{"text_format":"2","workbook":"xlsx","n_sheets":9,"sheets":["Revision","DI-DO","AI","AO","HW interlock","PLC interlock ","Software interlock","PM HW interlock draft","PM PLC interlock draft"],"not_rendered":{"charts":0,"images":2,"macros":0,"external_links":0,"defined_names":3,"comments":0,"pivot_tables":0},"unopened":[],"bounds":{"document_bytes":16777216,"sheet_cells":100000,"run_cost":"one","rows_first":2000,"rows_last":500,"rows_between":2000,"halvings":0,"cell_chars":16384,"cell_head_chars":4096},"cells_cut":0,"cells_raw":0,"read":"whole","date_system":"1900"}

{"sheet":"Revision","index":0,"n_rows":13,"n_cols":8,"rows_kept":13,"cut":false,"hidden":false,"merged":[[0,0,0,7],[1,1,1,5],[2,1,2,7],[4,0,4,7],[5,0,5,7],[6,0,6,7],[7,0,7,7],[8,0,8,7],[9,0,9,7]]}
["上海稷以科技有限公司\nSHANGHAI JETPLASMA CO.,LTD"]
["Part Number","210-0062-100",{"$nulls":4},"Revision","RFQ"]
["Description","IO LIST, TM, KPL"]
["Designed","ZLL","Checked","ZP","Approved","PJET","Date","2024-06-07"]
["第一版变更："]
["1、增加CHB\\LLA\\LLB 的压力设定AO。---20230306 by GZC\n2、增加TM MFC 流量/压力模式切换信号W4.00,LLB GUAGE ALARM W26.01取消。---20230307 by GZC\n3、完善PLC interlock 和software interlock,增加w4.08 VAC/ATM 模式切换信号。---20230322 by GZC\n4、完善PLC interlock 和software interlock,修改DO-01~04\\DO-06~08\\DO-16~19\\DO-11\\DO-21逻辑条件。---20230412 by GZC\n5、DO-04/DO-05 TM Vent Valve配置调整。---20230418 by GZC\n6、DI-10 TM RB In Auto Mode 信号取消,CHECH SENSOR 1和CHECK SENSOR 3功能细化为SMALL 和 BIG。\n    增加DO-15,DO-25,DO-28,DO-29,DO-30,DO-31信号设置6个工位的BIG / SMALL WAFER CHECK切换功能。\n     ---    20230527 by GZC\n7、删除DI-18 TM CHB DOOR OPENED信号，删除DO-05 Fast Vent Valve 信号，DO-04改为Vent Valve TM。\n     增加LLA 的pumping阀 与LLB 的pumping 阀的software interlock功能。---20230818 by GZC\n8、TM 腔、LLA腔、LLB腔的vent valve 与pumping valve 的software interlock均取消。---20230829 by GZC"]
["第二版变更："]
["1、DI变更。\n      设备只兼容一种尺寸，Check Sensor只有2个，取消Sensor3; PM Slit Door更改由TM控制。\n      新增DI-42,DI-54 分别对应PMA,PMC LID CLOSED。\n      修改DI-46,DI-50,DI-58,DI-62分别为PMA,PMB,PMC,PMD Slit Door Opened.\n      修改名称Check Sensor1(Small)->Check Sensor1: DI-42，DI-46，DI-50，DI-54，DI-58，DI-62意义不变。\n      修改DI-81 LLA/LLB Foreline VAC Gauge Alarm->LLA Foreline VAC Gauge Alarm。\n      修改DI-106,DI-107,对应TM MFC1状态反馈。\n      新增DI-43,DI-55 分别对应PMB,PMD LID CLOSED。\n      新增DI-47,DI-51,DI-59,DI-63分别为PMA,PMB,PMC,PMD Slit Door Closed。\n      新增DI-97，对应LLB Foreline VAC Gauge Alarm。\n      新增DI-108,DI-109，对应LLA MFC2状态反馈。\n      新增DI-110,DI-111，对应LLB MFC3状态反馈。\n      新增DI-70-DI-73，对应AC Rack 风扇和烟感检测。\n2、DO变更。\n     删除DO-15,D0-25,D0-28,D0-29,D0-30,D0-31。\n     修改DO-64，DO-80，DO-88，分别对应TM MFC1,Flow Mode/PID Start/PID 参数初始化,原未整个TM MFC逻辑。\n     新增DO-32至DO-39，对应PMA/PMB/PMC/PMD Slit Door Open/Close控制命令。\n     新增DO-5,DO-10，DO-20分别对应TM/LLA/LLB Protect Valve控制命令。\n     新增DO-65,DO-66，对应LLA/LLB MFC Flow Mode。\n     新增DO-81,DO-82，对应LLA/LLB PID Start。\n     新增DO-89,DO-90，对应LLA/LLB PID 参数初始化。\n\n  3、AO变更\n     修改AO-02,AO-05,AO-08,AO-11,Range由4000-8000。此项在设备已改，IO未更新，此处为更新IO.\n     新增AO-03,AO-04分别为MFC2.MFC3 Flow Setpoint.\n  4、AI变更\n     修改AI-02,LLA/LLB Foreline Pressure->LLA Foreline Pressure。\n     修改AI-15,此项在设备已改验证，IO未更新，此处为更新IO.\n     新增AI-11.AI-16.AI-17分别为LLB Foreline Pressure，MFC2/MFC3 Flow反馈。\n  5、HW interlock 更改，与软件无关。\n  6、PLC interlock更改，与软件无关。\n  7、Software interlock\n       新增DO-32至DO-39,PMA/PMB/PMC/PMD Slit Door Open&Close.\n\n                                                                                                                                                     ---20231129 By ZLL"]
["第三版变更："]
["1、新增DI74 (AC Rack-1 Main Breaker On OK),  \n      新增DI75 (AC Rack-2 Main Breaker On OK),\n2、修改AI/AO 压力单位 mtorr->pa,软件和PLC已修改。\n3、修改PLC INTERLOCK DO-00 (N2 Valve TM)，取消TM CHB Lid Door Closed互锁。\n      检修维护时，LLA/LLB需求使用N2 Valve，软件已修改。"]
["红色","删除"]
["黄色","修改"]
["绿色","新增"]

{"sheet":"DI-DO","index":1,"n_rows":113,"n_cols":15,"rows_kept":113,"cut":false,"hidden":false,"merged":[[12,14,13,14],[14,14,15,14],[22,14,23,14],[24,14,25,14],[33,14,34,14],[35,14,36,14],[37,14,38,14],[39,14,40,14]]}
["PLC DI","DI","Name","Note","Postion (NO Power)","Location","Alarm",null,"#.DO","ID","Name","EV No.","Note","Location","Logic Note"]
[0,"DI-00","TM Power On",null,null,"w20.00","1=OK，0=Alarm，Interlock-PLC",null,"DO-00",0,"EV1 N2 Valve",null,null,"w0.00"]
[0.01,"DI-01","SPARE",null,null,"w20.01","1=ON，0=OFF",null,"DO-01",0.01,"EV2 TM Soft Pumping Valve",null,null,"w0.01"]
[0.02,"DI-02","TM In Safety",null,null,"w20.02","1=OK，0=Alarm，Interlock-PLC",null,"DO-02",0.02,"EV3 TM Fast Pumping Valve",null,null,"w0.02"]
[0.03,"DI-03","Water Leak Sensor",null,null,"w20.03","1=normal，0=Alarm，Interlock-PLC",null,"DO-03",0.03,"EV4 TM Purge Valve",null,null,"w0.03"]
[0.04,"DI-04","TM RB Not Extend PMA",null,null,"w20.04","1=ON，0=OFF，Interlock-PLC",null,"DO-04",0.04,"EV5 TM Vent Valve",null,null,"w0.04"]
[0.05,"DI-05","TM RB Not Extend PMB",null,null,"w20.05","1=ON，0=OFF，Interlock-PLC",null,"DO-05",0.05,"EV6 TM Vent Exhaust Valve",null,null,"w0.05"]
