.11"]
[null,"DI-92","5.12"]
[null,"DI-93","5.13"]
[null,"DI-94","5.14","TM-soft-pump","TM-soft-pump",null,"w5.14"]
[null,"DI-95","5.15","TM-soft-vent","TM-soft-vent",null,"w5.15"]
[]
[null,null,null,"新增"]
[null,null,null,"修改"]
[null,null,null,"删除"]

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["Node No.","ID","Range","Device Name","Logic note","date type","Remark"]
["AO-00","d1000",null,null,null,"float"]
["AO-01","d1002",null,null,null,"float"]
["AO-02","d1004",null,null,null,"float"]
["AO-03","d1006",null,null,null,"float"]
["AO-04","d1008",null,null,null,"float"]
["AO-05","d1010",null,null,null,"float"]
["AO-06","d1012",null,null,null,"float"]
["AO-07","d1014",null,null,null,"float"]
["AO-08","d1016","0-4000","MFC Flow  setpoint","0-4000对应 MFC 0-100%量程(0-5V)","float"]
["AO-09","d1018","1000mTorr","TM Pressure setpoint","1000mTorr","float"]
["AO-10","d1020",null,null,null,"float"]
["AO-11","d1022",null,null,null,"float"]
["AO-12","d1024",null,null,null,"float"]
["AO-13","d1026",null,null,null,"float"]
["AO-14","d1028",null,null,null,"float"]
["AO-15","d1030",null,null,null,"float"]
["AO-16","d1032",null,null,null,"float"]
["AO-17","d1034",null,null,null,"float"]
["AO-18","d1036",null,null,null,"float"]
["AO-19","d1038",null,null,null,"float"]
["AO-20","d1040",null,null,null,"float"]
["AO-21","d1042",null,null,null,"float"]
["AO-22","d1044",null,null,null,"float"]
["AO-23","d1046",null,null,null,"float"]
["AO-24","d1048",null,null,null,"float"]
["AO-25","d1050",null,null,null,"float"]
["AO-26","d1052",null,null,null,"float"]
["AO-27","d1054",null,null,null,"float"]
["AO-28","d1056",null,null,null,"float"]
["AO-29","d1058",null,null,null,"float"]
["AO-30","d1060",null,null,null,"float"]
["AO-31","d1062",null,null,null,"float"]
["AO-32","d1064",null,null,null,"float"]
["AO-33","d1066",null,null,null,"float"]
["AO-34","d1068",null,null,null,"float"]
["AO-35","d1070",null,null,null,"float"]
["AO-36","d1072",null,null,null,"float"]
["AO-37","d1074",null,null,null,"float"]
["AO-38","d1076",null,null,null,"float"]
["AO-39","d1078",null,null,null,"float"]
["AO-40","d1080",null,null,null,"float"]
["AO-41","d1082",null,null,null,"float"]
["AO-42","d1084",null,null,null,"float"]
["AO-43","d1086",null,null,null,"float"]
["AO-44","d1088",null,null,null,"float"]
["AO-45","d1090",null,null,null,"float"]
["AO-46","d1092",null,null,null,"float"]
["AO-47","d1094",null,null,null,"float"]
["AO-48","d1096",null,null,null,"float"]
["AO-49","d1098",null,null,null,"float"]
[]
[]
[null,"新增"]
[null,"修改"]
[null,"删除"]
{"$rows_empty":38}
[null,"新增"]
[null,"修改"]
[null,"删除"]

{"sheet":"AI","index":2,"n_rows":96,"n_cols":13,"rows_kept":96,"cut":false,"hidden":false,"merged":[[5,10,14,10],[15,10,22,10],[36,10,41,10]]}
["Node No.",{"$nulls":5},"ID","Range","Device Name","Note","Logic note","date type","Remark"]
["AI-00",null,2033,"D3554","D3860","D3862","d2000","0.00-780.00Torr","左VCE真空计",null,null,"float"]
["AI-01",{"$nulls":5},"d2002","0.00-780.00Torr","右VCE真空计",null,null,"float"]
["AI-02",{"$nulls":5},"d2004","0.00-780.00Torr","TM真空计",null,null,"float"]
["AI-03",{"$nulls":5},"d2006","0-100%","MFC Flow",null,null,"float"]
["AI-04",{"$nulls":5},"d2008","0.00-780.00Torr","左VCE管路真空计",null,null,"float"]
["AI-05",{"$nulls":5},"d2010","0.00-780.00Torr","右VCE管路真空计",null,null,"float"]
["AI-06",{"$nulls":5},"d2012","0.00-780.00Torr","TM管路真空计",null,null,"float"]
["AI-07"]
["AI-08"]
["AI-09"]
["AI-10"]
["AI-11"]
["AI-12"]
["AI-13"]
["AI-14"]
["AI-15"]
["AI-16"]
["AI-17"]
["AI-18"]
["AI-19"]
["AI-20"]
["AI-21"]
["AI-22"]
["AI-23"]
["AI-24"]
["AI-25"]
["AI-26"]
["AI-27"]
["AI-28"]
["AI-29"]
["AI-30"]
["AI-31"]
["AI-32"]
["AI-33"]
["AI-34"]
["AI-35"]
["AI-36"]
["AI-37"]
["AI-38"]
["AI-39"]
["AI-40"]
["AI-41"]
["AI-42"]
["AI-43"]
["AI-44"]
["AI-45"]
["AI-46"]
["AI-47"]
["AI-48"]
["AI-49"]
[]
[]
[null,"新增"]
[null,"修改"]
[null,"删除"]
{"$rows_empty":37}
[{"$nulls":6},"新增"]
[{"$nulls":6},"修改"]
[{"$nulls":6},"删除"]

