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- using System;
- using System.Collections.Generic;
- using System.Linq;
- using Aitex.Core.Common;
- using Aitex.Core.RT.DataCenter;
- using Aitex.Core.RT.Event;
- using Aitex.Core.RT.Routine;
- using Aitex.Core.RT.SCCore;
- using Aitex.Sorter.Common;
- using MECF.Framework.Common.Equipment;
- using MECF.Framework.Common.Schedulers;
- using MECF.Framework.Common.SubstrateTrackings;
- using MECF.Framework.RT.ModuleLibrary.SystemModules;
- using EfemDualSchedulerLib.Schedulers;
- namespace EfemDualSchedulerLib
- {
- public class TMCycle : SchedulerModuleFactory, IRoutine
- {
- Dictionary<ModuleName, int> _checkPosition = new Dictionary<ModuleName, int>()
- {
- {ModuleName.TMRobot, 2},
- {ModuleName.PMA, 2},
- {ModuleName.PMB, 2},
- };
- Queue<Action> tmRobotActions = new Queue<Action>() { };
- private List<SchedulerPM> _lstPms = new List<SchedulerPM>();
- private List<SchedulerLoadLock> _lstLls = new List<SchedulerLoadLock>();
- public bool PMAIsInstalled
- {
- get
- {
- return SC.GetValueOrDefault<bool>("System.SetUp.PMA.IsInstalled");
- }
- }
- public bool PMBIsInstalled
- {
- get
- {
- return SC.GetValueOrDefault<bool>("System.SetUp.PMB.IsInstalled");
- }
- }
- public TMCycle(EquipmentManager equipment) : base()
- {
- DATA.Subscribe("TMCylce.RemainedCycleCount", () =>
- {
- return cycleCount - 1;
- });
- //有优先级,先处理pmb后pma
- if (PMBIsInstalled)
- _lstPms.Add(_pm2);
- if (PMAIsInstalled)
- _lstPms.Add(_pm1);
- _lstLls.Add(_loadlockA);
- _lstLls.Add(_loadlockB);
- tmRobotActions.Enqueue(MonitorTmRobotLoadLockPickTask);
- tmRobotActions.Enqueue(MonitorTMRobotPMPlaceTask);
- tmRobotActions.Enqueue(MonitorTMRobotPMPickTask);
- tmRobotActions.Enqueue(MonitorTmRobotLoadLockPlaceTask);
- }
- List<string> tmCycleRoutine = new List<string>() { "LLA", "PMA", "PMB", "LLB" };
- int cycleCount = 1;
- public Result Start(params object[] objs)
- {
- if (objs.Length == 2)
- {
- tmCycleRoutine = ((string[])objs[0]).ToList();
- cycleCount = (int)objs[1];
- }
- //if (!PMAIsInstalled && !PMBIsInstalled)
- //{
- // EV.PostWarningLog("System", $"TM Cycle, PMA & PMB Both UnInstalled.");
- // return Result.FAIL;
- //}
- if (!PMAIsInstalled && tmCycleRoutine.Contains("PMA"))
- {
- EV.PostWarningLog("System", $"TM Cycle, PMA is UnInstalled.");
- return Result.FAIL;
- }
- if (!PMBIsInstalled && tmCycleRoutine.Contains("PMB"))
- {
- EV.PostWarningLog("System", $"TM Cycle, PMB is UnInstalled.");
- return Result.FAIL;
- }
- foreach (var positions in _checkPosition)
- {
- for (int i = 0; i < positions.Value; i++)
- {
- WaferInfo wafer = WaferManager.Instance.GetWafer(positions.Key, i);
- if (!wafer.IsEmpty)
- {
- EV.PostWarningLog("System", $"TM Cycle, {positions.Key}.{i + 1} can not has wafer.");
- return Result.FAIL;
- }
- }
- }
- WaferInfo[] OriginWafers = WaferManager.Instance.GetWafers(ModuleHelper.Converter(tmCycleRoutine.First()));
- WaferInfo[] DestinationWafers = WaferManager.Instance.GetWafers(ModuleHelper.Converter(tmCycleRoutine.Last()));
- for (int i = 0; i < OriginWafers.Length; i++)
- {
- if (!OriginWafers[i].IsEmpty)