[0.06,"DI-06","TM RB Not Extend PMC",null,null,"w20.06","1=ON，0=OFF，Interlock-PLC",null,"DO-06",0.06,"EV7 LLA Soft Pumping Valve",null,null,"w0.06"]
[0.07,"DI-07","TM RB Not Extend PMD",null,null,"w20.07","1=ON，0=OFF，Interlock-PLC",null,"DO-07",0.07,"EV8 LLA Fast Pumping Valve",null,null,"w0.07"]
[0.08,"DI-08","TM RB Not Extend LLA",null,null,"w20.08","1=ON，0=OFF，Interlock-PLC",null,"DO-08",0.08,"EV9 LLA Purge Valve",null,null,"w0.08"]
[0.09,"DI-09","TM RB Not Extend LLB",null,null,"w20.09","1=ON，0=OFF，Interlock-PLC",null,"DO-09",0.09,"EV10 LLA Vent Valve",null,null,"w0.09"]
[0.1,"DI-10","SPARE",null,null,"w20.10",null,null,"DO-10",0.1,"EV11 LLA Vent Exhaust Valve",null,null,"w0.10"]
[0.11,"DI-11","EFEM RB Not Extend LLA",null,null,"w20.11","1=ON，0=OFF，Interlock-PLC",null,"DO-11",0.11,"EV12 LLA Slit Door/I Open",null,null,"w0.11","软件初始化时：DI-22为1，DO-11置为1，DO-12置为0;\n                               DI-22为0，DO-11置为0，DO-12置为1。"]
[0.12,"DI-12","EFEM RB Not Extend LLB",null,null,"w20.12","1=ON，0=OFF，Interlock-PLC",null,"DO-12",0.12,"EV12 LLA Slit Door/I Close",null,null,"w0.12"]
[0.13,"DI-13","EFEM Side Door Closed",null,null,"w20.13","1=OK，0=Alarm，Interlock-PLC",null,"DO-13",0.13,"EV13 LLA Slit Door/O Open",null,null,"w0.13","软件初始化时：DI-24为1，DO-13置为1，DO-14置为0;\n                               DI-24为0，DO-13置为0，DO-14置为1。"]
[0.14,"DI-14","TM PCW Flow Switch",null,null,"w20.14","1=OK，0=Warning，Interlock-PLC",null,"DO-14",0.14,"EV13 LLA Slit Door/O Close",null,null,"w0.14"]
[0.15,"DI-15","LLA PCW Flow Switch",null,null,"w20.15","1=OK，0=Warning，Interlock-PLC",null,"DO-15",0.15,null,null,null,"w0.15"]
[1,"DI-16","LLB PCW Flow Switch",null,null,"w21.00","1=OK，0=Warning，Interlock-PLC",null,"DO-16",1,"EV14 LLB Soft Pumping Valve",null,null,"w1.00"]
[1.01,"DI-17","TM CHB Door Closed",null,null,"w21.01","1=OK，0=Alarm，Interlock-PLC",null,"DO-17",1.01,"EV15 LLB Fast Pumping Valve",null,null,"w1.01"]
[1.02,"DI-18",null,null,null,"w21.02",null,null,"DO-18",1.02,"EV16 LLB Purge Valve",null,null,"w1.02"]
[1.03,"DI-19","CDA Pressure Switch",null,null,"w21.03","1=OK，0=Alarm，Interlock-PLC",null,"DO-19",1.03,"EV17 LLB Vent Valve",null,null,"w1.03"]
[1.04,"DI-20","Vaccum Pressure Switch",null,null,"w21.04","1=OK，0=Alarm，Interlock-PLC",null,"DO-20",1.04,"EV18 LLB Vent Exhaust Valve",null,null,"w1.04"]
[1.05,"DI-21","N2 Pressure Switch",null,null,"w21.05","1=OK，0=Alarm，Interlock-PLC",null,"DO-21",1.05,"EV19 LLB Slit Door/I Open",null,null,"w1.05","软件初始化时：DI-27为1，DO-21置为1，DO-22置为0;\n                               DI-27为0，DO-21置为0，DO-22置为1。"]
[1.06,"DI-22","LLA In Slit Door open Position",null,null,"w21.06","1=ON，0=OFF，Interlock-PLC",null,"DO-22",1.06,"EV19 LLB Slit Door/I Close",null,null,"w1.06"]
[1.07,"DI-23","LLA In Slit Door close Position",null,null,"w21.07","1=ON，0=OFF，Interlock-PLC",null,"DO-23",1.07,"EV20 LLB Slit Door/O Open",null,null,"w1.07","软件初始化时：DI-29为1，DO-23置为1，DO-24置为0;\n                               DI-29为0，DO-23置为0，DO-24置为1。"]
[1.08,"DI-24","LLA Out Slit Door open Position",null,null,"w21.08","1=ON，0=OFF，Interlock-PLC",null,"DO-24",1.08,"EV20 LLB Slit Door/O Close",null,null,"w1.08"]
[1.09,"DI-25","LLA Out Slit Door close Position",null,null,"w21.09","1=ON，0=OFF，Interlock-PLC;",null,"DO-25",1.09,null,null,null,"w1.09"]
[1.1,"DI-26","LLA Lid Door Closed",null,null,"w21.10","1=ON，0=OFF，Interlock-PLC;",null,"DO-26",1.1,"EV21 Water Valve",null,null,"w1.10","PC to PLC  w1.10  ON开启冷却水，DO-26在满足DI-03 ON条件下置ON。"]
[1.11,"DI-27","LLB In Slit Door open Position",null,null,"w21.11","1=ON，0=OFF，Interlock-PLC",null,"DO-27",1.11,null,null,null,"w1.11"]
[1.12,"DI-28","LLB In Slit Door close Position",null,null,"w21.12","1=ON，0=OFF，Interlock-PLC",null,"DO-28",1.12,null,null,null,"w1.12"]
[1.13,"DI-29","LLB Out Slit Door open Position",null,null,"w21.13","1=ON，0=OFF，Interlock-PLC",null,"DO-29",1.13,null,null,null,"w1.13"]
[1.14,"DI-30","LLB Out Slit Door close Position",null,null,"w21.14","1=ON，0=OFF，Interlock-PLC",null,"DO-30",1.14,null,null,null,"w1.14"]
[1.15,"DI-31","LLB Lid Door Closed",null,null,"w21.15","1=ON，0=OFF，Interlock-PLC",null,"DO-31",1.15,null,null,null,"w1.15"]
["PLC软件DI","DI-32","TM VAC Switch",null,null,"w22.00","1=ON，0=OFF，Interlock-PLC;",null,"DO-32",null,"EV22 PMA Slit Door Open",null,null,"w2.00","软件初始化时：DI-47为1，DO-33置为1，DO-32置为0;"]
[2.01,"DI-33","TM ATM Switch",null,null,"w22.01","1=ON，0=OFF，Interlock-PLC;",null,"DO-33",null,"EV22 PMA Slit Door Close",null,null,"w2.01"]
["PLC软件DI","DI-34","LLA VAC Switch",null,null,"w22.02","1=ON，0=OFF，Interlock-PLC;",null,"DO-34",null,"EV23 PMB Slit Door Open",null,null,"w2.02","软件初始化时：DI-51为1，DO-35置为1，DO-34置为0;"]
[2.03,"DI-35","LLA ATM Switch",null,null,"w22.03","1=ON，0=OFF，Interlock-PLC;",null,"DO-35",null,"EV23 PMB Slit Door Close",null,null,"w2.03"]
["PLC软件DI","DI-36","LLB VAC Switch",null,null,"w22.04","1=OK，0=OFF，Interlock-PLC;",null,"DO-36",null,"EV24 PMC Slit Door Open",null,null,"w2.04","软件初始化时：DI-59为1，DO-37置为1，DO-36置为0;"]
