{"text_format":"2","workbook":"xlsx","n_sheets":8,"sheets":["Revision","PM_DI-DO","PM_AO","PM_AI","PM_HW interlock","PM_Soft interlock","PM HW interlock draft","PM PLC interlock draft"],"not_rendered":{"charts":0,"images":2,"macros":0,"external_links":0,"defined_names":2,"comments":0,"pivot_tables":0},"unopened":[],"bounds":{"document_bytes":16777216,"sheet_cells":100000,"run_cost":"one","rows_first":2000,"rows_last":500,"rows_between":2000,"halvings":0,"cell_chars":16384,"cell_head_chars":4096},"cells_cut":0,"cells_raw":0,"read":"whole","date_system":"1900"}

{"sheet":"Revision","index":0,"n_rows":22,"n_cols":8,"rows_kept":22,"cut":false,"hidden":false,"merged":[[0,0,0,7],[1,1,1,5],[2,1,2,7],[4,0,4,7],[5,0,5,2],[6,0,6,2],[21,7,21,13]]}
["上海稷以科技有限公司\nSHANGHAI JETPLASMA CO.,LTD\n上海市闵行区莲花南路2899号\nNo.2899, Lianhua Road(s.), Minhang District, Shanghai\nTel: 021-34125995   Web: www.jetplasma.com"]
["Part Number","210-0031-010",{"$nulls":4},"Revision","E01"]
["Description","IO LIST, PM, MS"]
["Designed","ZLL","Checked","GFX","Approved","PJET","Date","2023-12-21"]
["           1，新增DI-25 Water Leak; DI-35 CDA Pressure SW。\n           2，删除DI-50 TM In Safety，PM不再控制SLIT DOOR,不许确认TM Safety Door。\n           3，新增DO-01,DO-02,DO-16,DO-17, PM  SLIT DOOR改由 TM 控制。\n           4，删除DO-33, 取消上位给CDA OK信号，PM通过硬件确认CDA OK。\n"]
["PMA PLC IP:192.168.10.110"]
["PMB PLC IP:192.168.10.120"]
[]
["红色","删除"]
["黄色","修改"]
["绿色","新增"]
{"$rows_empty":10}
[{"$nulls":7},"******V1.0_2021/11/12 →V1.0_2022/02/23 By Xia huan\n1，删除DI-52信号；\n2，更改DI-29名称，由Lid OT SW改为Source fan；\n3，更改DI-53名称，由GB Door SW改为GB Interlock；\n4，新增DO-25,新增N2阀；\n5，新增DI-15,DO-26,AO-10,AI-09信号，设备软件需支持6路工艺气体。具体路数可配置。\n\n******V1.0_2022/02/23→V1.1_2023/02/09 By Xia huan\n1，修改了DI-51信号名称，此信号不做软件互锁，请将原来的信号DI-51的软件互锁逻辑删除，也不要显示在提示栏，只显示在IO界面；\n2，新增DI-54信号，此信号不做软件互锁，不要显示在提示栏，只显示在IO界面；\n3，新增DI-86，DI-87，DI-96，DI-97报警信号，为1后设备报警，并显示相应报警信息。\n4，删除DI-35信号。"]

{"sheet":"PM_DI-DO","index":1,"n_rows":149,"n_cols":14,"rows_kept":149,"cut":false,"hidden":false,"merged":[[1,13,2,13],[17,13,18,13]]}
["DI","Name","Note","Postion (NO Power)","Location","Logic Note",null,"#.DO","ID","Name","EV No.","Note","Location","Logic Note"]
["DI-00","1_Slit Door Open Pos",null,null,"w20.00","Interlock-HW",null,"DO-00",null,"1_Slit Door Open",null,null,"w0.00","Slit Door有气锁，软件初始化时，\nDI-01为1，DO-01置为1，DO-00置为0;\nDI-01为0，DO-01置为0，DO-00置为1"]
["DI-01","1_Slit Door Close Pos",null,null,"w20.01","Interlock-HW",null,"DO-01",null,"1_Slit Door Close",null,null,"w0.01"]
["DI-02","1_Lift Pin Up",null,null,"w20.02",null,null,"DO-02",null,"1_Lift Pin Up",null,null,"w0.02"]
["DI-03","1_Lift Pin Down",null,null,"w20.03",null,null,"DO-03",null,"1_Lift Pin Down",null,null,"w0.03"]
["DI-04","1_Guide Pin Lifter Up Pos",null,null,"w20.04",null,null,"DO-04",null,"1_Guide Pin Lifter Up",null,null,"w0.04"]
["DI-05","1_Guide Pin Lifter Down Pos",null,null,"w20.05",null,null,"DO-05",null,"1_Guide Pin Lifter Down",null,null,"w0.05"]
["DI-06",null,null,null,"w20.06",null,null,"DO-06",{"$nulls":4},"w0.06"]
["DI-07",null,null,null,"w20.07",null,null,"DO-07",{"$nulls":4},"w0.07"]
["DI-08",null,null,null,"w20.08",null,null,"DO-08",{"$nulls":4},"w0.08"]
["DI-09","MFC1 Pressure SW",null,null,"w20.09","1=OK，0=alarm，Interlock-PLC",null,"DO-09",null,"MFC1 Valve",null,null,"w0.09"]
