123456789101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960616263646566676869707172737475767778798081828384858687888990919293949596979899100101102103104105106107108109110111112113114115116117118119120121122123124125126127 |
- using System;
- using Aitex.Core.RT.Device;
- using Aitex.Core.RT.Routine;
- using Aitex.Core.RT.SCCore;
- using MECF.Framework.Common.Equipment;
- using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Aligners;
- using MECF.Framework.RT.ModuleLibrary.AlignerModules;
- namespace FutureEfemLib.Aligners
- {
- class AlignerAlignRoutine : ModuleRoutine, IRoutine
- {
- enum Align
- {
- Align,
- }
-
- private int _timeout = 0;
- private double _angle = 0.0;
- private AlignerBase _aligner;
-
- public AlignerAlignRoutine(AlignerModuleBase module)
- {
- Module = module.Module;
- Name = "Align";
- _aligner = DEVICE.GetDevice<AlignerBase>($"{ModuleName.Aligner}.{ModuleName.Aligner}");
- _angle = SC.GetValue<double>("EFEM.Aligner.DefaultNotchDegree");
- }
- public bool Initalize()
- {
- return true;
- }
- public void Init(double notch)
- {
- _angle = notch;
- }
- public Result Start(params object[] objs)
- {
- Reset();
- _timeout = SC.GetValue<int>("EFEM.Aligner.AlignTimeout");
- Notify($"Start align to {_angle} degree");
- //AlignersState.IsAligning = true;
- return Result.RUN;
- }
- public Result Monitor()
- {
- //AlignersState.IsAligning = true;
- try
- {
- AlignWafer((int)Align.Align, _angle, _timeout);
- }
- catch (RoutineBreakException)
- {
- return Result.RUN;
- }
- catch (RoutineFaildException)
- {
- _stepName = "";
- return Result.FAIL;
- }
- Notify("Finished");
- // AlignersState.IsAligning = false;
- return Result.DONE;
- }
- public void AlignWafer(int id, double angle, int timeout)
- {
- Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
- {
- //Notify($"Start align to {angle} degree");
- string reason;
- if (!_aligner.Align(angle, out reason))
- {
- Stop(reason);
- return false;
- }
- return true;
- }, () =>
- {
- if (_aligner.IsError)
- return null;
- if (_aligner.IsBusy)
- return false;
- return true;
- }, timeout * 1000);
- if (ret.Item1)
- {
- if (ret.Item2 == Result.FAIL)
- {
- Stop(string.Format("failed."));
- throw (new RoutineFaildException());
- }
- else if (ret.Item2 == Result.TIMEOUT) //timeout
- {
- Stop(string.Format("timeout, can not complete in {0} seconds", timeout));
- throw (new RoutineFaildException());
- }
- else
- throw (new RoutineBreakException());
- }
- }
- public void Abort()
- {
- //AlignersState.IsAligning = false;
- Notify("Abort");
- }
- }
- }
|