[2.05,"DI-37","LLB ATM Switch",null,null,"w22.05","1=ON，0=OFF，Interlock-PLC;",null,"DO-37",null,"EV24 PMC Slit Door Close",null,null,"w2.05"]
[2.06,"DI-38","SPARE",null,null,"w22.06",null,null,"DO-38",null,"EV25 PMD Slit Door Open",null,null,"w2.06","软件初始化时：DI-63为1，DO-39置为1，DO-38置为0;"]
[2.07,"DI-39","SPARE",null,null,"w22.07",null,null,"DO-39",null,"EV25 PMD Slit Door Close",null,null,"w2.07"]
[2.08,"DI-40","LLA AWC Sensor1",null,null,"w22.08",null,null,"DO-40",{"$nulls":4},"w2.08"]
[2.09,"DI-41","LLA AWC  Sensor2",null,null,"w22.09",null,null,"DO-41",{"$nulls":4},"w2.09"]
[2.1,"DI-42","PMA Lid Closed",null,null,"w22.10",null,null,"DO-42",{"$nulls":4},"w2.10"]
[2.11,"DI-43","PMB Lid Closed",null,null,"w22.11",null,null,"DO-43",{"$nulls":4},"w2.11"]
[2.12,"DI-44","PMA AWC  Sensor1",null,null,"w22.12",null,null,"DO-44",{"$nulls":4},"w2.12"]
[2.13,"DI-45","PMA AWC  Sensor2",null,null,"w22.13",null,null,"DO-45",{"$nulls":4},"w2.13"]
[2.14,"DI-46","PMA Slit Door Open Position",null,null,"w22.14",null,null,"DO-46",{"$nulls":4},"w2.14"]
[2.15,"DI-47","PMA Slit Door Close Position",null,null,"w22.15",null,null,"DO-47",{"$nulls":4},"w2.15"]
[3,"DI-48","PMB AWC  Sensor1",null,null,"w23.00",null,null,"DO-48",{"$nulls":4},"w3.00"]
[3.01,"DI-49","PMB AWC  Sensor2",null,null,"w23.01",null,null,"DO-49",{"$nulls":4},"w3.01"]
[3.02,"DI-50","PMB Slit Door Open Position",null,null,"w23.02",null,null,"DO-50",{"$nulls":4},"w3.02"]
[3.03,"DI-51","PMB Slit Door Close Position",null,null,"w23.03",null,null,"DO-51",{"$nulls":4},"w3.03"]
[3.04,"DI-52","LLB AWC  Sensor1",null,null,"w23.04",null,null,"DO-52",{"$nulls":4},"w3.04"]
[3.05,"DI-53","LLB AWC  Sensor2",null,null,"w23.05",null,null,"DO-53",{"$nulls":4},"w3.05"]
[3.06,"DI-54","PMC Lid Closed",null,null,"w23.06",null,null,"DO-54",{"$nulls":4},"w3.06"]
[3.07,"DI-55","PMD Lid Closed",null,null,"w23.07",null,null,"DO-55",{"$nulls":4},"w3.07"]
[3.08,"DI-56","PMC AWC  Sensor1",null,null,"w23.08",null,null,"DO-56",{"$nulls":4},"w3.08"]
[3.09,"DI-57","PMC AWC  Sensor2",null,null,"w23.09",null,null,"DO-57",{"$nulls":4},"w3.09"]
[3.1,"DI-58","PMC Slit Door Open Position",null,null,"w23.10",null,null,"DO-58",{"$nulls":4},"w3.10"]
[3.11,"DI-59","PMC Slit Door Close Position",null,null,"w23.11",null,null,"DO-59",{"$nulls":4},"w3.11"]
[3.12,"DI-60","PMD AWC  Sensor1",null,null,"w23.12",null,null,"DO-60",{"$nulls":4},"w3.12"]
[3.13,"DI-61","PMD AWC  Sensor2",null,null,"w23.13",null,null,"DO-61",{"$nulls":4},"w3.13"]
[3.14,"DI-62","PMD Slit Door Open Position",null,null,"w23.14",null,null,"DO-62",{"$nulls":4},"w3.14"]
[3.15,"DI-63","PMD Slit Door Close Position",null,null,"w23.15",null,null,"DO-63",{"$nulls":4},"w3.15"]
[null,"DI-64","TM Chamber VAC Gauge Alarm",null,null,"w24.00","0=OK，1=Alarm",null,"DO-64",null,"TM MFC Flow Mode/Pressure Mode",null,null,"w4.00","0=Flow Mode;1=Pressure Mode"]
[null,"DI-65","TM Foreline VAC Gauge Alarm",null,null,"w24.01","0=OK，1=Alarm",null,"DO-65",null,"LLA MFC Flow Mode/Pressure Mode",null,null,"w4.01","0=Flow Mode;1=Pressure Mode"]
[null,"DI-66",null,null,null,"w24.02",null,null,"DO-66",null,"LLB MFC Flow Mode/Pressure Mode",null,null,"w4.02","0=Flow Mode;1=Pressure Mode"]
[null,"DI-67",null,null,null,"w24.03",null,null,"DO-67",{"$nulls":4},"w4.03"]
[null,"DI-68",null,null,null,"w24.04",null,null,"DO-68",{"$nulls":4},"w4.04"]
[null,"DI-69",null,null,null,"w24.05",null,null,"DO-69",{"$nulls":4},"w4.05"]
[null,"DI-70","AC Rack-1 Fans OK",null,null,"w24.06","1=OK，0=Warning",null,"DO-70",{"$nulls":4},"w4.06"]
[null,"DI-71","AC Rack-1 Smoke Detect OK",null,null,"w24.07","1=OK，0=Alarm",null,"DO-71",{"$nulls":4},"w4.07"]
[null,"DI-72","AC Rack-2 Fans OK",null,null,"w24.08","1=OK，0=Warning",null,"DO-72",null,"TM  VAC/ATM  Mode",null,null,"w4.08","0=VAC Mode;1=ATM Mode"]
[null,"DI-73","AC Rack-2 Smoke Detect OK",null,null,"w24.09","1=OK，0=Alarm",null,"DO-73",{"$nulls":4},"w4.09"]
[null,"DI-74","AC Rack-1 Main Breaker On OK",null,null,"w24.10","1=OK，0=Alarm",null,"DO-74",{"$nulls":4},"w4.10"]
[null,"DI-75","AC Rack-2 Main Breaker On OK",null,null,"w24.11","1=OK，0=Alarm",null,"DO-75",{"$nulls":4},"w4.11"]
[null,"DI-76",null,null,null,"w24.12",null,null,"DO-76",{"$nulls":4},"w4.12"]
[null,"DI-77",null,null,null,"w24.13",null,null,"DO-77",{"$nulls":4},"w4.13"]
[null,"DI-78",null,null,null,"w24.14",null,null,"DO-78",{"$nulls":4},"w4.14"]
[null,"DI-79",null,null,null,"w24.15",null,null,"DO-79",{"$nulls":4},"w4.15"]
[null,"DI-80","LLA Chamber VAC Gauge Alarm",null,null,"w25.00","0=OK，1=Alarm",null,"DO-80",null,"TM MFC Flow Control Mode  PID AT Start",null,null,"w5.00","0=OFF,1=ON。当W26.11 OFF时，若W5.00置ON, 则W26.10置ON，1s后W26.10置OFF,同步W5.00置OFF."]
[null,"DI-81","LLA Foreline VAC Gauge Alarm",null,null,"w25.01","0=OK，1=Alarm",null,"DO-81",null,"LLA MFC Flow Control Mode  PID AT Start",null,null,"w5.01","0=OFF,1=ON。当W26.13 OFF时，若W5.01置ON, 则W26.12置ON，1s后W26.12置OFF,同步W5.01置OFF."]