["DI-10","MFC2 Pressure  SW",null,null,"w20.10","1=OK，0=alarm，Interlock-PLC",null,"DO-10",null,"MFC2 Valve",null,null,"w0.10"]
["DI-11","MFC3 Pressure  SW",null,null,"w20.11","1=OK，0=alarm，Interlock-PLC",null,"DO-11",null,"MFC3 Valve",null,null,"w0.11"]
["DI-12","MFC4 Pressure  SW",null,null,"w20.12","1=OK，0=alarm，Interlock-PLC",null,"DO-12",null,"MFC4 Valve",null,null,"w0.12"]
["DI-13","MFC5 Pressure  SW",null,null,"w20.13","1=OK，0=alarm，Interlock-PLC",null,"DO-13",null,"MFC5 Valve",null,null,"w0.13"]
["DI-14","N2 Pressure  SW",null,null,"w20.14","1=OK，0=alarm，Interlock-PLC",null,"DO-14",null,"Chamber purge valve",null,null,"w0.14"]
["DI-15","MFC6 Pressure  SW",null,null,"w20.15","1=OK，0=alarm，Interlock-PLC",null,"DO-15",null,"Chamber vent valve",null,null,"w0.15"]
["DI-16","2_Slit Door Open Pos",null,null,"w21.00","Interlock-HW",null,"DO-16",null,"2_Slit Door Open",null,null,"w1.00","Slit Door有气锁，软件初始化时，\nDI-17为1，DO-17置为1，DO-16置为0;\nDI-17为0，DO-17置为0，DO-16置为1"]
["DI-17","2_Slit Door Close Pos",null,null,"w21.01","Interlock-HW",null,"DO-17",null,"2_Slit Door Close",null,null,"w1.01"]
["DI-18","2_Lift Pin Up",null,null,"w21.02",null,null,"DO-18",null,"2_Lift Pin Up",null,null,"w1.02"]
["DI-19","2_Lift Pin Down",null,null,"w21.03",null,null,"DO-19",null,"2_Lift Pin Down",null,null,"w1.03"]
["DI-20","2_Guide Pin  Lifter Up Pos",null,null,"w21.04",null,null,"DO-20",null,"2_Guide Pin Lifter Up",null,null,"w1.04"]
["DI-21","2_Guide Pin  Lifter Down Pos",null,null,"w21.05",null,null,"DO-21",null,"2_Guide Pin Lifter Down",null,null,"w1.05"]
["DI-22",null,null,null,"w21.06",null,null,"DO-22",null,"Process gas final valve",null,null,"w1.06"]
["DI-23",null,null,null,"w21.07",null,null,"DO-23",null,"Soft Pumping Valve",null,null,"w1.07"]
["DI-24",null,null,null,"w21.08",null,null,"DO-24",null,"Fast Pumping Valve",null,null,"w1.08"]
["DI-25","Water Leak",null,null,"w21.09","1=OK，0=alarm，Interlock-PLC",null,"DO-25",null,"N2  Valve",null,null,"w1.09"]
["DI-26","1_Cooling Water Flow SW",null,null,"w21.10","1=OK，0=alarm，Interlock-PLC",null,"DO-26",null,"MFC6 Valve",null,null,"w1.10"]
["DI-27","2_Cooling Water Flow SW",null,null,"w21.11","1=OK，0=alarm，Interlock-PLC",null,"DO-27",{"$nulls":4},"w1.11"]
["DI-28","CHB OT SW",null,null,"w21.12","1=OK，0=alarm，Interlock-HW",null,"DO-28",null,"CHB Heater On",null,null,"w1.12"]
["DI-29","Souce Fan",null,null,"w21.13","1=OK，0=alarm，Interlock-HW",null,"DO-29",null,"Foreline Heater On",null,null,"w1.13"]
["DI-30","1_LE OT SW",null,null,"w21.14","1=OK，0=alarm，Interlock-HW",null,"DO-30",null,"1_LE Heater On",null,null,"w1.14"]
["DI-31","2_LE OT SW",null,null,"w21.15","1=OK，0=alarm，Interlock-HW",null,"DO-31",null,"2_LE Heater On",null,null,"w1.15"]
["DI-32","Lid Closed",null,null,"w22.00","1=OK，0=alarm，Interlock-HW",null,"DO-32",null,"Reset Signal",null,"pc to plc","w2.00"]
["DI-33","ATM SW",null,null,"w22.01",null,null,"DO-33",null,"CDA Pressure Normal",null,null,"w2.01","取消上位给CDA OK信号，PM通过硬件确认CDA OK"]
["DI-34","VAC SW",null,null,"w22.02","Interlock-HW",null,"DO-34",{"$nulls":4},"w2.02"]
["DI-35","CDA Pressure SW",null,null,"w22.03","1=OK，0=alarm，Interlock-PLC",null,"DO-35",null,"CHB Heat PID AT Star",null,null,"w2.03","DI-100为1，将DO-35置0"]
["DI-36",null,null,null,"w22.04",null,null,"DO-36",null,"CHB Heat PID AT Stop",null,null,"w2.04","DI-101为1，将DO-36置0"]