{"sheet":"Software interlock","index":3,"n_rows":35,"n_cols":62,"rows_kept":35,"cut":false,"hidden":true,"merged":[[0,0,0,1],[29,0,29,1],[1,0,2,1]]}
["CONDITION"]
[{"$nulls":5},"DO-00","DO-01","DO-02","DO-03","DO-04","DO-05","DO-06","DO-07","DO-08","DO-09","DO-57","DO-58","DO-59","DO-60","DO-61","DO-62","DO-63","DO-64","DO-65","DO-66","DO-67","DO-68","DO-69","DO-70","DO-71","DO-72","DO-10","DO-11","DO-12","DO-13","DO-14","DO-15","DO-16","DO-17","DO-18","DO-52","DO-53","DO-54","DO-55","DO-19","DO-20","DO-48","DO-21","DO-22","DO-23","DO-24","DO-25","DO-26","DO-27","DO-29","DO-30","DO-31","DO-35","DO-42","DO-43","DO-44","DO-45"]
[null,null,"Turbo Pump Run"]
["DI-00",null,null,"T1","T1","T1",null,"T1","T1","T1","T1","T1","T1","T1","T1","T1","T1","T1","T1","T1","T1","T1","T1","T1","T1","T1","T1","T1","T1","T1","T1","T1","T1","T1","T1","T1","T1","T1","T1","T1","T1","T1","T1","T1",null,null,null,"T1","T1","T1","T1","T1",{"$nulls":8},"T1","T1"]
["DI-01"]
["DI-02",null,null,"T2","T2",{"$nulls":51},"T1"]
["DI-03",null,null,"T3","T3"]
["DI-55",null,null,"T4","T4"]
["DI-07",null,null,"T5","T5"]
["DI-08",null,null,"T5","T5"]
["DI-62",null,null,"T6","T6"]
["DI-63",null,null,"T7","T7"]
["DI-09",null,"T1"]
["DI-10",{"$nulls":59},"T2","T2"]
["DI-11",null,null,"T8","T8","T2",null,"T2","T2","T2","T2","T2","T2","T2","T2","T2","T2","T2","T2","T2","T2","T2","T2","T2","T2","T2","T2","T2","T2","T2","T2","T2","T2","T2","T2","T2","T2","T2","T2","T2","T2","T2","T2","T2",null,null,null,"T2","T2","T2",{"$nulls":8},"T1","T1"]
["DI-12",{"$nulls":4},"T3","T1","T3","T3","T3","T3","T3","T3","T3","T3","T3","T3","T3","T3","T3","T3","T3","T3","T3","T3","T3","T3","T3","T3","T3","T3","T3","T3","T3","T3","T3","T3","T3","T3","T3","T3","T3","T3","T3","T1","T1","T1","T3","T3","T3","T2","T2","T1","T1","T1","T1","T2",null,"T2","T2"]
["DI-32",{"$nulls":56},"T1=0"]
["DI-45",{"$nulls":49},"T3","T3",{"$nulls":6},"T3","T4","T3","T3"]
["DI-47",{"$nulls":49},"T4","T4"]
["DI-58",{"$nulls":49},"T3","T3"]
["DI-59",{"$nulls":49},"T4","T4"]
["DI-51",{"$nulls":4},"T4","T2","T4","T4","T4","T4","T4","T4","T4","T4","T4","T4","T4","T4","T4","T4","T4","T4","T4","T4","T4","T4","T4","T4","T4","T4","T4","T4","T4","T4","T4","T4","T4","T4","T4","T4","T4","T4","T4","T2","T2","T2"]
["DI-52",{"$nulls":4},"T5","T3","T5","T5","T5","T5","T5","T5","T5","T5","T5","T5","T5","T5","T5","T5","T5","T5","T5","T5","T5","T5","T5","T5","T5","T5","T5","T5","T5","T5","T5","T5","T5","T5","T5","T5","T5","T5","T5","T3","T3","T3"]
["DO-10",{"$nulls":47},"T4=0","T4=0"]
["DO-22",{"$nulls":30},"T7=0"]
["DO-23",{"$nulls":30},"T8=0"]
[]
["DO-42",{"$nulls":58},"T5=0"]
["DO-43",{"$nulls":57},"T4=0"]
["Logic",null,"If T1=1 it is enable","If T1*T2*T3*T4*T5*T6*T7=1 it is enable","If T1*T2*T3*T4*T5*T6*T7=1 it is enable","If T1*T2*T3*T4*T5=1 it is enable","If T1*T2*T3=1 it is enable","If T1*T2*T3*T4*T5=1 it is enable","If T1*T2*T3*T4*T5=1 it is enable","If T1*T2*T3*T4*T5=1 it is enable","If T1*T2*T3*T4*T5=1 it is enable","If T1*T2*T3*T4*T5=1 it is enable","If T1*T2*T3*T4*T5=1 it is enable","If T1*T2*T3*T4*T5=1 it is enable","If T1*T2*T3*T4*T5=1 it is enable","If T1*T2*T3*T4*T5=1 it is enable","If T1*T2*T3*T4*T5=1 it is enable","If T1*T2*T3*T4*T5=1 it is enable","If T1*T2*T3*T4*T5=1 it is enable","If T1*T2*T3*T4*T5=1 it is enable","If T1*T2*T3*T4*T5=1 it is enable","If T1*T2*T3*T4*T5=1 it is enable","If T1*T2*T3*T4*T5=1 it is enable","If T1*T2*T3*T4*T5=1 it is enable","If T1*T2*T3*T4*T5=1 it is enable","If T1*T2*T3*T4*T5=1 it is enable","If T1*T2*T3*T4*T5=1 it is enable","If T1*T2*T3*T4*T5=1 it is enable","If T1*T2*T3*T4*T5=1 it is enable","If T1*T2*T3*T4*T5=1 it is enable","If T1*T2*T3*T4*T5=1 it is enable","If T1*T2*T3*T4*T5*T6*T7*T8=1 it is enable","If T1*T2*T3*T4*T5=1 it is enable","If T1*T2*T3*T4*T5=1 it is enable","If T1*T2*T3*T4*T5=1 it is enable","If T1*T2*T3*T4*T5=1 it is enable","If T1*T2*T3*T4*T5=1 it is enable","If T1*T2*T3*T4*T5=1 it is enable","If T1*T2*T3*T4*T5=1 it is enable","If T1*T2*T3*T4*T5=1 it is enable","If T1*T2*T3*T4*T5=1 it is enable","If T1*T2*T3*T4*T5=1 it is enable","If T1*T2*T3*T4*T5=1 it is enable","If T1*T2*T3*T4*T5=1 it is enable","If T1*T2*T3=1 it is enable","If T1*T2*T3=1 it is enable","If T1*T2*T3=1 it is enable","If T1*T2*T3=1 it is enable","If T1*T2*T3*T4=1 it is enable","If T1*T2*T3*T4*T5=1 it is enable","If T1*T2*T3*T4=1 it is enable","If T1*T2*T3*T4=1 it is enable","If T1=1 it is enable","If T1=1 it is enable","If T1=1 it is enable","If T1*T2=1 it is enable","If T1*T2=1 it is enable","If T1=1 it is enable","If T1*T2*T3*T4=1 it is enable","If T1*T2*T3*T4*T5=1 it is enable","If T1*T2*T3=1 it is enable","If T1*T2*T3=1 it is enable"]
[]
[]
[null,null,"新增"]
[null,null,"修改"]
[null,null,"删除"]