[null,"DI-82",null,null,null,"w25.02",null,null,"DO-82",null,"LLB MFC Flow Control Mode  PID AT Start",null,null,"w5.02","0=OFF,1=ON。当W26.15 OFF时，若W5.02置ON, 则W26.14置ON，1s后W26.14置OFF,同步W5.02置OFF."]
[null,"DI-83",null,null,null,"w25.03",null,null,"DO-83",{"$nulls":4},"w5.03"]
[null,"DI-84",null,null,null,"w25.04",null,null,"DO-84",{"$nulls":4},"w5.04"]
[null,"DI-85",null,null,null,"w25.05",null,null,"DO-85",{"$nulls":4},"w5.05"]
[null,"DI-86",null,null,null,"w25.06",null,null,"DO-86",{"$nulls":4},"w5.06"]
[null,"DI-87",null,null,null,"w25.07",null,null,"DO-87",{"$nulls":4},"w5.07"]
[null,"DI-88",null,null,null,"w25.08",null,null,"DO-88",null,"TM MFC Flow Control Mode  PID PARM INIT",null,null,"w5.08","0=OFF,1=ON 大于3s触发恢复出厂设置，W26.11置ON，第4s W26.11置OFF。"]
[null,"DI-89",null,null,null,"w25.09",null,null,"DO-89",null,"LLA MFC Flow Control Mode  PID PARM INIT",null,null,"w5.09","0=OFF,1=ON 大于3s触发恢复出厂设置，W26.13置ON，第4s W26.13置OFF。"]
[null,"DI-90",null,null,null,"w25.10",null,null,"DO-90",null,"LLB MFC Flow Control Mode  PID PARM INIT",null,null,"w5.10","0=OFF,1=ON 大于3s触发恢复出厂设置，W26.15置ON，第4s W26.15置OFF。"]
[null,"DI-91",null,null,null,"w25.11",null,null,"DO-91",{"$nulls":4},"w5.11"]
[null,"DI-92",null,null,null,"w25.12",null,null,"DO-92",{"$nulls":4},"w5.12"]
[null,"DI-93",null,null,null,"w25.13",null,null,"DO-93",{"$nulls":4},"w5.13"]
[null,"DI-94",null,null,null,"w25.14",null,null,"DO-94",{"$nulls":4},"w5.14"]
[null,"DI-95",null,null,null,"w25.15",null,null,"DO-95",{"$nulls":4},"w5.15"]
[null,"DI-96","LLB Chamber VAC Gauge Alarm",null,null,"w26.00","0=OK，1=Alarm",null,"DO-96",{"$nulls":4},"w6.00"]
[null,"DI-97","LLB Foreline VAC Gauge Alarm",null,null,"w26.01","0=OK，1=Alarm",null,"DO-97",{"$nulls":4},"w6.01"]
[null,"DI-98",null,null,null,"w26.02",null,null,"DO-98",{"$nulls":4},"w6.02"]
[null,"DI-99",null,null,null,"w26.03",null,null,"DO-99",{"$nulls":4},"w6.03"]
[null,"DI-100",null,null,null,"w26.04",null,null,"DO-100",{"$nulls":4},"w6.04"]
[null,"DI-101",null,null,null,"w26.05",null,null,"DO-101",{"$nulls":4},"w6.05"]
[null,"DI-102",null,null,null,"w26.06",null,null,"DO-102",{"$nulls":4},"w6.06"]
[null,"DI-103",null,null,null,"w26.07",null,null,"DO-103",{"$nulls":4},"w6.07"]
[null,"DI-104",null,null,null,"w26.08",null,null,"DO-104",{"$nulls":4},"w6.08"]
[null,"DI-105",null,null,null,"w26.09",null,null,"DO-105",{"$nulls":4},"w6.09"]
[null,"DI-106","TM MFC Flow Control Mode PID AT Running",null,null,"w26.10","0=OFF,1=ON AT完成后PLC自动置OFF",null,"DO-106",{"$nulls":4},"w6.10"]
[null,"DI-107","TM MFC Flow ControlPID PARM INIT",null,null,"w26.11","0=OFF,1=ON 1s后PLC自动置OFF",null,"DO-107",{"$nulls":4},"w6.11"]
[null,"DI-108","LLA MFC Flow ControlMode PID AT Running",null,null,"w26.12","0=OFF,1=ON AT完成后PLC自动置OFF",null,"DO-108",{"$nulls":4},"w6.12"]
[null,"DI-109","LLA MFC Flow Control PID PARM INIT",null,null,"w26.13","0=OFF,1=ON 1s后PLC自动置OFF",null,"DO-109",{"$nulls":4},"w6.13"]
[null,"DI-110","LLB MFC Flow Control Mode PID AT Running",null,null,"w26.14","0=OFF,1=ON AT完成后PLC自动置OFF",null,"DO-110",{"$nulls":4},"w6.14"]
[null,"DI-111","LLB MFC Flow Control PID PARM INIT",null,null,"w26.15","0=OFF,1=ON 1s后PLC自动置OFF",null,"DO-111",{"$nulls":4},"w6.15"]

{"sheet":"AI","index":2,"n_rows":51,"n_cols":7,"rows_kept":51,"cut":false,"hidden":false,"merged":[]}
["Node No. ","ID","Range","Device Name","Logic note","date type","Remark"]
["AI-00","d2000","1000T","TM  Pressure","Unit:Pa","float"]
["AI-01","d2002","10T","TM Foreline Pressure","Unit:Pa","float"]
["AI-02","d2004",null,null,null,"float"]
["AI-03","d2006",null,null,null,"float"]
["AI-04","d2008",null,null,null,"float"]
["AI-05","d2010","1000T","LLA  Pressure","Unit:Pa","float"]
["AI-06","d2012","10T","LLA Foreline Pressure","Unit:Pa","float"]
["AI-07","d2014",null,null,null,"float"]
["AI-08","d2016",null,null,null,"float"]
["AI-09","d2018",null,null,null,"float"]
["AI-10","d2020","1000T","LLB  Pressure","Unit:Pa","float"]
["AI-11","d2022","10T","LLB Foreline Pressure","Unit:Pa","float"]
["AI-12","d2024",null,null,null,"float"]
["AI-13","d2026",null,null,null,"float"]
["AI-14","d2028",null,null,null,"float"]
["AI-15","d2030","0-8000","TM MFC Flow",null,"float","TM MFC"]
["AI-16","d2032","0-8000","LLA MFC Flow",null,"float","LLA MFC"]
["AI-17","d2034","0-8000","LLB MFC Flow",null,"float","LLB MFC"]
["AI-18","d2036",null,"Heartbeat FB","PLC 输出接收到的D1036值","float","From PLC to PC"]
["AI-19","d2038",null,null,null,"float"]
["AI-20","d2040",null,null,null,"float"]
["AI-21","d2042","00~59","Second","秒","float"]
["AI-22","d2044","00~59","Minute","分","float"]
["AI-23","d2046","00~23","Time","时","float"]
["AI-24","d2048","00~31","Day","日","float"]
["AI-25","d2050","01~12","Month","月","float"]
["AI-26","d2052","00~99","Year","年","float"]
["AI-27","d2054",null,null,null,"float"]
["AI-28","d2056",null,null,null,"float"]
["AI-29","d2058",null,null,null,"float"]
["AI-30","d2060",null,null,null,"float"]
["AI-31","d2062",null,null,null,"float"]
["AI-32","d2064",null,null,null,"float"]
["AI-33","d2066",null,null,null,"float"]
["AI-34","d2068",null,null,null,"float"]
["AI-35","d2070",null,null,null,"float"]
["AI-36","d2072",null,null,null,"float"]
["AI-37","d2074",null,null,null,"float"]
["AI-38","d2076",null,null,null,"float"]
["AI-39","d2078",null,null,null,"float"]