["DI-37",null,null,null,"w22.05",null,null,"DO-37",null,"Foreline Heat PID AT Star",null,null,"w2.05","DI-102为1，将DO-37置0"]
["DI-38",null,null,null,"w22.06",null,null,"DO-38",null,"Foreline Heat PID AT Stop",null,null,"w2.06","DI-103为1，将DO-38置0"]
["DI-39",null,null,null,"w22.07",null,null,"DO-39",null,"1_LE  Heat PID AT Star",null,null,"w2.07","DI-104为1，将DO-39置0"]
["DI-40",null,null,null,"w22.08",null,null,"DO-40",null,"1_LE  Heat PID AT Stop",null,null,"w2.08","DI-105为1，将DO-40置0"]
["DI-41",null,null,null,"w22.09",null,null,"DO-41",null,"2_LE  Heat PID AT Star",null,null,"w2.09","DI-106为1，将DO-41置0"]
["DI-42",null,null,null,"w22.10",null,null,"DO-42",null,"2_LE  Heat PID AT Stop",null,null,"w2.10","DI-107为1，将DO-42置0"]
["DI-43",null,null,null,"w22.11",null,null,"DO-43",{"$nulls":4},"w2.11"]
["DI-44",null,null,null,"w22.12",null,null,"DO-44",{"$nulls":4},"w2.12"]
["DI-45",null,null,null,"w22.13",null,null,"DO-45",{"$nulls":4},"w2.13"]
["DI-46",null,null,null,"w22.14",null,null,"DO-46",{"$nulls":4},"w2.14"]
["DI-47",null,null,null,"w22.15",null,null,"DO-47",{"$nulls":4},"w2.15"]
["DI-48","TM RB Not Extend to PM1",null,null,"w23.00",null,null,"DO-48",{"$nulls":4},"w3.00"]
["DI-49","TM RB Not Extend to PM2",null,null,"w23.01",null,null,"DO-49",{"$nulls":4},"w3.01"]
["DI-50","TM  In Safety",null,null,"w23.02",null,null,"DO-50",{"$nulls":4},"w3.02"]
["DI-51","1_RF Hardware Interlock",null,null,"w23.03","仅IO界面显示",null,"DO-51",{"$nulls":4},"w3.03"]
["DI-52",null,null,null,"w23.04",null,null,"DO-52",{"$nulls":4},"w3.04"]
["DI-53","GB Interlock",null,null,"w23.05","1=OK，0=alarm，Interlock-HW",null,"DO-53",{"$nulls":4},"w3.05"]
["DI-54","2_RF Hardware Interlock",null,null,"w23.06","仅IO界面显示",null,"DO-54",{"$nulls":4},"w3.06"]
["DI-55",null,null,null,"w23.07",null,null,"DO-55",{"$nulls":4},"w3.07"]
["DI-56",null,null,null,"w23.08",null,null,"DO-56",{"$nulls":4},"w3.08"]
["DI-57",null,null,null,"w23.09",null,null,"DO-57",{"$nulls":4},"w3.09"]
["DI-58",null,null,null,"w23.10",null,null,"DO-58",{"$nulls":4},"w3.10"]
["DI-59",null,null,null,"w23.11",null,null,"DO-59",{"$nulls":4},"w3.11"]
["DI-60",null,null,null,"w23.12",null,null,"DO-60",{"$nulls":4},"w3.12"]
["DI-61",null,null,null,"w23.13",null,null,"DO-61",{"$nulls":4},"w3.13"]
["DI-62",null,null,null,"w23.14",null,null,"DO-62",{"$nulls":4},"w3.14"]
["DI-63",null,null,null,"w23.15",null,null,"DO-63",{"$nulls":4},"w3.15"]
["DI-64","CHB Heater On_FB",null,null,"w24.00",null,null,"DO-64",{"$nulls":4},"w4.00"]
["DI-65","Foreline Heater On_FB",null,null,"w24.01",null,null,"DO-65",{"$nulls":4},"w4.01"]
["DI-66","1_LE Heater On_FB",null,null,"w24.02",null,null,"DO-66",{"$nulls":4},"w4.02"]
["DI-67","2_LE Heater On_FB",null,null,"w24.03",null,null,"DO-67",{"$nulls":4},"w4.03"]
["DI-68","Process pressure gauge Alarm",null,null,"w24.04","0=OK，1=alarm",null,"DO-68",{"$nulls":4},"w4.04"]
["DI-69","Chamber pressure gauge Alarm",null,null,"w24.05","0=OK，1=alarm",null,"DO-69",{"$nulls":4},"w4.05"]
["DI-70","Foreline pressure gauge Alarm",null,null,"w24.06","0=OK，1=alarm",null,"DO-70",{"$nulls":4},"w4.06"]
["DI-71","Foreline TC Deviation out of range",null,null,"w24.07","0=OK，1=alarm",null,"DO-71",{"$nulls":4},"w4.07"]
["DI-72","Foreline Control TC Broken Alarm",null,null,"w24.08","0=OK，1=alarm",null,"DO-72",{"$nulls":4},"w4.08"]