- {
- OriginWafers[i].OriginStation = (int)ModuleHelper.Converter(tmCycleRoutine.First());
- OriginWafers[i].OriginSlot = i;
- OriginWafers[i].ProcessState = EnumWaferProcessStatus.InProcess;
- OriginWafers[i].NextSequenceStep = 0;
- if (tmCycleRoutine.First() != tmCycleRoutine.Last() && !DestinationWafers[i].IsEmpty)
- {
- EV.PostWarningLog("System", $"TM Cycle, {tmCycleRoutine.Last()}.{i + 1} already has wafer.");
- return Result.FAIL;
- }
- }
- }
- if (tmCycleRoutine.First() != tmCycleRoutine.Last())
- {
- tmCycleRoutine.Add(tmCycleRoutine.First());
- }
- return Result.RUN;
- }
- public Result Monitor()
- {
- MonitorModuleTasks();
- if (MonitorTaskDone())
- {
- return Result.DONE;
- }
- return Result.RUN;
- }
- public void Clear()
- {
- }
- public void Abort()
- {
- }
- public Result MonitorModuleTasks()
- {
- MonitorPMTask();
- MonitorTMRobotTask();
- return Result.RUN;
- }
- private void MonitorTMRobotTask()
- {
- if (!_tmRobot.IsAvailable)
- return;
- //_tmRobot is idle, release all the target
- foreach (var ll in _lstLls)
- {
- if (ll.IsWaitTransfer(ModuleName.TMRobot))
- ll.StopWaitTransfer(ModuleName.TMRobot);
- }
- foreach (var pm in _lstPms)
- {
- if (pm.IsWaitTransfer(ModuleName.TMRobot))
- pm.StopWaitTransfer(ModuleName.TMRobot);
- }
- if (!_tmRobot.IsAvailable)
- return;
- var act = tmRobotActions.Peek();
- act.Invoke();
- if (!_tmRobot.IsAvailable)
- return;
- tmRobotActions.Enqueue(tmRobotActions.Dequeue());
- //MonitorTMRobotPMTask();
- //if (!_tmRobot.IsAvailable)
- // return;
- //MonitorTMRobotLoadLockTask();
- }
- private void MonitorTmRobotLoadLockPlaceTask()
- {
- if (!_tmRobot.IsAvailable)
- return;
- //place to ll
- bool blade0HasWaferAndProcessed = _tmRobot.Blade1Enable && WaferManager.Instance.CheckHasWafer(ModuleName.TMRobot, 0);
- bool blade1HasWaferAndProcessed = _tmRobot.Blade2Enable && WaferManager.Instance.CheckHasWafer(ModuleName.TMRobot, 1);
- if (blade0HasWaferAndProcessed || blade1HasWaferAndProcessed)
- {
- Hand placeBlade = blade0HasWaferAndProcessed ? Hand.Blade1 : Hand.Blade2;
- foreach (var ll in _lstLls)
- {
- if (!ll.IsAvailable)
- continue;
- if (!CheckWaferNextStep(ModuleName.TMRobot, (int)placeBlade, ll.Module))
- continue;
- var wafer = WaferManager.Instance.GetWafer(ModuleName.TMRobot, (int)placeBlade);
- var slot = wafer.OriginSlot;
- if (ll.IsReadyForPlace(ModuleName.TMRobot, placeBlade, (int)slot))
- {
- if (_tmRobot.Place(ll.Module, (int)slot, placeBlade, 0, 0, false))
- {
- if (wafer.NextSequenceStep >= tmCycleRoutine.Count-1)
- wafer.ProcessState = EnumWaferProcessStatus.Completed;
- ll.WaitTransfer(ModuleName.TMRobot);
- return;
- }
- }
- }
- }
- }
- private void MonitorTmRobotLoadLockPickTask()
- {
- if (!_tmRobot.IsAvailable)
- return;
- //pick from ll
- if (WaferManager.Instance.CheckNoWafer(ModuleName.TMRobot, 0) || WaferManager.Instance.CheckNoWafer(ModuleName.TMRobot, 1))
- {
- Hand pickBlade;
- if (_tmRobot.Blade1Enable && WaferManager.Instance.CheckNoWafer(ModuleName.TMRobot, 0))
- {
- pickBlade = Hand.Blade1;
- }
- else if (_tmRobot.Blade2Enable && WaferManager.Instance.CheckNoWafer(ModuleName.TMRobot, 1))