["AI-40","d2080",null,null,null,"float"]
["AI-41","d2082",null,null,null,"float"]
["AI-42","d2084",null,null,null,"float"]
["AI-43","d2086",null,null,null,"float"]
["AI-44","d2088",null,null,null,"float"]
["AI-45","d2090",null,null,null,"float"]
["AI-46","d2092",null,null,null,"float"]
["AI-47","d2094",null,null,null,"float"]
["AI-48","d2096",null,null,null,"float"]
["AI-49","d2098",null,null,null,"float"]

{"sheet":"AO","index":3,"n_rows":51,"n_cols":7,"rows_kept":51,"cut":false,"hidden":false,"merged":[[41,6,42,6]]}
["Node No.","ID","Range","Device Name","Logic note","date type","Remark"]
["AO-00","d1000",null,null,null,"float"]
["AO-01","d1002",null,null,null,"float"]
["AO-02","d1004","0-8000","TM MFC Flow Setpoint",null,"float","TM MFC"]
["AO-03","d1006","0-8000","LLA MFC Flow Setpoint",null,"float","LLA MFC"]
["AO-04","d1008","0-8000","LLB MFC Flow Setpoint",null,"float","LLB MFC"]
["AO-05","d1010","0-8000","TM Pressure","Unit:Pa","float","TM  Pressure"]
["AO-06","d1012",null,null,null,"float"]
["AO-07","d1014",null,null,null,"float"]
["AO-08","d1016","0-8000","LLA Pressure","Unit:Pa","float","LLA  Pressure"]
["AO-09","d1018",null,null,null,"float"]
["AO-10","d1020",null,null,null,"float"]
["AO-11","d1022","0-8000","LLB Pressure","Unit:Pa","float","LLB  Pressure"]
["AO-12","d1024",null,null,null,"float"]
["AO-13","d1026",null,null,null,"float"]
["AO-14","d1028",null,null,null,"float"]
["AO-15","d1030",null,null,null,"float"]
["AO-16","d1032",null,null,null,"float"]
["AO-17","d1034",null,null,null,"float"]
["AO-18","d1036",null,"Heartbeat","5s变化一次","float","From PC to PLC"]
["AO-19","d1038",null,null,null,"float"]
["AO-20","d1040",null,null,null,"float"]
["AO-21","d1042",null,null,null,"float"]
["AO-22","d1044",null,null,null,"float"]
["AO-23","d1046",null,null,null,"float"]
["AO-24","d1048",null,null,null,"float"]
["AO-25","d1050",null,null,null,"float"]
["AO-26","d1052",null,null,null,"float"]
["AO-27","d1054",null,null,null,"float"]
["AO-28","d1056",null,null,null,"float"]
["AO-29","d1058",null,null,null,"float"]
["AO-30","d1060",null,null,null,"float"]
["AO-31","d1062",null,null,null,"float"]
["AO-32","d1064",null,null,null,"float"]
["AO-33","d1066",null,null,null,"float"]
["AO-34","d1068",null,null,null,"float"]
["AO-35","d1070",null,null,null,"float"]
["AO-36","d1072",null,null,null,"float"]
["AO-37","d1074",null,null,null,"float"]
["AO-38","d1076",null,null,null,"float"]
["AO-39","d1078",null,null,null,"float"]
["AO-40","d1080",null,null,null,"float"]
["AO-41","d1082",null,null,null,"float"]
["AO-42","d1084",null,null,null,"float"]
["AO-43","d1086",null,null,null,"float"]
["AO-44","d1088",null,null,null,"float"]
["AO-45","d1090",null,null,null,"float"]
["AO-46","d1092",null,null,null,"float"]
["AO-47","d1094",null,null,null,"float"]
["AO-48","d1096",null,null,null,"float"]
["AO-49","d1098",null,null,null,"float"]

{"sheet":"HW interlock","index":4,"n_rows":36,"n_cols":31,"rows_kept":36,"cut":false,"hidden":false,"merged":[[0,0,0,1],[0,2,0,15],[1,2,1,8],[1,13,1,14],[35,0,35,1],[1,0,2,1]]}
["CONDITION"]
["TM SYSTEM CONDTION",null,"TM TO ROB",{"$nulls":6},"TM TO PMA","TM TO PMB","TM TO PMC","TM TO PMD","TM TO EFEM",null,"LLA In   Slit Door Open","LLA In   Slit Door Close","LLB In   Slit Door Open","LLB In   Slit Door Close","LLA Out Slit Door  Open","LLA Out Slit Door Close","LLB Out Slit Door Open","LLB Out   Slit Door  Close","PMA  Slit Door  Open","PMA  Slit Door  Close","PMB  Slit Door  Open","PMB  Slit Door  Close","PMC  Slit Door  Open","PMC  Slit Door  Close","PMD  Slit Door  Open","PMD  Slit Door  Close"]
[null,null,"TM RB EMO","Safety to PMA","Safety to PMB","Safety to PMC","Safety to PMD","Safety to LLA","Safety to LLB","Safety to O/C Slit Door","Safety to O/C Slit Door","Safety to O/C Slit Door","Safety to O/C Slit Door","EFEM RB safety to LLA","EFEM RB safety to LLB","Safety to Action","Safety to Action","Safety to Action","Safety to Action","Safety to Action","Safety to Action","Safety to Action","Safety to Action","Safety to Action","Safety to Action","Safety to Action","Safety to Action","Safety to Action","Safety to Action","Safety to Action","Safety to Action"]
["KA9.6.0/KA9.6.1","TM In Safety","T1",{"$nulls":6},"T1","T1","T1","T1",{"$nulls":10},"T1","T1","T1","T1","T1","T1","T1","T1"]
["KA20.1.0/KA20.1.1","TM RB Not Extend PMA",{"$nulls":7},"T2",{"$nulls":13},"T2","T2"]
["KA20.1.2/KA20.1.3","TM RB Not Extend PMB",{"$nulls":8},"T2",{"$nulls":14},"T2","T2"]
["KA20.1.4/KA20.1.5","TM RB Not Extend PMC",{"$nulls":9},"T2",{"$nulls":15},"T2","T2"]
["KA20.1.6/KA20.1.7","TM RB Not Extend PMD",{"$nulls":10},"T2",{"$nulls":16},"T2","T2"]
["KA20.5.0/KA20.5.1","TM RB Not Extend LLA",{"$nulls":11},"T1",{"$nulls":5},"T1","T1"]
["KA20.5.2/KA20.5.3","TM RB Not Extend LLB",{"$nulls":12},"T1",{"$nulls":6},"T1","T1"]
["KA15.1","LLA In Slit Door open Position",{"$nulls":11},"T2"]
["KA15.3/KA15.3.0","LLA In Slit Door close Position",{"$nulls":5},"T1",{"$nulls":11},"T2"]
["KA15.4","LLA Out Slit Door open Position",{"$nulls":5},"T2"]
["KA15.6/KA15.6.0","LLA Out Slit Door close Position",{"$nulls":11},"T3",null,"T1"]
["KA15.8","LLA LID Door Closed",{"$nulls":13},"T2","T1",null,null,"T3","T2","T2","T2"]