["DI-73","Foreline Monitor TC Broken Alarm",null,null,"w24.09","0=OK，1=alarm",null,"DO-73",{"$nulls":4},"w4.09"]
["DI-74","CHB TC Deviation out of range",null,null,"w24.10","0=OK，1=alarm",null,"DO-74",{"$nulls":4},"w4.10"]
["DI-75","CHB Control TC Broken Alarm",null,null,"w24.11","0=OK，1=alarm",null,"DO-75",{"$nulls":4},"w4.11"]
["DI-76","CHB Monitor TC Broken Alarm",null,null,"w24.12","0=OK，1=alarm",null,"DO-76",{"$nulls":4},"w4.12"]
["DI-77",null,null,null,"w24.13",null,null,"DO-77",{"$nulls":4},"w4.13"]
["DI-78",null,null,null,"w24.14",null,null,"DO-78",{"$nulls":4},"w4.14"]
["DI-79",null,null,null,"w24.15",null,null,"DO-79",{"$nulls":4},"w4.15"]
["DI-80",null,null,null,"w25.00",null,null,"DO-80",{"$nulls":4},"w5.00"]
["DI-81","1_Coolant Inlet TC Broken Alarm",null,null,"w25.01","0=OK，1=alarm",null,"DO-81",{"$nulls":4},"w5.01"]
["DI-82","1_Coolant Outlet TC Broken Alarm",null,null,"w25.02","0=OK，1=alarm",null,"DO-82",{"$nulls":4},"w5.02"]
["DI-83","1_LE Control TC Broken Alarm",null,null,"w25.03","0=OK，1=alarm",null,"DO-83",{"$nulls":4},"w5.03"]
["DI-84","1_LE Monitor TC Broken Alarm",null,null,"w25.04","0=OK，1=alarm",null,"DO-84",{"$nulls":4},"w5.04"]
["DI-85","1_LE TC Deviation out of range",null,null,"w25.05","0=OK，1=alarm",null,"DO-85",{"$nulls":4},"w5.05"]
["DI-86","1_Source Match interlock Alarm",null,null,"w25.06","0=OK，1=alarm",null,"DO-86",{"$nulls":4},"w5.06"]
["DI-87","1_Bias Match interlock Alarm",null,null,"w25.07","0=OK，1=alarm",null,"DO-87",{"$nulls":4},"w5.07"]
["DI-88",null,null,null,"w25.08",null,null,"DO-88",{"$nulls":4},"w5.08"]
["DI-89",null,null,null,"w25.09",null,null,"DO-89",{"$nulls":4},"w5.09"]
["DI-90",null,null,null,"w25.10",null,null,"DO-90",{"$nulls":4},"w5.10"]
["DI-91","2_Coolant Inlet TC Broken Alarm",null,null,"w25.11","0=OK，1=alarm",null,"DO-91",{"$nulls":4},"w5.11"]
["DI-92","2_Coolant Outlet TC Broken Alarm",null,null,"w25.12","0=OK，1=alarm",null,"DO-92",{"$nulls":4},"w5.12"]
["DI-93","2_LE Control TC Broken Alarm",null,null,"w25.13","0=OK，1=alarm",null,"DO-93",{"$nulls":4},"w5.13"]
["DI-94","2_LE Monitor TC Broken Alarm",null,null,"w25.14","0=OK，1=alarm",null,"DO-94",{"$nulls":4},"w5.14"]
["DI-95","2_LE TC Deviation out of range",null,null,"w25.15","0=OK，1=alarm",null,"DO-95",{"$nulls":4},"w5.15"]
["DI-96","2_Source Match interlock Alarm",null,null,"w26.00","0=OK，1=alarm",null,"DO-96",{"$nulls":4},"w6.00"]
["DI-97","2_Bias Match interlock Alarm",null,null,"w26.01","0=OK，1=alarm",null,"DO-97",{"$nulls":4},"w6.01"]
["DI-98",null,null,null,"w26.02",null,null,"DO-98",{"$nulls":4},"w6.02"]
["DI-99",null,null,null,"w26.03",null,null,"DO-99",{"$nulls":4},"w6.03"]
["DI-100","CHB Heat PID AT Star_Fb",null,null,"w26.04","DO-35信号反馈",null,"DO-100",{"$nulls":4},"w6.04"]
["DI-101","CHB Heat PID AT Stop_Fb",null,null,"w26.05","DO-36信号反馈",null,"DO-101",{"$nulls":4},"w6.05"]
["DI-102","Foreline Heat PID AT Star_Fb",null,null,"w26.06","DO-37信号反馈",null,"DO-102",{"$nulls":4},"w6.06"]
["DI-103","Foreline Heat PID AT Stop_Fb",null,null,"w26.07","DO-38信号反馈",null,"DO-103",{"$nulls":4},"w6.07"]
["DI-104","1_LE  Heat PID AT Star_Fb",null,null,"w26.08","DO-39信号反馈",null,"DO-104",{"$nulls":4},"w6.08"]
["DI-105","1_LE  Heat PID AT Stop_Fb",null,null,"w26.09","DO-40信号反馈",null,"DO-105",{"$nulls":4},"w6.09"]
["DI-106","2_LE  Heat PID AT Star_Fb",null,null,"w26.10","DO-41信号反馈",null,"DO-106",{"$nulls":4},"w6.10"]