{"sheet":"PM HW interlock draft","index":4,"n_rows":9,"n_cols":8,"rows_kept":9,"cut":false,"hidden":true,"merged":[[0,0,0,1],[0,2,0,7],[8,0,8,1],[1,0,2,1]]}
["Condition"]
[null,null,"DO-32","DO-33","DO-34","DO-48","DO-16","DO-15"]
[null,null,"MFC1 valve  ","MFC2 valve","MFC3 valve","Process gas final valve","RPS enable","Heater  Enable"]
["DI-44","UE on Chamber SW","T1","T1","T1","T1","T1","T1"]
["DI-38","PM VAC SW","T2","T2","T2","T2","T2"]
["DI-12","Slit Door Close Pos","T3","T3","T3","T3"]
["DI-41","PM Foreline VAC SW","T4","T4","T4","T4"]
["DI-46","Cooling water flow SW",{"$nulls":4},"T3"]
["Logic",null,"If T1*T2*T3*T4=1 it is enable.","If T1*T2*T3*T4=1 it is enable.","If T1*T2*T3*T4=1 it is enable.","If T1*T2*T3*T4=1 it is enable.","If T1*T2*T3=1 it is enable.","If T1=1 it is enable."]

{"sheet":"PM PLC interlock draft","index":5,"n_rows":6,"n_cols":3,"rows_kept":6,"cut":false,"hidden":true,"merged":[[0,0,0,1],[5,0,5,1],[1,0,2,1]]}
["Condition"]
[null,null,"DO-16"]
[null,null,"RPS enable"]
["DI-41","PM Foreline VAC SW","T1"]
["DI-46","Cooling water flow SW","T2"]
["Logic",null,"If T1*T2=1 it is enable."]