- {
- pickBlade = Hand.Blade2;
- }
- else
- {
- return;
- }
- foreach (var ll in _lstLls)
- {
- if (!ll.IsAvailable)
- continue;
- var wafers = WaferManager.Instance.GetWafers(ll.Module);
- for (int pickSlot = 0; pickSlot < wafers.Length; pickSlot++)
- {
- if (wafers[pickSlot].NextSequenceStep == 0)
- {
- ModuleName nextModule = ModuleHelper.Converter(tmCycleRoutine[1]);
- if (WaferManager.Instance.GetWafers(nextModule).All(x => !x.IsEmpty))
- return;
- }
- if (wafers[pickSlot].ProcessState != EnumWaferProcessStatus.InProcess)
- continue;
- if (ll.IsReadyForPick(ModuleName.TMRobot, pickBlade, pickSlot))
- {
- if (_tmRobot.Pick(ll.Module, pickSlot, pickBlade, 0, 0, false))
- {
- wafers[pickSlot].NextSequenceStep++;
- ll.WaitTransfer(ModuleName.TMRobot);
- return;
- }
- }
- }
- }
- }
- }
- private void MonitorTMRobotLoadLockTask()
- {
- if (!_tmRobot.IsAvailable)
- return;
- //place to llb
- {
- bool blade1HasWafer = _tmRobot.Blade1Enable && WaferManager.Instance.CheckHasWafer(ModuleName.TMRobot, 0) && WaferManager.Instance.GetWafer(ModuleName.TMRobot, 0).NextStation == (int)ModuleName.LLB;
- bool blade2HasWafer = _tmRobot.Blade2Enable && WaferManager.Instance.CheckHasWafer(ModuleName.TMRobot, 1) && WaferManager.Instance.GetWafer(ModuleName.TMRobot, 1).NextStation == (int)ModuleName.LLB;
- if (blade1HasWafer || blade2HasWafer)
- {
- Hand placeBlade = blade1HasWafer ? Hand.Blade1 : Hand.Blade2;
- var wafer = WaferManager.Instance.GetWafer(ModuleName.TMRobot, (int)placeBlade);
- {
- if (!_loadlockB.IsAvailable)
- return;
- var slot = wafer.OriginSlot;
- if (_loadlockB.IsReadyForPlace(ModuleName.TMRobot, placeBlade, (int)slot))
- {
- if (_tmRobot.Place(_loadlockB.Module, (int)slot, placeBlade, 0, 0, false))
- {
- _loadlockB.WaitTransfer(ModuleName.TMRobot);
- return;
- }
- }
- }
- }
- }
- if (!_tmRobot.IsAvailable)
- return;
- //pick from lla
- if (PMAIsInstalled && PMBIsInstalled && WaferManager.Instance.CheckHasWafer(ModuleName.PMA, 0) && WaferManager.Instance.CheckHasWafer(ModuleName.PMA, 1))
- return;
- if (WaferManager.Instance.CheckNoWafer(ModuleName.TMRobot, 0) || WaferManager.Instance.CheckNoWafer(ModuleName.TMRobot, 1))
- {
- Hand pickBlade;
- if (_tmRobot.Blade2Enable && WaferManager.Instance.CheckNoWafer(ModuleName.TMRobot, 1))
- {
- pickBlade = Hand.Blade2;
- }
- else if (_tmRobot.Blade1Enable && WaferManager.Instance.CheckNoWafer(ModuleName.EfemRobot, 0))
- {
- pickBlade = Hand.Blade1;
- }
- else
- {
- return;
- }
- {
- if (!_loadlockA.IsAvailable)
- return;
- var wafers = WaferManager.Instance.GetWafers(_loadlockA.Module);
- for (int pickSlot = 0; pickSlot < wafers.Length; pickSlot++)
- {
- if (_loadlockA.IsReadyForPick(ModuleName.TMRobot, pickBlade, pickSlot))
- {
- if (_tmRobot.Pick(_loadlockA.Module, pickSlot, pickBlade, 0, 0, false))
- {
- _loadlockA.WaitTransfer(ModuleName.TMRobot);
- return;
- }
- }
- }
- }
- }
- }
- private void MonitorTMRobotPMPlaceTask()
- {
- if (!_tmRobot.IsAvailable)
- return;
- //place to pm
- bool blade0HasWafer = _tmRobot.Blade1Enable && WaferManager.Instance.CheckHasWafer(ModuleName.TMRobot, 0);