["DI-107","2_LE  Heat PID AT Stop_Fb",null,null,"w26.11","DO-42信号反馈",null,"DO-107",{"$nulls":4},"w6.11"]
["DI-108",null,null,null,"w26.12",null,null,"DO-108",{"$nulls":4},"w6.12"]
["DI-109",null,null,null,"w26.13",null,null,"DO-109",{"$nulls":4},"w6.13"]
["DI-110",null,null,null,"w26.14",null,null,"DO-110",{"$nulls":4},"w6.14"]
["DI-111",null,null,null,"w26.15",null,null,"DO-111",{"$nulls":4},"w6.15"]
["DI-112",null,null,null,"w27.00"]
["DI-113",null,null,null,"w27.01"]
["DI-114",null,null,null,"w27.02"]
["DI-115",null,null,null,"w27.03"]
["DI-116","CHB Heat PID AT Running",null,null,"w27.04","PID自学习整定进行中"]
["DI-117","CHB Heat PID AT Finished",null,null,"w27.05","PID自学习整定完成"]
["DI-118","Foreline Heat PID AT Running",null,null,"w27.06"]
["DI-119","Foreline Heat PID AT Finished",null,null,"w27.07"]
["DI-120","1_LE Heat PID AT Running",null,null,"w27.08"]
["DI-121","1_LE Heat PID AT Finished",null,null,"w27.09"]
["DI-122","2_LE Heat PID AT Running",null,null,"w27.10"]
["DI-123","2_LE Heat PID AT Finished",null,null,"w27.11"]
["DI-124",null,null,null,"w27.12"]
["DI-125",null,null,null,"w27.13"]
["DI-126",null,null,null,"w27.14"]
["DI-127",null,null,null,"w27.15"]
["DI-128",null,null,null,"w28.00"]
["DI-129",null,null,null,"w28.01"]
["DI-130",null,null,null,"w28.02"]
["DI-131",null,null,null,"w28.03"]
["DI-132",null,null,null,"w28.04"]
["DI-133",null,null,null,"w28.05"]
["DI-134",null,null,null,"w28.06"]
["DI-135",null,null,null,"w28.07"]
["DI-136",null,null,null,"w28.08"]
["DI-137",null,null,null,"w28.09"]
["DI-138",null,null,null,"w28.10"]
["DI-139",null,null,null,"w28.11"]
["DI-140",null,null,null,"w28.12"]
["DI-141",null,null,null,"w28.13"]
["DI-142",null,null,null,"w28.14"]
["DI-143",null,null,null,"w28.15"]
[]
["红色","删除"]
["黄色","修改"]
["绿色","新增"]

{"sheet":"PM_AO","index":2,"n_rows":51,"n_cols":7,"rows_kept":51,"cut":false,"hidden":false,"merged":[[8,6,10,6]]}
["Node No.","ID","Range","Device Name","Logic note","date type","Remark"]
["AO-00","d1000",null,null,null,"float"]
["AO-01","d1002"]
["AO-02","d1004","0-4000","MFC1 Flow Setpoint",null,"float","MFC1"]
["AO-03","d1006","0-4000","MFC2 Flow Setpoint",null,"float","MFC2"]
["AO-04","d1008","0-4000","MFC3 Flow Setpoint",null,"float","MFC3"]
["AO-05","d1010","0-4000","MFC4 Flow Setpoint",null,"float","MFC4"]
["AO-06","d1012","0-4000","MFC5 Flow Setpoint",null,"float","MFC5"]
["AO-07","d1014","1或2","Throttle Valve Work Mode","Pressure=1,Position=2","float","Throttle valve only"]
["AO-08","d1016","0-4000","Throttle Valve Pressure Setpoint","unit:mtorr","float"]
["AO-09","d1018","0-100%","Throttle Valve Position Setpoint",null,"float"]
["AO-10","d1020","0-4000","MFC6 Flow Setpoint",null,"float","MFC6"]
["AO-11","d1022"]
["AO-12","d1024"]
["AO-13","d1026"]
["AO-14","d1028"]
["AO-15","d1030"]
["AO-16","d1032"]
["AO-17","d1034"]
["AO-18","d1036",null,"Heartbeat",null,"float","From PC to PLC"]
["AO-19","d1038",null,null,null,"float"]
["AO-20","d1040",null,null,null,"float"]
["AO-21","d1042","0或1","Bais RF Enable","0=LE heater mode ,1=Bais RF mode","float","下电极加热或双射频配置"]
["AO-22","d1044"]
["AO-23","d1046"]
["AO-24","d1048"]
["AO-25","d1050"]
["AO-26","d1052"]
["AO-27","d1054"]
["AO-28","d1056","10-250°","CHB Temperature Setpoint",null,"float","腔体加热设定温度"]
["AO-29","d1058","100-500°","CHB Temp Limit Setpoint",null,"float","腔体加热最大温度"]