["KA15.1.1","LLB In Slit Door open Position",{"$nulls":12},"T2"]
["KA15.3.1/KA15.3.2","LLB In Slit Door close Position",{"$nulls":6},"T1",{"$nulls":12},"T3"]
["KA15.4.1","LLB Out Slit Door open Position",{"$nulls":6},"T2"]
["KA15.6.1/KA15.6.2","LLB Out Slit Door close Position",{"$nulls":12},"T3",null,null,"T1"]
["KA15.8.1","LLB LID Door Closed",{"$nulls":15},"T2","T1"]
["KA17.1/KA17.2","PMA Slit Door Opened",null,"T1"]
["KA17.1.1","PMA Slit Door Closed"]
["KA17.3/KA17.4","PMB  Slit Door Opened",null,null,"T1"]
["KA17.3.1","PMB Slit Door Closed"]
["KA17.5/KA17.6","PMC Slit Door Opened",null,null,null,"T1"]
["KA17.5.1","PMC Slit Door Closed"]
["KA17.7/KA17.8","PMD  Slit Door Opened",{"$nulls":4},"T1"]
["KA17.8.1","PMD Slit Door Closed"]
["KA21.5.2/KA21.5.3","EFEM Side Panel Closed",{"$nulls":17},"T4","T3","T4","T3"]
["KA21.5.0/KA21.5.1","EFEM RB NOT EXTEND LLA",{"$nulls":5},"T3",{"$nulls":7},"T3","T2"]
["KA21.5.4/KA21.5.5","EFEM RB NOT EXTEND LLB",{"$nulls":6},"T3",{"$nulls":8},"T3","T2"]
["KA24.3","PMA Lid Closed",{"$nulls":21},"T3","T3"]
["KA25.3","PMB Lid Closed",{"$nulls":23},"T3","T3"]
["KA26.3","PMC Lid Closed",{"$nulls":25},"T3","T3"]
["KA27.3","PMD Lid Closed",{"$nulls":27},"T3","T3"]
["REMARKS",null,"If T1=1 it is enable","If T1=1 it is enable","If T1=1 it is enable","If T1=1 it is enable","If T1=1 it is enable","If T1=1 it is enable","If T1=1 it is enable","If T1*T2=1 it is enable","If T1*T2=1 it is enable","If T1*T2=1 it is enable","If T1*T2=1 it is enable","If T1*T2*T3=1 it is enable","If T1*T2*T3=1 it is enable","If T1*T2*T3=1 it is enable","If T1*T2=1 it is enable","If T1*T2*T3=1 it is enable","If T1*T2=1 it is enable","If T1*T2*T3*T4=1 it is enable","If T1*T2*T3=1 it is enable","If T1*T2*T3*T4=1 it is enable","If T1*T2*T3=1 it is enable","If T1*T2*T3=1 it is enable","If T1*T2*T3=1 it is enable","If T1*T2*T3=1 it is enable","If T1*T2*T3=1 it is enable","If T1*T2*T3=1 it is enable","If T1*T2*T3=1 it is enable","If T1*T2*T3=1 it is enable","If T1*T2*T3=1 it is enable"]

{"sheet":"PLC interlock ","index":5,"n_rows":58,"n_cols":39,"rows_kept":58,"cut":false,"hidden":false,"merged":[[0,0,0,1],[0,15,0,16],[1,15,1,16],[1,25,1,26],[2,15,2,16],[2,25,2,26],[57,0,57,1],[57,15,57,16],[57,25,57,26],[1,0,2,1]]}
["CONDITION",{"$nulls":12},"E","E","T",null,"T"]
[null,null,"DO-00","DO-01","DO-02","DO-03","DO-04","DO-05","DO-06","DO-07","DO-08","DO-09","DO-10","DO-11","DO-12","DO-13",null,"DO-14","DO-16","DO-17","DO-18","DO-19","DO-20","DO-21","DO-22","DO-23",null,"DO-24","DO-26","DO-32","DO-33","DO-34","DO-35","DO-36","DO-37","DO-38","DO-39","DO-40","DO-41"]
[null,null,"N2 Valve TM","Soft Pumping Valve TM","Fast Pumping Valve TM","Purge Valve TM","Vent Valve TM",null,"Soft Pumping Valve LLA","Fast Pumping Valve LLA","Purge Valve LLA","Vent Valve LLA","N2 Valve LLA","LLA Slit Door/I Open","LLA Slit Door/I Close","LLA Slit Door/O Open",null,"LLA Slit Door/O Close","Soft Pumping Valve LLB","Fast Pumping Valve LLB","Purge Valve LLB","Vent Valve LLB","N2 Valve LLB","LLB Slit Door/I Open","LLB Slit Door/I Close","LLB Slit Door/O Open",null,"LLB Slit Door/O Close","Water Valve Relay","PMA Slit Door Open","PMA Slit Door Close","PMB Slit Door Open","PMB Slit Door Close","PMC Slit Door Open","PMC Slit Door Close","PMD Slit Door Open","PMD Slit Door Close","LLA Balance Valve","LLB Balance Valve"]
["DI-03","Water Leak Sensor",{"$nulls":26},"T1"]
["DI-04","TM RB Not Extend To PMA",{"$nulls":27},"T1","T1"]
["DI-05","TM RB Not Extend To PMB",{"$nulls":29},"T1","T1"]
["DI-06","TM RB Not Extend To PMC",{"$nulls":31},"T1","T1"]
["DI-07","TM RB Not Extend To PMD",{"$nulls":33},"T1","T1"]
["DI-08","TM RB Not Extend LLA",{"$nulls":11},"T1","T1","T1","T1","T1"]
["DI-09","TM RB Not Extend LLB",{"$nulls":21},"T1","T1","T1","T1","T1"]
["DI-11","EFEM RB Not Extend LLA",{"$nulls":11},"T2","T2","T2","T2","T2"]
["DI-12","EFEM RB Not Extend LLB",{"$nulls":21},"T2","T2","T2","T2","T2"]
["DI-13","EFEM Side Door Closed",{"$nulls":11},"T3","T3",{"$nulls":8},"T3","T3"]
["DI-17","TM CHB Lid Door Closed","T1","T1","T1","T1","T1","T1",{"$nulls":7},"T3","T3","T3",{"$nulls":7},"T3","T3","T3",null,"T2","T2","T2","T2","T2","T2","T2","T2"]
["DI-19","CDA Pressure Switch","T2","T2","T2","T2","T2","T2","T1","T1","T1","T1","T1","T4","T4","T4","T4","T4","T1","T1","T1","T1","T1","T4","T4","T4","T4","T4",null,"T3","T3","T3","T3","T3","T3","T3","T3","T1","T1"]
["DI-20","Vaccum Pressure Switch"]
["DI-21","N2 Pressure Switch","T3",null,null,"T5","T5","T5",null,null,"T5","T5","T2",{"$nulls":7},"T5","T5","T2"]
["DI-22","LLA In Slit Door open Position"]
["DI-23","LLA In Slit Door close Position",null,"T5","T5",null,null,null,"T5","T5",{"$nulls":5},"T5","T5"]
["DI-24","LLA Out Slit Door open Position"]
["DI-25","LLA Out Slit Door close Position",null,"T6","T6",{"$nulls":8},"T5"]
["DI-26","LLA Lid Door Closed",null,"T7","T7",null,null,null,"T2","T2","T2","T2","T3","T6","T5","T6","T6","T5",{"$nulls":19},"T2"]
["DI-27","LLB In Slit Door open Position"]
["DI-28","LLB In Slit Door close Position",null,"T8","T8",{"$nulls":13},"T5","T5",{"$nulls":5},"T5","T5"]
["DI-29","LLB Out Slit Door open Position"]
["DI-30","LLB Out Slit Door close Position",null,"T9","T9",{"$nulls":18},"T5"]
["DI-31","LLB Lid Door Closed",null,"T10","T10",{"$nulls":13},"T2","T2","T2","T2","T3","T6","T5","T6","T6","T5",{"$nulls":10},"T2"]