- bool blade1HasWafer = _tmRobot.Blade2Enable && WaferManager.Instance.CheckHasWafer(ModuleName.TMRobot, 1);
- if (blade0HasWafer || blade1HasWafer)
- {
- Hand placeBlade = blade0HasWafer ? Hand.Blade1 : Hand.Blade2;
- var wafer = WaferManager.Instance.GetWafer(ModuleName.TMRobot, (int)placeBlade);
- foreach (var schedulerPm in _lstPms)
- {
- if (!schedulerPm.IsAvailable)
- continue;
- if (!CheckWaferNextStep(ModuleName.TMRobot, (int)placeBlade, schedulerPm.Module))
- continue;
- var pmWafer0 = WaferManager.Instance.GetWafer(schedulerPm.Module, 0);
- var pmWafer1 = WaferManager.Instance.GetWafer(schedulerPm.Module, 1);
- //如果腔体中两片都满了,则不允许放入
- if (!pmWafer0.IsEmpty && !pmWafer1.IsEmpty)
- continue;
- if (WaferManager.Instance.CheckNoWafer(schedulerPm.Module, 0))
- {
- if (_tmRobot.Place(schedulerPm.Module, 0, placeBlade, 0, 0, false))
- {
- schedulerPm.WaitTransfer(ModuleName.TMRobot);
- return;
- }
- }
- if (WaferManager.Instance.CheckNoWafer(schedulerPm.Module, 1))
- {
- if (_tmRobot.Place(schedulerPm.Module, 1, placeBlade, 0, 0, false))
- {
- schedulerPm.WaitTransfer(ModuleName.TMRobot);
- return;
- }
- }
- }
- }
- }
- private void MonitorTMRobotPMPickTask()
- {
- //pick from pm
- {
- bool blade1Empty = _tmRobot.Blade1Enable && WaferManager.Instance.CheckNoWafer(ModuleName.TMRobot, 0);
- bool blade2Empty = _tmRobot.Blade2Enable && WaferManager.Instance.CheckNoWafer(ModuleName.TMRobot, 1);
- if (blade1Empty || blade2Empty)
- {
- Hand pickBlade = blade1Empty ? Hand.Blade1 : Hand.Blade2;
- foreach (var pm in _lstPms)
- {
- if (!pm.IsAvailable)
- continue;
- var wafers = WaferManager.Instance.GetWafers(pm.Module);
- for (int slot = 0; slot < wafers.Length; slot++)
- {
- if (pm.IsReadyForPick(ModuleName.TMRobot, pickBlade, slot))
- {
- if (_tmRobot.Pick(pm.Module, slot, pickBlade, 0, 0, false))
- {
- wafers[slot].NextSequenceStep++;
- pm.WaitTransfer(ModuleName.TMRobot);
- return;
- }
- }
- }
- }
- }
- }
- }
- private void MonitorTMRobotPMTask()
- {
- if (!_tmRobot.IsAvailable)
- return;
- //place to pm
- bool blade0HasWafer = _tmRobot.Blade1Enable && WaferManager.Instance.CheckHasWafer(ModuleName.TMRobot, 0);
- bool blade1HasWafer = _tmRobot.Blade2Enable && WaferManager.Instance.CheckHasWafer(ModuleName.TMRobot, 1);
- if (blade0HasWafer || blade1HasWafer)
- {
- Hand placeBlade = blade0HasWafer ? Hand.Blade1 : Hand.Blade2;
- var wafer = WaferManager.Instance.GetWafer(ModuleName.TMRobot, (int)placeBlade);
- foreach (var schedulerPm in _lstPms)
- {
- if (!schedulerPm.IsAvailable)
- continue;
- if (wafer.NextStation != (int)schedulerPm.Module)
- continue;
- var pmWafer0 = WaferManager.Instance.GetWafer(schedulerPm.Module, 0);
- var pmWafer1 = WaferManager.Instance.GetWafer(schedulerPm.Module, 1);
- //如果腔体中两片都满了,则不允许放入
- if (!pmWafer0.IsEmpty && !pmWafer1.IsEmpty)
- continue;
- if (WaferManager.Instance.CheckNoWafer(schedulerPm.Module, 0))
- {
- if (_tmRobot.Place(schedulerPm.Module, 0, placeBlade, 0, 0, false))
- {
- schedulerPm.WaitTransfer(ModuleName.TMRobot);
- return;
- }
- }
- if (WaferManager.Instance.CheckNoWafer(schedulerPm.Module, 1))
- {