["AO-30","d1060","10-250°","Foreline Temperature Setpoint",null,"float","前级管道加热设定温度"]
["AO-31","d1062","100-500°","Foreline Temp Limit Setpoint",null,"float","前级管道加热最大温度"]
["AO-32","d1064","50-250°","1_LE Temperature Setpoint",null,"float","PM1下电极加热设定温度"]
["AO-33","d1066","100-500°","1_LE Temp Limit Setpoint",null,"float","PM1下电极加热最大温度"]
["AO-34","d1068","50-250°","2_LE Temperature Setpoint",null,"float","PM2下电极加热设定温度"]
["AO-35","d1070","100-500°","2_LE Temp Limit Setpoint",null,"float","PM2下电极加热最大温度"]
["AO-36","d1072",null,null,null,"float"]
["AO-37","d1074",null,null,null,"float"]
["AO-38","d1076",null,null,null,"float"]
["AO-39","d1078",null,null,null,"float"]
["AO-40","d1080",null,null,null,"float"]
["AO-41","d1082",null,null,null,"float"]
["AO-42","d1084",null,null,null,"float"]
["AO-43","d1086",null,null,null,"float"]
["AO-44","d1088",null,null,null,"float"]
["AO-45","d1090",null,null,null,"float"]
["AO-46","d1092",null,null,null,"float"]
["AO-47","d1094",null,null,null,"float"]
["AO-48","d1096",null,null,null,"float"]
["AO-49","d1098",null,null,null,"float"]

{"sheet":"PM_AI","index":3,"n_rows":51,"n_cols":7,"rows_kept":51,"cut":false,"hidden":false,"merged":[[33,6,36,6],[37,6,40,6]]}
["Node No. ","ID","Range","Device Name","Logic note","date type","Remark"]
["AI-00","d2000","0-10T","Process pressure","unit:mtorr","float"]
["AI-01","d2002","0-760T","Chamber pressure","unit:mtorr","float"]
["AI-02","d2004","0-760T","Foreline pressure","unit:mtorr","float"]
["AI-03","d2006",null,null,null,"float"]
["AI-04","d2008","0-4000","MFC1 Flow",null,"float","MFC1"]
["AI-05","d2010","0-4000","MFC2 Flow",null,"float","MFC2"]
["AI-06","d2012","0-4000","MFC3 Flow",null,"float","MFC3"]
["AI-07","d2014","0-4000","MFC4 Flow",null,"float","MFC4"]
["AI-08","d2016","0-4000","MFC5 Flow",null,"float","MFC5"]
["AI-09","d2018","0-4000","MFC6 Flow",null,"float","MFC6"]
["AI-10","d2020",null,null,null,"float"]
["AI-11","d2022",null,null,null,"float"]
["AI-12","d2024",null,null,null,"float"]
["AI-13","d2026",null,null,null,"float"]
["AI-14","d2028","0-100%","Throttle Valve Real Position",null,"float","Throttle valve only"]
["AI-15","d2030","0-4000","Throttle Valve Real Pressure",null,"float"]
["AI-16","d2032",null,null,null,"float"]
["AI-17","d2034",null,null,null,"float"]
["AI-18","d2036",null,"Heartbeat FB",null,"float","From PLC to PC"]
["AI-19","d2038",null,null,null,"float"]
["AI-20","d2040",null,null,null,"float"]
["AI-21","d2042","00~59","Second","秒","float"]
["AI-22","d2044","00~59","Minute","分","float"]
["AI-23","d2046","00~23","Time","时","float"]
["AI-24","d2048","00~31","Day","日","float"]
["AI-25","d2050","01~12","Month","月","float"]
["AI-26","d2052","00~99","Year","年","float"]
["AI-27","d2054",null,null,null,"float"]
["AI-28","d2056","-200-1300°","CHB Control TC Temp",null,"float"]
["AI-29","d2058","-200-1300°","CHB Monitor TC Temp",null,"float"]
["AI-30","d2060","-200-1300°","Foreline Control TC Temp",null,"float"]
["AI-31","d2062","-200-1300°","Foreline Monitor TC Temp",null,"float"]
["AI-32","d2064","-200-1300°","1_LE Control TC Temp",null,"float","LE Heat 配置"]
["AI-33","d2066","-200-1300°","1_LE Monitor TC Temp",null,"float"]
["AI-34","d2068","-200-1300°","2_LE Control TC Temp",null,"float"]
["AI-35","d2070","-200-1300°","2_LE Monitor TC Temp",null,"float"]
