{"text_format":"2","workbook":"xlsx","n_sheets":4,"sheets":["Sheet1","DI-DO","AO","AI"],"not_rendered":{"charts":0,"images":0,"macros":0,"external_links":0,"defined_names":0,"comments":0,"pivot_tables":0},"unopened":[],"bounds":{"document_bytes":16777216,"sheet_cells":100000,"run_cost":"one","rows_first":2000,"rows_last":500,"rows_between":2000,"halvings":0,"cell_chars":16384,"cell_head_chars":4096},"cells_cut":0,"cells_raw":0,"read":"whole","date_system":"1900"}

{"sheet":"Sheet1","index":0,"n_rows":4,"n_cols":4,"rows_kept":4,"cut":false,"hidden":false,"merged":[]}
[null,null,null,"PLC TO PC ==AI"]
[null,null,null,"PC TO PLC ==AO"]
[null,null,null,"DI== PLC TO PC"]
[null,null,null,"DO== PC TO PLC"]

{"sheet":"DI-DO","index":1,"n_rows":57,"n_cols":15,"rows_kept":57,"cut":false,"hidden":false,"merged":[[98,2,99,2],[18,3,21,3],[18,2,22,2],[24,2,26,2],[27,2,30,2],[37,2,40,2],[42,2,45,2]]}
["DI","Name","Note","Postion (NO Power)","Location","Logic Note",null,null,"#.DO","ID","Name","EV No.","Note","Location","Logic Note"]
["DI-00","EMO ",null,null,"W0.00","1== EM on,0==EMO off",null,null,"DO-00",null,"mfc 1 valve o/c",null,null,"W5.00","1== open,0== close"]
["DI-01","EMO reset signal",null,null,"W0.01","1==signal on,0==signal off",null,null,"DO-01",null,"mfc 2 valve o/c",null,null,"W5.01","1== open,0== close"]
["DI-02","main power contact",null,null,"W0.02","1==main power ok,0==main power lost",null,null,"DO-02",null,"mfc 3 valve o/c",null,null,"W5.02","1== open,0== close"]
["DI-03","pump power",null,null,"W0.03","1==pump power on,0==pump power lost",null,null,"DO-03",null,"mfc 4 valve o/c",null,null,"W5.03","1== open,0== close"]
["DI-04","pump running",null,null,"W0.04","1==pump run,0==pump stop",null,null,"DO-04",null,"pumping valve o/c ",null,null,"W5.04","1== open,0== close"]
["DI-05","pump alarm",null,null,"W0.05","1==INV alarm,0==INV normal",null,null,"DO-05",null,"vent valve o/c",null,null,"W5.05","1== open,0== close"]
["DI-06","chamber door up sw",null,null,"W0.06","1==door opened,0==door unopened",null,null,"DO-06",null,"purge valve o/c",null,null,"W5.06","1== open,0== close"]
["DI-07","rf interlock state",null,null,"W0.07","1==interlock,0==uninterlock",null,null,"DO-07",{"$nulls":4},"W5.07"]
["DI-08","cylinder extend state",null,null,"W0.08","1==cylinder extend,0==cylinder unextend",null,null,"DO-08",null,"chamber open valve",null,null,"W5.08","1== open,0== close"]
["DI-09","cylinder retract state",null,null,"W0.09","1==cylinder retract,1==cylinder unretract",null,null,"DO-09",null,"chamber close valve",null,null,"W5.09","1== open,0== close"]
["DI-10","cda pressure sw state",null,null,"W0.10","1==cda ok,0==cda pressure low",null,null,"DO-10",null,"yellow light ",null,null,"W5.10"]
["DI-11",null,null,null,"W0.11",null,null,null,"DO-11",null,"green light",null,null,"W5.11"]
["DI-12","rf generator comm state",null,null,"W0.12","1==off line ,0==online",null,null,"DO-12",null,"red light",null,null,"W5.12"]
["DI-13","chamber door low sw",null,null,"W0.13","1==door closed,0==door unclosed",null,null,"DO-13",null,"buzzer",null,null,"W5.13"]
["DI-14","pump overload state",null,null,"W0.14","1==overload,0==nomal",null,null,"DO-14",{"$nulls":4},"W5.14"]
["DI-15","chamber close interlock",null,null,"W0.15","1==allow,0==forbid",null,null,"DO-15",null,"reset signal",null,null,"W5.15","on keep 1 s then off "]
["DI-16",null,null,null,"W1.00",null,null,null,"DO-16",null,"rf on/off enable",null,null,"W6.00","1==rf on,0==rf off"]
["DI-17","rf on/off fb","RF",null,"W1.01","1== rf on,0==rf off",null,null,"DO-17",{"$nulls":4},"W6.01"]
["DI-18","rf over temp fb",null,null,"W1.02","1==rf overtemp,0==rf unover temp",null,null,"DO-18",{"$nulls":4},"W6.02"]
["DI-19","high reflect power",null,null,"W1.03","1==high 0==normal",null,null,"DO-19",{"$nulls":4},"W6.03"]
["DI-20","match comm with generator",null,null,"W1.04","off line==0,on line==1",null,null,"DO-20",{"$nulls":4},"W6.04"]
["DI-21","rf state fb",null,null,"W1.05","1=normal,0=err",null,null,"DO-21",{"$nulls":4},"W6.05"]
["DI-22",null,null,null,"W1.06",null,null,null,"DO-22",{"$nulls":4},"W6.06"]
["DI-23","N2 in range","Dry pump",null,"W1.07","0==alarm,1==nomal",null,null,"DO-23",{"$nulls":4},"W6.07"]
["DI-24","Water flow in range",null,null,"W1.08","0==alarm,1==nomal",null,null,"DO-24",{"$nulls":4},"W6.08"]
["DI-25","Water flow over range",null,null,"W1.09","1==alarm,0==nomal",null,null,"DO-25",{"$nulls":4},"W6.09"]
["DI-26","mfc 1 valve state fb","MFC",null,"W1.10",null,null,null,"DO-26",{"$nulls":4},"W6.10"]
["DI-27","mfc 2 valve state fb",null,null,"W1.11",null,null,null,"DO-27",{"$nulls":4},"W6.11"]
["DI-28","mfc 3 valve state fb",null,null,"W1.12",null,null,null,"DO-28",{"$nulls":4},"W6.12"]
["DI-29","mfc 4 valve state fb",null,null,"W1.13",null,null,null,"DO-29",{"$nulls":4},"W6.13"]
["DI-30","pumping valve state fb",null,null,"W1.14",null,null,null,"DO-30",{"$nulls":4},"W6.14"]
["DI-31","vent valve  state fb",null,null,"W1.15",null,null,null,"DO-31",{"$nulls":4},"W6.15"]
["DI-32","purge valve state fb",null,null,"W2.00"]
["DI-33",null,null,null,"W2.01"]
["DI-34","chamber open valve  state fb",null,null,"W2.02"]
["DI-35","chamber close valve  state fb",null,null,"W2.03"]
["DI-36","yellow light  state fb","light",null,"W2.04"]
["DI-37","green light  state fb",null,null,"W2.05"]
["DI-38","red light  state fb",null,null,"W2.06"]
["DI-39","buzzer  state fb",null,null,"W2.07"]
["DI-40",null,null,null,"W2.08"]
["DI-41","dry pump tc alarm","dry pump",null,"W2.09","1==alarm,0==nomal"]
["DI-42","dry pump tc warning",null,null,"W2.10","1==warning,0==nomal"]
["DI-43","water flow alarm",null,null,"W2.11","1==alarm,0==nomal"]
["DI-44","N2 flow alarm",null,null,"W2.12","1==alarm,0==nomal"]
["DI-45",null,null,null,"W2.13"]
["DI-46",null,null,null,"W2.14"]
["DI-47",null,null,null,"W2.15"]
["DI-48"]
["DI-49"]
["DI-50"]
["DI-51"]
["DI-52"]
["DI-53"]
["DI-54"]
["DI-55"]