- if (_tmRobot.Place(schedulerPm.Module, 1, placeBlade, 0, 0, false))
- {
- schedulerPm.WaitTransfer(ModuleName.TMRobot);
- return;
- }
- }
- }
- }
- if (!_tmRobot.IsAvailable)
- return;
- //pick from pm
- {
- bool blade1Empty = _tmRobot.Blade1Enable && WaferManager.Instance.CheckNoWafer(ModuleName.TMRobot, 0);
- bool blade2Empty = _tmRobot.Blade2Enable && WaferManager.Instance.CheckNoWafer(ModuleName.TMRobot, 1);
- if (blade1Empty || blade2Empty)
- {
- Hand pickBlade = blade1Empty ? Hand.Blade1 : Hand.Blade2;
- foreach (var pm in _lstPms)
- {
- if (!pm.IsAvailable)
- continue;
- var wafers = WaferManager.Instance.GetWafers(pm.Module);
- for (int slot = 0; slot < wafers.Length; slot++)
- {
- if (pm.IsReadyForPick(ModuleName.TMRobot, pickBlade, slot))
- {
- if (_tmRobot.Pick(pm.Module, slot, pickBlade, 0, 0, false))
- {
- wafers[slot].NextSequenceStep++;
- pm.WaitTransfer(ModuleName.TMRobot);
- return;
- }
- }
- }
- }
- }
- }
- }
- private bool MonitorTaskDone()
- {
- foreach (var positions in _checkPosition)
- {
- for (int i = 0; i < positions.Value; i++)
- {
- WaferInfo wafer = WaferManager.Instance.GetWafer(positions.Key, i);
- if (!wafer.IsEmpty)
- {
- return false;
- }
- }
- }
- foreach (var ll in _lstLls)
- {
- var llWafers = WaferManager.Instance.GetWafers(ll.Module);
- for (int i = 0; i < llWafers.Length; i++)
- {
- if (!llWafers[i].IsEmpty && llWafers[i].ProcessState != EnumWaferProcessStatus.Completed)
- return false;
- }
- }
- if (!_tmRobot.IsAvailable)
- return false;
- WaferInfo[] originWafers = WaferManager.Instance.GetWafers(ModuleHelper.Converter(tmCycleRoutine.First()));
- if (cycleCount > 1 && originWafers.All(x => x.IsEmpty || x.ProcessState == EnumWaferProcessStatus.Completed))
- {
- cycleCount--;
- foreach (WaferInfo wafer in originWafers)
- {
- wafer.NextSequenceStep = 0;
- wafer.ProcessState = EnumWaferProcessStatus.InProcess;
- }
- return false;
- }
- return true;
- }
- private void MonitorPMTask()
- {
- foreach (var pm in _lstPms)
- {
- if (!pm.IsAvailable)
- continue;
- if (pm.Module == ModuleName.PMA && !PMAIsInstalled)
- continue;
- if (pm.Module == ModuleName.PMB && !PMBIsInstalled)
- continue;
- var wafers = WaferManager.Instance.GetWafers(pm.Module);
- for (int i = 0; i < wafers.Length; i++)
- {
- if (!pm.IsAvailable)
- break;
- if (!wafers[i].IsEmpty && !pm.IsReadyForPick(ModuleName.TMRobot, Hand.Blade1, i))
- {
- pm.PrepareTransfer(ModuleName.TMRobot, EnumTransferType.Pick, i);
- return;
- }
- if (wafers[i].IsEmpty && !pm.IsReadyForPlace(ModuleName.TMRobot, Hand.Blade1, i))
- {
- pm.PrepareTransfer(ModuleName.TMRobot, EnumTransferType.Place, i);
- return;
- }
- }
- }
- }
- private bool CheckWaferNextStep(ModuleName module, int slot, ModuleName nextModule)
- {
- if (!WaferManager.Instance.CheckHasWafer(module, slot))
- return false;
- WaferInfo wafer = WaferManager.Instance.GetWafer(module, slot);
- if (wafer.NextSequenceStep >= tmCycleRoutine.Count)
- return false;
- if (tmCycleRoutine[wafer.NextSequenceStep] != nextModule.ToString())
- return false;
- return true;
- }
- }
- }
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