["AI-36","d2072","-200-1300°","1_Coolant Inlet Temp",null,"float","Bias RF 配置"]
["AI-37","d2074","-200-1300°","1_Coolant Outlet Temp",null,"float"]
["AI-38","d2076","-200-1300°","2_Coolant Inlet Temp",null,"float"]
["AI-39","d2078","-200-1300°","2_Coolant Outlet Temp",null,"float"]
["AI-40","d2080"]
["AI-41","d2082"]
["AI-42","d2084"]
["AI-43","d2086"]
["AI-44","d2088"]
["AI-45","d2090"]
["AI-46","d2092"]
["AI-47","d2094"]
["AI-48","d2096"]
["AI-49","d2098"]

{"sheet":"PM_HW interlock","index":4,"n_rows":20,"n_cols":21,"rows_kept":20,"cut":false,"hidden":false,"merged":[[0,0,0,1],[0,3,0,4],[1,16,1,19],[19,0,19,1],[1,0,2,1]]}
["CONDITION"]
{"$rows_empty":18}
[null,null,"If T1*T2*T3=1 it is enable","If T1*T2*T3=1 it is enable","If T1*T2=1 it is enable","If T1*T2=1 it is enable","If T1*T2=1 it is enable","If T1*T2=1 it is enable","If T1*T2=1 it is enable","If T1*T2=1 it is enable","If T1*T2=1 it is enable","If T1*T2*T3=1 it is enable","If T1*T2*T3=1 it is enable","If T1=1 it is enable","If T1*T2=1 it is enable","If T1*T2=1 it is enable","If T1*T2*T3*T4*T5=1 it is enable","If T1*T2*T3*T4*T5=1 it is enable","If T1*T2*T3*T4*T5=1 it is enable","If T1*T2*T3*T4*T5=1 it is enable","If T1*T2=1 it is enable"]

{"sheet":"PM_Soft interlock","index":5,"n_rows":36,"n_cols":32,"rows_kept":36,"cut":false,"hidden":false,"merged":[[0,0,0,1],[1,28,1,31],[35,0,35,1],[1,0,2,1]]}
[]
["CONDITION",null,"DO-00","DO-01","DO-02","DO-03","DO-04","DO-05","DO-09","DO-10","DO-11","DO-12","DO-13","DO-14","DO-15","DO-16","DO-17","DO-18","DO-19","DO-20","DO-21","DO-22","DO-23","DO-24","DO-28\nDO-35","DO-29\nDO-37","DO-30\nDO-39","DO-31\nDO-41","PC"]
[null,null,"1_Slit Door Open","1_Slit Door Close","1_Lift Pin Up","1_Lift Pin Down","1_Guide Pin Lifter Up","1_Guide Pin Lifter Down","MFC1 Valve","MFC2 Valve","MFC3 Valve","MFC4 Valve","MFC5 Valve","Chamber purge valve","Chamber vent valve","2_Slit Door Open","2_Slit Door Close","2_Lift Pin Up","2_Lift Pin Down","2_Guide Pin Lifter Up","2_Guide Pin Lifter Down","Process gas final valve","Soft Pumping Valve","Fast Pumping Valve","CHB Heater On\nCHB Heat PID AT Star","Foreline Heater On\nForeline Heat PID AT Star","1_LE Heater On\n1_LE  Heat PID AT Star","2_LE Heater On\n2_LE  Heat PID AT Sta","1_Source RF ON","2_Source RF ON","1_Bias RF ON","2_Bias RF ON"]
["DI-01","1_Slit Door Close Pos",{"$nulls":6},"T1","T1","T1","T1","T1",{"$nulls":9},"T1","T1",{"$nulls":4},"T1","T1","T1","T1"]
["DI-17","2_Slit Door Close Pos",{"$nulls":6},"T2","T2","T2","T2","T2",{"$nulls":9},"T2","T2",{"$nulls":4},"T2","T2","T2","T2"]
["DI-26","1_Cooling Water Flow SW",{"$nulls":24},"T1"]
["DI-27","2_Cooling Water Flow SW",{"$nulls":25},"T1"]
["DI-28","CHB OT SW",{"$nulls":22},"T1"]
["DI-29","Source Fan",{"$nulls":26},"T3","T3","T3","T3"]
["DI-30","1_LE OT SW",{"$nulls":24},"T2"]
["DI-31","2_LE OT SW",{"$nulls":25},"T2"]
["DI-32","Lid Closed","T1","T1",{"$nulls":4},"T4","T4","T4","T4","T4",null,null,"T1","T1",{"$nulls":5},"T3","T3",null,null,"T3","T3","T4","T4","T4","T4"]
["DI-33","ATM SW","T2","T2",{"$nulls":11},"T2","T2"]
["DI-34","VAC SW",{"$nulls":6},"T5","T5","T5","T5","T5",{"$nulls":15},"T5","T5","T5","T5"]
["DI-48","TM RB Not Extend to PM1","T3","T3"]
["DI-49","TM RB Not Extend to PM2",{"$nulls":13},"T3","T3"]
["DI-50","TM  Side Panel Closed","T4","T4",{"$nulls":11},"T4","T4"]