["DI-34","LLA VAC Switch",{"$nulls":13},"T7","T7=0"]
["DI-35","LLA ATM Switch",{"$nulls":11},"T7",null,"T8=0","T8",{"$nulls":20},"T3"]
["DI-36","LLB VAC Switch",{"$nulls":23},"T7","T7=0"]
["DI-37","LLB ATM Switch",{"$nulls":21},"T7",null,"T8=0","T8",{"$nulls":11},"T3"]
["DI-46","PMA Slit Door open Position",{"$nulls":28},"T4"]
["DI-47","PMA Slit Door close Position",{"$nulls":27},"T4"]
["DI-50","PMB Slit Door open Position",{"$nulls":30},"T4"]
["DI-51","PMB Slit Door close Position",{"$nulls":29},"T4"]
["DI-58","PMC Slit Door open Position",{"$nulls":32},"T4"]
["DI-59","PMC Slit Door close Position",{"$nulls":31},"T4"]
["DI-62","PMD Slit Door open Position",{"$nulls":34},"T4"]
["DI-63","PMD Slit Door close Position",{"$nulls":33},"T4"]
["DI-42","PMA Lid Closed",{"$nulls":27},"T5","T5"]
["DI-43","PMB Lid Closed",{"$nulls":29},"T5","T5"]
["DI-54","PMC Lid Closed",{"$nulls":31},"T5","T5"]
["DI-55","PMD Lid Closed",{"$nulls":33},"T5","T5"]
["W4.08","TM  VAC/ATM  MODE",{"$nulls":13},"T9=0","T9",{"$nulls":8},"T9=0","T9"]
["DO-01","Soft Pumping Valve TM",null,null,null,"T3=0","T3=0","T3=0"]
["DO-02","Fast Pumping Valve TM",null,null,null,"T4=0","T4=0","T4=0"]
["DO-03","Purge Valve TM",null,"T3=0","T3=0"]
["DO-04","Vent Valve TM",null,"T4=0","T4=0"]
["DO-05",null,null,"T11=0","T11=0"]
["DO-06","Soft Pumping Valve LLA",{"$nulls":8},"T3=0","T3=0",{"$nulls":6},"T3=0","T3=0",{"$nulls":17},"T4=0"]
["DO-07","Fast Pumping Valve LLA",{"$nulls":8},"T4=0","T4=0",{"$nulls":6},"T4=0","T4=0",{"$nulls":17},"T5=0"]
["DO-08","Purge Valve LLA",{"$nulls":6},"T3=0","T3=0"]
["DO-09","Vent Valve LLA",{"$nulls":6},"T4=0","T4=0",{"$nulls":27},"T6","T6"]
["DO-16","Soft Pumping Valve LLB",{"$nulls":6},"T5=0","T5=0",{"$nulls":10},"T3=0","T3=0",{"$nulls":16},"T4=0"]
["DO-17","Fast Pumping Valve LLB",{"$nulls":6},"T6=0","T6=0",{"$nulls":10},"T4=0","T4=0",{"$nulls":16},"T5=0"]
["DO-18","Purge Valve LLB",{"$nulls":16},"T5=0","T5=0"]
["DO-19","Vent Valve LLB",{"$nulls":16},"T6=0","T6=0"]
["Logic",null,"If T2*T3=1 it is enable","If (T1*T2*T3=1) and (T5*T7=1 or T6=1) and (T8*T10=1 or T9=1),it is enable","If (T1*T2*T3=1) and (T5*T7=1 or T6=1) and (T8*T10=1 or T9=1),it is enable","If T1*T2*T3*T4*T5=1 it is enable","If T1*T2*T5=1 it is enable","If T1*T2*T3*T4*T5=1 it is enable","If T1*T2*T5*T6=1 it is enable","If T1*T2*T5*T6=1 it is enable","If T1*T2=1 it is enable","If T1*T2=1 it is enable",null,"If T1*T2*T3*T4*T5*T6*T7=1 it is enable","If T1*T2*T3*T4*T5=1 it is enable","If T1*T2*T3*T4*T5*T6*T7*T8*T9=1 \nit is enable",null,"If T1*T2*T3*T4*T5=1 it is enable","If T1*T2*T3*T4=1 it is enable","If T1*T2*T3*T4=1 it is enable","If T1*T2=1 it is enable","If T1*T2=1 it is enable",null,"If T1*T2*T3*T4*T5*T6*T7=1 it is enable","If T1*T2*T3*T4*T5=1 it is enable","If T1*T2*T3*T4*T5*T6*T7*T8*T9=1 \nit is enable",null,"If T1*T2*T3*T4*T5=1 it is enable","If T1=1 it is enable","If T1*T2*T3*T4*T5=1 it is enable","If T1*T2*T3*T4*T5=1 it is enable","If T1*T2*T3*T4*T5=1 it is enable","If T1*T2*T3*T4*T5=1 it is enable","If T1*T2*T3*T4*T5=1 it is enable","If T1*T2*T3*T4*T5=1 it is enable","If T1*T2*T3*T4*T5=1 it is enable","If T1*T2*T3*T4*T5=1 it is enable","If T1*T2*T3*T4*T5*T6=1 it is enable","If T1*T2*T3*T4*T5*T6=1 it is enable"]

{"sheet":"Software interlock","index":6,"n_rows":58,"n_cols":34,"rows_kept":58,"cut":false,"hidden":false,"merged":[[0,0,0,1],[0,13,0,14],[1,13,1,14],[1,22,1,23],[2,13,2,14],[2,22,2,23],[57,0,57,1],[57,13,57,14],[57,22,57,23],[1,0,2,1]]}
["CONDITION",{"$nulls":10},"E","E","T",null,"T"]
[null,null,"DO-00","DO-01","DO-02","DO-03","DO-04","DO-06","DO-07","DO-08","DO-09","DO-11","DO-12","DO-13",null,"DO-14","DO-16","DO-17","DO-18","DO-19","DO-21","DO-22","DO-23",null,"DO-24","DO-26","DO-32","DO-33","DO-34","DO-35","DO-36","DO-37","DO-38","DO-39"]
[null,null,"N2 Valve","Soft Pumping Valve TM","Fast Pumping Valve TM","Purge Valve TM","Vent Valve TM","Soft Pumping Valve LLA","Fast Pumping Valve LLA","Purge Valve LLA","Vent Valve LLA","LLA Slit Door/I Open","LLA Slit Door/I Close","LLA Slit Door/O Open",null,"LLA Slit Door/O Close","Soft Pumping Valve LLB","Fast Pumping Valve LLB","Purge Valve LLB","Vent Valve LLB","LLB Slit Door/I Open","LLB Slit Door/I Close","LLB Slit Door/O Open",null,"LLB Slit Door/O Close","Water Valve Relay","PMA Slit Door Open","PMA Slit Door Close","PMB Slit Door Open","PMB Slit Door Close","PMC Slit Door Open","PMC Slit Door Close","PMD Slit Door Open","PMD Slit Door Close"]
["DI-03","Water Leak Sensor",{"$nulls":23},"T1"]
["DI-04","TM RB Not Extend To PMA",{"$nulls":24},"T1","T1"]
["DI-05","TM RB Not Extend To PMB",{"$nulls":26},"T1","T1"]
["DI-06","TM RB Not Extend To PMC",{"$nulls":28},"T1","T1"]
["DI-07","TM RB Not Extend To PMD",{"$nulls":30},"T1","T1"]
["DI-08","TM RB Not Extend LLA",{"$nulls":9},"T1","T1","T1","T1","T1"]
["DI-09","TM RB Not Extend LLB",{"$nulls":18},"T1","T1","T1","T1","T1"]
["DI-11","EFEM RB Not Extend LLA",{"$nulls":9},"T2","T2","T2","T2","T2"]
["DI-12","EFEM RB Not Extend LLB",{"$nulls":18},"T2","T2","T2","T2","T2"]
["DI-13","EFEM Side Door Closed",{"$nulls":9},"T3","T3",{"$nulls":7},"T3","T3"]
["DI-17","TM CHB Lid Door Closed","T1","T1","T1","T1","T1",{"$nulls":6},"T3","T3","T3",{"$nulls":6},"T3","T3","T3",null,"T2","T2","T2","T2","T2","T2","T2","T2"]