{"sheet":"AO","index":2,"n_rows":25,"n_cols":6,"rows_kept":25,"cut":false,"hidden":false,"merged":[]}
["Node No. ","ID","Range","Device Name","Logic note","date type"]
["AO-00","d100",null,"MFC1 flow setpoint",null,"float"]
["AO-01","d102",null,"MFC1 flow range",null,"float"]
["AO-02","d104",null,"MFC2 flow setpoint",null,"float"]
["AO-03","d106",null,"MFC2 flow range",null,"float"]
["AO-04","d108",null,"MFC3 flow setpoint",null,"float"]
["AO-05","d110",null,"MFC3 flow range",null,"float"]
["AO-06","d112",null,"MFC4 flow setpoint",null,"float"]
["AO-07","d114",null,"MFC4 flow range",null,"float"]
["AO-08","d116","0-600W","rf power setpoint",null,"float"]
["AO-09","d118",null,"match work mode m/a","0==manual,1==auto","float"]
["AO-10","d120",null,"match work mode h/p","0==hold,1==preset","float"]
["AO-11","d122","0-100%","match c1 positon sp",null,"float"]
["AO-12","d124","0-100%","match c2 positon sp",null,"float"]
["AO-13","d126"]
["AO-14","d128"]
["AO-15","d130","L/MIN","water flow alarm setpoint MIN",null,"float"]
["AO-16","d132","L/MIN","water flow alarm setpoint MAX",null,"float"]
["AO-17","d134","mpa","N2 flow alarm setpoint MIN",null,"float"]
["AO-18","d136","mpa","N2 flow alarm setpoint MAX",null,"float"]
["AO-19","d138"]
["AO-20","d140",null,"heartbeat ",null,"float"]
["AO-21","d142"]
["AO-22","d144","0-10000","Chamber Low  Pressure sp",null,"float"]
["AO-23","d146","0-100HZ","INV Low frequnce sp",null,"float"]

{"sheet":"AI","index":3,"n_rows":22,"n_cols":6,"rows_kept":22,"cut":false,"hidden":false,"merged":[]}
["Node No. ","ID","Range","Device Name","Logic note","date type"]
["AI-00","d300",null," MFC1 flow fb",null,"float"]
["AI-01","d302",null," MFC2 flow fb",null,"float"]
["AI-02","d304",null," MFC3 flow fb",null,"float"]
["AI-03","d306",null," MFC4 flow fb",null,"float"]
["AI-04","d308",null,"chamber pressure fb",null,"float"]
["AI-05","d310",null,"rf power forword fb",null,"float"]
["AI-06","d312",null,"rf power reflect fb",null,"float"]
["AI-07","d314",null,"match work mode m/a fb","manual==0,auto==1","float"]
["AI-08","d316",null,"match work mode h/p fb","hold==0,preset==1","float"]
["AI-09","d318",null,"match c1 positon fb",null,"float"]
["AI-10","d320",null,"match c2 positon fb",null,"float"]
["AI-11","d322","4-32 L/MIN","water flow sensor fb",null,"float"]
["AI-12","d324",null,"N2 flow fb","unit: mpa","float"]
["AI-13","d326"]
["AI-14","d328"]
["AI-15","d330"]
["AI-16","d332"]
["AI-17","d334"]
["AI-18","d336"]
["AI-19","d338"]
["AI-20","d340",null,"heartbeat fb",null,"float"]