["DI-53","GB Interlock",{"$nulls":6},"T6","T6","T6","T6","T6","T2","T2"]
["DO-14","Chamber purge valve",{"$nulls":20},"T4=0","T4=0"]
["DO-15","Chamber vent valve",{"$nulls":20},"T5=0","T5=0"]
["DO-23","Soft Pumping Valve",{"$nulls":11},"T3=0","T3=0"]
["DO-24","Fast Pumping Valve",{"$nulls":11},"T4=0","T4=0"]
["DO-33","CDA Pressure Normal","T5","T5","T1","T1","T1","T1","T7","T7","T7","T7","T7","T5","T5","T5","T5","T1","T1","T1","T1","T1","T6","T6"]
["DI-71","Foreline TC Deviation out of range",{"$nulls":23},"T1=0"]
["DI-72","Foreline Control TC Broken Alarm",{"$nulls":23},"T2=0"]
["DI-73","Foreline Monitor TC Broken Alarm",{"$nulls":23},"T3=0"]
["DI-74","CHB TC Deviation out of range",{"$nulls":22},"T2=0"]
["DI-75","CHB Control TC Broken Alarm",{"$nulls":22},"T3=0"]
["DI-76","CHB Monitor TC Broken Alarm",{"$nulls":22},"T4=0"]
["DI-83","1_LE Control TC Broken Alarm",{"$nulls":24},"T4=0"]
["DI-84","1_LE Monitor TC Broken Alarm",{"$nulls":24},"T5=0"]
["DI-85","1_LE TC Deviation out of range",{"$nulls":24},"T6=0"]
["DI-93","2_LE Control TC Broken Alarm",{"$nulls":25},"T4=0"]
["DI-94","2_LE Monitor TC Broken Alarm",{"$nulls":25},"T5=0"]
["DI-95","2_LE TC Deviation out of range",{"$nulls":25},"T6=0"]
["Logic",null,"If T1*T2*T3*T4*T5=1 it is enable","If T1*T2*T3*T4*T5=1 it is enable","If T1=1 it is enable","If T1=1 it is enable","If T1=1 it is enable","If T1=1 it is enable","If T1*T2*T3*T4*T5*T6*T7=1 it is enable","If T1*T2*T3*T4*T5*T6*T7=1 it is enable","If T1*T2*T3*T4*T5*T6*T7=1 it is enable","If T1*T2*T3*T4*T5*T6*T7=1 it is enable","If T1*T2*T3*T4*T5*T6*T7=1 it is enable","If T1*T2*T3*T4*T5=1 it is enable","If T1*T2*T3*T4*T5=1 it is enable","If T1*T2*T3*T4*T5=1 it is enable","If T1*T2*T3*T4*T5=1 it is enable","If T1=1 it is enable","If T1=1 it is enable","If T1=1 it is enable","If T1=1 it is enable","If T1=1 it is enable","If T1*T2*T3*T4*T5*T6=1 it is enable","If T1*T2*T3*T4*T5*T6=1 it is enable","If T1*T2*T3*T4=1 it is enable","If T1*T2*T3=1 it is enable","If T1*T2*T3*T4*T5*T6=1 it is enable","If T1*T2*T3*T4*T5*T6=1 it is enable","If T1*T2*T3*T4*T5=1 it is enable","If T1*T2*T3*T4*T5=1 it is enable","If T1*T2*T3*T4*T5=1 it is enable","If T1*T2*T3*T4*T5=1 it is enable"]

{"sheet":"PM HW interlock draft","index":6,"n_rows":9,"n_cols":8,"rows_kept":9,"cut":false,"hidden":true,"merged":[[0,0,0,1],[0,2,0,7],[8,0,8,1],[1,0,2,1]]}
["Condition"]
[null,null,"DO-32","DO-33","DO-34","DO-48","DO-16","DO-15"]
[null,null,"MFC1 valve  ","MFC2 valve","MFC3 valve","Process gas final valve","RPS enable","Heater  Enable"]
["DI-44","UE on Chamber SW","T1","T1","T1","T1","T1","T1"]
["DI-38","PM VAC SW","T2","T2","T2","T2","T2"]
["DI-12","Slit Door Close Pos","T3","T3","T3","T3"]
["DI-41","PM Foreline VAC SW","T4","T4","T4","T4"]
["DI-46","Cooling water flow SW",{"$nulls":4},"T3"]
["Logic",null,"If T1*T2*T3*T4=1 it is enable.","If T1*T2*T3*T4=1 it is enable.","If T1*T2*T3*T4=1 it is enable.","If T1*T2*T3*T4=1 it is enable.","If T1*T2*T3=1 it is enable.","If T1=1 it is enable."]

{"sheet":"PM PLC interlock draft","index":7,"n_rows":6,"n_cols":3,"rows_kept":6,"cut":false,"hidden":true,"merged":[[0,0,0,1],[5,0,5,1],[1,0,2,1]]}
["Condition"]
[null,null,"DO-16"]
[null,null,"RPS enable"]
["DI-41","PM Foreline VAC SW","T1"]
["DI-46","Cooling water flow SW","T2"]
["Logic",null,"If T1*T2=1 it is enable."]