["DI-19","CDA Pressure Switch","T2","T2","T2","T2","T2","T1","T1","T1","T1","T4","T4","T4","T4","T4","T1","T1","T1","T1","T4","T4","T4","T4","T4",null,"T3","T3","T3","T3","T3","T3","T3","T3"]
["DI-20","Vaccum Pressure Switch"]
["DI-21","N2 Pressure Switch","T3",null,null,"T5","T5",null,null,"T5","T5",{"$nulls":7},"T5","T5"]
["DI-22","LLA In Slit Door open Position"]
["DI-23","LLA In Slit Door close Position",null,"T5","T5",null,null,"T5","T5",{"$nulls":4},"T5","T5"]
["DI-24","LLA Out Slit Door open Position"]
["DI-25","LLA Out Slit Door close Position",null,"T6","T6",{"$nulls":6},"T5"]
["DI-26","LLA Lid Door Closed",null,"T7","T7",null,null,"T2","T2","T2","T2","T6","T5","T6","T6","T5"]
["DI-27","LLB In Slit Door open Position"]
["DI-28","LLB In Slit Door close Position",null,"T8","T8",{"$nulls":11},"T5","T5",{"$nulls":4},"T5","T5"]
["DI-29","LLB Out Slit Door open Position"]
["DI-30","LLB Out Slit Door close Position",null,"T9","T9",{"$nulls":15},"T5"]
["DI-31","LLB Lid Door Closed",null,"T10","T10",{"$nulls":11},"T2","T2","T2","T2","T6","T5","T6","T6","T5"]
["DI-34","LLA VAC Switch",{"$nulls":11},"T7","T7=0"]
["DI-35","LLA ATM Switch",{"$nulls":9},"T7",null,"T8=0","T8"]
["DI-36","LLB VAC Switch",{"$nulls":20},"T7","T7=0"]
["DI-37","LLB ATM Switch",{"$nulls":18},"T7",null,"T8=0","T8"]
["DI-46","PMA Slit Door open Position",{"$nulls":25},"T4"]
["DI-47","PMA Slit Door close Position",{"$nulls":24},"T4"]
["DI-50","PMB Slit Door open Position",{"$nulls":27},"T4"]
["DI-51","PMB Slit Door close Position",{"$nulls":26},"T4"]
["DI-58","PMC Slit Door open Position",{"$nulls":29},"T4"]
["DI-59","PMC Slit Door close Position",{"$nulls":28},"T4"]
["DI-62","PMD Slit Door open Position",{"$nulls":31},"T4"]
["DI-63","PMD Slit Door close Position",{"$nulls":30},"T4"]
["DI-42","PMA Lid Closed",{"$nulls":24},"T5","T5"]
["DI-43","PMB Lid Closed",{"$nulls":26},"T5","T5"]
["DI-54","PMC Lid Closed",{"$nulls":28},"T5","T5"]
["DI-55","PMD Lid Closed",{"$nulls":30},"T5","T5"]
["W4.08","TM  VAC/ATM  MODE",{"$nulls":11},"T9=0","T9",{"$nulls":7},"T9=0","T9"]
["DO-01","Soft Pumping Valve TM",null,null,null,"T3=0","T3=0"]
["DO-02","Fast Pumping Valve TM",null,null,null,"T4=0","T4=0"]
["DO-03","Purge Valve TM",null,"T3=0","T3=0"]
["DO-04","Vent Valve TM",null,"T4=0","T4=0"]
["DO-05","Fast Vent Valve TM",null,"T11=0","T11=0"]
["DO-06","Soft Pumping Valve LLA",{"$nulls":7},"T3=0","T3=0",{"$nulls":5},"T3=0","T3=0"]
["DO-07","Fast Pumping Valve LLA",{"$nulls":7},"T4=0","T4=0",{"$nulls":5},"T4=0","T4=0"]
["DO-08","Purge Valve LLA",{"$nulls":5},"T3=0","T3=0"]
["DO-09","Vent Valve LLA",{"$nulls":5},"T4=0","T4=0"]
["DO-16","Soft Pumping Valve LLB",{"$nulls":5},"T5=0","T5=0",{"$nulls":9},"T3=0","T3=0"]
["DO-17","Fast Pumping Valve LLB",{"$nulls":5},"T6=0","T6=0",{"$nulls":9},"T4=0","T4=0"]
["DO-18","Purge Valve LLB",{"$nulls":14},"T5=0","T5=0"]
["DO-19","Vent Valve LLB",{"$nulls":14},"T6=0","T6=0"]
["Logic",null,"If T1*T2*T3=1 it is enable","If (T1*T2*T3=1) and (T5*T7=1 or T6=1) and (T8*T10=1 or T9=1),it is enable","If (T1*T2*T3=1) and (T5*T7=1 or T6=1) and (T8*T10=1 or T9=1),it is enable","If T1*T2*T3*T4*T5=1 it is enable","If T1*T2*T5=1 it is enable","If T1*T2*T5*T6=1 it is enable","If T1*T2*T5*T6=1 it is enable","If T1*T2*T3*T4=1 it is enable","If T1*T2=1 it is enable","If T1*T2*T3*T4*T5*T6*T7=1 it is enable","If T1*T2*T3*T4*T5=1 it is enable","If T1*T2*T3*T4*T5*T6*T7*T8*T9=1 \nit is enable",null,"If T1*T2*T3*T4*T5=1 it is enable","If T1*T2*T3*T4=1 it is enable","If T1*T2*T3*T4=1 it is enable","If T1*T2*T3*T4=1 it is enable","If T1*T2=1 it is enable","If T1*T2*T3*T4*T5*T6*T7=1 it is enable","If T1*T2*T3*T4*T5=1 it is enable","If T1*T2*T3*T4*T5*T6*T7*T8*T9=1 \nit is enable",null,"If T1*T2*T3*T4*T5=1 it is enable","If T1=1 it is enable","If T1*T2*T3*T4*T5=1 it is enable","If T1*T2*T3*T4*T5=1 it is enable","If T1*T2*T3*T4*T5=1 it is enable","If T1*T2*T3*T4*T5=1 it is enable","If T1*T2*T3*T4*T5=1 it is enable","If T1*T2*T3*T4*T5=1 it is enable","If T1*T2*T3*T4*T5=1 it is enable","If T1*T2*T3*T4*T5=1 it is enable"]

{"sheet":"PM HW interlock draft","index":7,"n_rows":9,"n_cols":8,"rows_kept":9,"cut":false,"hidden":true,"merged":[[0,0,0,1],[0,2,0,7],[8,0,8,1],[1,0,2,1]]}
["Condition"]
[null,null,"DO-32","DO-33","DO-34","DO-48","DO-16","DO-15"]
[null,null,"MFC1 valve  ","MFC2 valve","MFC3 valve","Process gas final valve","RPS enable","Heater  Enable"]
["DI-44","UE on Chamber SW","T1","T1","T1","T1","T1","T1"]
["DI-38","PM VAC SW","T2","T2","T2","T2","T2"]
["DI-12","Slit Door Close Pos","T3","T3","T3","T3"]
["DI-41","PM Foreline VAC SW","T4","T4","T4","T4"]
["DI-46","Cooling water flow SW",{"$nulls":4},"T3"]
["Logic",null,"If T1*T2*T3*T4=1 it is enable.","If T1*T2*T3*T4=1 it is enable.","If T1*T2*T3*T4=1 it is enable.","If T1*T2*T3*T4=1 it is enable.","If T1*T2*T3=1 it is enable.","If T1=1 it is enable."]

{"sheet":"PM PLC interlock draft","index":8,"n_rows":6,"n_cols":3,"rows_kept":6,"cut":false,"hidden":true,"merged":[[0,0,0,1],[5,0,5,1],[1,0,2,1]]}
["Condition"]
[null,null,"DO-16"]
[null,null,"RPS enable"]
["DI-41","PM Foreline VAC SW","T1"]
["DI-46","Cooling water flow SW","T2"]
["Logic",null,"If T1*T2=1 it is enable."]